硅微ZnO压电薄膜传声器的研制

本文介绍了一种利用ZnO压电薄膜为换能器的硅微压电薄膜传声器的制备,并且对微机械加工工艺过程进行了较为详细的描述。本文对传声器的部分结构进行改进,与通常设计相比较大幅提高了传声器的性能,1000Hz基准频率的灵敏度达到-85dB(相对于1V/Pa),500Hz到10000Hz的频率响应的平坦度在±3dB范围内。     

新型MEMS压电矢量水听器

对一种具有U形槽或双U形槽结构的MEMS压电式矢量水听器进行了仿真分析与优化,采用微机械加工技术研制出水听器芯片,并对芯片进行了封装与性能测试。提出了理论灵敏度和能量综合分析的方法,在考虑杂散电容的情况下,对敏感结构进行了更加精确的优化。从实验结果可以看出,所提出的优化方法比仅考虑理论灵敏度的传统优化方法具有更高的准确度。此外,具有双U形槽结构的矢量水听器的灵敏度比传统的单臂悬臂梁结构的灵敏度高约5.9dB,并且具有良好的指向性。     

基于ZnO压电薄膜的弯曲振动硅微压电超声换能器的研究

对所研制的硅微压电超声换能器（PMUT）的振动特性进行了研究分析。对硅微压电超声换能的振动膜薄板的厚度相对于薄板的尺度（边长）而言较薄的情况,理论分析与实验结果均表明残余应力对换能器的谐振频率影响较大:不考虑残余应力的理论分析得出的换能器谐振频率与器件的实验测量的结果相差较大,而考虑残余应力的分析给出的谐振频率结果与实验结果是符合的。本文还对所制作的硅微压电超声换能器的谐振频率及导纳进行测量,并给出其等效电路参数。其中振动膜边长为1mm的换能器的谐振频率为71.25 kHz。最后对其进行了简单接收发射实验,测得谐振频率处的接收灵敏度为-201.6 dB（ref 1 V/μPa）,发射电压响应约为137 dB（ref 1 μPa·m/V）。     

MEMS压电水听器和矢量水听器研究进展*

基于微电子机械系统制造技术的MEMS压电水听器和矢量水听器具有小型化、低功耗、低成本、易成阵、无源、噪音低等优点。对基于ZnO薄膜的MEMS水听器和矢量水听器进行了研究,测试结果表明,硅微压电水听器的灵敏度为-192 d B(ref.1 V/μPa),基本达到实用化的要求。MEMS压电矢量水听器等效声压灵敏度为-229.5 d B(ref.1 V/μPa),比同类型压阻式MEMS矢量水听器的灵敏度高17 d B,但还未达到实用化要求。为了进一步提高MEMS矢量水听器的灵敏度,设计了具有U形槽的压电复合悬臂梁结构和电极串联结构,采用具有更高压电系数的掺钒ZnO薄膜作为压电层,并对MEMS制备工艺进行了改进,有望显著提高MEMS矢量水听器的灵敏度。     

灵敏度可调式压电薄膜水听器

本文介绍一种灵敏度可调式压电薄膜水听器，采用PVDF薄膜作为换能材料，聚碳酸脂作为背衬，薄膜粘贴在背衬的内壁，软性的背衬在声压的作用下形变。从而带动薄膜形变，产生电信号输出。水听器内装有前置放大器，调节放大器的负载电阻可调节水听器的灵敏度，灵敏度变化范围为出，水听器内装有前置放大器，100Hz-16kHz。     

MEMS仿生矢量水听器微结构力学建模及实验验证

MEMS仿生矢量水听器是一种新型水声传感器, 其工作性能决定于内部MEMS声电换能微结构的几何、材料及流体环境参数。为深入探讨该水听器的工作机理并提高其工作性能, 针对其内部微结构通过合理的简化建立了相应的单自由度等效力学模型, 并推导出理想流体环境下该微结构一阶固有频率与其几何、材料及流体环境参数间的解析表达式。在此基础上, 推导出现有水听器微结构的一阶固有频率, 并搭建实验平台进行验证, 实验结果表明理论值与实验值间的相对误差低于5%, 从而验证了该力学模型的有效性, 为水听器的设计及优化提供了理论基础和参考依据, 同时也为具有类似结构的传感器的性能分析奠定了基础。     

