Influence of nonparallelism of the surfaces of a piezoelectric layer on the frequency band of an electroacoustic piezoelectric transducer

The influence of nonparallelism of the surfaces of a piezoelectric transducer on its impedance and frequency band is analyzed theoretically. The model of a wedge-shaped piezoelectric layer taken for the analysis consists of a set of n plane-parallel elements arranged in succession along the length of the transducer with a gradual increase in the thickness of the piezoelectric layer. The analysis performed demonstrates the possibility of significantly expanding the band of working frequencies of a piezoelectric transducer when its electroacoustic conversion efficiency is reduced. In some cases, however, a decrease in conversion efficiency can be employed to optimize an acoustic device, for example, in creating a filter-type piezoelectric transducer, where electromagnetic energy is converted into acoustic energy successively from one cell of the filter to another. The proposed method for expanding the frequency band can be useful, for example, in creating high-frequency acousto-optic Bragg cells. Zh. Tekh. Fiz. 69, 72–73 (March 1999)     

空心聚合物微珠/环氧树脂复合材料匹配层空耦式压电换能器

研制了一种厚度模空耦式压电换能器,使用综合考虑材料衰减系数和声阻抗的空耦式压电换能器电力声等效电路理论模型以指导匹配层结构设计和材料选择,选用新型的空心聚合物微珠/环氧树脂复合材料作为声匹配材料,优化设计电阻抗匹配及结构参数。该换能器中心频率为510 kHz,-6 dB频域相对带宽为25.4%,插入损耗为-27 dB。结果表明,使用新型低衰减系数的闭孔复合材料单匹配层设计的该换能器不仅保证了高灵敏度,同时简化了换能器结构,为空耦式压电换能器研制提供了新思路。      

压电陶瓷非线性对大功率换能器结构参数匹配影响的计算分析

在Guyomar非线性模型基础上,通过机电等效法将晶堆前向负载作为等效质量和阻尼加入振动方程的质量项和阻尼项,推导了换能器振速、辐射声压级和谐振频率偏移率等表达式,计算分析了压电陶瓷非线性参数和结构参数对换能器声辐射性能的影响,研究了压电陶瓷的非线性对换能器结构参数匹配的影响。结果表明,换能器节面靠前,前盖板厚度越小,前盖板大径越小,都可以减少压电陶瓷非线性引起的换能器频率偏移。当设计频率确定时,压电陶瓷处于非线性工作域的换能器的结构参数有所减小。换能器加入辐射端匹配后,可以改善压电晶堆前向负载匹配,降低换能器的谐振频率偏移率。换能器激励电流也会出现频率偏移现象。在提高换能器激励电压时,换能器的结构参数应适当减小。得到的结论可为换能器设计提供理论依据和帮助。     

基于2-2型压电复合材料的新型宽频带径向振动超声换能器

本文提出了一种基于2-2型压电复合材料的新型宽频带径向振动超声换能器,它主要由内金属圆环和外压电陶瓷复合材料圆环组成.首先利用Newnham串并联理论和均匀场理论推导了2-2型压电复合材料的等效参数;其次利用解析法得到了金属圆环和径向极化压电复合陶瓷圆环径向振动的机电等效电路;最后得到了换能器的六端机电等效电路,从而得到了换能器的频率方程.接着分析了换能器共振频率和反共振频率以及有效机电耦合系数与几何尺寸、两相体积占比的关系,采用仿真软件对新型换能器的径向振动进行了数值模拟.结果表明,利用解析法得到的共振频率和反共振频率与数值模拟结果吻合较好.此外,对换能器在水下的辐射声场进行了仿真研究,结果表明新型复合材料径向换能器相比传统纯陶瓷径向换能器,发射电压响应幅值更大,工作带宽提高接近一倍,声匹配更佳.     

