Mikrophysikalische Bestimmung elektronenkinetischer Kenngrößen im binären Molekül-Mischplasma von Stickstoff und Wasserstoff. II. Elektronenstoßfrequenzen für die Anregung und Ionisierung langlebiger elektronischer Molekülzustände und die Energieverlustraten der Elektronenkomponente des Mischplasmas

In this second part of the in [l] started paper the results of microphysical determined collision frequencies of the electrons for the excitation and ionization of metastable molecules, excited in electronic states, and of the energy loss rates of the electrons due to elastic collisions, vibrational excitation, electronic excitation, dissociation and ionization of the molecules in a N₂ - H₂ -plasma are represented and discussed. These investigations are related to a low ionized, homogeneous and stationary plasma in a mixture and are performed for the range 6- 100 V/(cm Torr) of the reduced electric field strength and for any composition of the N₂ - H₂-mixture.     

Mikrophysikalische Bestimmung elektronenkinetischer Kenngrößen im binären Molekül-Mischplasma von Stickstoff und Wasserstoff I. Geschwindigkeitsverteilungsfunktion,Transportgrößen und Stoß-frequenzen für Dissoziation und Direktionisation im Mischplasma

For the low ionized anisothermal plasma in a mixture of moleculare nitrogen and molecular hydrogen the isotropic part of the velocity distribution function of the electrons is calculated and compared with the experimentally determined velocity distribution. the calculation of this distribution is performed by the help of the homogeneous and stationary electron Boltzmann-equation and takes into consideration all essential collision processes between the electrons and the N₂ and H₂ molecules. Furthermore, the calculated results of the mean energy, of the transport coefficients, of the collision frequencies for dissociation and direct ionization of the molecules, of the first Townsend coefficient of the molecules and of the collision rates for the direct ionization of the N- and H-atoms in the mixture are represented for the range 6–100 V/(cm Torr) of the reduced electric field strength and for any composition of the N₂-H₂ mixture.     

Diffusionstheoretische Beschreibung der Dissoziation und des Ionenhaushaltes im schwachionisierten Säulenplasma der Wasserstoffentladung. II. Makroskopische Kenngrößen der Elektronen im H/H2-Mischplasma

The results of the calculation of the energy distribution function f(U), of the transport coefficients ū, b_e, D_e, of the collision frequencies for dissociation and direct ionization and of the main energy loss rates due to elastic and inelastic collisions of the electrons with the components of the mixture are presented for a stationary and homogeneous hydrogen plasma. These calculations, based upon the Boltzmann equation for the electrons, are performed in dependence of the normalized electric field strength E/p₀ and the mixture ratio x_D in the range of 7.5 to 100 V/cm Torr for E/p₀ and for any mixture ratio.     

The townsend coefficient and runaway of electrons in electronegative gas

We have studied the character of variation of the number of electrons formed in an electronegative gas (SF₆) under the action of an external electric field. At any value of the electric field strength E, the number of generated electrons exponentially increases with the distance from the cathode, while the average velocity and energy of electrons attain constant values. At small values of the reduced field strength, E/p<94 V/(cm Torr) (p is the gas pressure), the regime of electron attachment prevails that is characterized by negative values of the exponent (negative Townsend coefficients). For E/p>94 V/(cm Torr), the electron multiplication proceeds in the usual Townsend regime with positive exponents. In the intermediate region of E/p=40–160 V/(cm Torr), the electron multiplication coefficient exhibits a linear dependence on E/p. Numerical calculations based on a simple model show that the Townsend multiplication regime takes place even in very strong fields where the drag caused by ionization can be ignored. A universal function describing the electron runaway in SF₆ is obtained.     

