平面磁控阴极用于PEPC等离子体放电实验研究

 平面磁控阴极用于大面积等离子体放电具有大幅降低放电电压和放电气压的优点,是PEPC首选的放电途径。通过对不同尺寸、不同磁场强度和不同气压状态下放电实验研究表明：在较宽的磁场强度范围内都可实现全口径的均匀等离子体放电,电极几何尺寸的小量变化对放电均匀性的影响不大。给出了满足300mm×300mm放电腔的放电参数。     

双频容性耦合等离子体密度径向均匀性研究

利用自主研制的全悬浮双探针, 对影响双频容性耦合等离子体径向均匀性的因素进行了研究. 发现低频功率、放电气压和放电间距对径向均匀性有明显影响. 合适的低频功率、放电气压及较大的极板间距可以得到更均匀的等离子体. 采用与实验相同的放电参数, 利用改进的二维流体模型进行理论模拟, 得到了不同极板间距下径向离子密度分布, 并和实验测量结果进行了比较, 两者的变化趋势基本符合. 关键词： 双频容性耦合等离子体 径向均匀性 全悬浮双探针 二维流体模型     

电极构形对形成大面积放电均匀性影响

 设计并制作了空心阴极、钮扣阴极、针阴极和条形阴极，利用CCD照相，在5cm×5cm口径范围内，分别对四种阴极放电的空间均匀性进行了研究。实验表明，在预电离电压800V，主放电电压3kV和气体气压约30Pa的条件下，利用空心阴极放电，能够获得空间较为均匀的放电等离子体。放电等离子体可以用作普克尔盒电光开关的等离子体电极。     

30cm口径离子推力器磁场设计

为了对30cm口径离子推力器的磁场设计提出合理建议,研究了四极磁场结构下,不同尺寸的磁极宽度和磁极间距对磁极表面磁场强度和放电室电子约束长度的影响,并利用Maxwell-3D磁场分析软件得到柱段和锥段永磁体分别呈30°,60°和90°夹角时的放电室磁场强度分布,根据不同磁场强度计算了电子温度、离子密度以及电离率等推力器放电参数。结果表明,当推力器放电电压为30V时,磁极长度设计为0.008m且磁极间距取为0.12m,电子约束路径大约为50m;柱段和锥段永磁体分别呈30°,60°和90°夹角时,放电室磁场等势线基本在0.002~0.005T之间;永磁体夹角为60°时磁场分布和磁空区相比30°和90°夹角更为合理,此时的电子温度约在2~6eV,等离子体密度约在4×1017~8×1017 m-3,电子碰撞频率比率约在0.2~1.8范围内。     

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采用纳秒脉冲电源,在静止空气条件下,开展了不同气压、放电距离和电压条件下的大体积纳秒脉冲放电实验研究.研究表明,当长度固定为200mm时,气压为250Pa时,随着电压的增大,放电区域从圆锥电极附近扩展到整个通道.当电压为12kV时,放电布满整个通道;随气压升高,初始放电电压增大.实验中发现在电压升高到一定程度时纳秒脉冲电离出现不稳定性,表现在气压相对较低时等离子体出现径向波动,气压相对较高时非平衡等离子体放电向电弧放电转变.分析认为,为了实现大体积均匀放电等离子体的产生,阻止放电不稳定性发生,应该采用上升沿时间更短,脉宽更小,电压更高的纳秒脉冲电源.     

Xe介质极紫外光源时间特性及最佳条件研究

理论和实验上研究了Xe介质毛细管放电极紫外光源等离子体时间特性和最佳条件. 从理论上建立了Xe介质一维辐射磁流体力学模型,模拟了不同气压和电流条件下等离子体压缩和辐射特性;实验上测量了放电电流30 kA时不同气压条件下13.5 nm （2%带宽）动态特性. 理论和实验结果表明：不同放电电流条件下,存在最佳气压值,最佳气压随着电流的增加而增加;同时,电流增加时,13.5 nm （2%带宽）辐射光强峰值时刻减小. 关键词： 极紫外光刻光源 毛细管放电 磁流体力学 Xe等离子体     

射频容性耦合等离子体放电特性的光谱诊断

利用流体模型模拟和发射光谱实验诊断相结合的方法,研究了中等气压、中等功率下射频容性耦合等离子体的放电特性。理论上,采用基于流体模型的COMSOL软件仿真,建立一维等离子体放电模型,以Ar气为工作气体,研究了不同气压以及不同射频输入功率下等离子体电子温度和电子密度的分布规律。实验上,依据仿真模型设计制作了相同尺寸的密闭玻璃腔体和平板电极,采用13.56 MHz射频放电技术电离腔体内的工作气体Ar气,测量了不同气压、不同射频输入功率时放电等离子体的发射光谱。通过分析和选择适当的Ar Ⅰ和Ar Ⅱ的特征谱线,分别利用玻尔兹曼斜率法以及沙哈-玻尔兹曼方程计算了等离子体的电子温度与电子密度,并结合模拟仿真结果对光谱诊断结果进行了修正。结果表明：当气体压强为300~400 Pa、输入功率为600~800 W时,等离子体近似服从玻尔兹曼分布,此时利用光谱法得到的等离子体参数与仿真结果相符合。仿真模拟与光谱实验诊断相结合的方法可初步诊断出中等气压下等离子体的放电参数,增加了玻尔兹曼斜率法和沙哈-玻尔兹曼方程在等离子体放电中的使用范围,扩大了光谱法在低电子密度容性耦合等离子体参数诊断的应用场合,为中等气压容性耦合等离子体在工业与军事上的应用研究提供了重要物理状态的分析手段。     

