超结硅锗碳异质结双极晶体管机理研究与特性分析优化

提出一种超结硅锗碳异质结双极晶体管(SiGeC HBT)新结构.详细分析了新结构中SiGeC基区和超结结构的引入对器件性能的影响,并对其电流输运机制进行研究.基于SiGeC/Si异质结技术,新结构器件的高频特性优良;同时超结结构的存在,在集电区内部水平方向和垂直方向都建立了电场,二维方向上的电场分布相互作用大大提高了新结构器件的耐压能力.结果表明:超结SiGeC HBT与普通结构SiGeC HBT相比,击穿电压提高了48.8%;更重要的是SiGeC HBT器件中超结结构的引入,不会改变器件高电流增益、高频率特性的优点;新结构器件与相同结构参数的Si双极晶体管相比,电流增益提高了10.7倍,截止频率和最高震荡频率也得到了大幅度改善,很好地实现了高电流增益、高频率特性和高击穿电压三者之间的折中.对超结区域的柱区层数和宽度进行优化设计,随着柱区层数的增多,击穿电压显著增大,电流增益有所提高,截止频率和最高震荡频率减低,但幅度很小.综合考虑认为超结区域采用pnpn四层结构是合理的.     

富硅氮化硅薄膜的制备及其光学带隙研究

采用双极脉冲磁控反应溅射法在不同参数条件下制备了一系列氮化硅薄膜。利用数字式显微镜和紫外-可见光光谱仪研究了沉积薄膜的表面形貌及其光学带隙,利用共焦显微拉曼光谱仪比较了硅衬底、氮化硅薄膜退火前后的拉曼光谱。结果表明,氮气流量对薄膜的光学带隙影响较大,制备的薄膜主要为富硅氮化硅薄膜。原沉积薄膜的拉曼光谱存在明显的非晶硅和单晶硅峰,退火处理后非晶硅峰减弱或消失,表明薄膜出现明显的结晶化;单晶硅峰出现频移现象,表明薄膜中出现硅纳米颗粒,平均尺寸约为6.6 nm。     

纳米硅/单晶硅异质结二极管的I-V特性

用纳米硅（nc_Si∶H）薄膜制成了纳米硅/单晶硅（nc_Si∶H/c_Si）异质结二极管，对nc_Si∶H/c_Si异质结的特性进行了研究，它具有很好的温度稳定性.温度从20℃上升到200℃ ，I_V曲线只有很小的漂移.对nc_Si∶H/c_Si异质结二极管的输运机理进行了讨论. 关键词： 异质结二极管 纳米硅薄膜 输运机理     

Si／Ge应变层异质结带的价带偏移理论计算

在应变异质结价带偏移从头算赝势法的理论计算中，建议一种以平均键能为参考能级的△Ｅｖ值理论计算方法，该方法在Ｓｉ为衬底，以Ｇｅ为衬底和自由共度生长等３种不同应变情况的Ｓｉ／Ｇｅ异质结价带偏移△Ｅｖ值计算中，分别得到０．７３１ｅＶ，０．２４３ｅＶ和０．５２１ｅＶ的计算结果。     

硅异质结太阳能电池工艺优化

硅异质结太阳能电池的制作过程中,所有工艺步骤都会影响其性能.通过扫描电镜、反射率、量子效率及少子寿命测试,逐步优化硅异质结太阳能电池的性能.结果表明,单晶硅片钝化的最佳锥体尺寸约为6～9μm.利用高质量的本征氢化非晶硅(a-Si:H)薄膜钝化硅片,获得了超过5 ms的少数载流子寿命.采用大带隙p型a-SiCx:H薄膜替...     

硅异质结太阳电池的物理机制和优化设计

硅异质结太阳电池是一种由非晶硅薄膜层沉积于晶硅吸收层构成的高效低成本的光伏器件,是一种具有大面积规模化生产潜力的光伏产品.异质结界面钝化品质、发射极的掺杂浓度和厚度以及透明导电层的功函数是影响硅异质结太阳电池性能的主要因素.针对这些影响因素已经有大量的研究工作在全世界范围内展开,并且有诸多研究小组提出了器件效率限制因素背后的物理机制.洞悉物理机制可为今后优化设计高性能的器件提供准则.因此及时总结硅异质结太阳电池的物理机制和优化设计非常必要.本文主要讨论了晶硅表面钝化、发射极掺杂层和透明导电层之间的功函数失配以及由此形成的肖特基势垒;讨论了屏蔽由功函数失配引起的能带弯曲所需的特征长度,即屏蔽长度;介绍了硅异质结太阳电池优化设计的数值模拟和实践;总结了硅异质结太阳电池的研究现状和发展前景.     

