基于U型波导耦合单微环结构的高灵敏度湿度传感器

首次提出了一种基于U型波导耦合的新型单微环结构湿度传感器,该传感器以聚酰亚胺(polyimide,P1)作为感湿材料,当外界环境相对湿度变化时,引起感湿部位折射率的相应变化,导致传感器的输出光谱发生漂移。根据传输矩阵法推导U型波导耦合单微环结构的传递函数,重点讨论了不同感湿部位对输出光谱的影响,通过Matlab理论仿真,确定以U型波导耦合单微环结构整体作为最佳感湿部位。当U型波导的两个耦合点间的距离为微环周长的整数倍时,相比于传统的单微环结构,自由光谱范围(FSR)实现加倍。外界相对湿度从10%RH变化到100%RH时,传感器的输出光谱漂移量在0.027～0.191 μm之间变化,灵敏度高达0.001 8 μm/%RH,相比于具有高灵敏度的光纤光栅类湿度传感器,灵敏度提高了10~100倍,实现了在高灵敏度感湿的同时兼顾谐振峰两侧大范围的滤波选频。     

串联双微环湿度传感器光谱特性研究

提出了一种基于串联双微环谐振器的新型聚酰亚胺(Polyimide,PI)湿度传感器,采用传输矩阵法和耦合模的理论计算微环谐振器的传递函数,并对比了传统单微环与串联不同半径的双微环的输出光谱特性。外界湿度变化使得聚酰亚胺SOI波导吸收水汽后折射率发生变化,从而引起微环输出光谱发生漂移,通过探测光谱漂移量来测湿度值,得到了串联双微环传感器的灵敏度和测量范围,并且分析了感湿部位不同时谐振器输出光谱特性。理论结果表明：串联不同半径的微环谐振器的自由光谱范围（FSR）要比单微环有所提高,而且串联双微环谐振器整体感湿比单个微环单独感湿的传感性能更优良,可作为最佳的湿敏元件。与传统的单微环传感器相比,串联不同半径的微环结构可提高系统的测量范围和灵敏度,半径为30和50 μm的串联微环谐振器的FSR可达到0.15 μm,传感器测量湿度范围为10%RH～80%RH,灵敏度可达到0.001 7 μm·(%RH)-1。因此串联不同半径的双微环谐振器为制备成本低、结构简单、高灵敏度、可集成的微型湿度传感器件提供一定理论基础。     

一种新型高灵敏度光学微环湿度传感器

提出了以聚酰亚胺（PI）为感湿材料的三耦合点单微环新型湿度传感器。外界湿度变化使得聚酰亚胺SOI微环谐振特性发生变化,最终通过谐振波长的漂移量确定湿度值。讨论了不同部位感湿时系统的传感特性,并且选择了最佳湿敏元件。数值模拟结果表明：与传统的单微环传感器相比,新型传感器具有较高灵敏度和测量范围,Through端口的自由频谱范围可提高3倍。三耦合点单微环谐振器整体结构可作为最佳湿敏元件,该传感器在10%RH~80%RH相对湿度范围内,灵敏度可达到0.98 nm/%RH,该结构为制备高灵敏度可集成微型湿度传感器件提供了一定的理论依据。     

用表面等离子体共振原理检测湿度环境（英文）

采用Kretschmann结构激发表面等离子体,利用多孔陶瓷材料SiO2作感湿材料,当外界环境的相对湿度变化时,引起感湿层SiO2的折射率发生相应变化,导致表面等离子体共振角发生偏移.采用有限元法对传感系统在不同感湿层折射率下的反射谱进行了模拟分析,并根据反射谱的共振半峰宽和共振峰深度对金膜的厚度进行优化.研究结果表明:金膜的最佳厚度为55nm,反射谱的共振角偏移量与感湿层折射率变化呈线性关系,湿度检测的分辨率高达0.37%RΗ,灵敏度达到0.03°/%RH.该研究对基于表面等离子体共振原理的湿度传感器的研制与应用具有一定意义.     

温度测量范围加倍的单微环传感器

本文提出了一种基于U形波导耦合单微环结构的新型SOI(绝缘体上硅)温度传感器.温度变化引起感温部位有效折射率和长度变化,导致传感器的输出光谱发生漂移.根据传输矩阵法和耦合模理论,设计了新型传感器模型,并且分析了感温部位不同时系统输出光谱特性.结果表明:当U形波导耦合单微环整体结构感温时,输出光谱无伪模,消光比达到31 dB,可作为最佳感温元件.相比于传统的双直波导耦合单微环结构,当U形波导的两个耦合点间的距离为微环周长的整数倍数时,FSR(自由光谱范围)可加倍至56 nm,灵敏度提高到89.2 pm/?C,测量范围为298—720 K,实现了SOI微环谐振器的高温测量.     

