Combining TEM and APFIM techniques to study the microstructure of steels and hardmetals

This paper describes the benefits of combining transmission electron microscopy (TEM) and atom probe field ion microscopy (APFIM) techniques to study the microstructure of steels and hardmetals. In addition to energy dispersive X-ray spectrometry (EDS), recent experience of electron energy loss spectroscopy (EELS) and energy filtered TEM (EFTEM) is treated. Topics covered are: phase composition (APFIM, TEM/EDS and TEM/EELS); precipitate size distribution (EFTEM); precipitate volume fraction (APFIM); and compositional gradients (APFIM, EFTEM and SEM). Examples given include precipitate composition and size distribution in creep resistant 9–12% chromium steels, phase distribution and composition in nitrogen containing hardmetals (cermets) after sintering and heat treatment, and boron grain boundary segregation in austenitic stainless steels.     

Measurement of γ′ precipitates in a nickel-based superalloy using energy-filtered transmission electron microscopy coupled with automated segmenting techniques

Precipitates of the ordered L1₂ γ′ phase (dispersed in the face-centered cubic or FCC γ matrix) were imaged in Rene 88 DT, a commercial multicomponent Ni-based superalloy, using energy-filtered transmission electron microscopy (EFTEM). Imaging was performed using the Cr, Co, Ni, Ti and Al elemental L-absorption edges in the energy loss spectrum. Manual and automated segmentation procedures were utilized for identification of precipitate boundaries and measurement of precipitate sizes. The automated region growing technique for precipitate identification in images was determined to measure accurately precipitate diameters. In addition, the region growing technique provided a repeatable method for optimizing segmentation techniques for varying EFTEM conditions.     

Energy-filtered TEM imaging and EELS study of ODS particles and argon-filled cavities in ferritic-martensitic steels

Oxide-dispersion-strengthened (ODS) ferritic-martensitic steels with yttrium oxide (Y(2)O(3)) have been produced by mechanical alloying and hot isostatic pressing for use as advanced material in fusion power reactors. Argon gas, usually widely used as inert gas during mechanical alloying, was surprisingly detected in the nanodispersion-strengthened materials. Energy-filtered transmission electron microscopy (EFTEM) and electron energy loss spectroscopy (EELS) led to the following results: (i) chemical composition of ODS particles, (ii) voids with typical diameters of 1-6 nm are formed in the matrix, (iii) these voids are filled with Ar gas, and (iv) the high-density nanosized ODS particles serve as trapping centers for the Ar bubbles. The Ar L(3,2) energy loss edge at 245 eV as well as the absorption features of the ODS particle elements were identified in the EELS spectrum. The energy resolution in the EEL spectrum of about 1.0 eV allows to identify the electronic structure of the ODS particles.     

Size and density control of silicon oxide nanowires by rapid thermal annealing and their growth mechanism

In this work, we demonstrate a fast approach to grow SiO₂ nanowires by rapid thermal annealing (RTA). The material characteristics of SiO₂ nanowires are investigated by field emission scanning electron microscopy, high-resolution transmission electron microscopy (HRTEM), high-angle annular dark-field (HAADF) imaging, electron energy loss spectroscopy (EELS), and energy-filtered TEM (EFTEM). The HAADF images show that the wire tip is predominantly composed of Pt with brighter contrast, while the elemental mappings in EFTEM and EELS spectra reveal that the wire consists of Si and O elements. The SiO₂ nanowires are amorphous with featureless contrast in HRTEM images after RTA at 900°C. Furthermore, the nanowire length and diameter are found to be dependent on the initial Pt film thickness. It is suggested that a high SiO₂ growth rate of >1 μm/min can be achieved by RTA, showing a promising way to enable large-area fabrication of nanowires.     

Practical spatial resolution of electron energy loss spectroscopy in aberration corrected scanning transmission electron microscopy

The resolution of electron energy loss spectroscopy (EELS) is limited by delocalization of inelastic electron scattering rather than probe size in an aberration corrected scanning transmission electron microscope (STEM). In this study, we present an experimental quantification of EELS spatial resolution using chemically modulated 2×(LaMnO(3))/2×(SrTiO(3)) and 2×(SrVO(3))/2×(SrTiO(3)) superlattices by measuring the full width at half maxima (FWHM) of integrated Ti M(2,3), Ti L(2,3), V L(2,3), Mn L(2,3), La N(4,5), La N(2,3) La M(4,5) and Sr L(3) edges over the superlattices. The EELS signals recorded using large collection angles are peaked at atomic columns. The FWHM of the EELS profile, obtained by curve-fitting, reveals a systematic trend with the energy loss for the Ti, V, and Mn edges. However, the experimental FWHM of the Sr and La edges deviates significantly from the observed experimental tendency.     

