阶跃型三维形貌信息小波去噪方法研究

阶跃样品显微测量时,样品三维形貌本身丰富的阶跃信息极易受到噪声高频信号的干扰,如何在滤除噪声的同时保持三维形貌的阶跃特征,实现对样品表面三维形貌信息的高精度测量是一个重要研究问题。利用小波函数良好的空间域和频率域的局部化特性,针对阶跃型样品的特点选取Haar小波,并采用一种基于模平方的阈值处理方法对三维形貌信息小波去噪方法进行研究。将该方法应用在本课题组研制的激光差动共焦显微镜扫描台阶样品得到的三维高度轮廓中,去噪后测量样品高度与OLYMPUS共焦显微镜扫描结果相对比,误差为0.146 8 nm,满足三维形貌信息后续测量分析的要求,证明了算法的有效性。     

三维轮廓扫描法测量透镜曲率半径的实验研究

三维轮廓扫描方法可通过连续扫描透镜表面三维空间形貌,拟合得到其曲率半径值。该方法具有测量精度高、可任意选定测量区域、测量力微弱、对光学表面划伤可忽略等优点。通过实验,研究了三维轮廓扫描法测量透镜曲率半径的精度,并分析了测量区域大小、扫描间距等因素对测量精度的影响。实验结果表明,该方法测量凸、凹球面透镜的曲率半径的相对重复性可达到110-6。     

基于傅里叶变换轮廓术的动态液膜测量

动态液膜三维形貌的高速测量及重建,对于能源动力领域的工业过程优化十分重要。基于傅里叶变换轮廓术,对缓变表面和非缓变表面分别进行了模拟仿真,研究了物体表面形貌重建精度的影响因素,包括物体表面高度变化率、环境随机噪声以及条纹频率。并根据模拟结果对实验参数进行了优化,研发构建了高速三维结构光测量系统,对竖直壁面下降液膜表面形貌进行了动态测量。实验结果表明:随着液膜沿竖直壁面向下流动,液膜厚度呈现先增大后减小的趋势,高度方向的平均误差为0.1 mm,傅里叶变换轮廓术能够精确地应用于动态液膜高速测量。     

基于全场干涉测量方法的透镜三维轮廓测量

为了满足高精度透镜加工工艺的要求,设计了一套基于全场干涉测量方法的透镜三维轮廓测量系统。已标定的透镜三维轮廓测量系统利用分布式反馈激光二极管对透镜进行波数扫描,对CCD相机采集到的干涉图像依次进行随机采样傅里叶变换和解卷绕算法,最终通过计算得出透镜的三维轮廓数据。实验结果表明:该系统横向和纵向的分辨率均为0.011 3 mm/pixels,深度方向的测量均方根误差为±19.8 nm。系统结构简单、稳定性高,对透镜没有任何接触,不会对透镜表面造成损伤,适用于透镜的高精度轮廓测量。     

基于自适应条纹投影的高反光物体三维面形测量

结构光投影方法在三维形貌测量中应用广泛,但是由于被测物体表面反射率变化范围较大,过度曝光会导致相位信息无法获取。而传统的高动态范围扫描技术步骤复杂,耗时较长。文中提出一种自适应条纹投影技术,向待测物体表面投射较高灰度级的条纹图,判断并标记过度曝光点。降低投射强度后通过非线性最小二乘法拟合来确定每个饱和像素点最适合的最大输入灰度,用重新生成的自适应条纹图来采集图像并进行相位计算和三维形貌恢复。通过实验验证,该方法可以对物体表面的高反光区域进行有效测量,避免过度饱和,仿真误差在0.02 mm范围内,实测误差约为0.14 mm,实际实验对过曝点的补偿率可达到99%。     

非平行光干涉照明显微镜三维形貌检测研究

为实现表面微观形貌快速而较简单的检测, 一种使用非平行光干涉照明的光学显微三维形貌检测方法被提出。该方法使用空间光调制器对激光光束进行衍射, 选取光强相近的2个衍射级通过显微物镜, 双光束干涉可得到周期接近图像分辨率、相位可精确调节的照明条纹, 被测样本的三维形貌可通过拍摄4帧等相位差的条纹照明图像来计算得到。该方法不需借助干涉物镜产生条纹, 不需要轴向扫描装置记录条纹变化, 相位调节精确, 成像直观。此外, 该方法所产生干涉条纹的相位随坐标线性变化, 不需对条纹周期进行修正。因为照明条纹参数调节光路独立于显微成像光路, 系统装置具有光路简洁、易于调节的优点。为验证所提出三维检测精度, 以粗糙度100 nm的粗糙度对比模块和硅片为被测样品进行了三维轮廓重建实验, 实验结果显示, 所提出方法轴向重复性测量精度为8.6 nm(2σ)。     