光纤布拉格光栅嵌入SMS光纤结构的湿度传感器

提出了一种基于光纤布拉格光栅嵌入单模-多模纤芯-单模(single-mode-multimode fiber core-single mode, SMS)光纤结构的湿度传感器。当环境湿度变化时,SMS光纤结构的干涉光谱会发生漂移,而光纤布拉格光栅对湿度不敏感,其纤芯基模保持不变。因此利用SMS光纤结构对环境湿度的敏感性去调制光纤布拉格光栅纤芯基模,通过检测光纤布拉格光栅纤芯基模的反射能量变化就可以实现湿度测量。数值模拟了SMS光纤结构的内部光场分布规律,理论计算了不同环境折射率时,多模纤芯的长度、直径对SMS光纤结构输出能量耦合系数的影响。理论模拟表明,随着环境折射率变化,SMS光纤结构中传输的纤芯基模的输出能量耦合系数会发生变化。同时制作了传感器样品并对其进行了传感实验研究,实验结果表明多模纤芯长35 mm、纤芯直径为85 μm的传感器在45%～95%RH湿度变化范围内,湿度灵敏度为0.06 dBm·(%RH)-1。在20～80 ℃温度范围内,传感器的温度灵敏度为0.008 nm·℃-1,温度所带来的湿度测量误差为0.047%RH·℃-1。传感器具有制作简单、灵敏度高、反射式能量检测等优点,在湿度测量领域有一定的应用价值。     

反馈式跑道型光学微环的传感灵敏度研究

提出了一种由U型反馈波导、跑道谐振腔和敏感环组成的反馈式跑道型光学微环传感器.采用耦合模理论推导了该传感器的归一化输出光强公式,数值分析了传输损耗因子、自耦合因子和敏感环尺寸对归一化输出光强的影响.分析表明:敏感环的损耗因子对归一化输出光强的调制作用明显,只要损耗因子发生微小变化,输出光强即发生较大变化;敏感环工作在弱耦合状态时传感灵敏度较高;敏感环的尺寸对传感灵敏度影响较大,适当地调整敏感环的大小可得到陡峭的输出光强谱线.对结构参数进行优化后不仅可以输出尖锐陡峭的非对称法诺谐振光强谱线,而且具有较高的法诺谐振光谱斜率,能更好地增强传感灵敏度.在信噪比为30dB的测量系统中,优化的反馈式跑道型光学微环传感器的探测极限达4.48×10-8单位折射率.     

无增敏材料修饰的高灵敏度光纤湿度传感器

设计并制作了一种高灵敏度且制作简单的聚甲基丙烯酸甲酯（Polymethyl Methacrylate,PMMA）微球与单模光纤复合的湿度传感器。该光纤湿度传感器由PMMA微球与单模光纤构成。由于在微球中形成了法布里-珀罗腔,当外界环境湿度升高时,PMMA微球吸收水分子体积膨胀,导致法布里-珀罗腔的腔长增长,使得传感器干涉光谱的波峰（谷）发生红移,从而实现湿度传感。对所制作传感器的湿度响应、稳定性和重复性等进行了实验研究,实验结果表明：在30%～80%湿度范围内,该湿度传感器的灵敏度达173.36 pm/%RH,波长漂移随相对湿度变化呈良好的线性关系,其线性度达0.992 26,且具有良好的稳定性和重复性。该PMMA微球与单模光纤复合的湿度传感器具有灵敏度高、结构简单、无需镀膜且易于制作的优点。     

微环谐振腔加速度传感器光谱特性研究

为满足加速度传感器微型化、低成本的需求,提出了一种带有单微环谐振腔的悬臂梁式光学加速度传感器结构,采用耦合模和传输矩阵理论求取了微环谐振器的传递函数,利用检测同一波长处光强度变化的新测量方法实现了对加速度的探测,从而得到了加速度传感器的灵敏度和探测极限,深入研究了不同结构参数对系统灵敏度的影响,数值仿真并分析了输出端口的光谱特性。结果表明：加速度传感器在外界加速度作用时,悬臂梁在应力的作用下会发生弯曲,使得固定在悬臂梁上的微环谐振器发生形变,即微环谐振器的长度和折射率都发生了变化,从而光在微环谐振器中的传输特性发生变化,因此可以通过探测微环输出端光场强度的变化来测定加速度值;悬臂梁的长度、厚度以及微环谐振腔的固定位置都是影响加速度传感器性能的直接因素,并且选择最佳的结构参数可以有效地提高系统灵敏度和精度。经过数值仿真,对于信噪比为30 dB系统,波长在1.515 μm处,悬臂梁的长度、厚度分别为180和3 μm时,系统的灵敏度可达到2.112 g-1,探测极限为1.421×10-3 g,因此在悬臂梁可承受的范围内,选取长度较长的悬臂梁结构能够有效地改善系统的灵敏度和探测极限。该结构为制备高灵敏度、低成本、易于加工的加速度传感器及可嵌入式微型光学器件提供理论基础。     

