Optimization of TXRF measurements by variable incident angles

Variable incident angles in TXRF instrumentation open up new possibilities in the field of analytical quality assurance of TXRF measurements as well as the possibility of optimizing the measurement angle with respect to the sample carrier. Measurements on the same sample with different incident angles allow a check to be made on the behavior of the internal standard and the elements under investigation within the sample, which makes quantification more reliable, even for difficult samples. This is demonstrated on the example of standard reference material NIST 1633a comparing the relative fluorescence intensities of the elements K, Ti and Fe obtained from a sample prepared from a suspension and a digestion of the SRM material, respectively. Furthermore, it will be shown how the measurement conditions for different sample carrier materials such as quartz and acrylic glass can be optimized by measuring angular-dependent signal and background intensities.     

An electrochemical enrichment procedure for the determination of heavy metals by total-reflection X-ray fluorescence spectroscopy

An electrolytic separation and enrichment technique was developed for the determination of trace elements by total-reflection X-ray fluorescence spectroscopy (TXRF). The elements of interest are electrodeposited out of the sample solution onto a solid, polished disc of pure niobium which is used as sample carrier for the TXRF measurement. The electrochemical deposition leads to a high enrichment of the analytes and at the same time to a removal of the matrix. This results in substantially improved detection limits in the lower picogram per gram region. The deposited elements are directly measured by TXRF without any further sample preparation step. The homogeneous thin layer of the analytes is an ideal sample form for TXRF, because scattered radiation from the sample itself is minimized. The proposed sample preparation method is useful particularly for the analysis of heavy metals in liquid samples with for TXRF disturbing matrices, e.g. sea water.     

Thin film characterization by total reflection x-ray fluorescence

Sensitive and accurate characterization of films thinner than a few nm used in nanoelectronics represents a challenge for many conventional production metrology tools. With capabilities in the 10¹⁰ at/cm², methods usually dedicated to contamination analysis appear promising, especially Total-reflection X-Ray Fluorescence (TXRF). This study shows that under usual configuration for contamination analysis, with incident angle smaller than the critical angle of the substrate, TXRF signal saturation occurs very rapidly for dense films (below 0.5 nm for HfO₂ films on Si wafers using a 9.67 keV excitation at 0.5°). Increasing the incident angle, the range of linear results can be extended, but on the other hand, the TXRF sensitivity is degraded because of a strong increase of the measurement dead time. On HfO₂ films grown on Si wafers, an incident angle of 0.32° corresponding to a dead time of 95% was used to achieve linear analysis up to 2 nm. Composition analysis by TXRF, and especially the detection of minor elements into thin films, requires the use of a specific incident angle to optimize sensitivity. Although quantitative analyses might require specific calibration, this work shows on Co–based films that the ratio between minor elements (W, P, Mo) and Co taking into account their relative sensitivity factors is a good direct reading of the composition.     

Elemental Analysis of Copper-Zinc Ores by Total Reflection X-Ray Fluorescence using Nonaqueous Suspensions

Novel rapid determination of copper-zinc ore elemental composition by total reflection X-ray fluorescence (TXRF) is proposed. Approaches for solid state sample analysis by TXRF are provided. The sample preparation is chosen to obtain the suspensions in ethylene glycol. The optimum suspension preparation conditions (sample mass, volume of dispersion medium) and the measurement conditions (internal standard element, spectra acquisition time) were determined. The sedimentation stability of suspensions was studied. It was found that the suspensions remain stable for approximately 2?min, which is sufficiently long for the sampling the suspension. The proposed technique allows determining the elemental composition of solid ore samples without sample digestion. The sample preparation time takes approximately 20?min. The relative standard deviation of the analytical results did not exceed 10%.     