Die Relaxation der Geschwindigkeitsverteilungsfunktion der Elektronen im homogenen Feld mit elastischen und anregenden Stößen. III. Die Einstellung des periodischen Verhaltens der Elektronen-komponente im elektrischen Feld großen Modulationsgrades

To continue the kinetic investigations concerning the periodic behaviour of the electron component of a low ionized Ne-plasma of a glow discharge column in a periodic electric field [4] with high degree of modulation in this paper the adjustment of the isotropic distribution function of the electrons and by the latter determined macroscopic quantities are calculated and discussed. Starting with the non-stationary Boltzmann equation the adjustment process is considered using different direct components of the field but nearly constant degree of modulation. In the whole range from a nearly momentary adjustment to an adjustment in the high frequency limit of only small modulated distribution function we obtained results concerning the adjustment behaviour and its characteristic times by variation of the cycle time of the electric field starting from the different stationary states. At the other hand the influence of the different degrees of modulation on the adjustment process and its characteristic times was investigated and interpreted. For this interpretation the spectrum of adjustment times of stationary states corresponding to all momentary values of the periodic electric field strength in one cycle plays a dominant role. From the investigations follows that the adjustment times of periodic states can alter their values by some orders of magnitudes in dependence on the parameters of the electric field.     

Stoßbestimmte Relaxation des Elektronenensembles im Plasma bei zusätzlicher Aufheizung durch ein elektrisches Feld. III. Das periodische Verhalten der Elektronenkomponente im elektrischen Feld großen Modulationsgrades

Collision Dominated Relaxation of the Electron Ensemble in a Plasma with Additional Heating by an Electric Field. III. The Periodic Behaviour of the Electron Component in an Electric Field with a Large Modulation Amplitude With the aid of the non-stationary Boltzmann-equation the periodic behaviour of the isotropic part of the velocity distribution of electrons and thereby determined macroscopic quantities is calculated for periodic electric fields with large modulation amplitude. The investigations concern a weakly ionized column plasma in neon under typical low and medium pressure conditions. Based on the numerical results for typical ranges of field strength and cycle times of the electric field a qualitative physical interpretation for the periodic behaviour of the electron component is obtained. The introduction of special field-dependent adjustment times allows the formalution of conditions which characterize the case of quasi-stationary behaviour and also the case of small amplitudes of modulation in the macroscopic quantities determined by the isotropic distribution function. The periodic states between these two limiting cases can be interpreted as due to two competing processes. The first one is the energy input controlled by the electric field and the second one is the energy loss in binary collisions of the electrons with the atoms.     

Simulation of an electron avalanche in helium

The parameters of an avalanche generated by an electron in helium at different ratios E/p, where E is the external field strength and p is the pressure, are simulated. The E/p dependences of the ionization rate and Townsend coefficient have maxima at E/p≈1000 and ≈200 V/(cm Torr), respectively. The today’s concepts of the electron density distribution in the avalanche are valid only at small values of the reduced strength, E/p<100 V/(cm Torr). With E/p>100 V/(cm Torr), the electron density distribution extends along the field.     

Die Berücksichtigung der Ionisation durch Elektronenstoß in der Elektronenkinetik des schwachionisierten anisothermen Plasmas III. Das instationäre Verhalten bei großer impulsförmiger Feldstörung

The Influence of Ionization by Electron Collisions on the Electron Kinetics of the Low Ionized Anisothermal Plasmas The time behaviour of the electron component was calculated during the additional application of a single pulse to the electric field in the plasma. The investigations were performed for the weakly ionized Ne-plasma as a typical example taking into account supplementarily the direct ionization due to electron collisions and an electron loss term with a constant life time besides elastic and exciting collisions. Using the instationary Boltzmann equation we determined the time behaviour of the essential macroscopic quantities. Besides the caluclation of the marked temporal development of such quantities as the electron concentration, the electron collision frequencies for excitation and ionization and the different energy transfer rates especially the relaxation of the electron component was analysed after switch on and switch off the additional rectangular pulse.     

