Spatial Uniformity of Atmospheric Pressure Discharges: A Simulation Study

Spatial uniformity is important in most applications of dielectric barrier discharges operating at atmospheric pressure. However, such uniformity is not easily achieved. Under many conditions, a filamentary structure usually develops. In this paper, we employ a two‐dimensional self‐consistent fluid model to explore the influence of several factors on the evolution of spatial structure of dielectric barrier discharges. In particular, we contrast the behavior of discharges in pure helium and He‐N₂ gas mixture, which represent the reduction in breakdown voltage of gas during the evolvement of uniform glow discharge plasma. The transformation from filamentary to uniform mode of discharge plasma is analyzed by the phenomenon of coalescence of filaments and we investigate the effect of several external discharge parameters, such as driving frequency and effect of overvoltage, and the dielectric constant of the barrier material for the uniform and filamentary discharge plasmas. This simulation study is useful to describe the spatio‐temporal profiles of electron density in different phases of the filamentary, uniform Townsend and glow discharge regimes under various constraints. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

大气压介质阻挡辉光放电中放电电流的测量与分析

介质阻挡放电产生的低温等离子体具有广泛的应用前景而成为研究热点。文章利用平行平板介质阻挡放电装置,在流动的氦气中实现了大气压均匀辉光放电,得到了大气压下的均匀等离子体。利用电学方法将放电电流从总电流中分离出来,从而得到了辉光放电的放电电流。通过分析放电电流、外加电压、气隙上电压以及壁电荷电量之间的相互关系,可以研究气体放电过程中壁电荷积累的微观动力学行为。实验结果表明壁电荷主要是在放电电流脉冲持续期间积累的,但电流脉冲结束后,由于气隙电压没有改变极性,壁电荷还会逐渐积累,气隙电压改变极性后,壁电荷量随时间减小。这些结果对壁电荷在介质阻挡辉光放电中作用的深入研究和大气压介质阻挡辉光放电的工业应用具有重要意义。     

Discharge Operation Mode Manipulation of Radio Frequency Atmospheric Pressure Glow Discharges in Argon

Stable operation of radio frequency atmospheric glow discharges is widely desired by most processing applications for their conveniency and feasibility, many of which have been addressed with the noble gas of helium and low discharge current density in stable operation regime of α mode. Here, the operation mode manipulation of rf atmospheric pressure glow discharge in argon is investigated using a one‐dimensional self‐consistent modeling approach. Stable operation regime of α mode is found to expand with rinsing excitation frequency and reducing discharge gap distance. The sheath characteristics in terms of sheath voltage and sheath thickness are given to explain the of α ‐γ mode transition. Furthermore, stable operation of discharge in γ mode is proposed tobe achieved by introducing dielectric barriers, which is indicated by monotonously growing of applied voltage with discharge current density (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

大气压介质阻挡放电的光谱研究

使用水电极介质阻挡放电装置,分别在大气压空气和氦气中实现了稳定的高气压放电。通过水电极观察两种气体的放电,发现大气压空气中放电为空间随机分布的微放电丝,等离子体是不均匀的,而在氦气中放电没有微放电丝,空间分布比较均匀。比较而言,这种均匀放电产生的等离子体具有更广泛的工业应用前景。对两种气体中放电的电流波形进行了比较,发现空气中放电的电流脉冲在时间上是随机出现的而氦气中放电的电流脉冲在时间上具有周期性,并且空气中放电脉冲宽度约为几十ns而氦气中放电的电流持续时间较长,脉冲宽度大约为1μs。文章还对两种气体中介质阻挡放电发射光谱进行了研究,结果表明大气压氦气中均匀放电的N+₂(B2Σ+_u→X2Σ+_g)谱线391.4nm很强而在大气压空气放电中此光谱线很弱。这些研究结果对高气压条件下均匀放电的实现和大气压辉光放电的工业应用具有重要意义。     

