Bio-inspired dual surface modification to improve tribological properties at small-scale

In miniaturized devices like micro/nano-electro-mechanical systems (MEMS/NEMS), the critical forces, namely adhesion and friction restrict the smooth operation of the elements that are in relative motion. MEMS/NEMS are traditionally made of silicon, whose tribological properties are not good. In this paper, we present an investigation on the approach of dual surface modification of silicon surfaces and their tribological properties at micro-scale. The dual surface modification is a combination of topographical and chemical modifications. As the topographical modification, micro-patterns with varying shapes of pillars and channels were fabricated on Si(1 0 0) wafer surfaces using photolithography method. Chemical modification included the coating of micro-patterns with diamond-like carbon (DLC) and Z-DOL (perfluoropolyether, PFPE) thin films. The surfaces with combined modification were evaluated for their micro-friction behavior in comparison with those of bare Si(1 0 0) flat surfaces and the topographically/chemically modified silicon surfaces. Results showed that the surfaces with dual modification exhibited superior tribological properties. These results indicate that a combination of topographical and chemical modification is very effective in enhancing tribological properties at small-scale. The combined surface treatments such as the ones investigated in the current work could be useful for tribological applications in small-scale devices such as MEMS/NEMS. The motivation for undertaking the dual modification approach comes from an earlier observation made on the significant influence of the surface characteristics of lotus leaf on its micro-friction behavior.     

Charge and Heat Transport in Polycrystalline Metallic Nanostructures

Metals are typically good conductors in which the abilities to transport charge and to transport heat can be related through the Wiedemann-Franz law. Here we report on an abnormal charge and heat transport in polycrystalline metallic nanostructures in which the ability to transport charge is weakened more obviously than that to transport heat. We attribute it to the influence of the internal grain boundaries and have formulated a novel relation to predict the thermal conductivity. The Wiedemann-Franz law is then modified to account for the influence of the grain boundaries on the charge and heat transport with the predictions now agreeing well with the measured results.     

Fragmentation of dodecanethiol molecules: application to self-assembled monolayer damage in atom lithography

Atom lithography commonly employs self-assem- bled monolayers (SAMs) of alkanethiols which act as resists to protect prepared surfaces. Metastable atomic species such as helium are used to damage the resist, enabling pattern transfer via mask lithography, followed by wet chemical etching. The damage mechanism is, however, not well understood. Here we report studies of fragmentation of dodecanethiol (DDT) molecules embedded in helium nano-droplets that have been irradiated by an electron beam. The results of the charge-transfer fragmentation process provide the first experimental data on the damage mechanisms that occur in the metastable helium/SAM interaction. Received: 20 September 1999 / Revised version: 6 December 1999 / Published online: 8 March 2000     

Cantilevered actuator using magnetostrictive thin film

This paper describes a cantilevered magnetic actuator driven by magnetostriction in a low magnetic field. The dimensions of the two layers actuator were 1×5 mm and amorphous FeSiB was used as the magnetostrictive material. Since the FeSiB has excellent soft magnetic characteristics, the actuator with FeSiB was able to work in magnetic field strength of less than 10 kA/m. The theoretical formulas for the amount of the displacement and the force of the actuator were obtained. The theoretical results agreed with the experimental one. According to the theoretical formula, the displacement was calculated with the parameter of the mechanical properties of the substrate. To obtain the large displacement, the actuator with Co substrate was designed based on the theoretical formula. The displacement of 153 μm was obtained using Cu substrate of 1.1 μm thickness in the magnetic field of 10 kA/m. © 2008 Elsevier B.V. All rights reserved     

Fabrication of doped nano‐electromechanical systems

We present a new generation of nano‐electromechanical systems (NEMS), which are realized by doping the semiconductor base material. In contrast to the traditional approach these doped NEMS (D‐NEMS) do not require a metallization layer. This makes them far lighter and hence increases resonance frequency and quality factor. Additionally, D‐NEMS can be tuned from the conductive state into an insulating one. This will enable a host of new device designs, like mechanically tunable pin‐junctions and nanomechanical single electron switches. We demonstrate D‐NEMS fabrication and operation from the intrinsic, to the light, and to the heavy regime of doping. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Etching of buried photoresist layers and its application to the formation of three-dimensional layered structures

