Design study of hard X-ray tomography system to obtain a spatial resolution of 100 nm

An optic-based X-ray tomography system of a high spatial resolution using a conventional X-ray tube was proposed. The system had several X-ray optics: multilayer mirror for monochromatic X-ray, capillary optic for focusing X-ray onto a sample, and objective zone plate. The X-ray tomography system was designed for obtaining a spatial resolution of 100 nm. Design parameters for each optic were determined and optimized by ray tracing in considering X-ray intensity and reflectivity. The X-ray tomography system with a spatial resolution of 100 nm will provide a good inspect tool in bio-medical field and semiconductor applications.     

Analysis of optical energy transportation on toroidal mirror X-ray relay optics

An analysis is given about energy transportation in toroidal mirror X-ray relayoptics.The systematic error which may be induced in the measurement of laboratory X-raylaser gain by the toroidal mirror relay optics is analysed and simulated for two applicable sys-tems,as shown in the examples,the degradation of spatial resolution of the relay optics is esti-mated.     

Exploring nanomagnetism with soft X-ray microscopy

Magnetic soft X-ray microscopy images magnetism in nanoscale systems with a spatial resolution down to 15 nm provided by state-of-the-art Fresnel zone plate optics. X-ray magnetic circular dichroism (X-MCD) is used as the element-specific magnetic contrast mechanism similar to photoemission electron microscopy (PEEM), however, with volume sensitivity and the ability to record the images in varying applied magnetic fields which allows study of magnetization reversal processes at fundamental length scales. Utilizing a stroboscopic pump-probe scheme one can investigate fast spin dynamics with a time resolution down to 70 ps which gives access to precessional and relaxation phenomena as well as spin torque driven domain wall dynamics in nanoscale systems. Current developments in zone plate optics aim for a spatial resolution towards 10 nm and at next generation X-ray sources a time resolution in the fs regime can be envisioned.     

New directions in X-ray microscopy

The development of high brightness X-ray sources and high resolution X-ray optics has led to rapid advances in X-ray microscopy. Scanning microscopes and full-field instruments are in operation at synchrotron light sources worldwide, and provide spatial resolution routinely in the 25–50 nm range using zone plate focusing elements. X-ray microscopes can provide elemental maps and/or chemical sensitivity in samples that are too thick for electron microscopy. Lensless techniques, such as diffraction microscopy, holography and ptychography are also being developed. In high resolution imaging of radiation-sensitive material the effects of radiation damage needs to be carefully considered. This article is designed to provide an introduction to the current state and future prospects of X-ray microscopy for the non-expert.     

Development of Hard X-ray Focusing Optics at Diamond Light Source

The short wavelength of X-rays makes them an excellent choice for probing materials on the nanometer scale and for crystallography of sub-micrometer crystallites. The objective of nanofocusing optics is to produce a small, focused beam size in order to obtain the highest X-ray flux on a small sample or as a fine spatial probe. Achieving nanometer-scale focused X-ray beam sizes puts great demands on the optical elements in an X-ray beamline—the optics must balance the requirements to de-magnify the electron beam X-ray source, to reduce the diffraction-limited focus size, and to minimize the contribution to the focus of aberrations in the optics while collecting the maximum X-ray flux into the focused beam. These requirements dictate that an extreme demagnifying geometry should be employed and that high-specification optical elements must be used. Nanofocusing optics has often been added as an upgrade to existing beamlines at Diamond, extending the range of science that can be carried out. Extreme nanofocusing also forms the basis of new beamlines at Diamond, such as the nanoprobe beamline (I14), which aims to provide sub-30-nm-dimension focused X-ray beams for mapping samples at high spatial resolution. The demand for nanometer-scale diffraction-limited X-ray beams is expected to grow at Diamond and requires corresponding advances in X-ray optics to exploit the present source and future lower emittance storage ring sources; for example, the proposed Diamond II upgrade, projected to give a factor 20 emittance reduction.     

