轴对称折叠组合腔CO2激光器的实验研究

对轴对称折叠组合腔CO2激光器进行了相关的实验研究。主要用线图的方式研究了在两种不同混合气体比例条件下,输出功率与放电电流之间和输出功率与放电气压之间的关系。引入辅助气体xe后,输出功率有很大的提高,能够达到35％左右。根据模型结构的实际参数,运用数值计算的方法模拟画出其输出光强和光斑分布图。以三维5根、7根和9根放电...     

The research of phase-locking of more discharge tubes for two-dimensional axisymmetric-fold combination resonator CO2 laser

A method of reflection-injection phase-locking used on two-dimensional axisymmetric-fold combination resonator (ASFC) CO₂ laser has been proposed. The structure characteristics and the method of phase-locking have been introduced. The expression of output light intensity distribution has been deduced by matrix theory and Collins Formula and the output light intensity distribution has been numerically calculated and simulated. Comparing the output light intensity distribution in the case of phase-locking with that of non-phase-locking. The result shows that this method of phase-locking greatly improve the characteristics of output beam.     

Beam profile monitor for pulsed CO2-laser

Commercial beam profile monitors for pulsed CO₂ lasers (10.6 μm wavelength) are expensive and suffer from a low damage threshold. To overcome these problems, a robust detector with a high damage threshold was developed. The detector is made of a special type of graphite which is evaporated during the interaction with the laser beam. A plasma is formed which radiates visible light. Using a conventional fast shutter imaging system, this plasma light directly shows the spatial intensity distribution of the laser beam. The detector works in the power range of 10⁵-10⁷ W/cm²      

激光分离卵磷脂混合物的实验研究

对于沸点相近并且分子自由程相差不大的物质,常规分离方法难以实现有效的分离,激光分离有效地弥补了常规分离方法的不足.用脉冲CO2激光器和连续CO2激光器对大豆卵磷脂混合物进行了激光分离实验,用高效液相色谱对激光辐照前后的样品进行了分析.经192.31 W/cm2的脉冲CO2激光辐照,卵磷脂的质量分数相对提高了26.7%,...     

Cutting and welding using a CO2 laser

Of all the types of lasers now available, the CO₂ laser is particularly suitable for materials working. It has a very high efficiency (15–20%) and a high out-put power (up to several kW). When the laser light is focused by means of a lens or a mirror, a c.w. power density of more than 10⁹ W cm^-2 can be attained. The laser need not be used in vacuum.

The CO₂ laser is a suitable cutting tool for numerous materials. These include metals such as titanium or steel; combustible materials such as paper, textiles and wood; and plastics. The CO₂ laser can also cut hard and brittle materials such as aluminum oxide and silicon carbide. If metals are cut in an oxidizing atmosphere, the cutting speed may be increased. The cutting width, however, is determined by the size of the laser spot. Another important field of application is the growth of single crystals.

Experiments are reported in which the CO₂ laser was used for welding steel, titanium, plastics, quartz, and glass. The advantages of the laser for this application are discussed. A comparative study of laser and electron beam techniques is included.     

Infra-red radiation focusators

This paper presents the results of investigations in the field of diffractive or ‘binary’ computer-generated optics for the infra-red region of the spectrum. The problem of a CO₂-laser beam focusing into a complicated focal domain is considered in detail. Special ray-tracing methods are elaborated to calculate the new analytic functions of diffractive optical elements, called focusators. The development of IR focusators into a ring, uniform planar spots, segments of a straight line, and other focal domains for the CO₂ lasers powered from several watts up to 3 kW is reported. Reflective-type focusators are manufactured by a specific microrelief technology that has some features in common with normal microelectronic technology. Experimental results for focused-beam interaction with rubber, wood, fabric, and plastics are presented for the case of a 30-W laser. Effective laser heat-hardening of steel is achieved by 3-kW CO₂ laser by means of a computer-generated reflective focusator.     

脉冲激光辐照液滴锡靶等离子体极紫外辐射的实验研究

采用波长13.5 nm的极紫外光作为曝光光源的极紫外光刻技术是最有潜力的下一代光刻技术之一, 它是半导体制造实现10 nm及以下节点的关键技术. 获得极紫外辐射的方法中, 激光等离子体光源凭借转换效率高、收集角度大、碎屑产量低等优点而被认为是最有前途的极紫外光源. 本文开展了脉冲TEA-CO₂激光和Nd:YAG激光辐照液滴锡靶产生极紫外辐射的实验, 对极紫外辐射的谱线结构以及辐射的时空分布特性进行了研究.实验发现: 与TEA-CO₂激光相比, 较高功率密度的Nd:YAG激光激发的极紫外辐射谱存在明显的蓝移; 并且激光等离子体光源可以认为是点状光源, 其极紫外辐射强度随空间角度变化近似满足Lambertian分布.     

