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光学读出式红外成像技术是近年来研究的热点,本文讨论了镜面弯曲对光学检测灵敏度的影响。由双材料微悬臂梁组成的非致冷焦平面阵列通过体刻蚀工艺加工而成,由于残余应力的影响,制成的焦平面阵列将会发生弯曲,应力导致的镜面弯曲将会降低光学探测灵敏度。本文通过傅立叶光学模拟了镜面弯曲对光学探测灵敏度的影响,并通过实验验证了该模型。实验和模拟结果表明,在镜面曲率为0.1mm-1时,光学探测灵敏度将会降低到理想情况的40%。最后我们用这个模型评价了通过表面修饰来提高光学性能的效果。 相似文献
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光学读出式红外成像技术是近年来研究的热点,本文讨论了镜面弯曲对光学检测灵敏度的影响.由双材料微悬臂梁组成的非致冷焦平面阵列通过体刻蚀工艺加工而成,由于残余应力的影响,制成的焦平面阵列将会发生弯曲,应力导致的镜面弯曲将会降低光学探测灵敏度.本文通过傅立叶光学模拟了镜面弯曲对光学探测灵敏度的影响,并通过实验验证了该模型.实验和模拟结果表明,在镜面曲率为0.1mm-1时,光学探测灵敏度将会降低到理想情况的40%.最后我们用这个模型评价了通过表面修饰来提高光学性能的效果. 相似文献
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系统响应率是光学读出微梁焦平面阵列(Focal Plane Array,FPA)红外成像的关键性能参数。在刀口滤波光学读出技术中,系统响应率的主要组成部分——光学读出灵敏度与微梁反光板的长度密切相关,并受到反光板弯曲变形的严重影响。由于残余应力在制作过程中不可避免地存在,微梁反光板都有弯曲变形,膜厚相同的反光板具有相同的变形曲率半径。本文利用傅里叶光学分析了反光板长度和弯曲变形对光学读出灵敏度的影响,构建并实验验证光学读出灵敏度理论模型。根据该模型,分析了系统响应率与反光板长度之间关系,理论分析与实验结果相符。结果表明,通过减薄SiNx厚度并使反光板处于该厚度下的最优长度,不仅能提高红外成像的系统响应率,而且能同时提高红外成像的空间分辨率。 相似文献
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基于MEMS的光力学红外成像 总被引:9,自引:3,他引:9
非制冷红外成像仪以其优良的性价比和高可靠性而倍受关注。近期 ,非制冷的热机械型红外成像仪有望发展成为新的低价格高性能的红外成像设备。本文提出了一种新型光学读出的红外探测仪。此红外探测仪的核心器件焦平面阵列 (FPA)由无硅基底结构的微悬臂梁阵列构成。每个微悬臂梁独立地把入射的红外热辐射转化为被光学系统探测的热变形。它不需要读出电路、真空腔和制冷装置 ,其理论上的噪声等效温度差接近致冷型红外成像系统 ,而制作成本和难度将大幅降低。制作的无硅基底单层膜结构的FPA ,其单元尺寸为 2 0 0 μm× 1 0 0 μm ,阵列大小为 1 5 0× 1 0 0像素数。实验制作的系统探测到温度为 5 0 0K左右的热物体像 ,热像采样频率为 1 2幅 /秒。 相似文献
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基于光学读出非制冷红外成像技术,本文作者提出并成功设计制作了无基底焦平面阵列结构(Focal Plane Array,FPA),不仅简化了制作工艺,而且大幅提升了成像性能。但由于其为单层膜结构,固有频率值低,可能会引起热机械振动噪声(NETDTM),导致噪声等效温度差(NETD)上升。为解决这一问题,本文提出两种改进的加强梁结构,借助有限元简化模型和激光位移传感器,通过数值模拟和实验验证,证实这两种结构可以大幅度提高FPA固有频率值(分别从74Hz提升至835Hz和404Hz),NETDTM降低约两个数量级,从而实现了对FPA的优化设计。 相似文献
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提出了一种大展弦比机翼管路的抗大变形设计与优化方法。首先建立了大展弦比机翼平板-不同布局管路的装配简化模型;然后分析了在机翼大变形下,管道的弯曲位置、弯曲半径、横向距离、弯曲角度等几种不同布局参数,对管路根部应力、最大应力和卡箍处变形的影响关系。结果表明:弯曲位置与横向距离对应力有较大影响,弯曲位置靠近机翼根部可以降低管道根部应力,但是最大应力显著增加,横向距离的增加可以降低管路根部应力以及最大应力;弯曲位置和弯曲半径对卡箍处变形有较大影响,随着弯曲位置从机翼板根部向变形处移动,卡箍处变形量均先减小后增加,弯曲半径的增加会降低卡箍处变形量。采用遗传算法得到在机翼大变形下最优的管形布局,结果表明,卡箍附近最大应力比直管降低了51%。 相似文献
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由于军事和商业应用的巨大潜力,红外成像技术至今仍是研究热点之一。针对本课题组提出的基于MEMS和光学读出的新型非制冷红外成像技术,本文一方面通过有限元仿真分析,详细讨论了新型无基底双材料微梁阵列FPA的热转换效率和热变形效率,另一方面通过光学理论分析,详细讨论了光学读出系统在极限操作下的光学测量灵敏度。理论和仿真分析显示,课题组提出的非制冷红外成像技术的NETD的理论极限与当前制冷型红外成像技术的典型指标相当,约为4mK。同时,本文对设计制作的FPA,在构建的系统上进行了红外实时成像实验和理论仿真分析,显示其系统级NETD已达到110mK。 相似文献
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在光学读出非制冷红外热像仪焦平面阵列(FPA,Focal Plane Array)真空封装结构中,硼硅玻璃和双面镀增透膜的锗片分别作为透可见光和透红外光的窗口材料.由于锗窗上增透膜不能承受高温(<250℃),同时FPA也不能承受高温(<100℃),因此封装过程须在低温下进行,并对锗窗上的增透膜及FPA进行保护.本文提出了一种用于锗-硼硅玻璃低温扩散焊接的局部加热方法.该方法从导热系数较大的锗窗外表面加热(200℃),而导热系数较小的硼硅玻璃窗口外表面维持低温(60℃).有限元模拟计算结果表明,该加热过程稳态情况下待焊接区域温度约200℃,满足低温焊接的温度要求.锗窗上温度(200℃)低于250℃,且FPA区域的温升在75℃以下.用实验方法对模拟结果进行了验证,实验结果同模拟结果一致,证明该方法能够有效地保护FPA及锗窗上的增透膜. 相似文献
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This paper describes coherent gradient sensing (CGS) as an optical, full-field, real-time, nonintrusive, noncontact technique for measurement of curvature and curvature changes in single-layered and multilayered thin films deposited on substrates. The sensitivity of the basic CGS technique is enhanced using optical fringe multiplication to map curvature in very flat specimens (k0.001 m–1). Subsequently, this curvature measurement technique is applied to the determination of the yield properties of thin films subjected to cyclic thermomechanical loading. 相似文献