针-板和针-水电极大气压直流辉光放电的光谱特性

利用光谱学方法,对针-水电极和针-板电极直流辉光放电特性进行了比较研究。结果发现两种装置产生的放电都有明显的分区现象, 从阴极到阳极分别为负辉区、阴极暗区、正柱区和阳极辉区。针-板电极放电中可以清晰地观测到阳极暗区, 而针-水电极放电阳极暗区不明显。对比两种放电的伏安特性曲线,发现放电电压均随电流增大而减小,但相同电流下针-水电极间的电压大于针-板电极间的电压。由于伏安特性具有负斜率,且放电电流密度介于10-5～10-4 A·cm-2,说明两种装置中的放电均处于正常辉光放电阶段。在正常辉光放电的范围内比较两种放电的发射光谱, 发现发射光谱中都包含N₂的第二正带系(含波长为337.1 nm的谱线)和N+₂的第一负带系(含波长为391.4 nm的谱线),但相对强度不同。利用光谱学方法对放电发射谱的谱线强度比I_391.4／I_337.1和振动温度进行了空间分辨测量,发现相同位置处针-水电极放电的谱线强度比要比针-板电极放电的大,并且相同位置处针-水电极放电的振动温度高。     

常压介质阻挡放电等离子体发射光谱的检测分析

以常压介质阻挡放电等离子体作为研究对象,在常温常压条件下使用介质阻挡放电光谱诊断装置,得到N2第二正系跃迁和Ar原子发射谱线。通过对放电光谱的检测分析,可以察知常压介质阻挡放电等离子体的特性,并可运用同一元素谱线的相对强度来诊断电子激发温度等物理参量,以达到对材料表面改性过程的实时监控,工作的结果对常压介质阻挡放电及其在材料改性的应用中具有重要的意义。     

少量氩气对大气介质阻挡放电光谱的增强

采用双水电极介质阻挡放电装置,测量了大气介质阻挡放电的光谱,并研究了加入少量氩气后光谱的变化。在300～800 nm波长范围内,发现了氮分子(C3Π_u(v′=0)→B3Π_g(v″=0～4))的光谱和氮原子(4d4D_7/2→3p4P0_1/2)的光谱。在大气中加入少量氩气后,击穿电压明显降低,在相同电压条件下,氮分子光谱线和氮原子光谱线强度都增强。同时,加入氩气后上述谱线的半宽度明显加大。由于谱线的Stark加宽与电子密度成正比, 说明加入氩气后等离子体的电子密度增大, 使得电子碰撞激发氮分子及氮原子的概率增大,激发到较高激发态的氮原子或氮分子增多,从而使光谱强度增强。     

Temperatures in Dielectric Barrier Gas Discharges for Surface Treatment

Optical emission spectroscopy is an optical non‐destructive method with which the temperature of the heavy particles (atoms, molecules, and ions) and the vibration temperature is determined in an air plasma torch and in an atmospheric nitrogen dielectric barrier parallel plate discharge. The two temperatures are measured to obtain an estimation of the deviation from local thermal equilibrium and to compare the two plasma source configurations which are used for surface treatment. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Numerical studies of atmospheric pressure glow discharge controlled by a dielectric barrier between two coaxial electrodes

The glow discharge in pure helium at atmospheric pressure, controlled by a dielectric barrier between coaxial electrodes, is investigated based on a one-dimensional self-consistent fluid model. By solving the continuity equations for electrons, ions, and excited atoms, with the current conservation equation and the electric field profile, the time evolution of the discharge current, gas voltage and the surface density of charged particles on the dielectric barrier are calculated. The simulation results show that the peak values of the discharge current, gas voltage and electric field in the first half period are asymmetric to the second half. When the current reaches its positive or negative maximum, the electric field profile, and the electron and ion densities represent similar properties to the typical glow discharge at low pressures. Obviously there exist a cathode fall, a negative glow region, and a positive column. Effects of the barrier position in between the two coaxial electrodes and the discharge gap width on discharge current characteristics are also analysed. The result indicates that, in the case when the dielectric covering the outer electrode only, the gas is punctured earlier during the former half period and later during the latter half period than other cases, also the current peak value is higher, and the difference of pulse width between the two half periods is more obvious. On reducing the gap width, the multiple current pulse discharge happens.     