一种新型Si/SiGe/Si双异质结PIN电学调制结构的异质结能带分析

PIN结构是电光调制器中常见的一种电学调制结构, 该结构中载流子注入效率直接影响着电光调制器的性能. 在前期的研究中, 我们在SOI材料的基础上提出了一种新型Si/SiGe/Si双异质结PIN电学调制结构, 可以有效提高载流子注入效率, 降低调制功耗. 为了进一步研究这种新型调制器结构的调制机理, 本文从单异质结能带理论出发, 定量分析了该新型结构中双异质结的势垒高度变化, 给出了双异质结势垒高度的定量公式, 将新型结构与SiGe-OI和SOI两种PIN电学调制结构进行能带对比, 分析了该新型结构载流子注入增强的原因, 最后模拟了新型结构的能带分布, 以及能带和调制电压与注入载流子密度的关系, 并与SiGe-OI和SOI两种PIN电学调制结构进行对比发现, 1 V调制电压下, 新型结构的载流子密度达到了8× 10¹⁸cm^-3, 比SOI 结构的载流子密度高了800%, 比SiGe-OI结构的载流子密度高了340%, 进一步说明了该新型结构的优越性, 并且验证了理论分析的正确性.     

钙钛矿氧化物异质结自旋极化输运机制研究

文章介绍了一个基于弱Hund耦合规则以及载流子漂移扩散机制所提出的关于钙钛矿氧化物p-n异质结构的自旋极化输运机制的物理模型．该理论不仅可以很好地解释由具有负磁阻效应的La0.9Sr0．1MnO3（LSMO）与非磁性的SrNb0.01Ti0.99O3（SNTO）所组成的异质结中所存在的正磁电阻效应，同时揭示了该体系中LSMO在界面区域的载流子与远离界面区域的载流子具有不同的自旋极化方向．这一结果将为理解钙钛矿氧化物异质结及多层膜的自旋极化输运机制开辟了一条新的途径．     

钙钛矿氧化物异质结自旋极化输运机制研究

文章介绍了一个基于弱Hund耦合规则以及载流子漂移扩散机制所提出的关于钙钛矿氧化物p-n异质结构的自旋极化输运机制的物理模型.该理论不仅可以很好地解释由具有负磁阻效应的La0.9Sr0.1MnO3（LSMO）与非磁性的SrNb0.01Ti0.99O3（SNTO）所组成的异质结中所存在的正磁电阻效应,同时揭示了该体系中LSMO在界面区域的载流子与远离界面区域的载流子具有不同的自旋极化方向.这一结果将为理解钙钛矿氧化物异质结及多层膜的自旋极化输运机制开辟了一条新的途径.     

三维数值仿真研究锗硅异质结双极晶体管总剂量效应

为探索锗硅异质结双极晶体管(SiGe HBT)总剂量效应的损伤机理,采用半导体器件三维模拟工具(TCAD),建立电离辐照总剂量效应损伤模型,分析比较电离辐射在SiGe HBT不同氧化层结构的不同位置引入陷阱电荷缺陷后,器件正向Gummel特性和反向Gummel特性的退化特征,获得SiGe HBT总剂量效应损伤规律,并与⁶⁰Coγ辐照实验进行对比.结果表明:总剂量辐照在SiGe HBT器件中引入的氧化物陷阱正电荷主要在pn结附近的Si/SiO₂界面处产生影响,引起pn结耗尽区的变化,带来载流子复合增加,最终导致基极电流增大、增益下降;其中EB Spacer氧化层中产生的陷阱电荷主要影响正向Gummel特性,而LOCOS隔离氧化层中的陷阱电荷则是造成反向Gummel特性退化的主要因素.通过数值模拟分析获得的SiGe HBT总剂量效应损伤规律与不同偏置下⁶⁰Coγ辐照实验的结论符合得较好.     

