Wavelength division multiplexed confocal microscopy using supercontinuum

We investigate both theoretically and experimentally wavelength division multiplexed confocal imaging by using white light supercontinuum. We show that with the optimized pinhole diameter an axial resolution of 0.75 μm and detection efficiency of 80% can be achieved. In addition, we applied the axial WDM confocal system to 3D surface measurement and the result agreed well with that measured by commercially available surface profilometer. The measured sensitivity of the system is 3.25 nm. Finally, we demonstrated lateral confocal imaging by using supercontinuum. An effective lateral scanning range of 130 μm was obtained.     

A lateral super-resolution differential confocal technology with phase-only pupil filter

In order to achieve a higher lateral resolution required for ultraprecision measurement of microstructural workpieces, phase-only pupil filtering differential confocal microscopy (PFDCM), a new approach is proposed based on the differential confocal microscopy (DCM), which uses a three-zone phase-only pupil filter with lateral super-resolution capability obtained through optimized design to change the distribution of DCM three-dimensional point spread function, so that the DCM lateral resolution is therefore significantly improved while its axial resolution is slightly improved. Preliminary experimental comparison and analyses indicate that, the lateral and axial resolutions of PFDCM are better than 0.2 μm and 2 nm, respectively, when wavelength of incidence laser beam , numerical aperture of measuring lens NA=0.85, and lateral spot size with a three-zone phase-only pupil filter G_T=0.65. It is therefore concluded that PFDCM is a new approach to further improvement of lateral resolution in laser probe measurement systems.     

Improvement of confocal microscope performance by shaped annular beam and heterodyne confocal techniques

In order to further improve the performance of a confocal microscope (CM) used for measurement of surface profiles and 3D microstructures, a shaped annular beam heterodyne confocal measurement method based on annular pupil filter technique and reflection confocal microscopy, is proposed to expand the measurement range and to improve the defocused property of CM. The approach proposed uses a confocal dual-receiving light path arrangement and a heterodyne subtraction of two signals received from detectors with axial offset to enable CM to be used for bipolar absolute measurement and to improve the defocused property of CM, and it uses the annular pupil filter technique to produce a binary optical shaped annular beam, which expands the measurement range by expanding the full-width at half-maximum of intensity curve received from two detectors in a heterodyne confocal microscopy system. Theoretical analyses and experimental results indicate that a shaped annular beam heterodyne microscope has a measurement range expanded from 4 to 14 μm, achieved an axial resolution of 2 nm and improved the defocused property, when ε=0.5 and NA=0.65. It can be therefore concluded that the shaped annular beam heterodyne confocal measuring method proposed is a new approach to ultraprecision measurement of surface profiles and 3D microstructures.     

Characterization and performance of the femtosecond fluorescence up-conversion microscope

The characterization and performance of the femtosecond fluorescence up-conversion microscope is reported in this paper. This new fluorescence microscope is a combination of the frequency up-conversion technique and a confocal optical configuration, which simultaneously achieves femtosecond time and nanometer space resolution. The femtosecond time resolution was evaluated by measuring the rise up of time-resolved fluorescence from a dye molecule, and it was 520 fs and 460 fs with 100× (N.A.=1.3) and 40× (N.A.=0.75) objective lenses, respectively. The best transverse (XY) resolution was 0.34 m with the 100× objective lens for 400 nm excitation. An axial (Z) resolution as high as 1.1 m was obtained for 600 nm fluorescence detection with a 50 m pinhole and a 100× objective lens. The axial resolution was remarkably improved compared with ordinary confocal microscopes owing to the up-conversion process, which requires spatial overlap between the tightly focused gate and the fluorescence beams. Femtosecond time-resolved fluorescence measurements were performed for micro-meter sized particles in liquids, fluorescent beads and C519/toluene micro droplets, by using the laser trapping technique. The high potential of the fluorescence up-conversion microscope was demonstrated. PACS 78.47.+p; 87.64.-t; 82.53.-k     