The fabrication of three-dimensional layered structures with 180-nm-thick TaO_x top layers supported by 1.5-μm-thick Mo pillars formed on a glass substrate is presented. The photoresist used for planarization was successfully removed through the TaO_x layers using heat treatment at 270 °C with mixed vapors of ethyl alcohol and pure water at high pressure for 3 h. Vacancies underlying the TaO_x layers were consequently formed. The possibility of rapid and lateral crystallization of amorphous silicon films was demonstrated when the silicon films formed on the TaO_x overlaying the vacancy regions were irradiated using a frequency-doubled YAG laser at 250 mJ/cm². Energy sensors using Cr/Al metal wires, with a high sensitivity of 0.07 mW/cm², were also demonstrated using the present structure with vacancy regions for reduction of heat diffusion. Received: 22 January 2001 / Accepted: 24 January 2001 / Published online: 27 June 2001     

Elastic modulus and in-plane thermal diffusivity measurements in thin polyimide films using symmetry-selective real-time impulsive stimulated thermal scattering

We describe a technique for extending the utility of the real-time Impulsive Stimulated Thermal Scattering (ISTS) method for thin film characterization. Using weakly absorbed excitation pulses, we show how to selectively drive acoustic waveguide modes that are unobservable when strongly absorbed pulses are used. The ability to excite and monitor these modes is important because it allows for a significant increase in the experimental sensitivity to the film longitudinal velocity. This arrangement also greatly simplifies determination of the in-plane thermal diffusivity. The technique is illustrated through study of unsupported polyimide films with six different thicknesses.     

Study of nickel silicide formation on Si(1 1 0) substrate

Nickel silicide formation on Si(1 1 0) and Si(1 0 0) substrate was investigated in this paper. It is confirmed that nickel monosilicide (NiSi) starts to form after 450 °C annealing for Si(1 0 0) substrate, but a higher annealing temperature is required for NiSi formation on Si(1 1 0) substrate, which is demonstrated by X-ray diffraction (XRD) and Raman scattering spectroscopy. The higher formation temperature of NiSi is attributed to the larger Ni₂Si grain size formed on Si(1 1 0) substrate. Ni silicided Schottky contacts on both Si(1 0 0) and Si(1 1 0) substrates were also fabricated for electrical characteristics evaluation. It clearly reveals that the rectifying characteristics of NiSi/n-Si(1 1 0) Schottky contacts is inferior to that of NiSi/n-Si(1 0 0) Schottky contacts, which is attributed to a lower Schottky barrier height and a rougher contact interface. The formation kinetics for nickel silicide on Si(1 1 0) substrate is also discussed in this paper.     

Enhanced Photoluminescence of InGaN/GaN Green Light-Emitting Diodes Grown on Patterned Sapphire Substrate

Green InGaN/GaN based light-emitting diodes （LEDs） are fabricated both on planar and wet-etched patterned sapphire substrates by metalorganic vapour phase epitaxy （MOVPE）. Their photoluminescence （PL） properties of the two samples are studied. The results indicate that the PL integral intensity of the green LED on the patterned substrate is nearly two times of that on the planar one within the whole measured temperature range. The enhanced PL intensity in the green LED on the patterned substrate is shown completely contributed from the extraction efficiency, but not from the internal quantum efficiency. The conclusion is supported by temperature-dependent PL analysis on the two samples, and the mechanisms axe discussed.     

Improvement of the outcoupling efficiency of an organic light-emitting device by attaching microstructured films

In this paper, we present and analyse the optical characteristics, such as spectral shift, CIE coordinates, viewing angle dependence, luminous current efficiency and luminous power efficiency, of an organic light-emitting device (OLED) with a commercial diffuser film or a brightness-enhancement film (BEF) attached. Compared to a planar green OLED, the luminous current efficiencies of the OLED with an attached diffuser film or BEF increase by 29% and 23%, respectively. The overall luminous power efficiencies are enhanced by 28% and 7%. Compared to the planar green device, we observe blue shifts at different viewing angles when microstructured films are attached, which is the evidence that the waveguiding modes are being extracted. In our planar OLED, the peak wavelength blue shifts and the full width at the half maximum (FWHM) decrease with increasing viewing angles due to the microcavity effect. When the diffuser is attached, the spectral peak has a constant blue shift (6 nm) compared to that of the planar OLED. On the other hand, in the BEF case, the spectral shift depends on the viewing angle (2-12 nm blue shifts from 0 to 80°). This is due to the different operating principles (scattering and redirected light) of the diffuser and BEF. Since the transmittance spectra of both the diffuser film and the BEF are flat over the visible range, it is suitable for lighting applications by using white OLED. When attaching the films on a commercial white OLED, the luminous current efficiencies of the OLED with an attached diffuser film or BEF increase by 34% and 31%, respectively. The overall luminous power efficiencies are enhanced by 42% and 8%.     