Inelastic electron scattering observation using energy filtered transmission electron microscopy for silicon -- germanium nanostructures imaging

This paper presents a new technique using energy filtered TEM (EFTEM) for inelastic electron scattering contrast imaging of Germanium distribution in Si-SiGe nanostructures. Comparing electron energy loss spectra (EELS) obtained in both SiGe and Si single crystals, we found a spectrum area strongly sensitive to the presence of Ge in the range [50-100 eV]. In this energy loss window, EELS spectrum shows a smooth steeply shaped background strongly depending on Ge concentration. Germanium mapping inside SiGe can thus be performed through imaging of the EELS background slope variation, obtained by processing the ratio of two energy filtered TEM images, respectively, acquired at 90 and 60 eV. This technique gives contrasted images strongly similar to those obtained using STEM Z-contrast, but presenting some advantages: elastic interaction (diffraction) is eliminated, and contrast is insensitive to polycrystalline grains orientation or specimen thickness. Moreover, since the extracted signal is a spectral signature (inelastic energy loss) we demonstrate that it can be used for observation and quantification of Ge concentration depth profile of SiGe buried layers.     

Cr掺杂锐钛矿型TiO2（001）薄膜中Cr原子的直接观测

Imaging the doping elements is critical for understanding the photocatalytic activity of doped TiO₂ thin film. But it is still a challenge to characterize the interactions between the dopants and the TiO₂ lattice at the atomic level. Here, we use high angle annular dark-field/annular bright-field scanning transmission electron microscope (HAADF/ABF-STEM) combined with electron energy loss spectroscopy (EELS) to directly image the individual Cr atoms doped in anatase TiO₂(001) thin film from [100] direction. The Cr dopants, which are clearly imaged through the atomic-resolution EELS mappings while can not be seen by HADDF/ABF-STEM, occupy both the substitutional sites of Ti atoms and the interstitial sites of TiO₂ matrix. Most of them preferentially locate at the substitutional sites of Ti atoms. These results provide the direct evidence for the doping structure of Cr-doped A-TiO₂ thin film at the atomic level and also prove the EELS mapping is an excellent technique for characterizing the doped materials.     

New techniques in electron energy-loss spectroscopy and energy-filtered imaging

This article is a survey of hardware and software advances that promise to increase the power and sensitivity of electron energy-loss spectroscopy (EELS) and energy-filtered imaging (EFTEM) in a transmission electron microscope. Recent developments include electron-gun monochromators, lens-aberration correctors, and software for spectral sharpening, spectral processing and interpretation of fine structure. Future improvements could include the deployment of new electron sources. The expected enhancements in energy and spatial resolution are compared with fundamental limitations that arise from the natural widths of spectral peaks, the delocalization of inelastic scattering and the problem of electron-irradiation damage.     

Development and characterization of laser surface cladding (Ti,W)C reinforced Ni–30Cu alloy composite coating on copper

To improve the wear resistance of copper components, laser surface cladding (LSC) was applied to deposit (Ti,W)C reinforced Ni–30Cu alloy composite coating on copper using a cladding interlayer of Ni–30Cu alloy by Nd:YAG laser. The microstructure and phases of the composite coating were investigated by scanning electron microscopy (SEM), X-ray diffraction (XRD) and X-ray energy dispersive microanalysis (EDX). Microhardness tester and pin-on-disc wear tester were employed to evaluate the hardness and dry-sliding wear resistance. The results show that crack-free composite coating with metallurgical bonding to the copper substrate is obtained. Phases identified in the (Ti,W)C-reinforced Ni–30Cu alloy composite layer are composed of TiWC₂ reinforcements and (Ni,Cu) solid solution. TiWC₂ reinforcements are distributed uniformly in the (Ni,Cu) solid solution matrix with dendritic morphology in the upper region and with particles in the mid-lower region. The microhardness and wear properties of the composite coating are improved significantly in comparison to the as-received copper substrate due to the addition of 50 wt% (Ti,W)C multicarbides.     

Surface vibrational excitations of O in the p(2 × 2)O and c(2 × 2)O structures on Ni(100)

Surface vibrational excitations of O chemisorbed on the clean Ni(100) surface have been investigated by high-resolution electron energy loss spectroscopy (EELS). The observed vibrational losses in the Ni(100) p(2 × 2)O and Ni(100) c(2 × 2)O surface structures are 53.0 ± 0.5 and 39.5 ± 0.5 meV respectively. The unexpectedly large change in the vibrational excitation energy is attributed to a low potential barrier for oxygen dissolution into the Ni substrate.     