Performance of total reflection and grazing emission X-ray fluorescence spectrometry for the determination of trace metals in drinking water in relation to other analytical techniques

An intercomparison survey has been carried out in order to evaluate the performance of two related X-ray fluorescence techniques as compared to the achievements of several other analytical techniques applied for trace elements determination in drinking water. A relatively new technique, total reflection X-ray fluorescence (TXRF) and a novel related technique, grazing emission X-ray fluorescence (GEXRF) have been used for the analysis of a mineral water sample. The concentrations of the following elements have been determined: Na, Mg, K, Ca, Ni, Cu, Zn and Sr. The mineral water sample has also been analyzed by a number of other analytical techniques, routinely utilized in drinking water quality control. The analyses were performed in eleven laboratories which reported 286 individual determinations producing 75 laboratory means. From the obtained results, it can be concluded that the TXRF technique is suitable for a direct determination of heavy elements in drinking water (above potassium, Z = 19). This technique can compete with other analytical techniques routinely used in water quality monitoring. First results obtained with GEXRF spectrometry show that this technique can be successfully applied for the determination of low-Z elements in drinking water. However, results for sodium and magnesium were systematically too low, indicating that modifications of the quantification procedure may be required to improve the accuracy of determination for these light elements.     

Applications of total reflection X-ray fluorescence spectrometry in trace element and surface analysis

Total reflection X-ray fluorescence spectrometry (TXRF) is presented as a genuine surface analytical technique. Its low information depth is shown to be the characteristic feature differentiating it from other energy dispersive X-ray fluorescence methods used for layer and surface analysis. The surface sensitivity of TXRF and its analytical capability together with the limitations of the technique are discussed here using typical applications including the contamination control of silicon wafers, thin layer analysis and trace element determination. For buried interfaces and implantation depth profiles in silicon a combination of TXRF and other techniques has been applied successfully. The TXRF method has the particular advantage of being calibrated without the need for standards. This feature is demonstrated for the example of the element arsenic.     

Improvement of total reflection X-ray fluorescence analysis of low Z elements on silicon wafer surfaces at the PTB monochromator beamline for undulator radiation at the electron storage ring BESSY II

Several different total reflection X-ray fluorescence (TXRF) experiments were conducted at the plane grating monochromator beamline for undulator radiation of the Physikalisch-Technische Bundesanstalt (PTB) at the electron storage ring BESSY II, which provides photon energies between 0.1 and 1.9 keV for specimen excitation. The lower limits of detection of TXRF analysis were investigated for some low Z elements such as C, N, O, Al, Mg and Na in two different detection geometries for various excitation modes. Compared to ordinary XRF geometries involving large incident angles, the background contributions in TXRF are drastically reduced by the total reflection of the incident beam at the polished surface of a flat specimen carrier such as a silicon wafer. For the sake of an application-oriented TXRF approach, droplet samples on Si wafer surfaces were prepared by Wacker Siltronic and investigated in the TXRF irradiation chamber of the Atominstitut and the ultra-high vacuum TXRF irradiation chamber of the PTB. In the latter, thin C layer depositions on Si wafers were also studied.     

Performance of total reflection and grazing emission X-ray fluorescence spectrometry for the determination of trace metals in drinking water in relation to other analytical techniques

An intercomparison survey has been carried out in order to evaluate the performance of two related X-ray fluorescence techniques as compared to the achievements of several other analytical techniques applied for trace elements determination in drinking water. A relatively new technique, total reflection X-ray fluorescence (TXRF) and a novel related technique, grazing emission X-ray fluorescence (GEXRF) have been used for the analysis of a mineral water sample. The concentrations of the following elements have been determined: Na, Mg, K, Ca, Ni, Cu, Zn and Sr. The mineral water sample has also been analyzed by a number of other analytical techniques, routinely utilized in drinking water quality control. The analyses were performed in eleven laboratories which reported 286 individual determinations producing 75 laboratory means. From the obtained results, it can be concluded that the TXRF technique is suitable for a direct determination of heavy elements in drinking water (above potassium, Z = 19). This technique can compete with other analytical techniques routinely used in water quality monitoring. First results obtained with GEXRF spectrometry show that this technique can be successfully applied for the determination of low-Z elements in drinking water. However, results for sodium and magnesium were systematically too low, indicating that modifications of the quantification procedure may be required to improve the accuracy of determination for these light elements. Received: 5 January 1998 / Revised: 17 February 1998 / Accepted: 18 February 1998     

Analysis of low Z elements in various environmental samples with total reflection X-ray fluorescence (TXRF) spectrometry