垂直扫描白光干涉表面三维形貌测量系统

依据白光干涉理论,研制了垂直扫描白光干涉表面三维形貌测量仪。重点对实现垂直扫描运动的工作台进行了分析。所研制的测量系统具有1nm的垂直分辨力,可用于表面粗糙度、台阶、膜厚、球面等三维形貌测量。     

线结构光自同步扫描三维形貌测量系统

针对空间目标操控任务中非合作目标近距离三维形貌测量的需求,设计了基于激光三角法原理的线结构光自同步扫描三维形貌测量系统.分析了经典的点扫描测量系统模型,扩展建立了线结构光扫描系统模型.构建了测量系统桌面样机,利用二维平面棋盘靶标构建虚拟立体靶标完成了系统参量的标定.分别对已知结构的工件及天宫一号缩比模型进行了测量实验,结果表明:测量距离为1m时,系统三坐标测量误差均优于1mm,Z向距离误差为0.18mm,测量点到拟合平面的距离误差均值为0.31mm.该系统简化了扫描系统结构,能降低空间载荷的重量和功耗,满足空间任务中快速三维形貌测量的需求.     

应用多相机三维数字图像相关实现口腔印模三维重构

基于三维数字图像相关(3D-DIC)方法,采用拼接技术对口腔印模的三维形貌进行了测量。针对具有复杂表面形貌的口腔印模,采用由四个水平布置的相机组成的两个3D-DIC测量子系统,对每个子系统测量得到的局部形貌进行拼接,进而得到口腔印模的整体形貌。与传统的双相机3D-DIC测量方法测量结果进行了比较。实验结果表明,采用本文方法能够较好地重构出复杂的口腔印模的三维形貌,为口腔印模的三维重建提供了一种新的途径,同时也为复杂表面物体的三维形貌测量提供了参考。     

具有在线形貌矫正能力的组织体光学参数测量系统

针对具有复杂形貌的大面积组织体,基于空间频率域方法,提出并搭建了一种具有在线形貌矫正能力的绝对光学参数测量系统.首先利用相位轮廓术获取组织体三维表面轮廓,用余弦辐射公式法矫正由组织体表面复杂形貌引起的光照度的差异.然后,采用漫反射板代替传统方法中的参考仿体,基于空间频率域测量模式进行绝对光学参数测量,并利用提出的光学参数反演方法实现组织体吸收系数的重建.组织仿体实验结果表明,对于表面高度小于29mm的仿体,经矫正后,吸收系数的测量相对误差从60%下降到13%.     

A two-dimensional vision system with optical ranging capability

This paper describes an optical three-dimensional (3D) camera developed by combining a two-dimensional intensity image and non-contact time of flight (TOP) range image. The camera system consists of an amplitude modulated light source, an image dissector tube, a phase measuring circuit, and a host PC for system control. A semiconductor diode laser light source or a white light source and Kerr cell is used to generate continuously high frequency modulated light for bulk illumination of the scene to be viewed. A compact, 25 mm diameter image dissector camera (Hamamatsu N2730 or R4193) is used as a receiver to detect the modulated light and generate both a two-dimensional intensity image and a range image. The range is obtained by measuring the phase between the received signal and the transmitted signal. With the large detection area and the random access property of the image dissector camera, it is easy to scan systematically and electronically the illuminated area, within the frame, to identify the required object. Three different modulated frequencies (between 10 MHz and 45 MHz) have been used to obtain a range accuracy of 4 mm, over a distance of 10 m, within a time period of 10 ms per pixel. A demonstration of the three-dimensional vision system has been given, having an update time of 1 s during which a high resolution intensity image (300 × 300 pixels) is produced together with a limited number (100) of range measurements obtained for important features.     

3D coordinate measurement based on inverse photogrammetry and fringe analysis

A method based on inverse photogrammetry and fringe analysis is presented for 3D coordinate measurement. Measurement system mainly consists of a micro-camera fixed on one end of a measuring rod, a measuring probe on the other end and a liquid crystal display screen for displaying 2D fringe pattern in the measurement. In the measurement process, the probe contacts the surface of the measured object, and the CCD camera captures the stripes image on displays screen. The coordinates of camera principal point in the world coordinate system may be determined by the phase information carried in the fringe pattern. The coordinate relations between the principal point of the camera and the measuring probe can be determined with a least square optimization technique in camera coordinate system. This method has the advantage of large measurement range, good flexibility, and portable, which is suitable for field measurement. A result of our method is compared with that of the Coordinate Measuring Machine (CMM), which shows that the measurement accuracy of this method can meet accuracy requirement of the field measurement in large dimension.     

Misalignment error calibration of faro retro probe for laser tracker system

A technique to calibrate faro retro probe using laser tracker system (LTS) is presented. The deep-access retro probe enables LTS to perform three-dimensional (3D) measurements of surface hidden features. It has been shown that misalignment errors are the key contributor to measuring errors of retro probe. A device for measuring misalignment errors of retro probe is invented. Theoretical analysis and experiment show that using this technique to calibrate retro probe, the misalignment errors of retro probe can be eliminated effectively and quickly.     

