Complete determination of the conical Mueller matrix for one-dimensional rough metallic surfaces

We present results of the complete determination of the Mueller matrix for the light scattered by a one-dimensional random rough metallic surface under a conical or out-the-plane of incidence geometry. We present and apply a reduced method for its complete determination. This reduced method considers only 16 intensity-polarized measurements instead of the 36 intensity-polarized measurements recently reported. Effects related with the enhanced backscattering were observed.     

Mueller matrix for characterization of one-dimensional rough perfectly reflecting surfaces in a conical configuration

Theoretical results of the use of a Mueller matrix to characterize a one-dimensional rough perfectly reflecting, single-scattering surface in a conical configuration are presented. The conical Mueller matrix (CMM) is derived from the known Mueller matrix of this kind of surface in the plane of incidence [the plane Mueller matrix (PMM)]. The key argument is that, as the PMM is considered to be a Mueller-Jones matrix, an appropriate rotation of the complex amplitude matrix provides the conic Mueller matrix.     

Scattering by rough surfaces in a conical configuration: experimental Mueller matrix

A simple method for measuring the Mueller matrix associated with rough surfaces in a conical configuration is presented. I present result of experimental measurements of the Mueller matrix for the angular distribution of the light scattered by a one-dimensional gold-coated randomly rough surface in a conical configuration. Effects related to the phenomenon of enhanced backscattering are reported.     

Theoretical and computational aspects of scattering from rough surfaces: one-dimensional perfectly reflecting surfaces

We discuss the scattering of acoustic or electromagnetic waves from one-dimensional rough surfaces. We restrict the discussion in this report to perfectly reflecting Dirichlet surfaces (TE polarization). The theoretical development is for both infinite and periodic surfaces, the latter equations being derived from the former. We include both derivations for completeness of notation. Several theoretical developments are presented. They are characterized by integral equation solutions for the surface current or normal derivative of the total field. All the equations are discretized to a matrix system and further characterized by the sampling of the rows and columns of the matrix which is accomplished in either coordinate space (C) or spectral space (S). The standard equations are referred to here as CC equations of either the first (CC1) or second kind (CC2). Mixed representation, or SC-type, equations are solved as well as SS equations fully in spectral space.

Computational results are presented for scattering from various periodic surfaces. The results include examples with grazing incidence, a very rough surface and a highly oscillatory surface. The examples vary over a parameter set which includes the geometrical optics regime, physical optics or resonance regime, and a renormalization regime.

The objective of this study was to determine the best computational method for these problems. Briefly, the SC method was the fastest, but it did not converge for large slopes or very rough surfaces for reasons we explain. The SS method was slower and had the same convergence difficulties as SC. The CC methods were extremely slow but always converged. The simplest approach is to try the SC method first. Convergence, when the method works, is very fast. If convergence does not occur with SC, then SS should be used, and failing that CC.     

Theoretical and computational aspects of scattering from rough surfaces: one-dimensional perfectly reflecting surfaces

Abstract

We discuss the scattering of acoustic or electromagnetic waves from one-dimensional rough surfaces. We restrict the discussion in this report to perfectly reflecting Dirichlet surfaces (TE polarization). The theoretical development is for both infinite and periodic surfaces, the latter equations being derived from the former. We include both derivations for completeness of notation. Several theoretical developments are presented. They are characterized by integral equation solutions for the surface current or normal derivative of the total field. All the equations are discretized to a matrix system and further characterized by the sampling of the rows and columns of the matrix which is accomplished in either coordinate space (C) or spectral space (S). The standard equations are referred to here as CC equations of either the first (CC1) or second kind (CC2). Mixed representation, or SC-type, equations are solved as well as SS equations fully in spectral space.

Computational results are presented for scattering from various periodic surfaces. The results include examples with grazing incidence, a very rough surface and a highly oscillatory surface. The examples vary over a parameter set which includes the geometrical optics regime, physical optics or resonance regime, and a renormalization regime.

The objective of this study was to determine the best computational method for these problems. Briefly, the SC method was the fastest, but it did not converge for large slopes or very rough surfaces for reasons we explain. The SS method was slower and had the same convergence difficulties as SC. The CC methods were extremely slow but always converged. The simplest approach is to try the SC method first. Convergence, when the method works, is very fast. If convergence does not occur with SC, then SS should be used, and failing that CC.     

Calculations of the Mueller matrix for scattering of light from two-dimensional surfaces

Abstract

Results are presented of an analysis of the Mueller matrix parameters for the problem of scattering of light from two-dimensional rough surfaces. The Mueller matrix fully describes the polarization properties of the scattered light. It is shown, using symmetry arguments, that for normal incidence it is necessary to measure the Mueller matrix terms in only one plane, thus reducing the amount of data to be analysed. Examples of the form of the Mueller matrix terms are calculated using a simple ray-trace approach.     