介质阻挡放电点燃大气压直流均匀放电的光谱研究

由于大气压均匀放电等离子体在工业领域具有广泛的应用前景,为了获得大尺寸的大气压均匀等离子体,采用氩气作为工作气体,在大气压空气环境中利用同轴介质阻挡放电点燃了针-板电极间的大气隙(气隙宽度达到5 cm)直流均匀放电。研究发现,同轴介质阻挡放电能够有效降低针-板电极间的击穿电压。该均匀放电由等离子体柱、等离子体羽、阴极暗区和阴极辉区组成。其中等离子体柱和阴极辉区都是连续放电。而等离子体羽不同位置的放电是不同时的。事实上,等离子体羽放电是由从阴极向着等离子体柱移动的发光光层(即等离子体子弹)叠加而成。利用电学方法测量了放电的伏安特性曲线,发现其与低气压正常辉光放电类似,均具有负斜率。采集了放电的发射光谱,发现存在N₂第二正带系、氩原子和氧原子谱线。通过Boltzmann plot方法对放电等离子体电子激发温度进行了空间分辨测量,发现等离子体柱的电子激发温度比等离子体羽的电子激发温度低。通过分析放电机制,对以上现象进行了定性解释。这些研究结果对大气压均匀放电等离子体源的研制和工业应用具有重要意义。     

PICPMCC 数值模拟四阳极直流辉光放电

利用OOPIC 代码并结合MCC 方法考察四阳极低气压直流辉光放电中粒子间的碰撞, 并对其进行了数值模拟。首先分析OOPIC 代码的计算流程, 给出模拟的边界条件和时间、空间步进; 然后对所得到的等离子体密度、温度的分布情况进行了分析。结果表明, 放电气压、电流以及环电极的有效宽度均影响等离子体密度和温度的径向分布。当气压为300Pa 时, 电子密度在径向较大范围内是均匀分布的, 而当气压升高到800Pa 时, 其径向不均匀增大, 且总的密度和电子的平均温度下降。放电电流的增大使得等离子体密度和温度均相应升高。但环电极有效宽度的减小使得等离子体密度的分布更不均匀, 并使总的密度和平均温度均下降。     

单针电极放电的发光特性

采用单针电极放电装置在氩气中产生了稳定的均匀等离子体。利用光学方法对单针放电特性进行了研究,结果表明单针放电等离子体的长度随外加电压峰值、气压的增大而增大,随空气含量的增大而减小。利用光电倍增管对单针电极放电等离子体羽的发光信号进行了空间分辨测量,发现靠近单针电极的羽头和等离子体羽其余部分放电行为不同。其中羽头源于针尖附近的电晕放电,它仅在外加电压负半周期的发光较强,正半周期发光几乎探测不到。而等离子体羽其余部分的放电在外加电压正、负半周期均存在,且正半周期强于负半周期。研究表明,外加电压正半周期的等离子体羽是源于发光光层(等离子体子弹)的传播,而负半周期等离子体羽的不同位置几乎同时放电。     

Guided-Wave Two-Dimensional Acousto-Optic Scanner Using Proton-Exchanged Lithium Niobate Waveguide

Two-dimensional scanning of a 0.6328 mum guided-light beam has been realized using noncolinear acousto-optic (AO) coplanar Bragg diffraction together with colinear AO guided-mode to substrate radiation-mode conversion in a Z-cut Xpropagation LiNbO3 proton-exchanged (PE) waveguide. The two surface acoustic (SAW) waves utilized are at the center frequencies of 500 and 200 MHz, propagating in the Y and X axes, respectively. Two-dimensional scanning of approximately 720 resolvable light beam spots, namely, 18 40 (horizontal vertical) scanning, has been demonstrated using a light beam of 1.0 mm aperture. The total number of resolvable beam spots can be greatly increased from 720 by simply utilizing SAW transducers of larger bandwidth and a light beam of greater aperture. It should also be possible to significantly increase the diffraction efficiency from 3 % by optimizing the parameters of the PE waveguide and the SAWs.     

Effect ofγ-radiation on the spectral luminescence characteristics of impure cadmium tungstate crystals

Results of a study of the effect of γ-radiation on the spectral luminescence properties of cadmium tungstate crystals doped with silver, bismuth, and molybdenum cations are presented. Spectral characteristics of the nondnnnoped crystals are briefly described. Absorption and photo and X-ray luminescence spectra of the crystals taken before and after exposure to γ-radiation (5.5·10⁴ Gy) are compared. It is found that the spectral characteristics of the crystals doped with silver, bismuth, and molybdenum cations do not change markedly after the exposure. The relation between the type of impurity-induced defects, individual characteristics of the impurity cations, and the character of the effect of γ-radiation on the spectral luminescence properties of impure crystals is analyzed (preliminarily). Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 64, No. 1, pp. 55–60, January–February, 1997.     