Parametric studies on generation of short CO2 laser pulses for IR-laser chemistry

Results of parametric studies on short CO₂ laser pulse generation by laser induced dielectric breakdown in a plasma shutter cell are described. From the rise time of such short pulses obtained, threshold breakdown intensity (I_th) has been estimated for different gases. The technique is further extended to obtain 40 ns pulses on two-frequency emission from a single TEA CO₂ laser. Pressure dependent studies of I_th are utilised to model the process of such laser induced plasma.     

Studies on CO2 laser marking

The nature of CO₂ laser marking was studied with a view to putting these lasers to practical use in the semiconductor industry. The marking is found to be due to surface spattering rather than burning, which is the main factor in YAG laser marking. The visibility greatly increases by the application of a surface treatment such as marker ink, varnish or poster color. The CO₂ laser may therefore be used in place of the YAG laser, now widely used for marking, with some merits: CO₂ laser marking is cheaper and faster, and in addition there is no danger of injury from irradiating laser light.     

Cold-cathode, glow-discharge, electron-beam gun pumped short pulse CO2 lasers

A pulsed cold-cathode glow-discharge electron beam gun emitting an electron-beam of 150 keV energy and 45 cm² cross-sectional area has been used to pump a short pulse CO₂ laser. A fast discharge capacitor bank was used to help make the design simpler than that employed in liquid coaxial lines. The system developed is capable of producing a CO₂ laser pulse of 1 J for about 200 ns duration.     

Optimization of a sealed-off CO2 laser resonator by utilizing a genetic algorithm

A genetic algorithm is used to optimize a CO₂ laser resonator. Three optimal parameters of a CO₂ laser resonator (the diameter of the laser discharge tube, the curvature radius of the concave reflector and the transmissivity of the output-mirror) are obtained with the maximum output of the laser power as the objective function in the genetic algorithm. After the optimization, the calculated laser power with the fundamental mode increases by 62% and the measured value increases by 35% in an experiment as compared to a non-optimized case.     

Variation of the gas components of a TEA CO2 laser during its lifetime

An in situ mass-spectrometric sampling technique has been developed for lifetime studies of TEA CO₂ lasers. Using the new technique, an analysis of the gas components of a TEA CO₂ laser during its lifetime has been performed. The results show that the laser output pulse energy was strongly influenced by the oxygen concentration inside the device.     

温度压强对CO_2吸收光谱的影响

为了提高差分吸收CO2探测激光雷达的反演精度,本文采用可调谐半导体激光吸收光谱技术,利用双光路差分实验系统,在不同温度和压强下精确探测了CO2吸收谱线(1.572μm附近)的精细结构,分析了吸收光谱谱型的变化差异,获得了5个温度(287K,297K,311K,315K,324K)的压力增宽系数和吸收截面,推算出了CO2的温度相关指数.这些参数是对现有数据库的补充和完善,确保差分吸收CO2探测激光雷达的精确反演,从而提高其探测能力.     

熔石英损伤修复坑下游光场调制的数值模拟与实验研究

系统研究了熔石英激光损伤修复后的形貌特征,根据测量数据建立了典型的损伤修复坑三维模型,利用标量衍射理论并结合快速傅里叶变换算法研究了修复坑在351 nm激光辐照下游光场调制的分布规律.研究表明,修复坑引起的光场调制会使得下游不同距离位置处出现环形光场增强区和轴上位置光场增强点;环形光场增强区位置距离修复元件较近,其环形调制极大值主要受修复坑深度的影响,且随修复坑深度的增大而逐渐增加;轴上位置光场增强点位置距离修复元件较远,其轴上调制极大值主要受修复坑边缘凸起高度的影响,且随凸起高度的增大而快速增加;环形调制极大值或轴上调制极大值增大的同时,其分布位置与修复元件之间的距离均会逐渐减小.实验验证表明,利用三维修复坑模型得到的下游光场调制数值模拟结果与实验测量结果具有较好的一致性.本研究结果对控制熔石英元件损伤修复形貌特征以抑制调制增强效应给出了具体的控制方向,对修复工艺的改进与完善提供了非常有意义的参考.     