Photoluminescence and optical absorption properties of silicon quantum dots embedded in Si-rich silicon nitride matrices

Silicon nitride (SiN_x) films were prepared with a gas mixture of SiH₄ and NH₃ on Si wafers using the plasma-enhanced chemical vapor deposition (PECVD) method. High-resolution transmission electron microscopy and infrared absorption have been used to reveal the existence of the Si quantum dots (Si QDs) and to determine the chemical composition of the silicon nitride layers. The optical properties of these structures were studied by photoluminescence (PL) spectroscopy and indicate that emission mechanisms are dominated by confined excitons within Si QDs. The peak position of PL could be controlled in the wavelength range from 1.5 to 2.2 eV by adjusting the flow rates of ammonia and silane gases. Absorbance spectra obtained in the transmission mode reveal optical absorption from Si QDs, which is in good correlation with PL properties. These results have implications for future nanomaterial deposition controlling and device applications.     

氮化硅薄膜中硅纳米颗粒的形成机制研究

采用等离子体增强化学气相沉积技术,以SiH₄作为硅源, NH₃和N₂共同作为氮源,在单晶硅衬底上制备了不同的氮化硅薄膜. X射线衍射分析薄膜晶体结构,通过计算晶格尺寸大小证明了纳米硅颗粒的存在. 傅里叶变换红外光谱分析了薄膜中的键合作用的变化并结合化学反应过程对氮化硅薄膜中纳米硅颗粒的形成机制进行了研究,发现Si—Si键作为硅纳米颗粒的初始位置, 当反应朝着生成Si—Si的方向进行时,可以促进氮化硅薄膜中硅纳米颗粒的形成. X射线衍射分析和光致发光实验结果表明Si—Si键浓度增大时, 所形成的纳米硅颗粒的尺寸和浓度都随之增大.     

钙钛矿/硅叠层太阳电池中平面a-Si:H/c-Si异质结底电池的钝化优化及性能提高

最近,旋涂法制备的钙钛矿/平面硅异质结高效叠层太阳电池引起人们广泛关注,主要原因是相比于绒面硅衬底制备的钙钛矿/硅叠层太阳电池,其制备工艺简单、制备成本低且效率高.对于平面a-Si:H/c-Si异质结电池, a-Si:H/c-Si界面的良好钝化是获得高转换效率的关键,进而决定了钙钛矿/硅异质结叠层太阳电池的性能.本文主要从硅片表面处理、a-Si:H钝化层和P型发射极等方面展开研究,通过对硅片表面的氢氟酸(HF)浸泡时间和氢等离子体预处理气体流量、a-Si:H钝化层沉积参数、钝化层与P型发射极(I/P)界面富氢等离子体处理的综合调控,获得了相应的优化工艺参数.对比研究了p-a-Si:H和p-nc-Si:H两种缓冲层材料对I/P界面的影响,其中高电导、宽带隙的p-nc-Si:H缓冲层既能够降低I/P界面的缺陷态,又可以增强P型发射层的暗电导率,提高了前表面场效应钝化效果.通过上述优化,制备出最佳的P-type emitter layer/aSi:H(i)/c-Si/a-Si:H(i)/N-type layer (inip)结构样品的少子寿命与implied-Voc分别达到2855μs和709 mV,表现出良好的钝化效果.应用于平面a-Si:H/c-Si异质结太阳电池,转换效率达到18.76%,其中开路电压达到681.5 mV,相对于未优化的电池提升了34.3 mV.将上述平面a-Si:H/c-Si异质结太阳电池作为底电池,对应的钙钛矿/硅异质结叠层太阳电池的开路电压达到1780 mV,转换效率达到21.24%,证明了上述工艺优化能够有效地改善叠层太阳电池中的硅异质结底电池的钝化及电池性能.     

Electronic transport properties of an (8,0) carbon/boron nitride nanotube heterojunction

The structure of a heterojunction made up of an (8, 0) carbon nanotube and an (8, 0) boron nitride nanotube is achieved through geometry optimization implemented in the CASTEP package. Based on the optimized geometry, the model of the heterojunction is established. Its transport properties are investigated by combining the nonequilibrium Green's function with density functional theory. Results show that both the lowest unoccupied molecular orbital and the highest occupied molecular orbital mainly locate on the carbon nanotube section. In the current--voltage characteristic of the heterojunction, a rectification feature is revealed.     

