二元光学分束器输出稳定性的优化设计

提出将微分-积分法用于二元光学分束器的设计, 以改善其输出对输入变化的敏感性。模拟计算表明, 使用这种方法设计的分束器, 当输入光束形状和强度变化时, 目标光强分布保持一定程度的稳定性, 衍射效率达到92.67% , 光强不均匀性小于0.002%。当输入由基模高斯波变为超高斯波或带有微小随机起伏的矩形光斑和平面波时, 衍射效率最低仍能达到89.60% 以上, 光强不均匀性最高为11.49%。综合衍射效率与光强不均匀性两方面考虑, 本文设计结果优于现有文献报导。     

无衍射光束聚焦后的重建与矫正

基于衍射理论分析了无衍射光束聚焦后重建现象.导出重建后的光场分布表达式,数值模拟了重建光束的光强分布.结果表明,重建光束中心光斑较聚焦前的无衍射光束中心光斑大,而且重建后的光束有较大的发散角,光束随着传输很快扩散,光强迅速衰减.此类光束的应用受到限制.利用另一正透镜对重建后的光束加以矫正.并且由几何光学知识,得到了改变重建光束参量的方法,研究结果拓宽了无衍射光束的应用.用体视显微镜和CCD照相机组成的系统拍摄光束强度分布,实验结果与理论计算相吻合.     

二元光学分束器输出稳定性的优化设计

 提出将微分-积分法用于二元光学分束器的设计, 以改善其输出对输入变化的敏感性。模拟计算表明, 使用这种方法设计的分束器, 当输入光束形状和强度变化时, 目标光强分布保持一定程度的稳定性, 衍射效率达到92.67% , 光强不均匀性小于0.002%。当输入由基模高斯波变为超高斯波或带有微小随机起伏的矩形光斑和平面波时, 衍射效率最低仍能达到89.60% 以上, 光强不均匀性最高为11.49%。综合衍射效率与光强不均匀性两方面考虑, 本文设计结果优于现有文献报导。     

高衍射效率连续面形分束器的设计与制备

为了解决目前光学分束器件衍射效率低的问题,在传统的Gerchberg-Saxton(GS)算法基础上,对初始相位和迭代算法中的振幅限制方式作改进.先利用二次相位来作为迭代算法的初始相位,再在迭代过程中将输出平面分为信号区和噪音区两部分,保持这两部分的相位不变,信号区内振幅乘上一个随迭代次数不断变化的因子,噪音区内振幅保持不变.通过该方法设计9×9连续面形的分束器件,并与传统GS算法设计的分束器进行了对比,结果表明:GS算法设计得到的分束器相位存在严重的突变和不连续等问题,而本文方法设计得到的分束器相位连续平滑,可利用移动掩模技术加工.最终制备出1×3和1×9分束器,其实测的衍射效率分别为83.5%和89.4%,均匀性误差分别为3.56%和15.23%.     

基于瑞利-索末菲积分的大衍射角衍射光学元件设计方法

针对现有的衍射光学元件设计方法只适用于小角度衍射的情况,本文提出了一种基于瑞利-索末菲衍射积分的设计方法,可以用来设计具有大衍射角的衍射光学元件。先对目标光场进行坐标变换和强度调整,再利用改进的Gerchberg-Saxton算法优化得到衍射光学元件的相位分布。分别采用本文方法和原有的基于夫琅禾费衍射积分的方法设计衍射光学元件实现线条结构光和不同角度方框图形的光场重构,结果表明:原有的设计方法只适用于衍射角全角小于25°的情况,当衍射角大于25°时,重构光场会出现显著的枕形畸变和不均匀的强度分布。而本文方法在小角度和大角度衍射下都能重构出准确的衍射角和较为均匀的强度分布.     

基于超表面材料的扇出衍射光学元件

提出一种基于电介质纳米砖阵列的扇出衍射光学元件的设计和实现方案,其纳米砖的深宽比低至1.5。这种扇出衍射光学元件被一束波长为633 nm的入射光束照射时,可以在远场中得到均匀的4×4点阵,发散角为32°×32°,且数值模拟与实验结果吻合良好。基于超表面材料的扇出衍射光学元件具有连续、精确的相位操纵能力和较高的偏振转换效率,并且仅需一步光刻制造工艺,可以广泛应用于工程光学的各种领域,例如光学传感,激光雷达,激光加工等。     