MEMS仿生矢量水听器微结构力学建模及实验验证

MEMS仿生矢量水听器是一种新型水声传感器, 其工作性能决定于内部MEMS声电换能微结构的几何、材料及流体环境参数。为深入探讨该水听器的工作机理并提高其工作性能, 针对其内部微结构通过合理的简化建立了相应的单自由度等效力学模型, 并推导出理想流体环境下该微结构一阶固有频率与其几何、材料及流体环境参数间的解析表达式。在此基础上, 推导出现有水听器微结构的一阶固有频率, 并搭建实验平台进行验证, 实验结果表明理论值与实验值间的相对误差低于5%, 从而验证了该力学模型的有效性, 为水听器的设计及优化提供了理论基础和参考依据, 同时也为具有类似结构的传感器的性能分析奠定了基础。     

开缝压电圆环深海水听器

利用能量法得到了开缝压电圆环水中的谐振频率方程与电导纳曲线;通过构建开缝压电圆环低频接收状态等效电路图,推导了开缝压电圆环低频开路电压灵敏度;比较开缝压电圆环和整体圆环低频接收灵敏度,提出了利用开缝压电陶瓷圆环与溢流结构相结合设计深海水听器的思路;通过建立溢流式开缝压电圆环有限元仿真模型,探讨了开缝压电圆环的低频开路电压灵敏度与圆环结构参数的关系。经过仿真优化,研制了水中谐振频率600 Hz的开缝压电圆环深海水听器。水池声学测试与耐压测试结果表明,溢流式开缝压电圆环水听器在100~300 Hz频段内低频开路电压灵敏度最大值为-193.2 dB,最小值-197.9 dB,起伏-4.7 dB,耐静水压30 MPa;与采用相同尺寸压电元件的溢流圆环水听器相比,溢流式开缝压电圆环水听器的低频开路电压灵敏度提高20 dB;验证了本文提出的采用开缝压电圆环构建深海水听器的实用性。     

第五讲新型光纤水听器和矢量水听器

光纤水听器和矢量水听器作为当前水声研究领域最具有代表性的两大技术倍受业界关注.光纤水听器的重要贡献在于,从一个全新的角度出发,试图解决传统的水声传感和声纳数据传输一体化设计和实现的一系列问题,这有助于改善声纳系统的可靠性,并且有可能降低其制造、使用和维护的总成本.矢量水听器则由于其特有的指向性和矢量－相位处理方法,在低频和甚低频水声微弱目标探测方面具有潜在的优势.经过不懈的努力,光纤水听器和矢量水听器系统已经从实验室逐渐进入到工程应用阶段.这些对未来声纳系统的发展会产生相当重要的影响.文章尝试从声纳设计的角度对这两者的技术现状进行简要综述,包括它们各自的物理基础、工作原理、关键技术和应用领域.     

采用双迭片压电敏感元件的同振柱型矢量水听器

介绍一种采用双选片作为压电敏感元件的同振柱型矢量水听器。描述了该矢量水听器的设计方法，并给出所研制该类型水听器的灵敏度和指向性测试结果。     

Fabrication of piezoelectric AlN thin film for FBARs

This paper focuses on the fabrication of film bulk acoustic-wave resonator (FBAR) comprising an aluminum nitride (AlN) piezoelectric thin film sandwiched between two metal electrodes and located on a silicon substrate with a low-stress silicon nitride (Si₃N₄) support membrane for high frequency wireless applications, and analyzes the optimization of the thin AlN film deposition parameters on Mo electrodes using the reactive RF magnetron sputter system. Several critical parameters of the sputtering process such as RF power and Ar/N₂ flow rate ratio were studied to clarify their effects on different electrodes characteristics of the AlN films. The experiment indicated that the process for Mo electrode was easier compared with that of the Pt/Ti or Au/Cr bi-layer electrode as it entailed only one photo resist and metal deposition step. Besides, Pt/Ti or Au/Cr electrodes reduced the resonance frequency due to their high mass density and low bulk acoustic velocity. Compared with the case of the Al bottom electrode, there is no evident amorphous layer between the Mo bottom electrode and the deposited AlN film. The characteristics of the FBAR devices depend not only upon the thickness and quality of the AlN film, but also upon the thickness of the top electrode and the materials used. The results indicate that decreasing the thickness of either the AlN film or the top electrode increases the resonance frequency. This suggests the potential of tuning the performance of the FBAR device by carefully controlling AlN film thickness. Besides, increasing either the thickness of the AlN film or higher RF power has improved a stronger c-axis orientation and tended to promote a narrower rocking curve full-width at half-maximum (FWHM), but increased both the grain size and the surface roughness. An FBAR device fabricated under optimal AlN deposition parameters has demonstrated the effective electromechanical coupling coefficient (k _eff²) and the quality factor (Q _{f x} ) are about 1.5% and 332, respectively.     