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There are deviations between real parameters and thermal design parameters on thermophysical attribute of focal plane assembly (FPA). The parameters are difficult to be determined accurately and the thermal design scheme will be affected with the values of the parameters. The thermal design problem of FPA is described by means of system sensitivity theory. The in-orbit heat balance equations are established, and the thermal design parameters, which might affect the temperature distribution of the FPA, are given. As an example, the sensitivity of thermal design parameters is analyzed for a FPA in a space spectral imaging instrument. A basis to determine the structural and thermophysical parameters for FPA is gotten, furthermore, an analytical method is provided for reliability validation of thermal design and operating reliability on orbit. It is shown that contact heat-transfer coefficient between mounted surfaces and surface emissivity are the main parameters affecting mean temperature of Charge converse device (CCD). The power of the inner heat source, thermal conductivity and inner contact heat-transfer coefficient are the primary parameters affecting temperature difference between CCD and the heat-transfer block. The thermal test is set up, and it is illuminated that the sensitivity analysis strategy based on the thermal design scheme is effective and feasible. 相似文献
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Opposition controlled fully developed turbulent flow along a thin cylinder is analyzed by means of direct numerical simulations. The influence of cylinder curvature on the skin-friction drag reduction effect by the classical opposition control (i.e., the radial velocity control) is investigated. The curvature of the cylinder affects the uncontrolled flow statistics; for instance, skin-friction coefficient increases while Reynolds shear stress (RSS) and turbulent intensity decrease. However, the control effect in the case of a small curvature is similar to that in channel flow. When the curvature is large, the maximum drag reduction rate decreased. However, the optimal location of the detection plane is the same as that in a flat plate. Further, the drag reduction effect is achieved even on a high detection plane where the drag increases in the flat plate. Although a difference in the drag reduction effect can be observed with a change in the curvature, its mechanism considered in this analysis based on the transport of the Reynolds stress is similar to that of the flat plate. 相似文献
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在基于光杠杆原理检测微悬臂梁变形的生化传感实验系统中,液体折射率的变化会导致PSD上光斑的位移,从而影响系统的检测信号。本文从理论上分析了在不同检测光束的入射角度、微梁的放置角度等参数条件下,液体折射率的变化对系统检测信号的影响。结果表明:在传统的光路下,液体折射率改变10-3引起的光斑位移与一般的生化反应引起的位移相当,即液体折射率的改变严重影响系统的检测信号。通过理论分析还发现在适合的参数配置下,可以忽略折射率变化对系统检测信号的影响。同时,参数的改变不影响系统的检测灵敏度。理论分析的结果得到了实验验证。 相似文献
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We present an optical detection technique, called the beam deflection probe, to accurately measure contact times of normal-incidence impacts of steel and sapphire spheres with a transparent glass block. It exploits the deformation of the area that is in a mechanical touch during the rebound. The deformation of the surface acts as a dynamic contact mirror. When illuminated by a laser beam, total internal reflection takes place at the contact mirror, the beam is deflected from it, and its angular deflection history is monitored by a quadrant photodiode. A simple threshold-level data processing of the photodiode signals is used to determine the impact duration. It is shown that the shape of the signal is highly dependent on the location of the impact relative to the center of the laser-beam illuminated area while the determination of the contact time does not depend on the impact position. Using an automated ball release mechanism, the contact time of low-velocity impacts was measured for various ball diameters and approach velocities conforming to the Hertz contact theory. The proposed optical detection of contact times supplements the existing measurement techniques and represents the only alternative to the piezoelectric detection when contact times are to be measured on the microsecond scale. 相似文献