Electronic frequency tuning of the acousto-optic mode-locking device of a laser

The effect of the electronic tuning of the acoustic resonances in an acousto-optic mode-locking device of a laser is investigated theoretically and experimentally. The problem of the excitation of a Fabry–Perot acoustic resonator by a plate-like piezoelectric transducer (PET) is solved in the approximation of plane acoustic waves taking into consideration the actual parameters of an RF generator and the elements for matching the PET to the generator. Resonances are tuned by changing the matching inductance that was connected in parallel to the transducer of the acousto-optic cell. The cell used in the experiment was manufactured from fused silica and included a lithium niobate PET. Changes in the matching inductance in the range of 0.025 to 0.2 μH provided the acoustic-resonance frequency tuning by 0.19 MHz, which exceeds the acoustic- resonance half-width.     

Fabrication and comparison of PMN-PT single crystal, PZT and PZT-based 1-3 composite ultrasonic transducers for NDE applications

This paper describes fabrication and comparison of PMN-PT single crystal, PZT, and PZT-based 1-3 composite ultrasonic transducers for NDE applications. As a front matching layer between test material (Austenite stainless steel, SUS316) and piezoelectric materials, alumina ceramics was selected. The appropriate acoustic impedance of the backing materials for each transducer was determined based on the results of KLM model simulation. Prototype ultrasonic transducers with the center frequencies of approximately 2.25 and 5 MHz for contact measurement were fabricated and compared to each other. The PMN-PT single crystal ultrasonic transducer shows considerably improved performance in sensitivity over the PZT and PZT-based 1-3 composite ultrasonic transducers.     

Design and modeling of inversion layer ultrasonic transducers using LiNbO3 single crystal

Using inversion domain engineering controlled by heating temperature, the LiNbO(3) (LNO) piezoelectric plate with both odd and even-order thickness-extensional modes can be excited simultaneously. Therefore, the inversion layer ultrasound transducer is expected to be capable of operating over a wider frequency range. In this paper, the electrical impedance and the acoustic characteristics of LiNbO(3) (LNO) inversion layer transducer have been studied by finite element modeling (FEM). The transducer designed for this study uses a 36 degrees rotated Y-cut LiNbO(3) thin plate with an active element thickness of approximately 100 microm. First the electrical and elastic properties of the 36 degrees rotated Y-cut LNO were obtained by transforming a basic piezoelectric matrix for Z-cut LNO. In order to validate the FEM using the transformed properties several pieces of pure and 50% inversion layer LNO were tested on the electrical impedance analyzer. The modeled impedance characteristics were consistent with the measured data. Next the model was used to design 50-60 MHz transducers using pure and 30% inversion LNO. Two lambda/4 matching layers and a Tungsten loaded epoxy backing were used in these designs. The modeled results show that an over 90% bandwidth transducer can be made with proper matching and 30% inversion layer.     

Determination of acoustic impedances of multi matching layers for narrowband ultrasonic airborne transducers at frequencies <2.5 MHz - Application of a genetic algorithm

The effective ultrasonic energy radiation into the air of piezoelectric transducers requires using multilayer matching systems with accurately selected acoustic impedances and the thickness of particular layers. One major problem of ultrasonic transducers, radiating acoustic energy into air, is to find the proper acoustic impedances of one or more matching layers. This work aims at developing an original solution to the acoustic impedance mismatch between transducer and air. If the acoustic impedance defences between transducer and air be more, then finding best matching layer(s) is harder. Therefore we consider PZT (lead zirconate titanate piezo electric) transducer and air that has huge acoustic impedance deference. The vibration source energy (PZT), which is used to generate the incident wave, consumes a part of the mechanical energy and converts it to an electrical one in theoretical calculation. After calculating matching layers, we consider the energy source as layer to design a transducer. However, this part of the mechanical energy will be neglected during the mathematical work. This approximation is correct only if the transducer is open-circuit. Since the possibilities of choosing material with required acoustic impedance are limited (the counted values cannot always be realized and applied in practice) it is necessary to correct the differences between theoretical values and the possibilities of practical application of given acoustic impedances. Such a correction can be done by manipulating other parameters of matching layers (e.g. by changing their thickness). The efficiency of the energy transmission from the piezoceramic transducer through different layers with different thickness and different attenuation enabling a compensation of non-ideal real values by changing their thickness was computer analyzed (base on genetic algorithm). Firstly, three theoretical solutions were investigated. Namely, Chebyshev, Desilets and Souquet theories. However, the obtained acoustic impedances do not necessarily correspond to a nowadays available material. Consequently, the values of the acoustic impedances are switched to the nearest values in a large material database. The switched values of the acoustic impedances do not generally give efficient transmission coefficients. Therefore, we proposed, in a second step, the use of a genetic algorithm (GA) to select the best acoustic impedances for matching layers from the material database for a narrow band ultrasonic transducer that work at frequency below the 2.5 MHz by considering attenuation. However this bank is rich, the results get better. So the accuracy of the propose method increase by using a lot of materials with exact data for acoustic impedance and their attenuation, especially in high frequency. This yields highly more efficient transmission coefficient. In fact by using increasing number of layer we can increase our chance to find the best sets of materials with valuable both in acoustic impedance and low attenuation. Precisely, the transmission coefficient is almost equal to unity for the all studied cases. Finally the effect of thickness on transmission coefficient is investigated for different layers. The results showed that the transmission coefficient for air media is a function of thickness and sensitive to it even for small variation in thickness. In fact, the sensitivity increases when the differences of acoustic impedances to be high (difference between PZT and air).     