Multichannel Mueller matrix ellipsometer for real-time spectroscopy of anisotropic surfaces and films

A multichannel ellipsometer in the dual-rotating-compensator configuration has been developed for potential applications in real-time Mueller matrix spectroscopy of anisotropic surfaces and films. This instrument provides spectra (1.7-5.3 eV) in all 16 elements of the unnormalized Mueller matrix M of a film-substrate system with a minimum overall data acquisition time of t(a) = 0.25 s. We have applied this instrument first for high-precision determination of spectra in M with t(a) = 2.5 s for a microscopically sculptured film.     

Absolute interferometer for three-dimensional profile measurement of rough surfaces

We present a new interferometer system devised for surface-profile metrology with multiple two-point-diffraction sources that are made from a pair of single-mode optical fibers. The diffraction interferometer system performs an absolute profile measurement by projecting multiple fringe patterns on the object surface and then fitting the measured phase data into a global model of multilateration. Test measurement results demonstrate that the proposed profiling method is suited for rough surfaces with excessive surface irregularities, which are difficult to measure with conventional two-arm interferometers.     

A heuristic model approximation for scattering from perfectly conducting one-dimensional random rough surfaces

Abstract

We propose a model for scattering from one-dimensional, perfectly conducting, slightly rough surfaces. A possible method for solving the scattering equations is examined which, with some assumptions, suggests the final result. The approximation is relatively simple and is comparable in computational effort with most first-order theories. We compare the bistatic scattering cross section for TE waves predicted by the present model for Gaussian randomly rough surfaces with numerical simulations and with some first-order theories. The comparison shows that the model is remarkably accurate for slightly rough surfaces and TE polarization.     

A heuristic model approximation for scattering from perfectly conducting one-dimensional random rough surfaces

We propose a model for scattering from one-dimensional, perfectly conducting, slightly rough surfaces. A possible method for solving the scattering equations is examined which, with some assumptions, suggests the final result. The approximation is relatively simple and is comparable in computational effort with most first-order theories. We compare the bistatic scattering cross section for TE waves predicted by the present model for Gaussian randomly rough surfaces with numerical simulations and with some first-order theories. The comparison shows that the model is remarkably accurate for slightly rough surfaces and TE polarization.     

A monostatic illumination function with surface reflections from one-dimensional rough surfaces

When solving scattering or emissivity problems for rough surfaces, the shadowing effect is often taken into account. Furthermore, for rough surfaces with large root mean square slope, surface reflections of the incidence or emission ray should not be neglected, especially at large observation angles. In this paper, a model of the monostatic statistical illumination function for one-dimensional rough surfaces with single surface reflection is developed, which is based on the Smith illumination function. A Monte Carlo ray-tracing algorithm is used to evaluate the accuracy of the present model. It is shown that, when neglecting the correlation between heights and slopes of the surface, the present model agrees quite well with the Monte Carlo result. Moreover, the result is improved if the correlation between heights and slopes is taken into account. For practical purposes, an empirical factor is introduced to improve the performance of the uncorrelated first-order illumination function to avoid computing the correlated one, which takes a long computation time. Besides, the first-order illumination function is significant at large observation angles, which could be promising to overcome problems in models of surface infrared emissivity where underestimation occurs compared with experimental measurements.     

Research on synthetic aperture radar imaging technology of one-dimensional layered rough surfaces

A quick and exact imaging method for one-dimensional layered rough surfaces is proposed in this paper to study the scattering characteristics of a layered medium that exists widely in nature.The boundary integral equations of layered rough surfaces are solved by using the propagation-inside-layer expansion combined with the forward and backward spectral acceleration method(PILE+FB-SA),and the back scattering data are obtained.Then,a conventional synthetic aperture radar(SAR) imaging procedure called back projection method is used to generate a two-dimensional(2D) image of the layered rough surfaces.Combined with the relative dielectric permittivity of realistic soil,the random rough surfaces with Gauss spectrum are used to simulate the layered medium with rough interfaces.Since the back scattering data are computed by using the fast numerical method,this method can be used to study layered rough surfaces with any parameter,which has a great application value in the detection and remote sensing areas.     

