Ion source with a cold magnetron cathode and magnetic plasma compression

The operating principles, design, and characteristics of an ion source with a cold magnetron cathode and magnetic plasma compression are described. The source is intended for the injector of a linear proton accelerator.     

Optimisation of cold cathode ion source model

This paper represents the results of the optimisation of cold cathode ion source model with 5 cm extraction aperture diameter. In this model, the glow discharge is utilised for generation of electrons in the cathode of the ion source. The various models with different lengths of cathode and anode are tested. The shortest model with 4.5 cm in length of cathode and anode each shows satisfactory operation and can be used in cases when the high values of extracted ion current are not required. The best model from the point of view of ion beam current value and efficiency of the discharge is the model with cathode length of 7 cm and anode length of 7 cm. In this case, the obtained maximum ion beam current is 110 mA when the discharge current is 1000 mA. In case when moderate values of extracted ion beam current are necessary, it is possible to operate the ion source even without the anode magnetic system.     

Characteristics of an ion source with a plasma cathode and a multipole magnetic system for confining fast electrons

Parameters and ion-emission characteristics of the plasma generated in the anode stage of an ion source with a hollow glow-discharge plasma cathode are studied. To decrease the minimum operating gas pressure to 5×10³ Pa, a multipole magnetic system was installed on the surface of the hollow cathode and the peripheral magnetic field was enhanced in the anode stage of the source. The effect of the gas pressure, the plasma-cathode current, and the voltage between the electrodes of the anode stage on the value of the ion current extracted from the plasma is investigated. It is found that the size of the exit aperture of the hollow cathode substantially affects the efficiency of ion extraction. The potential (1–5 V) and the electron temperature (1–8 eV) of the anode-stage plasma are measured by the probe method. The conditions are determined that ensure the maximum ion-emission current from the plasma at low gas pressures.     

一种新型微空阴极结构的大气压射频冷等离子体源

介绍微空阴极的结构和物理机理，着重介绍一种新型大气压下射频激励的大面积冷等离子体源——融合空心阴极(fused hollow cathodes，FHC).结合应用和与之有关的研究，简单介绍空心阴极的放电特性，以及影响其放电特性的因素，如阴极材料、气体种类、频率、气体流速、气压、阴极内径等.另外提到了其他两种相关的微空阴极系统. 关键词： 微空阴极 大气压 冷等离子体 射频     

宽束冷阴极离子源分时中和技术的研究

离子束辅助镀膜沉积过程中,绝缘薄膜表面的电荷积累效应严重影响了薄膜质量。通过对宽束冷阴极离子源引出栅部分的改进,采用分时引出电子和离子方法,使正负电荷中和,以消除薄膜表面的放电现象,并对引出电子束的束流密度、能量、发射角等参数进行了测试。实验结果表明：在引出电压为600V时,电子的平均能量为100eV左右;引出电子束的发射角可以达到±40°,在±15°范围内的束流密度波动小于±5%。引出电子的束流密度较同参数下的离子束流密度小,通过调节脉冲电源的占空比,可达到很好的中和效果。     

Operational characteristics of a plasma cathode with a grid stabilization in a two-stage ion source

The discharge characteristics and the parameters of the cathode plasma in a two-stage ion source with a grid plasma cathode and a magnetic trap in the anode region are investigated. It is shown that an increase in the gas pressure and the accompanying increase in the reverse ion current in the bipolar diode between the cathode and anode plasmas lead to an increase in the cathode plasma potential and a transition of the cathode into the regime of electron emission from the open plasma boundary. The dependence of the ion current extracted from the anode plasma on the area of the exit aperture of the hollow cathode and the mesh size of the grid plasma cathode is explained. The conditions at which the ion emission current from the anode plasma is maximum are determined. The potential difference at the bipolar diode is measured by using the probe method. It is shown that, when the gas pressures reaches a critical value determined by the mesh size of the grid plasma cathode, the discharge passes into a contracted operating mode, in which the ion current extracted from the anode plasma decreases severalfold.     