地基CO2廓线探测差分吸收激光雷达

研制了一台利用气溶胶散射信号的CO₂廓线探测差分吸收激光雷达. 系统利用染料激光器实现波长调制, 采用双光路气体吸收池, 结合Voigt拟合方法实现了脉冲红外激光的高精度定标. 针对输出激光带宽较宽的问题, 采取仿真实验评估了影响, 并设计了基于吸收池的订正因子获取方案. 进而, 开展了水平、垂直和连续观测实验, 通过与地面CO₂分析仪测量值的对比, 证明了系统具备优越的精密性和精确性. 实验表明, 该样机能够俘获CO₂浓度随高程和时间变化而产生的变化.     

Beam quality of a high-power CO2 laser MOPA system

In this paper, the effects of amplification of diffraction-limited pulsed CO₂ laser radiation over several meters of amplification length on beam quality and pointing stability are documented. Millijoule pulses are amplified up to 3 J. Generation and amplification of the 10 μm wavelength pulses were performed in the discharge volume of an e-beam sustained CO₂ laser. Beam quality is measured according to the ISO/DIS 11146 standard in terms of the beam quality factor M². Fluence distributions were recorded with a beam analysing system of 100 μm spatial resolution. M² parameter values ranged up to 1.55 for amplified pulse energies of 3 J. The necessity of beam-quality restoring techniques is inferred for the multijoule pulse energy regime.     

Principle of phase-locking of axisymmetric concentric cavity CO2 laser

Based on the phase-locking principle of Gaussian beam, the phase-locking mechanisms of the spherical wave from axisymmetric concentric cavity (ASCC) CO₂ laser are analyzed. And then we study the variety laws of the equiphase surfaces and the light spots of the injected beam. The numerical calculations show that the injected beam could be considered as a spherical wave approximately in the ASCC. The phase-locking of the spherical wave is different from the phase-locking of the Gaussian beam; there are different field distributions between Gaussian beam and spherical wave. And the phase-locking method could improve the maximum value of the light intensity, the encircled energy reflects the degree of phase-locking.     

长光程共振式二氧化碳气体光声传感器研究

二氧化碳(CO₂)是植物光合作用的原材料,也是一种温室气体,其过量地排放会影响动植物的生态环境。在碳达峰、碳中和的背景下,研制高灵敏度的CO₂检测装置具有重要意义。为了监测大气环境中CO₂含量的变化,设计了一种长光程共振式CO₂气体光声传感器,并以此搭建了光声检测装置。以中心波长为2 004 nm的分布式反馈激光器(DFB)作为激发光源,激光射入由漫反射材料制成的球型吸收腔,在腔内多次反射以增加气体的吸收路径。吸收腔外部被两个高热传导率的铝制半球包裹,降低由池体吸收光能后产生的热噪声。吸收腔上耦合一根声学管,当其工作在一阶纵向共振模态时,光声信号被放大,在管子末端达到极大值。为了进一步增大光声信号,通过饱和加湿样品的方式来加快CO₂气体的弛豫速率,加湿后的样品产生的光声信号是干燥样品的2.1倍左右。使用一系列浓度的湿润CO₂样品标定光声检测装置,结果表明,光声信号与浓度之间呈现良好的线性关系。在此基础上,通过对标准气体的检测实验,验证了装置的准确性与稳定性...     

Resonant optoacoustic detector in nondispersive gas analyzer scheme

A nondispersive gas analyzer scheme is suggested, in which the resonant optoacoustic device is used for detection of air sample absorption, where modulation with the appropriate spectral filtration is carried out with the help of pure detecting gas cells. Analyzer performance for CO₂, CO, CH₄, SO₂ and NO is studied. The modulation depth for gas cells was found to be between 0.45 for NO and 0.84 for CO₂. Trace-gas detectivity is limited by acoustical noise, originating from light beam chopper at a level of 10⁻²%. Information about the influence of spectral interference on detection selectivity was obtained.     

Development of a high power gas transport CO2 laser with with cylindrical geometry

The aim of this work is to report the achievement of a light weight, compact, high power CO₂ laser which can be used in industry. The construction and operation of a CO₂ gas transport laser with cylindrical geometry and two parallel electrical discharges are presented. Using a 600 mm diameter, 1400 mm length, 250 kg laser head, we have obtained more than 1.6 kW laser power with 2% stability and 2 mrad full angle divergence. For comparison the results are presented for one electrical discharge laser.