基于Mueller矩阵椭偏仪的纳米压印模板与光刻胶光栅结构准确测量

在纳米压印工艺中,对模板和压印结构的几何参数进行快速、低成本、非破坏性地准确测量具有非常重要的意义.与传统光谱椭偏仪只能改变波长和入射角2个测量条件并且在每一组测量条件下只能获得振幅比和相位差2个测量参数相比,Mueller矩阵椭偏仪可以改变波长、入射角和方位角3个测量条件,而且在每一组测量条件下都可以获得一个4×4阶Mueller矩阵共16个参数,因此可以获得更为丰富的测量信息.通过选择合适的测量条件配置,充分利用Mueller矩阵中的测量信息,有望实现更为准确的纳米结构测量.基于此,本文利用自主研制的Mueller矩阵椭偏仪对硅基光栅模板和纳米压印光刻胶光栅结构进行了测量.实验结果表明,通过对Mueller矩阵椭偏仪进行测量条件优化配置,并且在光学特性建模时考虑测量过程中出现的退偏效应,可以实现压印工艺中纳米结构线宽、线高、侧壁角以及残胶厚度等几何参数更为准确的测量,同时对于纳米压印光刻胶光栅结构还可以直接得到光斑照射区域内残胶厚度的不均匀性参数.     

High-speed polarization mode dispersion measurement using digital polarization-state generators and Mueller matrix method

A polarization-mode dispersion （PMD） measurement system using a pair of polarization-state generators （PSGs） is demonstrated. Based on the saturation characteristics of magneto-optic rotators, the PSG can be digitally controlled, ensuring high-speed and highly repeatable generation of five distinct polarization states. Thus, the PSG can make full use of the advantage of the Mueller matrix method of PMD measurement. The experimental result shows that the system has good measurement repeatability and potential for field testing.     

Mueller matrix polarimetry for improved liver fibrosis diagnosis

An experimental Mueller matrix polarimeter is used to quantify human liver fibrosis by measuring retardance and depolarization of thin biopsies. The former parameter is sensitive to fibrillar collagen, the latter is specifically sensitive to fibrillar collagen around blood vessels, which is not significant for liver fibrosis diagnosis. By using depolarization like a filter, retardance distribution enables distinguishing between disease stages and limits the high degree of observer discrepancy.     

Energy conservation of the scattering from one-dimensional random rough surfaces in the high-frequency limit

Energy conservation of the scattering from one-dimensional strongly rough dielectric surfaces is investigated using the Kirchhoff approximation with single reflection and by taking the shadowing phenomenon into account, both in reflection and transmission. In addition, because no shadowing function in transmission exists in the literature, this function is presented here in detail. The model is reduced to the high-frequency limit (or geometric optics). The energy conservation criterion is investigated versus the incidence angle, the permittivity of the lower medium, and the surface rms slope.     

Determination of the equivalent solid angles of radiation reflected from rough surfaces of opaque materials

Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 50, No. 3, pp. 456–462, March, 1989.     

Differential and product Mueller matrix decompositions: a formal comparison

It is shown that the Mueller matrix logarithm and the Mueller matrix roots decompositions used for the extraction of the elementary polarization properties of a depolarizing medium, although being computationally different, are formally equivalent, being both based upon the differential representation of a continuously depolarizing medium. The common set of six elementary polarization properties provided by these two decompositions is generally different from that obtained from the various product decompositions summarized by the G-polar decomposition whereby the depolarization phenomenon is treated as being concentrated, and not uniformly distributed, within the medium. However, if the medium is weakly depolarizing, the two sets of elementary properties coincide to the first order in the depolarization and tend to the set of properties of the nondepolarizing estimate of the measured Mueller matrix obtained from its Cloude sum decomposition.     

The ultimate in real-time ellipsometry: Multichannel Mueller matrix spectroscopy

A review of the techniques and applications of multichannel ellipsometry in the dual-rotating-compensator configuration is given. This ellipsometric approach has been established as the ultimate in real-time, single-spot optical measurement, as it determines the entire 16-element Mueller matrix of a sample over a wide spectral range (up to 1.7-5.3 eV) from raw data collected over a single optical period of 0.25 s. The sequence of optical elements for this ellipsometer is denoted PC_1rSC_2rA, where P, S, and A represent the polarizer, sample, and analyzer. C_1r and C_2r represent two MgF₂ rotating compensators, either biplates or monoplates that rotate synchronously at frequencies of ω₁ = 5ω and ω₂ = 3ω, where π/ω is the fundamental optical period. Previous high-speed Mueller matrix measurements with this instrument have been performed on uniform, weakly anisotropic samples such as (110) Si, in which case one can extract the bulk isotropic and near-surface anisotropic optical responses simultaneously. In such an application, the instrument is operated at its precision/accuracy limits. Here, ex situ results on a strongly anisotropic, locally biaxial film are presented that demonstrate instrument capabilities for real-time analysis of such films during fabrication or modification. In addition, the use of the instrument as a real-time probe to extract surface roughness evolution on three different in-plane scales for an isotropic film surface is demonstrated for the first time.