Femtosecond Transform-Limited Pulse Generation by Compensating for the Linear Chirp of SPM Spectra in Dispersion Shifted Fibers

A simple technique of pulse compression, based on the linear chirp compensation of self-phase modulation (SPM) spectra in dispersion shifted fibers, is demonstrated. The optimization procedure is carried out, for a short span of a single-mode fiber, using a parabolic law, which describes the behavior of the squared output pulse width versus the pump peak power in the case of Gaussian pulses. The experimental results give a minimum pulse duration of 233 fs, which is in good agreement with the model. Shorter and coherent pulses, down to 90 fs, have been obtained by inserting an interference filter at the optical output.     

Sorting of bending magnets for the SSRF booster

The Shanghai Synchrotron Radiation Facility(SSRF)booster ring,a full energy injector for the storage ring,is deigned to accelerate the electron beam energy from 150MeV to 3.5GeV that demands high extraction efficiency at the extraction energy with low beam loss rate when electrons are ramping.Closed orbit distortion(COD)caused by bending magnet field uniformity errors which affects the machine performance harmfully could be effectively reduced by bending magnet location sorting.Considering the affections of random errors in measurement,both ideal sorting and realistic sorting are studied based on measured bending magnet field uniformity errors and one reasonable combination of bending magnets which can reduce the horizontal COD by a factor of 5is given as the final installation sequence of the booster bending magnets in this paper.     

Measurement of nonlinear coefficient of optical fiber based on small chirped soliton transmission

We measure the waveform and phase curves of short optical pulses before and after transmission over different lengths of fibers by use of the pulse analyzer with the frequency-resolved optical gating (FROG),and numerically simulate pulse evolution under the experimental conditions.The nonlinear coefficient of the fiber is given by comparing the experimental results with the numerical ones.Difference between the experiment and numerical simulation is analyzed.     

Resonance scattering of canonical elastic shells in absorbing fluid medium

Resonance scattering of elastic spherical shell and cylindrical shell while the surrounding fluid medium has absorption is studied. The normal mode solution derived using exact elastic theory and the separation of variables is still applicable. However, the scattering form function has to be modified for the absorbing medium, otherwise the unreasonable result would be obtained. The backscattering form function in the absorbing medium is redefined, and the form function of elastic spherical and cylindrical shell with vacuum or solid matter filled is calculated in various absorption conditions. The results show that the absorption of surrounding fluid leads to notable attenuation of the coincidence resonances in the mid-frequency, but it has a little influence on the low-frequency resonance scattering induced by the filler inside the shell.     

Single-beam self-referenced phase-sensitive surface plasmon resonance sensor with high detection resolution

A versatile and low-cost single-beam self-referenced phase-sensitive surface plasmon resonance(SPR)sensing system with ultra-high resolution performance is presented.The system exhibits a root-mean-square phase fluctuation of ±0.0028.over a period of 45 min.i.e.a resolution of±5.2×10-9 refractive index units.The enhanced performance has been achieved through the incorporation of three design elements:a true single-beam configuration enabling complete self-referencing so that only the phase change associated with SPR gets detected,a differential measurement scheme to eliminate spurious signals not related to the sensor response,and the elimination of retardation drifts by incorporating temperature stabilization in the liquid crystal phase modulato .Our design should bring the detection sensitivity of non-labeling SPR biosensing closer to that achievable by conventional fluorescence-based techniques.     

Influences of SiO2 protective layers and annealing on the laser-induced damage threshold of Ta2O5 films

Ta2O5 films are prepared on BK7 substrates with conventional electron beam evaporation deposition.The effects of SiO2 protective layers and annealing on the laser-induced damage threshold (LIDT) of the films are investigated.The results show that SiO2 protective layers exert little influence on the electric field intensity(EFI)distribution,microstructure and microdefect density but increase the absorption slightly.Annealing iS effective on decreasing the microdefect density and the absorption of the films.Both SiO2 protective layers and annealing are beneficial to the damage resistance of the films and the latter is more effective to improve the LIDT.Moreover,the maximal LIDT of Ta2O5 films is achieved by the combination of SiO2 protective layers and annealing.     

A stereo matching algorithm using multi-peak candidate matches and geometric constraints

Gray cross correlation matching technique is adopted to extract candidate matches with gray cross correla- tion coefficients less than some certain range of maximal correlation coefficient called multi-peak candidate matches. Multi-peak candidates are extracted corresponding to three closest feature points at first. The corresponding multi-peak candidate matches are used to construct the model polygon. Correspondence is determined based on the local geometric relations between the three feature points and the multi-peak candidates. The disparity test and the global consistency checkout are applied to eliminate the remaining ambiguous matches that are not removed by the local geometric relational test. Experimental results show that the proposed algorithm is feasible and accurate.