Recently there is a growing interest in low Z elements such as carbon, oxygen up to sulphur and phosphorus in biological specimen. Total reflection X-ray fluorescence (TXRF) spectrometry is a suitable technique demanding only very small amounts of sample. On the other side, the detection of low Z elements is a critical point of this analytical technique. Besides other effects, self absorption may occur in the samples, because of the low energy of the fluorescence radiation. The calibration curves might be not linear any longer. To investigate this issue water samples and samples from human cerebrospinal fluid were used to examine absorption effects. The linearity of calibration curves in dependence of sample mass was investigated to verify the validity of the thin film approximation. The special requirements to the experimental setup for low Z energy dispersive fluorescence analysis were met by using the Atominstitute's TXRF vacuum chamber. This spectrometer is equipped with a Cr-anode X-ray tube, a multilayer monochromator and a SiLi detector with 30 mm² active area and with an ultrathin entrance window. Other object on this study are biofilms, living on all subaqueous surfaces, consisting of bacteria, algae and fungi embedded in their extracellular polymeric substances (EPS). Many trace elements from the water are bound in the biofilm. Thus, the biofilm is a useful indicator for polluting elements. For biomonitoring purposes not only the polluting elements but also the formation and growth rate of the biofilm are important. Biofilms were directly grown on TXRF reflectors. Their major elements and C-masses correlated to the cultivation time were investigated. These measured masses were related to the area seen by the detector, which was experimentally determined. Homogeneity of the biofilms was checked by measuring various sample positions on the reflectors.     

Investigation of element distribution and homogeneity of TXRF samples using SR-micro-XRF to validate the use of an internal standard and improve external standard quantification

Total reflection X-ray fluorescence analysis (TXRF) offers a nondestructive qualitative and quantitative analysis of trace elements. Due to its outstanding properties TXRF is widely used in the semiconductor industry for the analysis of silicon wafer surfaces and in the chemical analysis of liquid samples. Two problems occur in quantification: the large statistical uncertainty in wafer surface analysis and the validity of using an internal standard in chemical analysis. In general TXRF is known to allow for linear calibration. For small sample amounts (low nanogram (ng) region) the thin film approximation is valid neglecting absorption effects of the exciting and the detected radiation. For higher total amounts of samples deviations from the linear relation between fluorescence intensity and sample amount can be observed. This could be caused by the sample itself because inhomogeneities and different sample shapes can lead to differences of the emitted fluorescence intensities and high statistical errors. The aim of the study was to investigate the elemental distribution inside a sample. Single and multi-element samples were investigated with Synchrotron-radiation-induced micro X-ray Fluorescence Analysis (SR-μ-XRF) and with an optical microscope. It could be proven that the microscope images are all based on the investigated elements. This allows the determination of the sample shape and potential inhomogeneities using only light microscope images. For the multi-element samples, it was furthermore shown that the elemental distribution inside the samples is homogeneous. This justifies internal standard quantification.     

Determination of mercury by total-reflection X-ray fluorescence using amalgamation with gold

Analysis by total-reflection X-ray fluorescence (TXRF) is unsuitable for determining mercury concentrations because the usual sample preparation produces evaporation and loss of this element as a consequence of its high vapour pressure and low boiling point.A method that has been developed to achieve this determination involves forming an amalgam while a thin layer of silver (obtained by sputtering or evaporation) is in contact with an ionic solution of Hg; subsequently, a traditional TXRF analysis is performed. This was the first method reported in the literature to apply the TXRF technique for reliably determining mercury concentrations with high sensitivity.This work shows how a similar procedure may be employed to measure mercury concentrations. This second method involves forming an amalgam of gold using microlitre quantities of the solution to be analysed. As gold is a highly malleable material, it allows the production of very thin films, the weight of which is a few orders of magnitude higher than the mass of mercury present in the amalgam. The determination is performed in the usual way using the TXRF technique. The sensitivity of this method (≈ 5 ppm) is inferior to that of the former method, and data processing is quite difficult because the peaks for mercury and gold overlap, but the experiment is simple to execute and improved sensitivity is expected to be attained by forming the amalgam with larger volumes of sample and with a more responsive data processing scheme.     