厚度模压电超声换能器无源声学材料研究进展*

厚度模压电超声换能器作为超声波发射、接收以及电信号间转换的载体,是超声成像与检测系统的核心器件,一般由压电层、匹配层和背衬层3部分组成。超声换能器的性能一定程度上决定着整体超声设备的性能,影响了其在工业、医学、军事等领域的应用。该换能器的关键性能指标(带宽、灵敏度)除了受到压电层的影响,还与匹配层、背衬层等无源声学材料的设计密切相关。该文综述了近年来厚度模压电超声换能器无源声学材料(匹配层、背衬层和声透镜)的研究进展,提出了当前该类材料面临的难题和解决途径,并对其未来发展方向进行了展望。     

Extension of the angular scanning range of the acousto-optic deflector with a two-element phased-array piezoelectric transducer

The acousto-optic deflector with a two-element phased-array piezoelectric transducer is studied at an almost limiting diffraction efficiency. Significant broadening of the working acoustic frequency band (and angular scanning range) relative to the well-studied low-efficiency regime is theoretically predicted and experimentally demonstrated. For the off-axial deflector based on paratellurite (TeO₂), a radiation wavelength of 1.06 μm, and a two-element transducer with a total length of 6 mm, the working frequency band is 17–48 MHz (with the lower frequency determined by the electromechanical properties of the transducer) at an efficiency of no less than 94% of the maximum value.     

Experimental study of acoustooptical interaction in lithium niobate in the frequency range from 7.5 to 10.5 GHz

Results of the studies of acoustooptical interaction in a lithium niobate crystal upon excitation of an elastic wave in the direction of the X-axis by a multielement piezoelectric transducer at frequencies about 10 GHz are presented. The experimental method is described. Frequency dependences of the diffracted light intensity and acoustic damping as well as the frequency resolving power are studied. Damping of longitudinal acoustic waves in X-cut lithium niobate is measured to be 1.05±0.02 dB/cm GHz. The maximum diffraction efficiency reached 1% for 1 W of electromagnetic power supplied. The frequency bandwidths at the levels of 3 and 6 dB of the maximum value are 2.5 and 3 GHz, respectively. The frequency resolution is 15 MHz at the frequency of 9 GHz.     

Elastic guided wave propagation in a periodic array of multi-layered piezoelectric plates with finite cross-sections

In this study, we present a model study of guided wave dispersion and resonance behavior of an array of piezoelectric plates with arbitrary cross-sections. The objective of this work is to analyze the influence of the geometry of an element of a 1D-array ultrasound transducer on generating multi-resonance frequency so as to increase the frequency bandwidth of the transducers. A semi-analytical finite-element (SAFE) method is used to model guided wave propagation in multi-layered 1D-array ultrasound transducers. Each element of the array is composed of LiNbO₃ piezoelectric material with rectangular or subdiced cross-section. Four-node bilinear finite-elements have been used to discretize the cross-section of the transducer. Dispersion curves showing the dependence of phase and group velocities on the frequency, and mode shapes of propagating modes were obtained for different geometry consurations. A parametric analysis was carried out to determine the effect of the aspect ratio, subdicing, inversion layer and matching layers on the vibrational behavior of 1D-array ultrasound transducers. It was found that the geometry with subdiced cross-section causes more vibration modes compared with the rectangular section. Modal analysis showed that the additional modes correspond to lateral modes of the piezoelectric subdiced section. In addition, some modes have strong normal displacements, which may influence the bandwidth and the pressure field in front of the transducer. In addition, the dispersion curves reveal strong coupling between waveguide modes due to the anisotropy of the piezoelectric crystal. The effect of the matching layers was to cluster extensional and flexural modes within a certain frequency range. Finally, inversion layer is found to have a minor effect on the dispersion curves. This analysis may provide a means to analyze and understand the dynamic response of 1D-array ultrasound transducers.     

