Characterization of an atmospheric pressure plasma jet for surface modification and thin film deposition

In this paper, an experimental study is presented to characterize a commercially available atmospheric pressure plasma jet (APPJ) kINPen which can be used for local surface modification, e.g. changing the wettability as well as for thin film deposition with silicon-organic and metal-organic precursors to enhance scratch resistance or to lower the gas permeability. Characterization of the jet discharge has been carried out by three methods: (i) measurement of the energy influx from the jet plasma to a substrate by a calorimetric probe, (ii) spatial resolved investigation of the plasma beam by optical emission spectroscopy (OES) and (iii) observation of the plasma jet by video imaging. The deposited SiO _x and AlO _x films were analyzed by XPS measurements.     

层流等离子体射流温度与速度测量

本文分别应用光谱诊断、水冷皮托管及小尺寸杆状热流探针,对自由射入空气中的纯氩层流等离子体射流中心最高温度、滞止压力以及最大热流密度进行了测量,由测量结果导出了层流射流的中心最大速度,得到了射流气体温度和速度的轴向分布及其随工作电流和气流量变化的一些规律,探讨了气体的温度和速度对其向探针表面换热系数的影响。     

Modelling of the plasma-substrate interaction and prediction of substrate temperature during the plasma heating

Temperature of the substrate during plasma heating and spraying plays an important role on quality of the substrate and coating. In this study a three dimensional numerical model is developed to simulate the Ar-N₂ plasma jet and conjugate heat transfer between plasma and substrate. The influencing of operating parameters on thermal flux from the plasma to the substrate and substrate temperature are discussed. Transient simulations are carried out to predict the substrate temperature with heating time. The arc current, gas flow rate, stand-off distance, substrate material and environment around the substrate significantly affect the thermal flux to the substrate. Heat flux to the substrate cannot be neglected in the coating built-up models. Present model is validated by comparing the results of present model with previous predictions and measurements.     

氩等离子体射流在空气环境中冲击平板层流流动与传热的数值模拟

本文采用组合扩散系数方法处理不同气体组分之间的扩散，对氩等离子体的流射入空气环境并撞击平板时的层流流动和传热进行了数值模拟．这种新的处理混合气体中质量扩散的方法有助于更准确地描述等离子体条件下的组分扩散与能量输运。文中给出了射流中速度、温度及氩质量分数的分布情况，以及基板处热流密度分布的若干典型的数值模拟结果．     

Electrothermal efficiency, temperature and thermal conductivity of plasma jet in a DC plasma spray torch

A study was made to evaluate the electrothermal efficiency of a DC arc plasma torch and temperature and thermal conductivity of plasma jet in the torch. The torch was operated at power levels from 4 to 20 kW in non-transferred arc mode. The effect of nitrogen in combination with argon as plasma gas on the above properties was investigated. Calculations were made from experimental data. The electrothermal efficiency increased significantly with increase in nitrogen content. The plasma jet temperature and thermal conductivity exhibited a decrease with increase in nitrogen content. The experiment was done at different total gas flow rates. The results are explained on the basis of dissociation energy of nitrogen molecules and plasma jet energy loss to the cathode, anode and the walls of the torch     

大气感耦射流等离子体加工中的电子温度及激发光谱研究

大气感耦射流等离子体加工作为新型超光滑表面加工技术,其高密度等离子体激发能力为充分激发反应气体,提高材料去除率提供了有力条件。利用发射光谱仪,对加工过程中大气感耦射流等离子体激发的400~1 000 nm范围内的光谱进行了测量。并利用峰值明显,能级差较大的谱线计算电子温度。由于测量的谱线强度是等离子体发射系数沿弧长方向的积分值,且感耦射流等离子体具有回转对称性,因此可利用阿贝尔变换求取光谱发射系数,进而通过玻尔兹曼图谱法计算电子温度。计算结果表明由于趋肤效应和旋流进气的双重作用,处于加工区域的温度分布呈现出双峰形;随着距离增大,双峰效应逐渐减弱,温度分布趋于平滑。研究也表明随着加工距离的增大,等离子体边缘逐渐偏离局部热力学平衡状态,玻尔兹曼图谱法计算电子温度的适用性降低,导致等离子体边缘的温度拟合优度值逐渐降低。进一步对通入反应气体CF₄后的等离子体光谱进行了研究,通入反应气体后的等离子体呈现鲜亮的蓝绿色,是由于激发反应气体后产生的位于400~650 nm范围的带状光谱所致,分析表明谱图中的带状光谱为双原子分子C₂谱带Swan Bands,而该双原子分子是感耦氩等离子体对碳源CF₄的充分激发产生。     