强流磁约束金属离子注入源

设计和制造了适合工业应用的强流金属离子源。离子源的电弧阴、阳电极之间和放电室壁采用永磁体阵列形成导流、屏蔽磁场,改进了电弧的放电特性和提高等离子体密度。离子注入源在加速电压为30kV、50 Hz 条件时,平均束流流强约为30mA,调试结果表明附加磁场提高了离子源性能。     

High-voltage pulsed discharge in an electron source with a plasma cathode

The nature of and mechanism for producing a high-voltage discharge in an electron source with a plasma cathode are investigated. The possibility of generating pulsed electron currents with an amplitude of 10³–10⁴ A and a length of 10^–6 sec is considered.Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 10, pp. 117–121, October, 1973.The authors thank B. M. Koval'chuk for help in developing the experimental arrangement and G. A. Mesyates for constant attention to the work and discussion of the results.     

Joint functioning of a magnetron sputtering system and an end-hall ion source

The features of joint operation of a magnetron sputtering system (MSS) and an end-Hall ion source (EHIS) are investigated. It is noted that the initiation of the magnetron discharge leads to partial or complete neutralization of the ion beam generated by the EHIS; in other words, in some regimes of the MSS, the ion source operates in the filament-free regime. In such a case, the magnetron discharge is the source of electrons required for sustaining the discharge and for compensating the ion beam from the EHIS. The dependences of the discharge characteristics of the EHIS and MSS are established when a filament neutralizer and MSS discharge are used for compensating the EHIS ion beam. The balance of currents in the ion source-magnetron sputtering system is considered by analyzing the joint functioning of the MSS and EHIS. It is shown that the maximal discharge current from the ion source for which the charge compensation condition is preserved depends on the unbalance and the magnetron discharge current.     

磁约束磁控溅射源的磁场设计

磁控溅射镀膜机中的磁场分布对靶材利用率有着重要影响。为了提高磁控溅射源的靶材利用率,设计组抛弃了传统的跑道环形式的磁场设计理念,而是将永磁体或电磁体分置溅射靶的两侧,使其在溅射靶表面上方产生磁约束(磁镜)磁场。本设计使用有限元分析方法对磁场进行仿真计算,通过模拟磁场计算结果和实测结果的比较,验证有限元方法的可靠性。Ansys有限元分析软件对磁场分布进行仿真模拟,大大简化了计算并缩短了设计周期。通过实验验证,磁约束磁场大大提高了靶材的利用率。     

Generation of high-current electron beams by a hollow cathode with a ferroelectric plasma source

This paper presents results and analysis of an experimental investigation of the operation of a hollow cathode (HC) with an incorporated ferroelectric plasma source (FPS). It was shown that the use of FPS based on a BaTi solid solution allows one to ignite and to sustain a 10²-10³ A HC discharge with duration of 10^-3-10^-5 s at background pressure of 5 x 10^-3 Pa while keeping the HC design with small dimensions. It was found that the development of the HC discharge is accompanied by formation at the surface of the FPS of dense plasma which serves as a powerful (hundreds of kW) pulsed source of current carrying electrons. Parameters of the HC plasma (radial distribution of the plasma density and temperature and plasma potential) for different discharge current amplitudes and two types of FPS are presented. Application of the FPS as an electron source in a diode under an accelerating pulse 300 kV and pulse duration 400 ns showed that the latter operates in a plasma pre-filled mode with a current amplitude up to 1.6 kA. Parameters of the diode and electron beam for different experimental conditions are presented and discussed.Received: 10 April 2003, Published online: 12 August 2003PACS: 52.50.Dg Plasma sources - 29.25.Bx Electron sources - 52.25.Tx Emission, absorption, and scattering of particles     