Absolutbestimmung der Gesamtanregungsquerschnitte der Edelgase durch Elektronenstoß

With an improved Maier-Leibnitz collision chamber absolute values of the total excitation cross sections of the rare gases were measured. The half width of energy distribution in the beam of exciting electrons was approximately 0.7 eV. The results for He and Ne are in reasonable agreement with the excitation functions given by Maier-Leibnitz, if some necessary corrections (especially with regard to contact potentials) are made. Only the cross sections obtained by us are a little smaller. Furthermore the better fine structure yielded more favourable possibilities of comparison with other measurements published so far. The error should not be greater than 30%.     

Angular and energy distribution of electrons produced by 200–500 keV protons in gases

The cross beam method was used to measure double differential ionization cross sections for electron production by 200–500 keV protons incident on a molecular beam. The ejected secondary electrons were detected by an electron multiplier and an electrostatic 90 °-spectrometer which was movable in the scattering chamber from 18 °–155 ° with respect to the incident proton direction. After the elimination of disturbing electric and magnetic fields, electrons were measured at energies down to 1 eV. The absorption of the very slow electrons along their path through the spectrometer could be minimized by using a relatively low gas pressure in the scattering chamber of a few 10^?5 Torr. The efficiency of the electron detector was determined with an electron source whose emission rate per solid angle was known. Absolute cross sections and their angular dependence were obtained by measuring the slow electrons—ejected with a relatively high rate—without the molecular beam; these data being used to normalize the electron spectra acquired with the molecular beam. Ionization cross sections with 300 keV protons incident on helium are discussed and except for the very slow electrons, a good agreement is found with results of Ruddet al.     

Collisional and radiative processes with participation of highly excited states of atoms and molecules

A number of processes in which highly excited states of atoms and molecules participate are investigated. These processes are of interest for the kinetics of a low-temperature plasma, for atomic and molecular spectroscopy, and for astrophysics. A quasiclassical theory is developed for transitions between Rydberg states with change of the principal quantum number, and also for the processes of direct and associative ionization of highly excited atoms, which result from collisions between a neutral particle and its atomic core. The state of the inner electrons of a quasimolecular (molecular) ion is not altered by transitions of the outer electrons. Specific calculations are carried out for the case of the collision of hydrogen H(n) with helium He (1s²) atoms. It is shown that the cross sections and the rate constants of these processes are determined in this case by the mechanism investigated in the paper, and not by scattering of the Rydberg electron by the neutral particle. The cross sections for dipole excitation and dissociation of molecular ions from high vibrational energy levels by electron impact is calculated in the Born-Coulomb approximation. The cross sections and the rates of dissociative and three-particle attachment of electrons to ions are determined. The processes of autoionization and autodissociation decay of Rydberg states of vibrationally excited molecules are determined. Also investigated are radiative transitions near the dissociation limit of diatomic molecular ions and neutral molecules, viz., photodissociation and radiative decay of high vibrational levels, and photodissociation and translational (inverse-bremsstrahlung) absorption in collision of atomic particles.Translated from Trudy Ordena Lenina Fizicheskogo Instituta im. P. Lebedeva AN SSSR, Vol. 145, pp. 80–130, 1984.     

Stoßbestimmte Relaxation des Elektronenensembles im Plasma bei zusätzlicher Aufheizung durch ein elektrisches Feld I. Die charakteristischen Zeiten für den Übergang in stationäre Zustände

Collision Dominated Relaxation of the Electron Ensemble in a Plasma with Additional Heating by an Electric Field. I. Characteristic Times for the Transition to Stationary States Starting from time dependent Boltzmann equation for electrons the time development of the isotropic part of the distribution function and of macroscopic quantities as mean energy, mobility, excitation frequency and energy transfer quotients during transition between two stationary states are determined. The computation is referred to weak ionized neon plasmas which are typical for low pressure and for medium pressure discharges. As a result of this investigations we get informations about the characteristic relaxation times which are different in order of magnitude, and about their dependence of the processes of energy transfer. The energy transfer quotients which determine the energy loss by different collision processes in consideration are found to be suitable quantities to characterize the relaxation times.     