基于拉曼散射的光纤分布式温度测量系统的空间分辨力

基于自发拉曼散射的光纤分布式温度测量系统是一种真正的分布传感系统且已商品化。本文从光学的角度出发较详细地分析了此类系统的空间分辨力理论极限及其影响因素。分析表明， 对于一个１ ｋｍ 的多模系统， 若接收机的最小可分辨光功率优于３．５ ｐＷ， 则其在０～４００℃的范围内且温度精度为±１℃时的空间分辨力极限为２ ｃｍ ； 当接收机的最小可分辨光功率小于０．５ ｐＷ， 单模系统的空间分辨力极限优于对应的多模系统。因此， 把基于自发拉曼散射机理的光纤分布式温度测量系统用于短距离高分辨力的系统理论上是可行的。     

Submicrometer tomographic resolution examined using a micro-fabricated test object

To estimate the spatial resolution of microtomographs, a test object on the submicrometer scale was prepared by focused ion beam milling and subjected to microtomographic analysis. Since human tissues are composed of cells and extracellular matrices with micrometer and submicrometer structures, it is important to investigate the three-dimensional spatial resolution of microtomographs used to visualize microstructures of human tissues. The resolutions along the direction within the tomographic slice plane (in-plane resolution) and perpendicular to it (through-plane resolution) were determined from the modulation transfer function of square-wave patterns. The in-plane resolution was estimated to be 1.2 μm from the modulation transfer function of the non-zoom image. In contrast, the zoom image gave the in-plane resolution of 0.8 μm. This in-plane resolution is comparable to the through-plane resolution, which was estimated to be 0.8 μm. Although the two-dimensional radiographs were taken with the pixel width of half the X-ray optics resolution, these three-dimensional resolution analyses indicated that the zoom reconstruction should be performed to achieve the in-plane resolution comparable to the X-ray optics resolution. The submicrometer three-dimensional analysis was applied in the structural study of human cerebral tissue stained with high-Z elements and the obtained tomograms revealed that the microtomographic analysis allows visualization of the subcellular structures of the cerebral tissue.     

一种毛细管聚焦的便携式微束X射线荧光谱仪

基于毛细管X光透镜技术的便携式能量色散X射线荧光分析因其无损分析等优点成为分析文物样品的有利工具。但由于文物样品的表面不平整或弧度以及毛细管X光透镜聚焦X射线的特点，导致在测量过程中样品测量点与毛细管X光透镜出端之间的距离产生变化，引起照射样品的X射线束斑大小发生改变，从而影响测量结果的准确性和元素区域扫描的分辨率。介绍了本实验室自行研发的一种新型便携式微束X射线荧光谱仪，此谱仪主要是由SDD X射线探测器、30 W低功率X射线管、毛细管X光透镜、CCD和一个新型闭环控制系统构成。该闭环控制系统是在激光位移传感器能够精确控制样品测量点到毛细管X光透镜出端距离的基础上，结合LabVIEW语言环境下开发的计算机控制程序以及步进电机、样品台等器件组成。基于此系统，该实验室研发的便携式微束X射线荧光谱仪在测量过程中可以时刻保证照射样品的X射线光斑大小固定不变。同时，该谱仪还可以通过调整样品测量点到透镜出端的距离来选择不同尺寸的X射线照射光斑。为了验证设备的可行性，使用该便携式微束X射线荧光谱仪在激活激光位移传感器和关闭激光位移传感器两种情况下测量了一块表面不平整古陶瓷样品釉彩层中K，Ca，Zn和Fe等元素的含量及分布，并将测量结果进行了对比。结果显示，在激活激光位移传感器的情况下测得的样品微区元素含量与真实值较接近，扫描区域元素分布图的分辨率更好，表明本谱仪基于激光位移传感器开发的自动调整样品测量点到透镜出口端距离的闭环控制系统能有效的减少由于样品表面不平整或弧度带来的测量误差，弥补了现有微束X射线荧光谱仪在此方面的不足。因此，本便携式微束X射线荧光谱仪在无损分析检测文物方面具有潜在的应用前景。     