Construction and study of a magnetoactive plasma ion source

The interaction of intense electron beams with plasmas in a nonuniform magnetic field is studied for the purpose of obtaining a magnetoactive plasma ion source. The resulting experimental data are used to trace the dynamics of the changes in the basic parameters of the source, both during the stage where it interacts with the beam and in the cooling stage. It is found that the charged particles are contained for a long time and that the efficiency of energy transfer from the beam to the source is high. This source is intended to be used for shaping and accelerating multiampere ion beams. Zh. Tekh. Fiz. 69, 44–47 (April 1999)     

蓄电池供电的级联型爆磁压缩发生器实验研究

 一种由蓄电池作为初始能源的紧凑型螺线管爆磁压缩发生器由两级构成,其中第一级作为能量放大器,第二级通过磁通耦合对第一级输出的脉冲进行陡化以驱动较大的电感负载。初始能源由蓄电池、高压逆变器及储能电容器（220μF, 6 kV）构成。在爆磁压缩发生器运行以前,用5 min给储能电容器充上6 kV的电压。实验证明4 Ah的铅酸蓄电池可以通过高压逆变系统给220 μF的电容器充电超过五次以上,此时电池的电压仍然高于11 V。由此可见,以蓄电池加高压逆变器和储能电容器作为其初始能源,能够满足体积小、稳定提供较大的初始能量的能力。同时利用级联型爆磁压缩发生器,能够在较小的体积和重量的情况下驱动较大的电感负载(4μH),实现输出电流120kA,电流的上升时间为15 μs的预期目标。     

蓄电池供电的级联型爆磁压缩发生器实验研究

一种由蓄电池作为初始能源的紧凑型螺线管爆磁压缩发生器由两级构成,其中第一级作为能量放大器,第二级通过磁通耦合对第一级输出的脉冲进行陡化以驱动较大的电感负载。初始能源由蓄电池、高压逆变器及储能电容器（220μF, 6 kV）构成。在爆磁压缩发生器运行以前,用5 min给储能电容器充上6 kV的电压。实验证明4 Ah的铅酸蓄电池可以通过高压逆变系统给220 μF的电容器充电超过五次以上,此时电池的电压仍然高于11 V。由此可见,以蓄电池加高压逆变器和储能电容器作为其初始能源,能够满足体积小、稳定提供较大的初始能量的能力。同时利用级联型爆磁压缩发生器,能够在较小的体积和重量的情况下驱动较大的电感负载(4μH),实现输出电流120kA,电流的上升时间为15 μs的预期目标。     

Interaction of cathode plasma with the cathode surface in an electron source with explosive electron emission

The interaction of the plasma formed at emission centers of an electron source using explosive electron emission with the cathode surface is studied. It is found that the plasma flux does not flow around obstacles located in its path and is effectively deionized upon incidence on the wall.Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 11, pp. 26–29, November, 1981.     

Design of triode extraction system for a dual hollow cathode ion source

A triode extraction system is designed for a dual hollow cathode ion source being developed at the Institute of Heavy Ion Physics,Peking University.Basic parameters of the plasma are selected after examining the operation principle of the ion source,then the triode extraction system is designed and optimized by using software PBGUNS (for Particle Beam GUN Simulations).The physical design of the system is given in this paper.     

Design of triode extraction system for a dual hollow cathode ion source

A triode extraction system is designed for a dual hollow cathode ion source being developed at the Institute of Heavy Ion Physics, Peking University. Basic parameters of the plasma are selected after examining the operation principle of the ion source, then the triode extraction system is designed and optimized by using software PBGUNS (for Particle Beam GUN Simulations). The physical design of the system is given in this paper.     

Spectroscopic study of a brush cathode plasma in a magnetic field

The brush cathode helium discharge in the magnetic field has been operated stably at discharge currents larger than those without magnetic field. The diameter of the plasma column has been determined by the configuration of the magnetic field. The measurements of the spectral intensities of the recombination continuum followed by the 2³S-n³P series reveals that the electron density is 1·8 × 10¹³ cm^-3 and the electron temperature is 0·17 eV at a discharge current of 500 mA and a pressure of 0·9 torr for a magnetic flux density of 1·3 kG. The principal quantum number for line merging is 20.