Der Einfluß der Stoßkenndaten auf die Elektronenkinetik in schwachionisierten Mischplasmen

The Influence of the Characteristic Quantities of the Collision Processes on the Electron Kinetics in the Low Ionized Mixture Plasm Starting from former investigations concerning the electron kinetics in the pure molecular plasma of N₂ and H₂ and in the mixtures of N₂/Ne and N₂/H₂ the influence of the important characteristic quantities of the collision processes on the isotropic distribution function and the energy balance of the electrons was studied for binary mixtures. The conclusions obtained were verified by results calculated numerically for the energy balance in the three mixtures He/Ne, N₂/H₂ and N₂/Ne which were investigated in the relevant range of the normalized electric field strength E/p₀ as a function of the mixture ratio. This analysis demonstrates the sensitive dependence of the macroscopic properties of the binary mixtures on the characteristic quantities of the collision processes of the electrons with the two components of the binary mixture.     

Anlagerungskoeffizienten und Driftgeschwindigkeiten von Elektronen in Luft

Electron drift velocities and attachment coefficients were measured in dry air (E/p=0.1–30 V/cm Torr) and in a 9∶1 nitrogen/oxygen mixture (E/p=0.2–3 V/cm Torr) in the pressure range from 50 to 200 Torr, using a modified spark chamber technique. The primary electrons were released by anα-particle. The temporal development of the electron density in the gap was determined from the amplitude of the current due to the avalanches, which were produced by applying high voltage pulses at different delay times. — It was found that in air the dissociative attachment sets in at higherE/p (～10–15 V/cm Torr) than in oxygen. At lowerE/p three body attachment is predominant. — When the high voltage pulses were applied after the transit time of the primary electrons, electron avalanches still appeared. It was concluded that they were started by electrons which were detached from negative ions. The estimated detachment rates indicate the formation of O ₂ ^? ions at lowE/p and of O^? ions at higherE/p.     

H<Superscript>+</Superscript><Emphasis Type="Bold">and He</Emphasis><Superscript>2+</Superscript> impact single and double ionization of lead

H⁺ and He²⁺ impact single and double ionization cross sections of ground state lead atoms have been calculated in the binary encounter approximation. Calculations of direct double ionization cross sections have been performed in the modified double binary encounter model. The accurate expressions of σ_ΔE (cross-section for energy transfer ΔE) and Hartree-Fock velocity distributions for the target electrons have been used throughout the calculations. Contributions to double ionization from Auger effect following ionization of inner shells have been considered in the present work. Our H⁺ impact single and double ionization cross sections are in good agreement with the experimental observations. In calculations of He²⁺ impact cross sections, the present theoretical approach shows limited success in the experimentally investigated region (50–350 keV amu^-1).     

The role of primary and secondary electrons in electron induced desorption and dissociation: CO on Pt(111)

The electron impact desorption and dissociation of CO on Pt(111) has been studied under conditions which are fairly typical in Auger Electron Spectroscopy. It was found that desorption was about twenty times faster than dissociation, and the apparent cross sections for these processes were measured. By studying the dependence of these cross sections on electron beam incidence angle, it was shown that most of the disruption of the CO adlayer was caused by the relatively slow backscattered electrons rather than the fast primary beam. The Auger spectrum of adsorbed CO was measured and the relative Auger yields from carbon present as adsorbed CO and as surface carbide were obtained.     

The Influence of Admixtures of Molecular Gases on the Efficiency of Radiation Production by Ar?Hg Mixture Plasmas used in Fluorescent Lamps

Starting from former investigations of pure Ar? Hg mixture plasmas in parameter ranges typical of fluorescent lamps we studied the influence of additional admixtures of molecular gases (N₂, H₂) on the energy transfer from the electrons heated by an electric field to the lowest excited states of Hg atoms which are the energy source for the resonance radiation production. By calculation of the different power loss rates via solving the appropriate Boltzmann equation for three component mixture plasmas it was found that already a threshold level of molecular impurities of about 10^?4 Torr leads to a marked energy dissipation by the impurities and thus to a pronounced reduction of the efficiency of the resonance radiation production. This is caused by the great effectivity of vibrational excitation of molecules in electron collisions due to the great cross sections for such collisions and their low thresholds.     