Sapphire sample carriers for silicon determination by total-reflection X-ray fluorescence analysis

Sapphire is presented as a new sample carrier material for total-reflection X-ray fluorescence spectrometry (TXRF). A comparison with conventional sample carrier materials such as quartz glass, Perspex®, glassy carbon and boron nitride demonstrates that sapphire has all the physical and chemical properties required for TXRF micro and trace analysis. Moreover, sapphire sample carriers allow the determination of silicon in many matrices in a comparatively simple way. Especially for airborne particulate matter, acid digestion can be avoided by cool-plasma ashing of suitable filter materials directly on the sample carrier. This technique has been successfully applied to environmental samples.     

TXRF法测定松花粉中的9种生命元素

建立了微波消解前处理,全反射X射线荧光法(TXRF)同时测定松花粉中K、Ca、Ti、Mn、Fe、Ni、Cu、Zn和Rb9种生命元素含量的分析方法.松花粉原料经过微波消解前处理后,采用全反射X射线荧光光谱净计数、QXAS分析软件解谱和单一内标法进行定量分析.比较了干灰化法、湿消解法和微波消解法3种前处理方法的效果,并确立微波消解法作为样品前处理方法.用微波消解- TXRF法测定了花粉标准物质中的上述9种元素,并计算得到其仪器检出限(LLD)为0.002～0.054 mg/L,方法检出限(LDM)为0.004～0.122 mg/kg.TXRF法测定各元素的相对标准偏差(RSDs)为1.0％～5.5％.该方法操作简单、样品用量少、检出限低,对实际样品松花粉的测定结果与ICP - MS法无显著性差异.     

固定光路可变焦宽调角表面等离子共振成像装置

设计了一种折反式棱镜耦合单元, 用于简化表面等离子共振系统的角度调节操作, 并基于此单元构建了固定光路可变焦宽调角表面等离子共振成像装置. 该装置通过旋转折反式棱镜耦合单元即可实现角度调节, 调节范围可达40°~80°, 结合1~2倍的变焦成像系统, 可对1~4 cm²传感芯片成像, 且可分辨至少3600 Point/cm². 以蔗糖溶液为研究对象, 考察了该装置的灵敏度, 结果表明其灵敏度可达7×10^-6 RIU(Refractive index unit), 共振角与折射率的线性相关系数为0.99953. 将该装置用于研究抗牛血清白蛋白抗体与其它蛋白的实时相互作用, 所得结果与理论相符. 该表面等离子共振成像装置将在实时并行分析方面具有广阔的应用前景.     

Characterization of nuclear materials by total reflection X-ray fluorescence spectrometry

Nuclear energy is one of the available energy options for long term energy security of world. In order to produce electricity using this mode of energy generation in an efficient and safe manner, it is necessary that the materials used for such energy generation comply with the specifications assigned. The major and trace composition of these materials is an important specification for their quality control. Different analytical techniques are used for such quality control. Total reflection X-ray fluorescence (TXRF) is a comparatively new technique having several features well suited for trace and major element determinations in nuclear materials. However, this technique has not been used so far extensively for characterization of nuclear materials. The present paper gives a brief introduction of TXRF, its suitability for nuclear material characterization and some details of the TXRF studies made in our laboratory for the characterization of nuclear materials.     

An X-ray refractive lens comprising two sections cut from a gramophone record for a portable total reflection X-ray fluorescence spectrometer

An X-ray refractive lens is assembled from two sections cut from a gramophone record. The refractive lens is placed in a portable total reflection X-ray fluorescence (TXRF) spectrometer, and it is used for collimation of the incident X-ray beams. A TXRF spectrum measured with the refractive lens is compared with that measured with a waveguide. Compared with the refractive lens, the waveguide enhances the intensities of the X-rays illuminating an analyte. Therefore, fluorescent X-ray intensities increase when using the waveguide. On the other hand, the vertical angular divergence of the incident X-ray beams is smaller when using the refractive lens, and the smaller angular divergence results in a reduction of the scattering of the incident X-rays from a sample holder. Therefore, the spectral background is reduced when using the refractive lens, resulting in an increase of the signal to background ratios of the fluorescent X-rays. Detection limits for 3d transition metals obtained with the refractive lens are sub-nanograms to a few nanograms, and the detection limits are similar to those obtained with the waveguide.     