圆形振动膜ZnO压电微传声器的研制

本文介绍了一种新型圆形振动膜ZnO压电微传声器的制备，并对传声器制备的工艺过程进行了较为详细的描述。圆形振动膜的压电传卢器与以前方形振动膜结构设计相比，较大幅度提高了传声器的灵敏度和成品率，灵敏度达到-70dB（相对于1V／Pa），成品率达到80％。     

第五讲新型光纤水听器和矢量水听器

光纤水听器和矢量水听器作为当前水声研究领域最具有代表性的两大技术倍受业界关注。光纤水听器的重要贡献在于，从一个全新的角度出发，试图解决传统的水声传感和声纳数据传输一体化设计和实现的一系列问题，这有助于改善声纳系统的可靠性，并且有可能降低其制造、使用和维护的总成本。矢量水听器则由于其特有的指向性和矢量一相位处理方法，在低频和甚低频水声微弱目标探测方面具有潜在的优势．经过不懈的努力，光纤水听器和矢量水听器系统已经从实验室逐渐进入到工程应用阶段．这些对未来声纳系统的发展会产生相当重要的影响．文章尝试从声纳设计的角度对这两者的技术现状进行简要综述，包括它们各自的物理基础、工作原理、关键技术和应用领域．     

Miniature piezoelectric polymer ultrasonic hydrophone probes

The advantages of using piezoelectric polymer (plastic) materials as the sensitive element in miniature ultrasonic hydrophone probes are described, and proposed designs are critically reviewed. A novel needle type of probe design is described in detail, together with calibration results of the sensitivity and directivity of 0.6 mm and 1 mm diameter probes. The former typically have an end of cable sensitivity of ?271 dBV μPa^?1 ± 2 dB between 1 and 10 MHz, the latter of ?264 dBV μPa^?1 ± 1.5 dB. The linearity, temporal stability and thermal stability of those probes are also discussed. They are shown to be small and reliable instruments for obtaining good spatial and temporal resolution in ultrasonic field measurements.     

Slotted piezoelectric ring deep ocean hydrophone

Based on the energy method,the underwater resonance frequency equation and electrical admittance curve of the slotted piezoelectric ring are derived.By establishing the equivalent circuit of slotted piezoelectric ring in low-frequency receiving condition,the lowfrequency open circuit voltage sensitivity of slotted piezoelectric ring is deduced.Compared the low-frequency receiving sensitivity of the slotted piezoelectric ring and the complete ring,the thought to design the deep ocean hydrophone is presented,which combines the slotted piezoelectric ring and the free flooded structure.By establishing finite element simulation model of free flooded slotted piezoelectric ring,the relationship between ring structure parameters and low-frequency open circuit voltage sensitivity are discussed.Through the simulation and optimization,the deep-sea slotted piezoelectric ring hydrophone with the resonance frequency of 600 Hz is fabricated.The acoustic and pressure tests results indicated that the low-frequency open circuit voltage sensitivity of free flooded slotted piezoelectric ring hydrophone in work bandwidth 100-300 Hz is-193.2 dB and the least value is-197.9 dB with the-4.7 dB fluctuation.Hydrostatic pressure resistance of 30 Mpa is obtained.Compared with the same structure size free flooded piezoelectric ring hydrophone,the low-frequency open circuit voltage sensitivity of slotted piezoelectric ring hydrophone raised 20 dB.The results verify the practicability of deep ocean hydrophone presented here with free flooded slotted piezoelectric ring structure.