Absolute differential bremsstrahlung cross section for the scattering of 0.6-keV electrons by xenon atoms

The spectral distribution of the absolute differential cross section for total bremsstrahlung, including ordinary and polarization, for the scattering of 0.6-keV electrons from free xenon atoms has been measured. The bremsstrahlung photons have been detected at an angle of 97° with respect to the electron motion direction. The investigations have been carried out in the ultrasoft x-ray spectral region 60–240 eV. The results are compared with the total cross sections for bremsstrahlung calculated in several approximations for the scattering of 5-and 25-keV electrons by Xe atoms. Both the value and the spectral distribution of the experimental absolute cross sections are most satisfactorily reproduced by the calculations in the distorted partial wave approximation.     

Geant4模拟δ电子对单粒子翻转的影响

利用Geant4蒙特卡洛程序包, 基于RPP (Rectangular ParallelePiped Volume)模型构建SRAM器件单元的灵敏体积, 编写了重离子在器件材料中的输运程序和单粒子翻转截面计算方法, 得到了简化器件结构的单粒子翻转截面σ与线性能量转移LET的关系曲线, 计算得到的翻转LET阈值和饱和截面与实验结果基本一致。模拟获得了LET值为99.69 MeV/(cm-2·mg)的Bi离子及LET值为69 MeV/(cm-2·mg)的Bi离子和Xe离子在器件材料中产生的δ电子分布图像,讨论了δ电子分布对翻转截面的影响。 计算了灵敏体积中能量沉积与δ电子分布的关系,认为δ电子分布对单粒子效应的影响随着器件的特征尺寸减小将更加严重。In this paper, the sensitive volume of SRAMs was constructed based on RPP(Rectangular ParallelePiped Volume) model using the Monte-Carlo code Geant4. The interactions of heavy ion with materials and the SEU(Single Event Upset) cross section calculation method were presented in the program. The SEU cross section curves with the linear energy deposition ware obtained. The SEU threshold value and saturation cross section were consistent with the testing data with heavy ions beam. The δ electrons distribution were different in the device material, which were generated by Bi ion with LETs of 99.67 MeV/(cm2·mg) and Bi ion, Xe ion with LETs of 69 MeV/(cm-2·mg). These results indicate δ electrons distribution impacts on the SEU cross section. According to the relation of energy deposition in the sensitive volume, the δ electrons distribution have more and more important effect on the Single Event Effect with reducing the feature size of semiconductor devices.     

Die Relaxation der Geschwindigkeitsverteilungsfunktion der Elektronen im homogenen elektrischen Feld mit elastischen und anregenden Stößen. II. Das Verhalten des Elektronenensembles bei aperiodischer Feldänderung zwischen zwei stationären Zuständen

Recently the relaxation of the electron component was investigated under field-free conditions after sudden switch-off the electric field and otherwise after sudden changing the electric field to a new value of field strength. To continue these papers we consider now the relaxation process of the electron ensemble in the presence of a monotonous time variable electric field. The investigations are based on a computation of time change in the isotropic part of the velocity distribution function of the electrons and of the macroscopic parameters determined by the distribution function. The start-ing-point is the non-stationary Boltzmann equation with stationary initial states taking into consideration elastic and exciting collisions. Besides the representation of the received numerical results a physical interpretation is obtained for the duration of the whole relaxation process, for its initial stage as well as for the momentary stage of the relaxation by introduction of normalized characteristic time quantities. Further characterizing conditions are found related to the relaxation after quasi-jumplike change of the electric field and in the case of quasistationary field alteration respectively. With the introduced characteristic time quantities statements about the degree of realization of one of this limiting cases are possible for any given monotonous field. The investigations are per-formed in a low ionized non-thermal neon plasma.