用三角形闪耀光栅实现分束器

用闪耀光栅实现了光栅分束器。给出了该分束器衍射光强分布的解析表达,讨论了影响分束性能的各种因素,并把复杂的优化设计问题转变为简单的求条件极值问题,使编程简单,计算速度快。数值模拟表明,当分别扇出2束和4束光时,衍射效率可分别达到92.50%和95.75%,扇出光束能量均匀,各级衍射效率的方差分别在10-5和10-6的数量级。与其它分束器进行了比较。     

双层矩形位相光栅的分束特性

对由两矩形位相光栅构成的双层体积全息光栅的分束特性进行了优化设计，获得了扇出光束数分别为２，３和５，总衍射效率高于８９％，光强分布不均匀性小于５％的分束器。     

双轴棱锥产生长距离近似无衍射光的新技术

提出了一种利用会聚透镜、轴棱锥等简单光学元件产生长距离近似无衍射光的新技术. 分别利用几何光学和衍射理论分析了该方法产生长距离近似无衍射光束的原理, 通过软件模拟了长距离近似无衍射光束的形成过程,得出了该光束在不同距离处的横向光强分布. 模拟结果显示该光束在较长距离处的横向光强分布满足Bessel分布. 从实验上获得了传播距离长达80 m、中心光斑发散角约为0.12 mrad的近似无衍射光束, 相比于国外学者最近的研究成果(Belyi et al. 2010 Opt. Exp. 18 1966)将传播距离延长了50多米,而光束发散角压缩了22倍.实验中, 对光束沿光轴传播时在不同距离处的光斑进行了拍摄,所得实验结果与理论分析基本符合.     

卫星角反射器有效衍射区域的研究

本文基于角反射器的几何结构模型,采用矢量形式的折反射定律,推导了在不同入射条件下有效衍射区域的数学表达式.通过数值模拟的方法分析了有效衍射区域的变化规律,以及该规律对远场衍射光强空间分布的影响.结果表明,随着光束入射角的增加,有效衍射区域逐渐减小,进而导致角反射器衍射强度发散程度增加.光束方位角的引入不会改变有效衍射区域的形状和衍射强度的总能量,而只会使其各自分布旋转方位角的大小.在不考虑大气效应的情况下,根据不同入射条件对应的衍射强度分布,并结合速差补偿理论,提出了一种全新的角反射器口径设计方法.     

利用侧向阴影照相技术探测靶的飞行速度

 建立起一套侧向阴影照相的光学系统,利用可见光作为探测光,在状态方程实验中对靶的飞行速度进行探测。在天光KrF准分子激光装置上进行激光打靶实验,激光波长为248.4 nm。在激光功率密度为8.3×10¹¹ W/cm²的条件下,测得50 μm厚铝靶的飞行速度为3.28 km/s;在激光功率密度为4.7×1010¹¹ W/cm²的条件下,测得带100 μm厚烧蚀层的13 μm厚铝靶的飞行速度为2.52 km/s。最后进行了误差分析计算,实验中探测激光与靶表面偏离角度最大不会超过2.06°,偏离角对实验精度产生的影响可以被忽略。     

强流电子束入射角二维分布测量方法

电子束与靶物质相互作用时的入射角测量是强流电子束热-力学效应研究中的难点问题. 提出了一种新的基于覆盖不同厚度衰减片微型法拉第筒阵列的电子束入射角测量方法, 与现有方法相比, 可获得具有时域特性和位置分布的强流电子束入射角分布. 以此方法进行了入射角二维分布(r, θ)测量实验, 结果表明, 电子束入射角二维分布与束流箍缩情况紧密相关. 如果箍缩不明显, 则电子主要在自身做回旋运动的同时沿着电力线运动, 多以垂直或者小角度(40°以下)轰击到阳极靶面; 如果箍缩明显, 受E×B漂移影响, 电子束入射角度会明显变大, 从40°以下增至60°左右.     

Beam delivery system with a non-digitized diffractive beam splitter for laser-drilling of silicon

We report a beam-delivery system consisting of a non-digitized diffractive beam splitter and a Fourier transform lens. The system is applied to the deep-drilling of silicon using a nanosecond pulse laser in the manufacture of inkjet printer heads. In this process, a circularly polarized pulse beam is divided into an array of uniform beams, which are then delivered precisely to the process points. To meet these requirements, the splitter was designed to be polarization-independent with an efficiency>95%. The optical elements were assembled so as to allow the fine tuning of the effective overall focal length by adjusting the wavefront curvature of the beam. Using the system, a beam alignment accuracy of<5 μm was achieved for a 12-mm-wide beam array and the throughput was substantially improved (10,000 points on a silicon wafer drilled in ~1 min). This beam-delivery scheme works for a variety of laser applications that require parallel processing.     