High Speed and Ultra-Low-Power Phase Change Line Cell Memory Based on SiSb Thin Films with Nanoscale Gap of Electrodes Less Than 100nm

Si16Sbs4-based line cell phase change random access memory （PCRAM）, in which the Si16Sbs4 phase change line is contacted by TiN electrodes with a nanoscale gap, is fabricated by electron beam lithography. The lowest current and measured pulse width for RESET operation are 115 μA and 18 ns, respectively. The measured shortest pulse width for recrystallization is 110ns, with applied pulse amplitude of 1.5 V. SET and RESET currents for line cells with different line lengths are determined. Endurance of 106 cycles with a resistance ratio of above 800 has been achieved.     

An Array of One-Dimensional Porous Silicon Photonic Crystal Reflector Islands for a Far-Infrared Image Detector

With the aid of photolithography, an array of one-dimensional porous silicon photonic crystai reflector islands for a far infrared image detector ranging from 10 μm to 14 μm is successfully fabricated. Silicon nitride formed by low pressure chemical vapor deposition （LPCVD） was used as the masking layer for the island array formation. After etching, the microstructures were examined by a scanning electron microscope and the optical properties were studied by Fourier transform infrared spectroscopy, the result indicates that the multilayer structure could be obtained in the perpendicular direction via periodically alternative etching current in each pre-pattern. At the same time, the island array has a well-proportioned lateral etching effect, which is very useful for the thermal isolation in lateral orientation of the application in devices. It is concluded that regardless of the absorption of the deposition layer on the substrate, the localized photonic crystalline islands have higher reflectivity. The designed islands structure not only prevents the cracking of the porous silicon layers but is also useful for the application in the cold part for the sensor devices and the iliterconnection of each pixel.     

Squeezing Effect of a Nanomechanical Resonator Coupled to a Two-Level System: an Equilibrium Approach

The squeezing effect of a nanomechanical resonator coupled to a two-level system is studied by variational calculations based on both the displaced-squeezed-state （DSS） and the displaced-oscillator-state （DOS）. The stable region of the DSS ground state at both T = 0 and T ≠ 0 and the corresponding squeezing factor are calculated. It is found that when the resonator frequency lies in （kBT,△）, where A is the tunnelling splitting of the two-level-system in the presence of dissipation, tunnelling splitting of a DSS ground state decreases with the temperature, while tunnelling splittihg of a DOS ground state increases with the temperature in low temperature region. This opposite temperature dependence can help to distinguish between the DSS and DOS ground state in the experiment.     

Electromechanical Properties of Microcantilever Actuated by Enhanced Piezoelectric PZT Thick Film

Pb(Zr_0.53,Ti_0.47)O₃ (PZT) films with thicknesses of 0.8μm, 2μm and 4μm are prepared by a sol-gel method and their longitudinal piezoelectric coefficients are analysed. The results show that the PZT thick films, whose density is closer to bulk PZT, has the better crystallization, with d₃₃ and density much larger than those of PZT thin films. A piezoelectric microcantilever actuated by a 4-μm-thick PZT film is fabricated and its displacement is measured in different frequencies and voltages. The displacement increases linearly with the increasing bias, and the maximum displacement of 0.544μm is observed at 30kHz for 5V bias. The resonant frequency obtained in the experiment matches quite well with the theoretical result, and it is shown that the resonant frequency of PZT microcantilever could be controlled and predicated.     

Efficiency improvement and spectral shift of an organic light-emitting device with a square-based microlens array

In this paper, we present and analyze the influences of the fill factor and the height ratio of square-based microlens arrays on the optical characteristics of an organic light-emitting device (OLED). These properties include spectral shift, CIE coordinates, viewing-angle dependence, luminous current efficiency and luminous power efficiency. Both the luminous current efficiency and luminous power efficiency of the OLED were found to increase linearly with increasing the fill factor of microlenses. It is also found that the full width at half maximum (FWHM) of the OLED spectra and CIE coordinate decreased linearly with increasing the fill factor of the microlenses. Besides, the efficiency improvement of the OLED increased with the height ratio of attached microlenses. Compared to the OLED, the luminous current efficiency and luminous power efficiency of the device can be enhanced by 42% and 47%, respectively, by attaching the microlens array having a fill factor of 90% and a height ratio of 0.57. We also observed blue shifts at different viewing angles when microlens arrays were attached to the OLED, which is the evidence that the waveguiding modes are being extracted. In our planar OLED, the peak wavelength blue shifted and the FWHM decreased with increasing the viewing angles due to the microcavity effect.     