Width determination of SiO2-films in Si-based devices using low-loss EFTEM: image contrast as a function of sample thickness

Energy filtering transmission electron microscopy (EFTEM) has become one of the most efficient tools for specimen characterization at nanometer length scales. EFTEM imaging is most often carried out in the core-loss region but image intensity becomes more and more a limiting factor with decreasing feature size. Alternatively, it is possible to record EFTEM images in the low-loss region, where intensities are essentially higher and where in many cases the images contain material specific contrasts. In this paper we investigate the influence of the important parameters on the material contrast between silicon and silicon dioxide, e.g. specimen thickness, specimen orientation, energy-loss and energy selecting slit width. We show that sample thickness plays an important role and present two methods to calculate material contrast as a function of energy-loss and sample thicknesses. The first method uses spectra taken from both materials at different sample thickness by electron energy-loss spectroscopy, the second calculates contrast directly from a series of energy filtered images. From the results we determine the ideal acquisition parameters for the Si/SiO(2) system and demonstrate imaging at sufficient resolution below 2nm with a test sample of thin SiO(2) layers on Si.     

A combined SNMS and EFTEM/EELS study on focused ion beam prepared vanadium nitride thin films

We investigated the diffusion profiles and core-loss fine-structures (ELNES) of thin vanadium nitride films by electron energy-loss spectroscopy (EELS) and energy filtering transmission electron microscopy (EFTEM). The nitride layers have been produced by rapid thermal processing in a NH₃ or N₂ atmosphere and have then been cross-sectioned with a focused ion beam instrument (FIB) under mild milling conditions to maintain crystallography. For the high-resolution electron energy-loss spectroscopy studies (HREELS), a recently developed TEM gun monochromator, implemented into a 200 kV field emission gun column was used in combination with a new post-column spectrometer. It was found that, dependent on substrate and atmosphere, layers with different vanadium and nitrogen content were formed, showing distinct differences in their ELNES. With an energy resolution at the 0.2 eV level and a TEM beam spot size of approximately 2 nm these layers could be unambiguously identified when compared to theoretical ELNES simulations from the literature.     

Atomic-resolution electron energy loss spectroscopy imaging in aberration corrected scanning transmission electron microscopy

The "delocalization" of inelastic scattering is an important issue for the ultimate spatial resolution of innershell spectroscopy in the electron microscope. It is demonstrated in a nonlocal model for electron energy loss spectroscopy (EELS) that delocalization of scanning transmission electron microscopy (STEM) images for single, isolated atoms is primarily determined by the width of the probe, even for light atoms. We present experimental data and theoretical simulations for Ti L-shell EELS in a [100] SrTiO3 crystal showing that, in this case, delocalization is not significantly increased by dynamical propagation. Issues relating to the use of aberration correctors in the STEM geometry are discussed.     

Transmission electron microscopy and X-ray diffraction study of microstructural evolution in magnetoresistive Cu–Fe–Ni ribbons

The evolution of the microstructure of a granular Cu₈₀Fe₁₀Ni₁₀ (at%) melt-spun ribbon is studied by transmission electron microscopy (TEM), energy-filtered transmission electron microscopy (EFTEM) and X-ray diffraction. This system is interesting as large giant magnetoresistance (GMR) values have been measured for this composition. We have shown the presence of two face-centred cubic phases, an (Fe,Ni)-rich phase and a Cu-rich phase. The lattice parameters of these two phases are close and no diffraction or elastic contrast is involved in displaying the two phases in TEM bright-field mode. With EFTEM imaging, we have shown the presence of a fine-scale (Fe,Ni)-rich precipitation inside the Cu-rich fcc matrix. The precipitates are 2–4 nm in the as-spun state and 4–6 nm after annealing for 2 h at 400°C. The lattice parameter of the Cu-rich phase in the as-spun sample is 0.3608 nm and 0.3610 nm for the (Fe,Ni)-rich phase. After a 24-h annealing treatment at 600°C, the mean diameter of the particle is 20 nm and the lattice parameter of the (Fe,Ni)-rich phase has decreased to 0.3600 nm, while that of the Cu-rich phase has increased to 0.3613 nm, which is consistent with a segregation of Fe and Ni in the precipitates. The composition and volume fraction of the two phases measured for this annealed sample are in good agreement with the Thermocalc® predictions.     