Angle-resolved X-ray photoemission electron microscopy

Synchrotron based photoemission electron microscopy with energy filter combines real space imaging with microprobe diffraction (μ-ARPES), giving access to the local electronic structure of laterally inhomogeneous materials. We present here an overview of the capabilities of this technique, illustrating selected applications of angle resolved photoemission electron microscopy and related microprobe methods. In addition, we report the demonstration of a darkfield XPEEM (df-XPEEM) imaging method for real space mapping of the electronic structure away from Γ at a lateral resolution of few tens of nm. The application of df-XPEEM to the (1 × 12)-O/W(1 1 0) model oxide structure shows the high sensitivity of this technique to the local electronic structure, allowing to image domains with inequivalent adsorption site symmetry. Perspectives of angle-resolved PEEM are discussed.     

A post-compression based ultrasound imaging technique for simultaneous transmit multi-zone focusing

The compression error of post-compression based coded excitation techniques increases with decreasing f-number, which causes the elevation of side-lobe levels. In this paper, a post-compression based coded excitation technique with reduced compression errors through dynamic aperture control is proposed. To improve the near-field resolution with no frame rate reduction, the proposed method performs simultaneous transmit multi-zone focusing using two mutually orthogonal complementary Golay codes. In the proposed method, the two mutually orthogonal sequences of length 16 are simultaneously transmitted toward two different focal depths, which are separately compressed into two short pulses on receive after dynamic focusing is performed. After carrying out the same transmit-receive operation for the same scan line with the complementary set of the orthogonal Golay codes, a single scan line with two transmit foci is obtained.The computer simulation results using a linear array with a center frequency of 7.5 MHz and 60% 6 dB bandwidth show that the range side-lobe level can be suppressed below −50 dB, when f-number is maintained not smaller than 3. The performance of the proposed scheme for a smaller f-number of 2 was also verified through actual experiments using a 3.85 MHz curved linear array with 60% 6 dB bandwidth. Both the simulation and experimental results show that the proposed method provides improved lateral resolution compared to the conventional pre-compressed and post-compression based coded excitation imaging using Golay codes.     

Differential confocal technology based on radial birefringent pupil filtering principle

In order to improve the spatial resolution of a confocal system, a radial birefringent pupil filter (RBPF) is introduced into a differential confocal system. RBPF consists of two polarizers with a birefringent element between them, and its pupil function is deduced from Jones matrix. The thickness and curvature radius of RBPF are optimized independently, using the first zero coordinate ratio. The pupil function is modulated by RBPF to enhance the half-width of the response function, and lateral resolution is improved when response curve is changed with the position of RBPF as well as the polarization; then axial super-resolution of the system can be guaranteed using differential confocal detection mechanism. In comparison with conventional pupil filtering technology, RBPF features high lateral resolution and can be easily produced; moreover, it also has a simple structure. Together with its low cost, RBPF provides a new way for the improvement of super-resolution of confocal system. It is indicated from theoretical analysis and preliminary experiments that the lateral resolution can be significantly improved and the measurement error is reduced by 76 nm when measuring a standard grating of period 3 μm; the axial resolution up to 3 nm has been achieved using the optimized pupil filter. In addition to its application for measurement of a small irregular surface in a limited space, the whole differential confocal system proposed can be fitted onto a coordinate measuring machine for non-contact measurement of dimensions and surface roughness.     

Optimization of a long-period grating-based Mach-Zehnder interferometer for temperature measurement

An approach to optimize the design of the long-period grating pair as a temperature sensor device is presented, implemented by using a long-period grating (LPG) pair with a small separation (of around 2 mm) and scaling down their physical length by a factor greater than 2. The technique allows the interferometer formed not only to measure temperature variations over distances as small as the overall length of the grating pair (18 mm) but also to reduce the cladding losses between the LPGs forming the pair. This approach enhances the sharpness of the interference fringes (IFs) and the pits (Pts) in the transmission spectrum and, as a result, a high resolution sensor is obtained. The LPG pair is fabricated in the appropriate photosensitive single mode/core fibres, without being restricted to the use of dual core or other special fibres, thus exploiting the sensitivities of various fibres and reducing the overall system cost. In this work, the effectiveness of this technique is demonstrated by fabricating a small-scale LPG pair in a boron-germanium co-doped single mode fibre, with particular attention being paid to the higher order cladding modes. The sensitivity of the device thus created is 0.31 nm/°C with a root-mean-square (rms) deviation of 0.28 nm in the wavelength measurement, which corresponds to a temperature variation of approximately 0.9 °C. This was achieved while using a relatively low-resolution (0.6 nm) Optical Spectrum Analyzer to detect the wavelength changes of the device and was further improved to 0.7 °C when using an OSA with a resolution of 0.1 nm.     