常压介质阻挡放电等离子体发射光谱诊断及其在材料表面改性中的应用

使用介质阻挡放电光谱诊断装置,分析了常压等离子体放电电流与放电间隙的变化关系,提出了“放电临界间隙”的概念,记录和比较了空气和氩气常压介质阻挡放电等离子体发射光谱,并运用同一元素谱线的相对强度来诊断电子温度等物理参量,以达到对材料表面改性过程的实时监控。工作的结果对常压介质阻挡放电及其在材料改性中的应用具有重要的意义。     

空心针-板电极大气压氩气辉光放电的特性研究

大气压均匀放电等离子体在工业领域具有非常广泛的应用前景,它是利用直流电源激励的空心针-板放电装置,以氩气为工作气体在大气压空气中产生均匀稳定的放电。对氩气流量和气隙间距对辉光放电发光特性的关系进行了研究,结果表明放电所产生的等离子体柱连接两个电极,发光较为均匀(观察不到放电丝)。在板电极附近放电等离子体柱直径最大,最大直径随着电流和气流的增大而增大。放电伏安特性研究发现,与低气压辉光放电相类似,两电极间的电压随着电流的增大而减小,并且随气流和气隙间距的增大而增大。对该大气压直流均匀放电在扫描范围为330～450 nm的光学发射光谱进行分析,获得了放电等离子体的分子振动温度和谱线强度比I_391.4/I_337.1随氩气流量和气隙间距的变化关系。I_391.4/I_337.1均随流量和气隙间距的增大而降低。对等离子体柱的I_391.4/I_337.1沿气流方向(等离子体柱轴向)进行了空间分辨测量,并进行了定性分析,结果表明,振动温度及电子平均能量随着远离空心针口距离的增大而增大。这些结果对大气压辉光放电在工业中的应用具有重要意义。     

Characterizing uniform discharge in atmospheric helium by numerical modelling

One-dimensional fluid model of dielectric barrier discharge (DBD) in helium at atmospheric pressure was established and the discharge was numerically simulated. It was found that not only the spatial distributions of the internal parameters such as the electric field, the electron density and ion density are similar to those in a low-pressure glow discharge, but also the visually apparent attribute (light emission) is exactly the same as the observable feature of a low-pressure glow discharge. This confirms that the uniform DBD in atmospheric helium is a glow type discharge. The fact that the thickness of the cathode fall layer is about 0.5mm, much longer than that of a normal glow discharge in helium at atmospheric pressure, indicates the discharge being a sub-normal glow discharge close to normal one. The multipulse phenomenon was reproduced in the simulation and a much less complicated explanation for this phenomenon was given.     

大气压Ar／NH3介质阻挡辉光放电的仿真研究

为了研究火气压下氩气（Ar）中掺杂氨气（NH3）的Ar／NH3介质阻挡辉光放电的放电机理,通过建立一‘个多粒子的自洽耦合流体模型,采用有限元方法进行数值计算,得到了气体间隙压降、介质表面电荷密度、放电电流密度随时间的周期变化波形,以及带电粒子、中性粒子与空间电场强度的时空分布．仿真计算结果表明：气体间隙的周期击穿过程主要由气隙电压控制,并受气隙两侧介质极板上积聚的表面电荷的影响．气隙间带电粒子密度和电场强度的时空分布表明本文的放电过程存在阴极位降区、负辉区、法拉第暗区、等离子体正柱区等辉光放电的典型区域,放电模式为大气压辉光放电．在Ar/NH3等离子体中,主要的正离子为NH＋,其次为Ar2＋,主要的负离子为NHi：NH3分解产生的主要的激发态分子为NH,NH2和N2H3,而最终的稳态产物主要是N2和H2．     

常压DBD二维流体模型的FCT方法数值模拟

根据常压介质阻挡放电流体模型的物理方程,采用固定网格有限差分算法,分别用四阶和六阶相位误差FCT方法模拟求解二维流体连续方程.在均匀的初始条件下研究放电雪崩过程中电子密度的时空演化,具体分析和比较两种算法的差异.FCT方法模拟求解得出的计算结果与气体放电理论吻合较好,是一种具有较好的准确性和高精度的算法.     