Application of ETV-ICPMS in semiconductor process control

Submicron semiconductor manufacturing requires ultra-clean processes and materials to achieve high product yields. It is demonstrated that electrothermal evaporation (ETV) in a graphite furnace coupled with ICPMS offers a new possibility for a fast simultaneous analysis of eight elements with detection limits below 0.2 ng/g in conc. hydrofluoric acid and buffered oxide etch (ammonium fluoride/hydrogen fluoride mixture). ETV-ICPMS also comprises significant improvements in the analysis of metal contamination on silicon wafer surfaces with respect to currently used methods. The contaminants on the surface are usually analyzed by total reflexion X-ray fluorescence spectrometry (TXRF) or dissolved by HF vapour (vapour phase decomposition; VPD) or a mixture of hydrofluoric acid and hydrogen peroxide (droplet surface etching, DSE) and analyzed by GFAA or TXRF. ETV-ICPMS combines the advantages of both analytical methods: the multielemental advantage of TXRF and the possibility to analyze light elements like Al, Mg, Na which may not be analyzed by TXRF. With VPD/DSE-ETV-ICPMS detection limits between 0.2 and 2×10⁹ atoms cm^?2 on a 6″ wafer have been achieved in a simultaneous analysis of eight elements. The main advantage of ETV-ICPMS versus conventional ICPMS in both applications — chemical and surface analysis — is its capability to analyze Fe in the sub-ng/g range. As Fe is one of the most important impurities in semiconductor manufacturing ETV-ICPMS is much more useful for semiconductor applications than low-resolution ICPMS. For the present application potassium iodide was used as a modifier. It enhances the sensitivity by a factor of 3–4 and improves the reproducibility significantly.     

Determination of trace elements in bee honey,pollen and tissue by total reflection and radioisotope X-ray fluorescence spectrometry

Multielemental determinations in samples of various types of bee honey, pollen and bee tissue have been carried out using total reflection X-ray fluorescence spectrometry (TXRF) and radioisotope excited X-ray fluorescence spectrometry (XRF). The objective was to establish whether the elemental content of bee honey, in particular, correlates with any useful information about the environment, variety of honey, etc. An attempt has also been made to determine the X-ray techniques' ability to compete with atomic absorption spectrometry (AAS) and inductively coupled plasma-atomic emission spectrometry (ICP-AES), with regard to elemental sensitivity, accuracy, sample preparation procedures, and in particular, economic performance, which is very important in selecting an appropriate technique for the analysis of large numbers of samples. The results confirm the advantages of the TXRF method for trace element analysis, but only when utilising monochromatic excitation and selecting a proper sample preparation procedure. The radioisotope XRF technique, which does not require any sample preparation, is still very competitive in analysis of elements with concentrations above a few ten ppm. Preliminary results also confirm some correlations between the elemental content of honey and the status of the environment, and encourage further work in this direction     

Elemental analysis of airborne dust samples with TXRF: Comparison of oxygen-plasma ashing on sapphire carriers and acid digestion for sample preparation

The concentrations of 13 elements (As, Ca, Co, Cd, Cr, Fe, Ga, Ni, Pb, Pt, Ti, V and Zn) were determined in air particulate matter using total reflection X-ray fluorescence spectrometry (TXRF). For silicon analysis synthetic sapphire was chosen as a new sample carrier material – it is silicon-free, resistant to oxygen-plasma, microwaves and concentrated acids. The dust samples were collected on cellulose acetate filters. The decomposition of the filters was carried out by oxidation in a microwave-generated low-pressure oxygen-plasma directly on the TXRF sample carriers. The recovery of the investigated elements was verified with the standard reference material SRM 1648 (urban particulate matter) and ranged from 90 to 97%. The oxygen-plasma method was compared with conventional sample preparation by acid digestion. Received: 9 April 1999 / Revised: 18 May 1999 / Accepted: 3 June 1999