Slot结构聚合物波导微环光学生物传感器研究

Slot结构在提高集成波导光学传感器灵敏度和降低探测极限值方面具有极大的优势。对基于Slot结构的聚合物PSQ-Ls波导微环光学生物传感器进行了研究。分析了850 nm波段Slot波导的单波导高度、狭缝宽度及单波导宽度对传感器灵敏度的影响,在满足单模传输的条件下,得到了优化的微环传感器横截面尺寸参数。对Slot结构波导微环的弯曲损耗、自由光谱范围等进行了仿真分析,得到微环传感器的消光比、品质因子等随结构参数的变化,确定了优化的微环弯曲半径、耦合效率。与正脊形结构波导微环传感器相比,Slot结构波导微环传感器的灵敏度是前者的两倍,探测极限值是其一半。     

Humidity sensor based on localized surface plasmon resonance of multilayer thin films of gold nanoparticles linked with myoglobin

Layer-by-layer self-assembled multilayer thin films of gold nanoparticles (GNPs) linked with myoglobin (Mb) show substantial sensitivity to humidity at room temperature according to measurements of localized surface plasmon resonance (LSPR) absorption that relies on the interparticle interaction present in the film. The sensor response is reversible, with response and recovery times as low as 5 s. The sensing mechanism is as follows: as the ambient humidity changes, Mb molecules change their size, making the GNP-to-GNP spacing and thereby the interparticle interaction change; the change in the interparticle interaction causes a change in the LSPR absorption of the multilayer thin film. We found that the LSPR band of the multilayer thin film was almost insensitive to both the surrounding refractive index and the adlayer thickness, rendering the multilayer-film-based humidity sensor highly immune to ambient disturbances.     

Bimetallic Silver-Gold Film Waveguide Surface Plasmon Resonance Sensor

It is desirable that a surface plasmon resonance (SPR) sensor is highly sensitive to binding interactions within the sensing region, generate evanescent fields with long penetration depths, and utilize a metal film that is very stable even in extreme environmental conditions. In this study, we present the first example of a wavelength-modulated waveguide SPR sensor with a bimetallic silver-gold film for surface plasmon excitation. The underlying silver yields better evanescent field enhancement of the sensing surface, while the overlying gold ensures that the stability of the metallic film is not compromised. It is shown experimentally that in terms of dλ/dn, the bimetallic film waveguide SPR configuration has a sensitivity of 1232 nm/RIU, greater than two times improvement from the 594 nm/RIU achievable with single gold film waveguide SPR sensor. The higher sensitivity, compact nature, and better evanescent field enhancement of this configuration provides the potential to biosensing applications.     

Bimetallic Silver–Gold Film Waveguide Surface Plasmon Resonance Sensor

Abstract

It is desirable that a surface plasmon resonance (SPR) sensor is highly sensitive to binding interactions within the sensing region, generate evanescent fields with long penetration depths, and utilize a metal film that is very stable even in extreme environmental conditions. In this study, we present the first example of a wavelength-modulated waveguide SPR sensor with a bimetallic silver–gold film for surface plasmon excitation. The underlying silver yields better evanescent field enhancement of the sensing surface, while the overlying gold ensures that the stability of the metallic film is not compromised. It is shown experimentally that in terms of dλ/dn, the bimetallic film waveguide SPR configuration has a sensitivity of 1232 nm/RIU, greater than two times improvement from the 594 nm/RIU achievable with single gold film waveguide SPR sensor. The higher sensitivity, compact nature, and better evanescent field enhancement of this configuration provides the potential to biosensing applications.     

Improvement of optical sensing performances of a double-slot-waveguide-based ring resonator sensor on silicon-on-insulator platform

We demonstrate a label-free photonic biosensor with double slots based on micro-ring resonator. The footprint is less than 25 μm × 15 μm. Finite-difference time-domain (FDTD) method is used to analyze the influence of several key parameters on the performance of the double-slots micro-ring resonators. An asymmetric structure is considered for the ring waveguide in order to improve the sensor's bending efficiency. Our numerical analysis shows that the sensitivity of double-slot micro-ring resonator sensor with the radius of 5 μm reaches a value of 708 nm/RIU. The quality factor of 580 and the free spectral range (FSR) of 33 nm are achieved.     

Optical cavity coupled surface plasmon resonance sensing for enhanced sensitivity

A surface plasmon resonance (SPR) sensing system based on the optical cavity enhanced detection tech-nique is experimentally demonstrated. A fiber-optic laser cavity is built with a SPR sensor inside. By measuring the laser output power when the cavity is biased near the threshold point, the sensitivity, defined as the dependence of the output optical intensity on the sample variations, can be increased by about one order of magnitude compared to that of the SPR sensor alone under the intensity interrogation scheme. This could facilitate ultra-high sensitivity SPR biosensing applications. Further system miniaturization is possible by using integrated optical components and waveguide SPR sensors.