Electron temperature measurement in a surface-wave-produced argon plasma at intermediate pressures

The main objective of this work is to obtain the electron temperature in an argon surface-wave-produced plasma column at intermediate gas pressures. After proving that argon upper excited states remain in Excitation Saturation Balance, the value of electron temperature along the plasma column has been obtained using a modified Saha equation and a corrected Boltzmann-plot. Moreover, the electron energy distribution function has been verified to be nearly Maxwellian in a 0.8-2.8 torr intermediate pressure range. Received 24 July 2000 and Received in final form 19 January 2001     

Growth of electron energies with ion beam injection in a double plasma device

This paper reports about the observed energy growth of both high and low energetic electron species in the target plasma region with the increase in plasma potential in the source region of a double plasma device. This situation can be correlated to the injection of an ion beam from source to target plasma region. Plasma is solely produced in the source region and a low-density diffuse plasma is generated in the target region by local ionization between the neutral gas and the high energetic electrons coming from the source region. The growth of electron energy is accompanied by a decrease in diffuse plasma density. It is observed that although energy of high energetic group increases with the injected beam energy, the diffuse plasma density falls due to their decreasing population.     

VUV-spectroscopy of the plasma light emission generated by the pulsed arc cluster ion source (PACIS)

A pinhole grid spectrometer is used to measure the light emission from the plasma of the pulsed arc cluster ion source (PACIS). Spectra of various metals and carbon have been measured between 20 and 100 nm. In the case of carbon the average electron temperature is estimated to about 0.69 eV. Higher temperatures up to 0.79 eV are measured when inserting seeding gas which flushes the discharge volume with approx. one atmosphere of helium. An operation under this source conditions leads to the generation of an intense charged cluster beam. The application of the source as a bright light source in the VUV region is discussed. Received: 26 February 1998 / Revised: 12 May 1998 / Accepted: 14 May 1998     

Simulation of the ignition transient in RF inductively-coupled plasma torches

The paper deals with the time-dependent numerical simulation of inductively-coupled plasma torches during the ignition transient, which is induced by a graphite rod and leads to the final, self-sustaining plasma condition. The study has been performed by using a 2D time-dependent fluid-magnetic code based on the SIMPLER algorithm within the assumptions of laminar flow, local thermodynamic equilibrium conditions and optically thin plasma. The graphite rod has been treated as a real obstacle for the gas and the electron emission due to the thermoionic effect has been suitably taken into account. The advantage of using a time-dependent code in order to select different plasma operating conditions that can lead to stable discharges is pointed out. Results for both argon and air discharges are presented for different torch geometries, RF frequencies and inlet gas configurations (also including the presence of a carrier gas injected along the axis of the torch). Moreover, the final self-sustaining plasma configurations obtained are compared, when available, with results coming from static models, which have been published by other authors. Received 29 December 2000     

A study of OH radicals in an atmospheric AC discharge plasma using near infrared diode laser cavity ringdown spectroscopy combined with optical emission spectroscopy

Simultaneous measurements of absolute concentrations of H₂O and OH radicals in an atmospheric AC discharge using continuous wave cavity ringdown spectroscopy (cw-CRDS) are reported. Formation of OH radicals and plasma temperatures are characterized by optical emission spectroscopy. The concentration of OH radical at the edge of the discharge plume at 380 K is measured by the cw-CRDS technique to be 1.1 ×10¹⁵ molecule cm^-3. Ringdown measurements of the H₂O (120-000) band and the OH first overtone around 1515 nm enable us to determine an OH generation yield, , to be 4.8 ×10^-3, where N_OH and are the number densities of OH and H₂O, respectively. The minimum detectable absorption coefficient of the cw-CRDS system is 8.9 ×10^-9  cm^-1, which corresponds to a 1σ detection limit of OH number density of 1.2 ×10¹³ molecule cm^-3 in the discharge. This experimental approach is demonstrated for the first time ever in an AC discharge, and can be applied in general to a variety of atmospheric plasmas to help study OH formation mechanisms and OH-related plasma applications.     

Diagnosis of negative hydrogen ions and rovibrational distribution of H<Subscript>2</Subscript> molecule in non-thermal plasmas

Rovibrational excited hydrogen molecule plays an important role for the production of H^- ions. The correlation between H^- ion density and rovibrational distribution of H₂ molecules has been investigated in dielectric barrier discharge hydrogen plasmas via optical emission spectrometry and molecular beam mass spectrometry. The relative vibrational distribution of molecular hydrogen in the electronic ground state has been determined by the best fitting to the Fulcher-α band emission lines. It is shown that the ratio of the Q_(0-0)(1) to Q_(1-1)(1) line is very suitable and simple for the diagnosis of vibrational temperature in the range of 1500 to 7500 K. At certain discharge conditions (ac 40 kHz, 14 kV), the vibrational temperature decreases from 3600 to 2400 K as the pressure increases from 100 to 200 Pa and the negative ions density near the ground electrode also decreases as the pressure increases. Both the hydrogen ions density and the vibrational temperature increase with the increasing of discharge voltage. It is found that the evolution of negative atomic hydrogen ions density greatly depends on the vibrational temperature.     