Surface plasmon enhanced light emission of silicon-rich silicon nitride: Dependence on metal island size

Surface plasmon coupled light emission of silicon-rich silicon nitride (SRSN) was investigated as a function of metal island size. It was found that the emission intensity was enhanced by surface plasmon (SP) and the enhancement factors increase greatly with the increase of metal island size. Moreover, SP coupled emission spectral shape was found also correlating with Ag island size. By calculating the extinction characteristics of the Ag islands, it was believed that SP scattering and absorption efficiency of the metal islands decide the photoluminescence (PL) changes including emission intensity enhancement and band position shift.     

a-Si(n)/c-Si(p)异质结太阳电池薄膜硅背场的模拟优化

采用AFORS-HET数值模拟软件,对不同带隙的薄膜硅材料在a-Si(n)/c-Si(p)异质结太阳电池上的背场效果进行了模拟,分析了影响背场效果的原因,得到了薄膜硅背场在a-Si(n)/c-Si(p)异质结太阳电池上的适用条件为薄膜硅材料是带隙16 eV,硼掺杂浓度在10¹⁸cm^-3以上的微晶硅材料,其最佳厚度在5nm左右. 这种背场从工艺上易于实现,并且,与常用的Al扩散背场相比,在相同的掺杂浓度下,电池效率可以大大提高. 关键词： 薄膜硅 背场 硅异质结太阳电池     

Sub-stochiometric MoOx by radio-frequency magnetron sputtering as hole-selective passivating contacts for silicon heterojunction solar cells

The silicon heterojunction (SHJ) solar cell has long been considered as one of the most promising candidates for the next-generation PV market. Transition metal oxides (TMOs) show good carrier selectivity when combined with c-Si solar cells. This has led to the rapid demonstration of the remarkable potential of TMOs (especially MoO_x) with high work function to replace the p-type a-Si:H emitting layer. MoO_x can induce a strong inversion layer on the interface of n-type c-Si, which is beneficial to the extraction and conduction of holes. In this paper, the radio-frequency (RF) magnetron sputtering is used to deposit MoO_x films. The optical, electrical and structural properties of MoO_x films are measured and analyzed, with focus on the inherent compositions and work function. Then the MoO_x films are applied into SHJ solar cells. When the MoO_x works as a buffer layer between ITO/p-a-Si:H interface in the reference SHJ solar cell, a conversion efficiency of 19.1% can be obtained. When the MoO_x is used as a hole transport layer (HTL), the device indicates a desirable conversion efficiency of 17.5%. To the best of our knowledge, this current efficiency is the highest one for the MoO_x film as HTL by RF sputtering.     

Silicon nitride/silicon oxide interlayers for solar cell passivating contacts based on PECVD amorphous silicon

This Letter demonstrates improved passivating contacts for silicon solar cells consisting of doped silicon films together with tunnelling dielectric layers. An improvement is demonstrated by replacing the commonly used silicon oxide interfacial layer with a silicon nitride/silicon oxide double interfacial layer. The paper describes the optimization of such contacts, including doping of a PECVD intrinsic a‐Si:H film by means of a thermal POCl₃ diffusion process and an exploration of the effect of the refractive index of the SiN_x. The n⁺ silicon passivating contact with SiN_x /SiO_x double layer achieves a better result than a single SiN_x or SiO_x layer, giving a recombination current parameter of ～7 fA/cm² and a contact resistivity of ～0.005 Ω cm², respectively. These self‐passivating electron‐selective contacts open the way to high efficiency silicon solar cells. (© 2015 WILEY‐VCH Verlag GmbH &Co. KGaA, Weinheim)     

Optical harmonic generation in amorphous silicon nitride microcavities

Second harmonic (SH) and third harmonic (TH) generation in amorphous silicon nitride microcavity are experimentally investigated. The transmitted SH and TH signals are measured in the 0.9-1.4 μm spectral range, showing enhanced nonlinear conversion efficiency corresponding to resonant wavelength and optical band edges. The efficiencies of the SH and TH generation processes are found to be enhanced by about two and one orders of magnitude, respectively, in comparison with the case of reference amorphous silicon nitride sample. The SH spectra can be reasonably interpreted as due to surface/interface harmonic generation, while the TH signal is related to bulk isotropic third-order polarization. The results obtained for the TH signal are discussed in terms of the linear optical properties of amorphous silicon nitride thin films.