第三代同步辐射光源X射线相干性测量研究

随着高性能第三代同步辐射光源的建成开放,基于X射线相干特性的实验方法得到了快速发展和广泛应用.作为一个典型的例子,X射线相位衬度成像已经成为常规的X射线实验方法并向用户开放.相干散射、相干衍射成像、光子关联谱等X射线实验方法正日益受到重视,在高空间分辨、时间分辨等研究领域已显示出其独特的优越性.因此,研究和测量第三代同步辐射的空间相干特性对进一步发展这些新的实验方法具有重要意义.基于Talbot自成像原理成功测量了上海光源X射线成像线站发射的X射线的空间相干长度,并进而测得了相应光源的空间尺度.光子能量为33.2 keV时,测得的X射线光束垂直方向空间相干长度为8.84μm,对应的光源尺寸为23μm,测量结果与理论分析相符.     

Scanning X-ray microanalysis of bottom sediments using synchrotron radiation from the BINP VEPP-3 storage ring

Combining the features of synchrotron radiation (low angular divergence and continuous spectrum, natural polarization, and high intensity) with the use of modern X-ray optics (polycapillary lenses) and registering devices results in a new quality of analysis: measuring picogram concentrations of a broad set of elements with micron spatial resolution. Using a dedicated experimental station and developed methodologies, numerous scanning microanalyses of bottom sediments is performed to obtain a time series of geochemical indicators of paleoclimate in the Central Asian region. The detection limit under optimum conditions is 5 × 10^?5% with a spatial resolution of ～100 μm.     

Wide-Aperture Aspheric Optics for Formation of Subwavelength Caustics of a Terahertz Electromagnetic-Radiation Beam

A wide-aperture aspheric lens for focusing a terahertz electromagnetic-radiation beam in a circle of the subwavelength size is proposed. The calculation of the lens and the estimation of size of created caustic were carried out using computational methods of geometric optics and electrodynamics. The lens is made of high-density polyethylene with the help of a turning machine. For experimental estimation of the spatial resolution provided by the lens, a THz imaging system based on raster scanning of the object’s surface was created. The imaging system was used in combination with wide-aperture THz optics to record images of the streak plates with different spatial frequencies. Analysis of the experimental data showed that the aspheric lens allows the resolution of two objects spaced at a distance of 0.95λ, providing contrast of 15%. The proposed THz optics is superior to classical THz spherical lenses and off-axis parabolic mirrors, greatly expanding the capabilities of THz-spectroscopy methods and imaging.     

带超环面镜的掠入射光栅谱仪测试系统响应特性模拟分析

指出了文献[1]在物理概念上和公式推导中的错误,并在订正了这些错误之后,考虑了实际的激光等离子体光源的几何尺度和线状等离子体的安排,对在复合泵浦X激光增益实验中所使用的带超环面镜X光中继元件的掠入射光栅光谱仪系统进行了全面的模拟计算.结果表明,作者所使用的带超环面镜的X光增益测试系统,其因离焦而导致的非线性效应是完全可以忽略的,系统的空间分辨能力的下降也是非常小的,从而否定了文献[1]中的结论,表明作者在X激光增益测量实验中所使用的带超环面镜X光中继元件的掠入射光栅光谱仪系统是完全可靠的.     

Full-field optical coherence microscopy

We present a new microscopy system for imaging in turbid media that is based on the spatial coherence gate principle and generates in parallel a complete two-dimensional head-on image without scanning. This system has been implemented in a commercial microscope and preserves the lateral resolution of the optics used. With a spatially incoherent source, speckle-free images with diffraction-limited resolution are recorded at successive depths with shot-noise-limited detection. The setup comprises a photoelastic modulator for path difference modulation and a two-dimensional CCD array and uses a multiplexed lock-in detection scheme.     

用SVGA1薄膜晶体管液晶显示器矫正人眼波像差

在研究了SVGA1薄膜晶体管液晶显示器（TFT LCD）的位相调制特性的基础上,用它作为眼波像差的矫正器件,在用哈特曼-夏克波前传感器的眼像差测量系统中对眼波像差进行了成功的矫正.对于5.2 mm的瞳孔,矫正后人眼波像差的PV值降低了3倍多,并接近瑞利判据的像差容限.对系统的光学传递函数(MTF)的分析说明,经波像差矫正后眼的空间分辨率由17 c/deg提高到38 c/deg.     