Multi-wavelength laser sensor for intruder detection and discrimination

An intruder detection and discrimination sensor with improved optical design is developed using lasers of different wavelengths to demonstrate the concept of discrimination over a distance of 6 m. A distinctive feature of optics is used to provide additional transverse laser beam scanning. The sample objects used to demonstrate the concept of discrimination over a distance of 6 m are leaf, bark, black fabric, PVC, wood and camouflage material. A camouflage material is chosen to illustrate the discrimination capability of the sensor. The sensor utilizes a five-wavelength laser combination module, which sequentially emits identically-polarized laser light beams along one optical path. A cylindrical quasi-optical cavity with improved optical design generates multiple laser light beams for each laser. The intensities of the reflected light beams from the different spots are detected using a high speed area scan image sensor. Object discrimination and detection is based on analyzing the Gaussian profile of reflected light at the different wavelengths. The discrimination between selected objects is accomplished by calculating four different slopes from the objects' reflectance spectra at the wavelengths 473 nm, 532 nm, 635 nm, 670 nm and 785 nm. Furthermore, the camouflage material, which has complex patterns within a single sample, is also detected and discriminated over a 6 m range by scanning the laser beam spots along the transverse direction.     

A novel optical subdivision method for dual-frequency interferometer

The theory of optical subdivision techniques of dual-frequency laser interferometers is stated. And a novel optical subdivision technique is proposed originally to enhance resolution of a commercial interferometer by adding some corner-cubes. Then the performance of the interferometer is tested. The interferometer resolution of 1.24 nm and the average error of below 2 nm are achieved by using the technique. The most novel of the optical subdivision technique is without λ/4 plates. It is less sensitive to environmental changes, it has prodigious potential to improve resolution farther and it can reduce polarization mixing error.     

Demonstration of a no-moving-parts axial scanning confocal microscope using liquid crystal optics

For the first time, to the best of authors’ knowledge, a no-moving-parts axial scanning confocal microscope (ASCM) system is designed and demonstrated using a combination of a large diameter liquid crystal (LC) lens and a classical microscope objective lens. By electrically controlling the 5 mm diameter LC lens, the 633 nm wavelength focal spot is moved continuously over a 48 μm range with a measured 3-dB axial resolution of 3.1 μm using a 0.65 numerical aperture (NA) micro-objective lens. The ASCM is successfully used to image an Indium Phosphide (InP) twin square optical waveguide sample with a 10.2 μm waveguide pitch and 2.3 μm height and width. Using fine analog electrical control of the LC lens, a super-fine sub-wavelength axial resolution of 270 nm is demonstrated. The proposed ASCM can be useful in various precision three-dimensional (3D) imaging and profiling applications.     

微分干涉差共焦显微膜层微结构缺陷探测系统

多层膜极紫外光刻掩模"白板"缺陷是制约下一代光刻技术发展的瓶颈之一,为提高对掩模"白板"上的膜层微结构缺陷的分辨能力,提出了一种微分干涉差共焦显微探测系统方案。基于标量衍射理论,计算了系统横向和轴向分辨率。利用MATLAB建模仿真,在数值孔径为0.65、工作波长为405 nm时,分析比较了微分干涉差共焦显微系统、传统显微系统和共焦显微系统的分辨率。结果表明微分干涉差共焦显微系统具有230 nm的横向分辨率和25 nm轴向台阶高度差的分辨能力(对应划痕等缺陷形式)。此外,仿真和分析了实际应用中探测器尺寸、样品轴向偏移等的影响,模拟分析了膜层微结构缺陷的探测,结果表明本系统可以探测200 nm宽、10 nm高的微结构缺陷,较另外两种系统有更好的探测能力。     