Resonant-ultrasound spectroscopy for studying annealing effect on elastic constant of thin film

In this paper, we study the elastic property of thin films using resonant-ultrasound spectroscopy (RUS). RUS determines the elastic constants of a solid from its resonance frequencies of free vibration. There were two problems to be solved for applying RUS to thin films: accurate measurement of the resonance frequencies and mode identification of each resonance frequency. We solve these problems using the tripod needle transducers and the laser-Doppler interferometry (LDI). In this paper, we describe the RUS/LDI measurement setup we developed, and show the relationship between the elastic constant and annealing temperature for Cu thin films. Then, we discuss the effects of recrystallization and recovery on the elastic constant referring the X-ray diffraction measurement.     

Pulsed laser deposition and in situ diagnostics of the process applied to shape-memory alloys

NiTi films deposited by pulsed laser ablation on Si/SiO₂ are shown to exhibit structural and functional properties related to the shape-memory effect. Film characterization suggests that relevant temperatures for the solid-to-solid transformation responsible for the shape memory are in substantial agreement with those of the bulk target material, demonstrating a good congruency of the deposition process. Besides the technological interest for this class of thin films, our findings point out the suitability of laser ablation for metal alloy deposition. An investigation based on in situ ion-mass spectroscopy and covariance mapping analysis allows us to determine the main vapor-phase processes leading to the formation of stoichiometric clusters expected to play a relevant role in assisting the growth of NiTi thin films. Received: 6 August 2001 / Accepted: 11 April 2002 / Published online: 4 November 2002 RID="*" ID="*"Corresponding author. Fax: +39-50/2214-333, E-mail: fuso@df.unipi.it     

Aryltriazene photopolymer thin films as sacrificial release layers for laser-assisted forward transfer systems: study of photoablative decomposition and transfer behavior

Thin films of a tailor-made photodecomposible aryltriazene polymer were applied in a modified laser-induced forward transfer (LIFT) process as sacrificial release layers. The photopolymer film acts as an intermediate energy-absorbing dynamic release layer (DRL) that decomposes efficiently into small volatile fragments upon UV laser irradiation. A fast-expanding pressure jet is generated which is used to propel an overlying transfer material from the source target onto a receiver. This DRL-assisted laser direct-write process allows the precise deposition of intact material pixels with micrometer resolution and by single laser pulses. Triazene-based photopolymer DRL donor systems were studied to derive optimum conditions for film thickness and laser fluences necessary for a defined transfer process at the emission wavelength of a XeCl excimer laser (308 nm). Photoablation, surface detachment, delamination and transfer behavior of aryltriazene polymer films with a thickness from 25 nm to ∼400 nm were investigated in order to improve the process control parameters for the fabrication of functional thin-film devices of microdeposited heat- and UV-sensitive materials.     

Short pulse laser microforming of thin metal sheets for MEMS manufacturing

Continuous and long-pulse lasers have been used for the forming of metal sheets for macroscopic mechanical applications. However, for the manufacturing of micro-electro-mechanical systems (MEMS), the applicability of such type of lasers is limited by the long-relaxation-time of the thermal fields responsible for the forming phenomena. As a consequence of such slow relaxation, the final sheet deformation state is attained only after a certain time, what makes the generated internal residual stress fields more dependent on ambient conditions and might make difficult the subsequent assembly process for MEMS manufacturing from the point of view of residual stresses due to adjustment.The use of ns laser pulses provides a suitable parameter matching for the laser forming of an important range of sheet components used in MEMS that, preserving the short interaction time scale required for the predominantly mechanic (shock) induction of deformation residual stresses, allows for the successful processing of components in a medium range of miniaturization but particularly important according to its frequent use in such systems.In the present paper, a discussion is presented on the specific features of laser interaction in the timescale and intensity range needed for thin sheet microforming with ns-pulse lasers along with relevant modelling and experimental results and a primary delimitation of the parametric space of the considered class of lasers for the referred processes.     

Demonstration of Four Fundamental Operations of Liquid Droplets for Digital Microfluidic Systems Based on an Electrowetting-on-Dielectric Actuator

An electrowetting-on-dielectric actuator is developed, in which the liquid is sandwiched between top and bottom plates. For the bottom plate, silicon wafer is used as the substrate, the heavily phosphorus-doped polysilicon film is deposited by low pressure chemical vapour deposition as the microelectrode array, and thermally grown SiO2 film as the dielectric layer. The top p/ate is a glass plate covered with transparent and conductive indium tin oxide as the ground electrode. In addition, a Teflon AF1600 film is spun on the surface of both the plates as the hydrophobic layer. The experimental results show that when the gap height between two plates is 133μm, a prototype of the device is capable of creating, transporting, merging and dividing droplets of deionized water in an air environment with a 70V at lOHz voltage pulse. This is also established by simulations using the computational fluidic software of CFD-ACE＋.