The development of a portable line-shaping optical system for silicon surface treatment

This study proposes a beam shaper for converting a circle beam profile generated with a Gaussian intensity distribution by an 808 nm diode laser into a line beam profile for silicon surface treatment applications. To produce a hand-held and low-cost device with a large spot-size laser, this study uses a portable optical system consisting of a diode laser source, a collimator, a cylindrical lens, and a plano-convex lens to generate an approximately 40 × 3:5mm² line beam profile at a working distance of 200 mm. The silicon surface treated by the line-shaped laser beam has significantly reduced reflectance spectra. The proposed system is also suitable for the surface cleaning of materials.     

A novel automatic measurement method of laser beam divergence angle based on two linear array charge coupled devices

We propose a scanning imaging measurement method using two linear array charge coupled devices (CCD) to evaluate the transmission performance of the linear laser beam of 90° × 2°. The two linear array CCDs are placed at two positions in the far field separated by a definite angle. The beam divergence angles in the view direction are measured by linear fitting because the beam width conforms to the linear relationship in the far field. This method has the ability for real-time testing and is appropriate for the complicated beam shapes with a wide measurement range.     

Finite size panoramic optical system integrated design

Aiming at the present situation of the panoramic target detection field, one laser target panoramic optical system on finite size is designed. The laser transmission optical system proposes a partition beam layout method, namely 360° omnidirectional detection can be realized by 6 fan-shaped light beams with 60° × 1° field angle. The receiving system position and size can be determined based on calculation the transformation of the Gaussian beam through the lens. After the computing and optimizing the lens curvature radius and other optical parameters, the integrated design of the transmission and receiving optical system is completed. The system echo signal experiment is carried out, and the experimental results show the error of the actual value and theoretical value is less than 4.8%. The system works stably and the anticipated design effect is achieved.     

一种新型的二元光学器件——多位相光束分束器的制作

本文报道了用于多光束分束器的反射式16位相值二元光学器件的制作。该二元光学器件把一束光束分成5×5光束阵列。测量的衍射效率为76.16%,接近理论设计值79.68%。该二元光学器件的有效孔径为10mm×10mm。     

Investigation of diffractive optical element for shaping a Gaussian beam into a ring-shaped pattern

To convert a given single-mode He–Ne laser beam into a ring-shaped intensity distribution, a diffractive optical element with 16 levels was designed by YG amplitude-phase retrieval and iteration algorithm. This beam shaper is investigated experimentally and compared with the results of the computer design. The results show good conformity, and the measured diffraction efficiency is 87.2%. In addition, the diffractive effect is observed when the distance between diffractive optical element and CCD is changed.     

同时实现多角度非垂轴面均匀照明的衍射光学器件

本文利用长焦深器件设计思路,提出了通过设计衍射光学器件相位分布使得在三个垂轴面上满足均匀照明要求来间接实现非垂轴面均匀照明的设计方法,并完成了同时实现多种角度非垂轴面均匀照明的衍射光学器件设计.基于爬山法和模拟退火法相结合的混合算法,设计了器件的相位分布,在30°、45°、55°非垂轴面上光斑不均匀性分别为5.91%、4.00%、3.38%.该方法可推广至二维情形,实现任意曲面均匀照明的要求.     

Effect of size quantization of the reflection coefficient of an electron beam incident on a thin heteroepitaxial film

The effect of size quantization of the reflection coefficient of electrons incident on a thin single-crystal film located on a substrate has been theoretically predicted. Two methods for observing this effect experimentally are proposed. In the first method, the variation in the intensity of the beam of specularly reflected electrons can be measured by varying the small glancing angle α of the electron beam with a particle energy on the order of 10 keV. In the second method, intensity oscillations of the diffracted beam as a function of the variation in the reflection angle β are measured in the case of a small fixed glancing angle α (on the order of 1°–3°). Thus, the second variant corresponds to studying the intensity distribution along streaks (reflexes) in the case of electron diffraction on a smooth surface. In the second case, the appearance of elastically scattered electrons along the streaks between diffraction reflexes is predicted. Their number (the beam intensity) varies periodically as a function of the angle β.