Development of improved PLIF CH detection using an Alexandrite laser for single-shot investigation of turbulent and lean flames

We report on the development of planar laser-induced fluorescence (PLIF) for CH imaging with improved detection sensitivity for single-shot investigations of turbulent, lean, premixed flames. A ring-cavity, pulsed Alexandrite laser was frequency-doubled to excite the lines in the R-branch band-head of the B-X (0,0) band and broadband fluorescence from the B-X (0,1), A-X (1,1) and (0,0) bands, overlapping in the spectral range around 431 nm, was collected. The employed Alexandrite laser, which is characterized by its long pulse duration (150 ns), gives a tunable laser beam around 775 nm with a pulse energy for the second harmonic at the CH absorption wavelength of about 70 mJ. Moreover, the laser has the possibility to be operated in narrow bandwidth (100 MHz) or broad bandwidth (8 cm⁻¹). An introductory high resolution excitation scan over the R-branch band-head was performed and, in addition, saturated excitation with the broadband option of the laser was investigated. By simultaneous excitation of several rotational transitions and to bring these transitions close to saturation, high signal-to-noise ratios were reached over a wide range of equivalence ratios. A sharp and thin CH layer was observed in single-shot PLIF images from laminar premixed methane/air flames from Φ = 0.6 to Φ = 1.5. Finally, the impact of the developed CH PLIF technique is demonstrated in a highly turbulent, lean, partially premixed methane/air flame established on a co-axial jet flame burner.     

A shaped annular beam tri-heterodyne confocal microscope with good anti-environmental interference capability

A shaped annular beam tri-heterodyne confocal microscope has been proposed to improve the anti-environmental interference capability and the resolution of a confocal microscope. It simultaneously detects far-, on-, and near-focus signals with given phase differences by dividing the measured light path of the confocal microscope into three sub-paths (signals). Pair-wise real-time heterodyne subtraction of the three signals is used to improve the anti-environmental interference capability, axial resolution, and linearity; and a shaped annular beam super-resolution technique is used to improve lateral resolution. Theoretical analyses and preliminary experiments indicate that an axial resolution of about 1 nm can be achieved with a shaped annular beam tri-heterodyne confocal microscope and its lateral resolution can be better than 0.2 $\mu $m for $\lambda =632.8$~nm, the numerical aperture of the lens of the microscope is NA $=0.85$, and the normalized radius $\varepsilon =0.5$.     

Arrangement of a 4Pi microscope for reducing the confocal detection volume with two-photon excitation

The main advantage of two-photon fluorescence confocal microscopy is the low absorption obtained with live tissues at the wavelengths of operation. However, the resolution of two-photon fluorescence confocal microscopes is lower than in the case of one-photon excitation. The 4Pi microscope type C working in two-photon regime, in which the excitation beams are coherently superimposed and, simultaneously, the emitted beams are also coherently added, has shown to be a good solution for increasing the resolution along the optical axis and for reducing the amplitude of the side lobes of the point spread function. However, the resolution in the transverse plane is poorer than in the case of one-photon excitation due to the larger wavelength involved in the two-photon fluorescence process. In this paper we show that a particular arrangement of the 4Pi microscope, referenced as 4Pi′ microscope, is a solution for obtaining a lateral resolution in the two-photon regime similar or even better to that obtained with 4Pi microscopes working in the one-photon excitation regime.     

Luminescence of undoped β-Ga2O3 single crystals excited by picosecond X-ray and sub-picosecond UV pulses

Undoped β-Ga₂O₃ single crystals were grown using the floating zone technique under a pressure of 2 atm oxygen. Luminescence spectra of the crystals were measured with steady-state X-ray (<15 keV) and UV (258 nm, 4.8 eV) sources. The X-ray excitation produced a spectrum with a peak at 390 nm (3.2 eV) whereas the UV excited spectrum had a peak at 430 nm (2.9 eV). The luminescence rise and decay were also examined by using picosecond X-ray and sub-picosecond UV pulses. It was found that the X-ray pulse excitation gave a slower rise and a faster decay of the luminescence compared with the UV pulse excitation. These results suggest that X-ray excitation generates high energy electrons, building up luminescent states until those electrons lose their kinetic energies, giving rise to the formation of local hot spots in the gallium oxide crystals.     