基于光学测棒的立体视觉坐标测量系统的研究

提出了一种基丁测量与校准功能合一的光学测棒的立体视觉坐标测最系统.采用光学测棒作为成像目标,通过任意放置的两台摄像机获取测棒上的发光特征点的图像实现被测物体三维坐标的测量,同时利用测量数据定期对两台摄像机外部方位参数进行校准.深入研究了两台摄像机内部参数和外部方位参数校准过程中的校准件和校准算法的设计,以及系统测量建模等关键技术,提出了相应的解决方案,减小了摄像机内外参数校准及测量模型对测量结果的影响,提高系统的测量精度.实验结果表明.该系统的最大测量误差为0.11 mm.     

全视角高精度三维测量仪光学系统误差分析研究

大视角、高分辨率、低畸变光学成像系统是全视角高精度三维测量仪中最为关键的核心器件。现有三维测量仪实际使用过程中不可避免会产生各种误差,因此科学合理地评估和降低全视角高精度三维测量仪的测量误差具有十分重要的科学及工程应用意义。通过多角度、全方面分析定量研究了相机内方位元素标定误差对几何定位误差的影响,以及相机光学系统MTF分析、点扩散函数分析、波像差分析和公差分析对匹配误差产生的影响。研究结果表明,在各种影响三维测量仪光学成像系统测量误差的因素当中,相机的传递函数是影响系统三维定位误差最主要的因素,当系统MTF_N值大于0.4 lp/mm、系统几何畸变小于1个像素,PSF能量集中在以3 μm为半径的圆环内(小于1个像素),且PSF峰值达到了0.9时,三维测量仪的定位误差可达到秒级精度。     

Non-scanning,non-interferometric,three-dimensional optical profilometer with nanometer resolution

A non-scanning,non-interferometric,three-dimensional(3D) optical profilometer based on geometric optics,critical angle principle,and the use of a charge-coupled device(CCD) camera is presented.The surface profile of the test specimen can be transferred into the reflectance profile.The reflectance profile,obtained from a CCD,is the ratio of the intensity at the critical angle to the intensity obtained at the total internal reflection angle.The optical profilometer provides a sub-micron measuring range with nanometer resolution and can be used to measure roughness or surface defects in real time.     

Development of a novel scattered triangulation laser probe with six linear charge-coupled devices (CCDs)

The objective of this paper is to develop an inexpensive, robust, and precise scattered-type triangulation laser probe system with six linear charge-coupled devices (CCDs), that can be used to measure simultaneously the distance and inclination angle of a workpiece surface. The developed system has been configured and assembled based on Scheimpflug's principle. Through the specific arrangement of the six linear CCDs, four different measurement modules for the developed system were possible, namely the standard triangulation probe module, the double triangulation probe module, the pentagon-like triangulation probe module, and an approximately circular triangulation probe module. Angular measurements of an inclined surface were possible using the double triangulation probe module. The measuring range of the developed laser probe was ±2 mm and the resolution was 2 μm/pixel. The performance tests among the different measurement modules of the developed probe and the commercial circular triangulation laser probe OTM3-03 have been carried out. The measurement uncertainty of the developed laser probe system, with respect to different surface roughness and slope, was generally smaller than ±20 μm within the measuring range using the pentagon-like triangulation probe module with the statistical methodology of skewness (S_k) and kurtosis (K_u) analysis by setting the appropriate threshold values for S_k and K_u, respectively. The developed probe has been integrated with a PC-based 3-axis micro-positioning stage to construct an automatic non-contact 3D measurement system and to digitize the 3D profile of a small complex object.     

Depth resolution improvement of streak tube imaging lidar system using three laser beams

The work proposes a three-laser-beam streak tube imaging lidar system. Besides the main measuring laser beam,the second beam is used to decrease the error of time synchronization. The third beam has n+0.5 pixels' difference compared to the main measuring beam on a CCD, and it is used to correct the error caused by CCD discrete sampling. A three-dimensional(3D) imaging experiment using this scheme is carried out with time bin size of 0.066 ns(i.e., corresponding to a distance of 9.9 mm). An image of a 3D model is obtained with the depth resolution of 2 mm, which corresponds to ~0.2 pixel.     

新型小型化牙科扫描仪探头的光学系统设计

为解决牙科扫描探头小型化问题,基于结构光三维重建算法,创新性地设计出一种投影与成像共孔径设置的小型化牙科三维扫描仪探头光学系统。系统采用分视场共孔径技术,部分视场用于实现投影功能,另一部分视场用于实现成像功能,投影区域和成像区域存在公共区域。仿真实验给出了在扫描范围为46×35mm2内的系统性能,借助LightTools软件做了照明分析仿真,证明了系统光路的可行性。