Characteristics of an atmospheric‐pressure radio frequency‐driven Ar/H2 plasma discharge with copper wire in tube

This paper investigates a plasma discharge driven by a 13.56 MHz radio frequency (RF) power supply at atmospheric pressure, in which a copper wire is inserted in the discharge tube for the deposition of Cu films. The results show that the jet plasma formation originates from the discharge between the copper wire and induction coil because of its electrostatic field. The axial distribution of the plasma parameters in the RF plasma jet, namely the gas temperature, excitation temperature, and electron number density, is determined by diatomic molecule OH fitting, Boltzmann slope, and H_β Stark broadening, respectively. The discharge current significantly declines when a small amount of hydrogen is added to the argon as the plasma‐forming gas, and the gas temperature of discharge plasma increases considerably.     

一种新型大气压毛细管介质阻挡放电冷等离子体射流技术

介绍一种结构设计简单、操作运行方便的新型毫米量级大气压冷等离子体射流发生技术.这种射流可以在大气压条件下，利用多种工作气体(如Ar,He,N₂)，通过毛细管介质阻挡放电(DBD)的方式实现.使用频率为33kHz，峰值电压为1—12kV的双向脉冲电源，利用Ar,He,N₂等工作气体，在毛细管内形成了稳定的冷等离子体射流.放电区域的光辐射空间分布利用商用CCD摄像机记录，从中研究放电形态和空间分布，观察到了在DBD区域的流动气体放电和在毛细管出口处形成的等离子体射流 关键词： 冷等离子体射流 毛细管介质阻挡放电 射流射程 射流激发温度     

直流纯氩层流等离子体射流的长度变化

采用主要由阴极、阳极以及介于阴极和阳极之间的中间段组成的直流非转移式电弧等离子体发生器,在大气压条件下,比较系统地研究了纯氩层流等离子体射流的长度随着弧电流、气体流量以及发生器结构而变化的规律。结果表明:层流射流的长度随弧电流和工作气流量的增加而增长;层流向湍流流动转变的临界气流量值随弧电流增大而提高;在发生器的伏安特性呈大梯度变化的情况下,射流长度随弧电流的变化幅度增大。     

等离子体合成射流能量效率及工作特性研究

基于等离子体激励器工作过程中气体放电的焦耳加热作用, 并结合局部热力学平衡等离子体物理假设, 开展了等离子体合成射流三维唯象数值研究, 获得了完整工作周期内等离子体合成射流流场发展演变过程. 研究结果表明, 单次能量沉积建立的自维持周期性射流中存在有实现激励器腔体"充分" 回填的最大脉冲工作频率––饱和频率. 大的能量沉积、小的激励器出口直径和相同腔体体积下大的径高比都可以产生速度更高的射流, 而射流速度的提高会伴随有饱和频率的降低. 一个饱和周期内, 最多约有16%的初始腔内气体喷出, 吸气复原仅能实现初始腔体质量90%左右的回填.一个大气压条件下, 容性电源供能的等离子体合成射流激励器电能向气体热能和射流动能的转化效率分别约为5%和1.6%. 关键词： 等离子体激励器 合成射流 能量效率 饱和频率     

Laser plasmatron for diamond coating deposition

An experimental installation with a laser plasmatron based on a continuous wave CO₂ laser with a radiation power of up to 3.5 kW has been created. The plasmatron design makes it possible to bring out the plasma jet into atmospheric air both along and across the laser beam direction. The spatial temperature distributions on the metal substrate surface heated by the plasma jet are measured. The threshold power for optical discharge maintenance as a function of the gas flow rate and the focal length of the focusing lens are obtained for an Ar and Ar/CH₄/H₂ gas mixture under atmospheric pressure; the radiation spectrum of the discharge plasma is measured. A one-dimensional model of the discharge for estimation of its geometrical parameters in a convergent laser beam with consideration of radiation refraction on the discharge is given.     