Study of optical properties and molecular structure of plasma polymerized diethylene glycol dimethyl ether

This paper deals with plasma polymerization processes of diethylene glycol dimethyl ether. Plasmas were produced at 150 mtorr in the range of 10 W to 40 W of RF power. Films were grown on silicon and quartz substrates. Molecular structure of plasma polymerized films and their optical properties were analyzed by Fourier transform infrared spectroscopy (FTIR) and ultraviolet-visible spectroscopy. The IR spectra show C–H stretching at 3000–2900 cm^-1, C=O stretching at 1730–1650 cm^-1, C–H bending at 1440–1380 cm^-1, C–O and C–O–C stretching at 1200–1000 cm^-1. The concentrations of C–H, C–O and C–O–C were investigated for different values of RF power. It can be seen that the C–H concentration increases from 0.55 to 1.0 au (arbitrary unit) with the increase of RF power from 10 to 40 W. The concentration of C–O and C–O–C decreases from 1.0 to 0.5 au in the same range of RF power. The refraction index increased from 1.47 to 1.61 with the increase of RF power. The optical gap calculated from absorption coefficient decreased from 5.15 to 3.35 eV with the increase of power. Due to its optical and hydrophilic characteristics these films can be applied, for instance, as glass lens coatings for ophthalmic applications.     

Three-dimensional modelling of inductively coupled plasma torches

A three-dimensional model has been developed for simulating the behaviour of inductively coupled plasma torches (ICPTs), using customized CFD commercial code FLUENT ^?. The helicoidal coil is taken into account in its actual 3-D shape, showing the effects of its non-axisymmetry on the plasma discharge. Steady state, continuity, momentum and energy equations are solved for argon optically thin plasmas under the assumptions of LTE and laminar flow. The electromagnetic field is obtained by solving the 3-D vector potential equation on a grid extending outside the torch region. In order to evaluate the importance of various 3-D effects on calculated plasma temperature and flow fields, comparisons of our new results with the ones obtainable from conventional 2-D models and from an improved 2-D model that includes 3-D coil effects are presented. The presence of wall temperature hot spots due to plasma discharge displacement from the torch axis is evidenced, while the use of the new 3-D code for optimization of induction coil geometry and plasma gas inlet features is foreseen. Received 5 September 2002 Published online 13 December 2002 RID="a" ID="a"e-mail: colombo@ciram.ing.unibo.it     

Laser capabilities of CuBr mixture excited by RF discharge

Our investigations demonstrated that utilizing copper bromide (CuBr) mixture as a source of Cu atoms in a RF-excited discharge can be a promising alternative to the Cu sputtered system, when the development of Cu ion gas laser is considered. Both spectroscopic and laser investigations showed that the threshold input power for lasing was reduced about 5 times using the CuBr-based system instead of the Cu-sputtered system. Pulsed and CW laser oscillation on Cu⁺ transitions in the near IR spectral region was obtained in RF-excited He-CuBr discharge operated at 13.56 MHz and 27.12 MHz. At input RF power of 800 W, a laser output power of 10 mW at the 780.8 nm Cu ion laser line was achieved. An increase of laser output power by a factor of two, as well as better Cu vapour axial distribution and better discharge stability, was attained when DC discharge was superimposed on the RF discharge. Laser gain on 11 UV Cu ion lines was observed in RF-excited Ne-CuBr discharge. basing on the obtained results, we consider the CuBr laser system excited by RF discharge capable of generating UV laser radiation at relatively low input power. Received 4 January 1999     

Observation of disruptions in tokamak plasma under the influence of resonant helical magnetic fields

Summary Disruptive instabilities were investigated in the small-tokamak TBR-1 during the application of resonant helical magnetic fields created by external helical windings. Indications were found that the main triggering mechanism of the disruption was the rapid increase of them=2/n=1 mode which, apparently after reaching a certain amplitude, interacts with other resistive modes: the internal 1/1 mode in the case of a major disruption, or with higherm components, as the 3/1 or 4/1, in the case of minor disruptions. After the coupling, the growth of the associated islands would create a chaotic field line distribution in the region between the corresponding rational magnetic surfaces which caused the gross particle transport and, finally, destroyed the confinement. In addition, investigations on higherZ _eff discharges in which a mixture of helium and hydrogen was used resulted in much more unstable plasmas but apparently did not alter the basic characteristics of the disruptions. The authors of this paper have agreed to not receive the proofs for correction.     