Discharge characteristics in plasma display cell at high frequency

We present the experimental and simulation studies of the glow discharge plasma in a macroscopic AC plasma display panel cell operating at a high frequency. We find that at high frequencies the plasma from the previous pulse has a significant influence on the discharge properties. The xenon excitation efficiency is larger than that at low frequencies.The discharge mode and efficiency at high frequencies have been discussed in this paper.     

介质阻挡均匀大气压辉光放电数值模拟研究

通过数值求解一维电子、离子连续性方程和动量方程，以及电流连续性方程，计算了氦气介 质阻挡大气压辉光放电电子、离子密度和电场在放电空间的时空分布，以及放电电流密度和 绝缘介质板充电电荷密度随时间的变化. 分析讨论所加电压频率、幅值及介质板性质等对均 匀大气压辉光放电性质的影响. 当外加电压频率足够高时，大量离子被俘获在放电空间，空 间电荷场又引起足够多的电子滞留在放电空间. 这些种子电子使得在大气压下发生汤森放电 ，放电空间结构类似于低气压辉光放电，即存在明显的阴极位降区、负辉区、法拉第暗区和 等离子体正柱 关键词： 大气压辉光放电 介质阻挡 数值模拟 等离子体     

利用发射光谱进行常压介质阻挡放电等离子体诊断及其在材料表面改性上的应用(英文)

使用介质阻挡放电光谱诊断装置,对常压介质阻挡放电在材料改性过程中的等离子体发射光谱进行测量,记录和比较了空气、氦气和氩气常压介质阻挡放电等离子体发射光谱,并运用氩元素谱线的相对强度来诊断电子温度等物理参量,以达到对材料表面改性过程的实时监控。工作的结果对常压介质阻挡放电及其在材料改性上的应用具有重要的意义     

大气压低温氦等离子体射流的诊断研究

为了加快低温氦气等离子体射流的工程化进程,通过自主设计的同轴式介质阻挡放电等离子体射流发生器,在放电频率10 kHz,一个大气压条件下产生了稳定的氦气等离子体射流.通过分析不同工况下的电压电流波形可以发现单纯增加氦气体积流量只能小幅的增加电流脉冲幅值,而对放电时间、电流脉冲数的影响不大.增加放电峰值电压时电流脉冲幅值会...     

Microwave Plasmas at Atmospheric Pressure

Microwave plasmas at atmospheric pressure are used for surface treatments like for example cleaning, sterilization or decontamination purposes, for a pre‐treatment to increase the adhesion of lacquer, paint, or glue, and for the deposition of different kind of layers and coatings. Micro plasma jets can also be applied for biomedical applications and for treatment of small and complex geometries like for example the inside of capillaries. Larger plasma torches which exhibit higher gas temperatures can also be used for chemical syntheses like waste gas decomposition, methane pyrolysis, or carbon dioxide dissociation and for plasma spraying purposes. In the present publication an overview on the development and the investigation of the operating principle of two atmospheric pressure microwave plasma torches at frequencies of 2.45 GHz and 915 MHz will be presented. The plasma sources are based on a cylindrical resonator combined with coaxial structures. To explain how these plasma sources work, simulations of the electric field distribution will be discussed. Furthermore, some physical characteristics of an air and an Ar/H2 atmospheric plasma like gas temperatures, excitation temperatures and densities as well as the heating of the plasma by the microwave will be investigated. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

大气中介质阻挡放电发光的时间特性

采用光学方法测量了大气中介质阻挡放电丝极模式的时间特性，揭示了介质阻挡放电动力学过程的时间规律。实验表明，在驱动电压的产周内的放电团簇是由多个放电脉冲构成的，放电脉冲的持续时间为30-50ns，相邻放电脉冲之间的间歇时间为几百ns。本工作的结果对介质阻挡放电的应用有重要意义。