基于自发辐射光谱的超声速流场测速技术

等离子体状态参数测量是研究等离子体特性,开展等离子体模拟再入环境、等离子体隐身、等离子体减阻以及边界层控制等研究的重要基础。利用等离子体射流的自发辐射光谱,提出了一种基于光学多普勒频移效应的等离子体超声速射流测速的方法。首先,测量了等离子体中Ar原子产生的自发辐射光谱,选择696.54 nm的特征谱线,作为等离子体发生器测速实验的运动光源;其次,使用光谱仪、传能光纤、EMCCD相机和高光谱分辨法布里-珀罗（F-P）干涉仪,设计了高温等离子体速度测量光路;最后,在氩壁稳电弧等离子体发生器上,开展了超声速射流速度测量实验。实验中,同一测点的Ar原子产生的自发辐射光谱,分别被与等离子体射流运动方向成49°和90°夹角的收集透镜收集进入光谱仪,经光谱仪分光后仅保留特征谱线696.54 nm附近自发辐射光进入传能光纤,从而消除其他波长的自发辐射光的影响;光谱仪输出的特征辐射光谱,经光纤传输及透镜整形成平行光后,精细度30、自由光谱范围6.6 GHz的F-P干涉仪,形成多光束干涉圆环,并由EMCCD相机采集,实现对特征谱线的超高精度分辨;根据多普勒原理,不同角度收集的同一测点处Ar 696.54 nm特征谱线的频移将有所不同,EMCCD采集的干涉圆环半径也将不同,通过测量同一级次不同收集方向特征谱线形成的干涉圆环半径改变量,可测得高温等离子体射流流动速度。针对同一喷管开展了两车对比试验,实验测得两车射流轴向速度分别为791和783 m·s-1,具有较好的重复性。结果表明基于多普勒效应,利用高温气体自发辐射光谱,结合高光谱分辨F-P干涉仪,能够实现高温等离子体射流速度的精确测量,该方法属于非接触测量,不干扰流场,尤其适用于传统传感器难以应用的高温流场测量。     

The heating and acceleration dynamics of Al2O3 particles in the axisymmetric heterogeneous flow emanating from a plasma torch with inter-electrode inserts

Measured data on the temperature and velocity of Al₂O₃ particles of size fraction 34±6 μm in the jet emanating from a DC plasma torch with inter-electrode inserts under conditions of axisymmetric heterogeneous flow are reported. The velocity and temperature of individual particles were measured using a laser-optical diagnostic complex, which was a combination of a bifocal laser anemometer and a pyrometer based on a compact spectrometer. For measuring the temperature of individual particles in the particle-laden plasma jet, three-color pyrometry was used. The obtained data on the characteristics of particles in the jet emanating from the plasma spray torch with inter-electrode inserts equipped with a unit for radial-annular injection of powder into the plasma jet show that the implemented conditions for processing powder materials allow reaching a high homogeneity of the aggregate state of particles in the jet flow (～ 100 % of melted particles).     

ICP微等离子体射流在快速成形制造中的应用

本文开展了大气压甚高频感应耦合(ICP)微等离子体射流的特性与应用研究.在150 MHz甚高频,功率为90 W条件下获得温度高达上千度的温热等离子体射流,射流长度近3 cm.随着气流量的增加射流将呈现层流到湍流的转变,长度先增后减;而功率对于射流长度的影响存在着一个上限,当等离子体吸收的能量与扩散损失的能量达到平衡时,射流长度将达到最大.利用这种ICP微等离子体射流进行了微尺寸金属铜的快速成形制造,得到了球冠状和柱状铜金属件.在扫描电子显微镜下观察到沉积物表面最小颗粒尺寸远小于铜粉颗粒;X射线衍射结果显示沉积物表面存在弱氧化物峰,这是沉积过程中空气被射流卷入所致.     