A spectroscopic investigation of stabilized dc argon arc at atmospheric pressure by power modulation technique

Spatial distribution of delayed responses of argon and hydrogen spectral line and continuum intensity to square power modulation was investigated in order to get better insight into the processes occurring in argon dc arc plasma. The power was abruptly changed between stationary values, 9 and 3.5 A. For these currents steady state radial distributions of electron number density, temperature and emission intensity were measured. On part of the discharge radial profiles the power drop and the power jump are both accompanied by intensity peaks which may be explained by displacement of the arc core axis and change in the arc core diameter during the power modulation.     

Measurements of electron density and Stark width of neutral helium lines in a helium arc plasma

Electron densities in an atmospheric helium arc plasma have been measured with the Stark broadening parameters of helium spectral lines. The spatially distributed radiation intensities are converted to plasma emission coefficients at every wavelength by means of Abel inversion. From the inverted profiles of He I lines of 4713 ?, 5016 ?, and 6678 ? electron density has been calculated, which ranges from 0.5 ×10¹⁶ to 4 ×10¹⁶ cm^-3 for a helium arc with current 200 A. Stark widths of He I lines of 3889 ? and 7065 ? are determined based on the measurements and compared with existing data.     

Electromagnetic field distributions in waveguide-based axial-type microwave plasma source

We present results from simulations of 2D distributions of the electromagnetic field inside a waveguide-based axial-type microwave plasma source (MPS) used for hydrogen production via methane reforming. The studies are aimed at optimization of discharge processes and hydrogen production. We derive equations for determining electromagnetic field distributions and next determine the electromagnetic field distributions for two cases – without and with plasma inside the MPS. For the first case, we examine the influence of the length of the inner conductor of the coaxial line on electromagnetic field distributions. We have obtained standing wave patterns along the coaxial line and found resonances for certain positions of the coaxial line inner conductor. For the case with plasma inside the MPS, we perform calculations assuming that distributions of plasma parameters are known. Simulations are done for several values of maximum electron density. We have found that for values of electron density greater than strong skin effect in the plasma is observed. Consequently, plasma may be treated as an extension of the inner conductor of the coaxial line. We have used FlexPDE software for the calculations.     

Observations of extreme ultraviolet emission from plasma produced by capillary discharges

This study reports the results of a pilot experiment concerning observations of extreme ultraviolet emission from plasma produced by the capillary discharges. A few kA current was applied across the gas-filled alumina capillary (1 mm diameter and 8 mm long) to generate radiation in the EUV region (12–63 nm). Spectroscopic studies were carried out by means of a XEUV spectrometer which was upgraded for special lithography purposes. The results obtained from the EUV spectroscopic measurements provided information about the radiation processes from xenon and argon plasma and testifies that given capillary is an effective source of EUV emission. Additionally we showed a simulation which describes plasma dynamics parameters and dynamics of various ionization stages in capillary discharge. Our computer simulation confirmed the presence of ions, which spectra was registered in the experiment.     

Investigations on ionic processes and dynamics in the sheath region of helium and hydrogen discharges by laser spectroscopic electric field measurements

Temporally and spatially resolved measurements of the electric field distribution in the sheath region of RF and dc discharges provide a detailed insight into the sheath and ion dynamics. The electric field is directly related to the sheath ion and electron densities, the sheath voltage, and the displacement current density. Under certain assumptions also the electron and ion conduction current densities at the electrode, the ion current density into the sheath from the plasma bulk, the ion energy distribution function, and the power dissipated in the discharge can be inferred. Furthermore, the electric field distribution can give an indication of the collision-induced conversion between different ion species in the sheath. Laser spectroscopic techniques allow the noninvasive in situ measurement of the electric field with high spatial and temporal resolution. These techniques are based on the spectroscopic measurement of the Stark splitting of Rydberg states of helium and hydrogen atoms. Two alternative techniques are applied to RF discharges at 13.56 MHz in helium and hydrogen and a pulsed dc discharge in hydrogen. The measured electric field profiles are analyzed, and the results discussed with respect to the ion densities, currents, energies, temporal dynamics and species composition. Received: 26 July 2000 / Accepted: 12 December 2000 / Published online: 3 April 2001     

Numerical studies on velocity, temperature history and heat transfer to the particles injected into the argon plasma