具有高空间分辨力的整形环形光式差动共焦测量法

提出一种新的具有高空间分辨力的整形环形光式差动共焦测量方法。该方法通过整形环形光式共焦测量法和锐化爱里斑主瓣，改善系统横向分辨力；通过差动共焦测量法改善系统的轴向分辨力，最终达到提高系统空间分辨能力的目的。理论分析和实验表明：整形环形光内孔归一化半径ε越大，横向分辨力改善越明显，量程扩展范围越宽；当入射光波长λ=632.8nm，物镜数值孔径取NA=0.85，ε=0.5时，该系统的横向分辨力优于0.2μm，轴向分辨力优于2nm。该方法为光触针测量系统空间分辨力的提高提供了1种新的方法，可广泛应用于超精密三维微细结构工件的超精密测量。     

Microscopic observation of lateral diffusion at Si-SiO2 interface by photoelectron emission microscopy using synchrotron radiation

The lateral surface diffusion at Si-SiO₂ interface has been observed at nanometer scale using photoelectron emission microscopy (PEEM) combined with synchrotron soft X-ray excitation. The samples investigated were Si-SiO_x micro-patterns prepared by O₂⁺ ion implantation in Si (0 0 1) wafer using a mask. The lateral spacial resolution of the PEEM system was about 41 nm. The brightness of each spot in the PEEM images changed depending on the photon energy around the Si K-edge, in proportion to the X-ray absorption intensity of the corresponding valence states. It was found that the lateral diffusion occurs by 400-450 °C lower temperature than that reported for the longitudinal diffusion at the Si-SiO₂ interface. It was also found that no intermediate valence states such as SiO (Si²⁺) exist at the Si-SiO₂ interface during the diffusion. The observed differences between lateral and longitudinal diffusion are interpreted by the sublimated property of silicon monoxide (SiO).     

Femtosecond spectroscopic imaging by time-of-flight photoemission electron microscopy

Advances in electron optics and fast-pulsed light sources have enabled the imaging of nanoscale structures with simultaneous energy and time resolutions. We present the results obtained from a time-resolved time-of-flight photoemission electron microscopy (TR-TOF-PEEM) system. This system combined the spatial resolution of conventional PEEM with the time resolution of a femtosecond-pulsed laser and the energy resolution of a TOF energy analyzer. The TOF-PEEM system consists of three electrostatic lenses in front, a drift tube for the measurement of TOF, and a delay line detector (DLD) at the end of the optics. The excitation source is femtosecond pulses from a cavity-dumped Ti:sapphire oscillator that is frequency-doubled to 400 nm using a β-barium borate (BBO) crystal. Using a pump-probe two-photon photoemission technique, we demonstrate an example of sub-100 nm space-resolved ultrafast time evolution of the electron energy spectra for the plasmon resonance of an Ag-coated Si nanostructure, which exhibited unexpectedly intense high energy photoemission signals that show different time evolution between bright and dark regions in a PEEM image.     

Lateral resolution improvement in two-photon excitation microscopy by aperture engineering

A technique for resolution improvement in two-photon excitation (2PE) fluorescence microscopy based on radially-symmetric annular binary filter (consist of central circular aperture and a concentric peripheral annulus) is proposed. Resolution improvement is achieved by engineering the aperture of the objective lens in a way so as to enhance high spatial frequencies. The structure of the electromagnetic field in the regions of focus and nearby regions are determined. The central lobe of the time-averaged electric energy density is considerably reduced for both linearly- and circularly-polarized illuminated light. An impressive combined comparative percentage improvement of 40% and 53.71% both at low (α = 30) and high (α = 60) aperture angle is obtained for linearly-polarized light. Proposed aperture engineering technique complements conventional, confocal, two-photon fluorescence microscopy, and may facilitate working at low-to-medium magnifications and large free-working distances.