A quantitative analysis of a multi-phase polycrystalline cubic boron nitride tool material using DualEELS

This paper presents a quantitative analysis of a polycrystalline cubic boron nitride tool material by electron energy-loss spectroscopy spectrum imaging acquired in dual range mode. Having both the low-loss and core-loss regions acquired nearly simultaneously provides the advantage of accurate corrections for thickness effects and thus the possibility to perform quantification calculations. This has resulted in extracted bonding maps with areal (atoms/nm(2)) or volumetric (atoms/nm(3)) densities. Spectroscopic signatures in the low-loss and core-loss energy ranges, of the elements (Al, B, C, N, Ti and O) present in the existing phases, were studied and used when extracting the element specific bonding maps by the multiple linear least squares fitting procedure. Variations of elemental concentrations across the investigated area were determined, despite of phase overlap in the beam direction or energy overlaps in the EELS spectrum. Moreover, the surface oxidation of Ti(C,N) and AlN as well as the amorphisation of α-Al(2)O(3) is discussed.     

Electron-energy-loss and X-ray photoelectron spectra. Part 1. Electronic structure of tetraphenylporphyrin and its nickel derivative

Specific information on the energy level diagram and on the energy forbidden gap of tetraphenylporphyrin and its Ni derivative has been obtained by means of electron energy-loss spectroscopy (EELS) and X-ray photoelectron spectroscopy techniques. Comparison of the free ligand and its metal derivative emphasizes the importance of the metal 3d levels in the conduction processes. The interband and plasmon transition present in the EELS spectra of these species are compared with the theoretically calculated energy level diagram and experimental data.     

A vibrational study of ammonia chemisorbed on Ni(110) and Ni(111): whither goest the metal-nitrogen stretching mode on FCC (111) surfaces?

The adsorption of ammonia on the Ni(110) and Ni(111) surfaces has been studied with high resolution (≤ 65 cm_?1) electron energy loss spectroscopy (EELS) combined with thermal desorption spectroscopy. The EELS spectra of the initial chemisorbed layer or α state on each surface are very different. Ammonia chemisorbed on the Ni(110) surface exhibits a strong Ni-N stretching mode at 570 cm^?1 which is absent on the Ni(111) surface. The Ammonia adsorption site appears to be different on the Ni(110) and Ni(111) surfaces. We suggest that the absence of the M-N stretching mode on the Ni(111) surface is a general characteristic of the ammonia adsorption site on the (111) surfaces of fcc Group VIII metals.     

Unraveling the symmetry of the hole states near the Fermi level in the MgB2 superconductor

We use x-ray absorption spectroscopy (XAS) and electron energy loss spectroscopy (EELS) to study the fine structure at the K edge of boron in MgB(2). We observe in XAS a peak of width 0.7 eV at the edge threshold, signaling a narrow energy region with empty boron p states near the Fermi level. The changes in the near edge structure observed in EELS with direction of the momentum transfer imply that these states have p(x)p(y) symmetry. Our observations are consistent with electronic structure calculations indicating a narrow energy window of empty p(x)p(y) states that falls to zero at 0.8 eV above the Fermi level. The disappearance of the p(x)p(y) feature in EELS at grain boundaries suggests that this signature may become powerful in probing superconductivity at nanoscale.     

Experimental and theoretical determination of the low-loss electron energy loss spectroscopy of LiMn2O4

The dielectric properties of cubic spinel-type LiMn₂O₄, used as cathode material in lithium ion secondary batteries, are studied by analyzing the low-loss region of the electron energy loss spectroscopy (EELS) spectrum in a transmission electron microscope. A comparison of experimental EELS spectra and ab initio density-functional theory calculations (WIEN2k code) within the generalized gradient approximation (GGA) is presented. The origins of interband transitions are identified in the electronic band structure, by calculating the partial imaginary part of the dielectric function and the partial density of states of Li, Mn and O. Good agreement with experimental spectra is observed which allowed interpreting main features of the EELS spectrum.     

Microscopic analysis of the characteristic energy loss spectra of 3d-and 4d-transition metal carbides and nitrides

Microscopic studies of the electron-energy-loss-spectra (EELS) of the nitrides and carbides of the transition metals Ti, V, Zr, Nb in the energy range to about 35 eV have been done using the linear-muffin-tin-orbital (LMTO) method for solving the band structure problem. Special attention has been paid to the low energy region where for some of these compounds there is an interesting feature in the EELS. Good agreement between the calculations and experiment was obtained. The similarities and differences of these compounds are discussed in terms of their electronic structure.