A new approach to study the particle velocity in a thermal plasma in relation to input parameters (power, gas flow rate, injection velocity of the particle and particle size) and nozzle dimensions (nozzle length and diameter) has been made. Injected particle's temperature and thermal history were calculated for particles of three different materials (alumina, tungsten and graphite) in argon plasma. Allowable powder feed rate was calculated for the particles. Heat transfer per particle injected in to the plasma is reported. Liquid fraction of the particle after it reached the melting point is also reported. Particle velocity is found to increase with increase in power, gas flow rate and injection velocity and decrease with increase in particle size, nozzle length and nozzle diameter. Thermal histories of the particles in relation to the plasma temperature and particle diameter are presented. Particle's residence time is found to increase with increase in diameter of the particle. Allowable powder feed rate for complete melting of the particle is higher at higher percentage utilisation of the plasma power. Powder feed rate is seen to decrease with increase in particle size and it is higher for tungsten and lower for graphite particle. Heat transfer rate from plasma to particle is seen to decrease with increase in time and the same is higher for plasmas of higher temperature and smaller sized particle. Received 4 May 2000 and Received in final form 15 March 2001     

Characterization of the ion cathode fall region in relation to the growth rate in plasma sputter deposition

In plasma-assisted magnetron sputtering, the ion cathode fall region is the part of the plasma where the DC electric field and ion current evolve from zero to their maximum values at the cathode. These quantities are straightforwardly related to the deposition rate of the sputtered material. In this work we derive simple relations for the measurable axially averaged values of the ion density and the ion current at the ion cathode fall region and relate them with the deposition rate. These relations have been tested experimentally in the case of an argon plasma in a magnetron sputtering system devoted to depositing amorphous silicon. Using a movable Langmuir probe, the profiles of the plasma potential and ion density were measured along an axis perpendicularly to the cathode and in front of the so-called race-track. The deposition rate of silicon, under different conditions of pressure and input power, has been found to compare well with those determined with the relations derived.     

Atom-sensitive textiles as visual indicators for plasma post-discharges

The efficiency of surface treatments by plasma and post-discharge plasma processes is greatly dependent on the density of active species, such as neutral atoms in post-discharges. Therefore, many diagnostics exist to detect the presence and measure the concentrations of these species, but they often require expensive instrumentation and highly qualified personnel. These conditions are not often met when the process is industrially used and it becomes important to imagine simple indicators allowing to validate that the correct operating conditions are reached. In the present paper, we present the first results on the investigation of an inexpensive and easy to use visual indicator able to quantify the atomic species density in nitrogen post-discharge plasma processes. It is based on the differential recombination coefficients of N-atoms on metallic/textile fibres which are intrinsically bonded together in a fabric matrix which serves as support for a thermochromic ink. The specific heating of the metallic fibres by N-atom recombination heats the whole of the fabric, leading to a visible colour change of the thermochromic ink, and therefore, of the indicator. Through modelling, it was possible to estimate that the inclusion of copper fibres to a pure cotton matrix leads to a 60% increase of the global N-atom recombination coefficient of the fabric, sufficient enough to provide a clearly visible colour change.     

An analytic colllslonai-radlatlve model Incorporating non-LTE and optical depth effects

In this paper we analyze the variations in line intensities ratios due to a non-equilibrium situation and to optical depth effects. A four level model is proposed and the two particular situations for the possible transitions are considered. Electron density and temperature as well as the source thickness are used as independent parameters to find out in which way and extent they modify the ratios of levels populations compared with the ideal case of an equilibrium state and optically thin source. Accordingly with the ion of interest, electron temperatures ranging from I/20 to I/7 eV (I being the ionization energy), whereas electron densities in the interval from 10¹⁴ to 10²⁰ cm^-3 will be considered. These ranges are of special interest for diverse applications such as LIBS and measurement of transition probabilities. Some results are presented for real ions and a new expression for the escape factor is also proposed for general plasma conditions. Received 12 June 2001 and Received in final form 24 October 2001     

AFM and contact angle investigation of growth and structure of pp-HMDSO thin films

HMDSO was plasma polymerized on silicon wafer and polyethylene (PE) substrates. The chemical structure of the pp-HMDSO was analyzed with Fourier-transform infrared (FT-IR) spectroscopy. The morphological structure of the thin films deposited on the different substrates was investigated by means of atomic force microscopy (AFM), indicating different coverage mechanisms. In order to investigate the growth process of the pp-HMDSO, films of different thickness were also deposited, varying the plasma deposition time from 10 s to 1800 s. Thickness and structure of such deposits was detected with AFM. Finally, hydrophobic characteristics of the different samples were evaluated by means of contact angle measurements and correlated with the morphological characteristics.