Characteristics of helium DC plasma jets at atmospheric pressure with multiple cathodes

A novel DC plasma torch with multiple cathodes is developed for generating laminar, transitional and turbulent plasma jets. The jet's characteristics, including jet appearance, voltage fluctuation, thermal efficiency, specific enthalpy, and distributions of temperature, pressure, and velocity, are experimentally investigated. The results show that as the gas flow rate increases, the plasma jet transforms first from the laminar state to the transitional state and second to the turbulent state. Compared with the transitional/turbulent jet, the laminar jet possesses not only a better stability and a longer hightemperature zone but also a higher average/core temperature and a higher specific enthalpy at the nozzle's outlet. With the change of jet states from the laminar to the turbulent flow, the core pressure and velocity at the nozzle's outlet increase,while the decaying rates of temperature/pressure/velocity along the jet's axial direction increase sharply. Furthermore, applications of laminar, transitional and turbulent jets for zirconia spray coating are described. The test results indicate that the long laminar jet is favorable for the deposition of a high-quality coating because the powder particles injected into the laminar jet may have better heating and lower kinetic energy.     

Production of long,laminar plasma jets at atmospheric pressure with multiple cathodes

Plasma jets from conventional non‐transferred arc plasma devices are usually operated in turbulent flows at atmospheric pressure. In this paper, a novel non‐transferred arc plasma device with multiple cathodes is introduced to produce long, laminar plasma jets at atmospheric pressure. A pure helium atmosphere is used to produce a laminar plasma jet with a maximum length of >60 cm. The influence of gas components, arc currents, anode nozzle diameter, and gas flow rate on the jet characteristics is experimentally studied. The results reveal that the length of the plasma jet increases with increasing helium content and arc current but decreases with increasing nozzle diameter. As the gas flow rate increases, the length of the plasma jet initially increases and then decreases. Accordingly, the plasma jet is transformed from a laminar state to a transitional state and finally to a turbulent state. Furthermore, the anode arc root behaviours corresponding to different plasma jet flows are studied. In conclusion, the multiple stationary arc roots that exist on the anode just inside the nozzle entrance are favourable for the generation of a laminar plasma jet in this device.     

Effect of Nozzle Geometry on the Rewetting of Hot Surface During Jet Impingement Cooling

An investigation has been carried out to investigate the effect of nozzle geometry on hot horizontal surface rewetting during water jet impingement cooling. The test surface of 800 ± 10°C initial surface temperature is cooled by water jet of 22 ± 1°C temperature. The water flow is varied to maintain the jet Reynolds number in a range of 5,000 to 24,000. The rewetting phenomena with sharp-edged and tube-type nozzles are compared on the basis of rewetting temperature, wetting delay, rewetting velocity, and maximum surface heat flux. The rewetting performance with tube-type nozzle is better than the sharp-edged nozzle particularly for the downstream spatial locations; however, maximum surface heat flux at the stagnation region is higher with the sharp-edged nozzle.     

激光烧蚀等离子体射流与固体靶相互作用实验研究

利用激光烧蚀等离子体射流可以获得数km/s 甚至上千km/s 的射流速度，远超目前绝大多数设备所能提供的模拟速度，并且覆盖了极大的温度与密度范围，作为加载手段具有广阔的应用前景。通过实验方法，探索和发展激光烧蚀等离子体射流这一新型实验模拟手段，利用高功率激光烧蚀产生高温高压等离子体射流，实现超高速气体动力学实验室模拟的新途径。以此作为加载条件，研究超高速物体与气体相互作用的气体动力学特性。通过建立激光烧蚀等离子体射流与固体靶相互作用实验方法，可进一步研究等离子体射流的产生、发展以及高速物体气体动力学，为下一步开展天体物理、小行星形貌、超高速陨石与行星大气相互作用机制等相关研究奠定基础。     

Active plasma grid for on-demand airflow mixing increase

The present paper concerns the electromechanical characterization of an actuator composed of a ceramic plate perforated by 121 holes housing embedded and printed electrodes between which a high voltage is applied. The electrode arrangement is such that the holes where the gas flows are surrounded by surface discharges. Electrical measurements and iCCD images show that the discharge behaves as a typical surface dielectric barrier discharge with streamer and glow regimes during one period of the AC sine voltage. Particle image velocimetry has been used to measure the jet flow produced by the discharge. The plasma discharge is at the origin of a wall jet with mean velocity of about 2.2 m/s, oriented from the active electrode to the grounded one. The capability of this discharge for promoting mixing by reducing the length of the jet core is demonstrated for flow velocities from 20 up to 60 m/s. In all the tested cases, the actuator can improve the mixing downstream of the perforated plate, when periodic perturbations are imposed at the jet column mode (St_D = 0.3).