辐射成像系统中图像转换屏与物镜耦合的分析

辐射成像系统中,射线沿闪烁体厚度方向产生的光经过镜头形成一个弥散的像。这通常是此类系统空间分辨的主要限制因素。建立了几何光学成像模型,描述了近心光路中此图像的空变特性。用点扩散函数均方根半径表征系统空间分辨性能,给出了图像点扩散函数均方根半径的表达式,其与闪烁体厚度、折射率、镜头相对孔径、成像倍率、射线入射点相对位置直接相关。将硅酸镥晶体3维发光强度分布与镜头进行耦合,分析了闪烁体发光强度分布对耦合的影响。采用点扩散函数均方根半径为最小的原则,建立了一个推导闪烁体相对于物镜放置在最佳位置的方法。     

On the problems of the application of atomic-force microscopes for studying the surface roughness of elements for imaging optics

The key problems of applying atomic-force microscopes when studying the surface roughness of elements for imaging optics are discussed. Special attention is paid to optics of ultrahigh spatial resolution with an operating wavelength of no shorter than 100 nm. It is proposed that a specialized microscope for optical applications equipped with a tetraaxial goniometer be developed.     

分幅变像管动态空间分辨率的标定

为了提高激光惯性约束聚变实验二维成像诊断的精密化程度, 提出了分幅变像管动态空间分辨率的标定方法. 标定原理是以直边函数为物, 经光学系统成像后求解系统的调制传递函数, 从而获得系统的空间分辨率. 在神光Ⅱ装置上利用八路激光打靶产生1-3.5 keV能区的连续X 射线标定源, 照射高Z刀边材料, 并成像到分幅变像管阴极上, 分幅变像管采用脉冲选通工作模式获得动态像. 对分幅变像管采集的动态图像进行处理得到系统的调制传递函数. 根据调制传递函数为0.1时对应的空间截止频率, 得到系统的空间分辨率为20 lp/mm. 根据分幅变像管的动态空间分辨理论, 计算系统的极限空间分辨率为22.8 lp/mm. 标定结果略低于极限空间分辨率, 与理论基本吻合. 根据传统标定方法得到该分幅变像管的静态空间分辨率为22 lp/mm, 比动态空间分辨率略高. 在二维成像诊断时, 分幅变像管工作于动态选通模式, 故动态空间分辨率的标定结果更能真实地反映其成像诊断能力.     

Study of the aberrations of the IMP heavy ion microbeam irradiation system

A high energy heavy ion microbeam irradiation system is constructed at the Institute of Modern Physics (IMP) of the Chinese Academy of Sciences (CAS). A quadrupole focusing system, in combination with a series of slits, has been designed here. The IMP microbeam system is described in detail. The intrinsic and parasitic aberrations associated with the magnets are simulated. The ion beam optics of this microbeam system is investigated systematically. Then the optimized initial beam parameters are given for high spatial resolution and high hitting rates.     

X射线成像系统点扩展函数理论模型及其实验验证

X射线成像系统点扩展函数是影响X射线成像空间分辨率和密度分辨率的决定性因素,在系统分析X射线成像物理过程基础上,建立了X射线成像系统点扩展函数的一种数学解析模型,推导出了射束有效宽度计算公式,最后通过实验验证了模型的正确性。该模型为X射线成像系统空间分辨率和密度分辨率的初步设计和评定提供了理论依据,可作为X射线图像恢复算法中模糊函数的先验信息。     

消像散掠入射平场光栅谱仪及其在等离子体XUV光谱诊断中的应用

研制成一台由柱面反射镜和球面反射镜组成的掠入射前置光学系统和变间距球面光栅组成的掠入射平场光栅谱仪,它不仅有较高的效率和光谱分辨,调整方便,而且还具有在4.4nm～30nm波长范围里同时获得一维空间分辨光谱的能力.用该谱仪成功地获得了线聚焦激光产生的Si,Cu及其它元素的等离子体柱的轴向空间分辨光谱.该谱仪很适合与具有平直接收表面的光电探测器,如软X射线条纹相机等联用以获得时间分辨光谱.