Electrical Control of the Frequencies of a Fabry–Perot Acoustic Resonator

The effect electronic tuning has on the frequency of the acoustic resonance of an acousto-optic modulator intended for active laser mode locking is studied theoretically and experimentally. The problem of exciting a Fabri–Perot acoustic resonator with a plate-like piezoelectric transducer is solved in the approximation of plane acoustic waves, with allowance for the real parameters of the HF generator and the matching elements of the transducer and the generator. Expressions for the basic electrical and acoustic parameters are obtained. Theoretical analysis confirms the frequency shift effect of acoustic resonances, observed earlier experimentally upon varying the matching electrical elements. The experiment is performed using an acousto-optic quartz cell and a lithium niobate transducer.     

Influence of the thickness of multilayer matching systems on the transfer function of ultrasonic airborne transducer

The effective ultrasonic energy radiation into the air of piezoelectric transducers requires using multilayer matching systems with accurately selected acoustic impedances and the thickness of particular layers. This problem is of particular importance in the case of ultrasonic transducers working at a frequency above 1 MHz. Because the possibilities of choosing material with required acoustic impedance are limited (the counted values cannot always be realised and applied in practice) it is necessary to correct the differences between theoretical values and the possibilities of practical application of given acoustic impedances. Such a correction can be done by manipulating other parameters of matching layers (e.g. by changing their thickness). The efficiency of the energy transmission from the piezoceramic transducer through different layers with different thickness enabling a compensation of non-ideal real values by changing their thickness was computer analysed. The result of this analysis is the conclusion that from the technological point of view a layer with defined thickness is easier and faster to produce than elaboration of a new material with required acoustic parameter.     

弛豫铁电单晶/压电陶瓷混合激励换能器EI北大核心CSCD

为了降低纵向换能器尺寸并提高发射带宽和发送电压响应,研究了一种弛豫铁电单晶/压电陶瓷混合激励换能器,换能器由[011]方向极化PIN-PMN-PT单晶和PZT-4压电陶瓷混合激励,利用多模态振动耦合的原理,通过单晶的32模式振动,可以灵活调整两种振子之间的驱动能力和刚度分配。首先通过四端网络法得到了换能器等效电路并计算了其谐振频率,然后利用有限元方法对换能器进行了仿真优化,最后制作了试验样机并进行了测试分析。换能器样机外径86 mm、长度80 mm,工作频带13~38 kHz,最大发送电压响应为144.9 dB,带内发送电压响应起伏小于6 dB,具有良好的宽带、小尺寸工作性能。     

QCM based sensor for detecting volumetric properties of liquids

We introduce a microacoustic sensor, which combines the quartz crystal microbalance, a liquid-filled cavity and an intermediate artificial layer with effective acoustic properties. Each of the three components fulfils a specific task. The quartz vibrates in its thickness shear mode and acts as source and detector of shear waves, which penetrate the intermediate artificial layer and excite a resonance in the liquid-filled cavity. Both the piezoelectric transducer and the liquid-filled cavity are high-Q resonators with well-adjusted resonance frequencies very close to each other. The intermediate artificial layer couples the two resonators in a distinct manner via control of the propagation of acoustic waves between the quartz crystal and the liquid-filled cavity layer. The origin of the sensor signal is a change of the resonance frequency of the liquid-filled cavity caused by variations of acoustic properties of the liquid analyte inside the cavity, first of all speed of sound. This resonance appears as second resonance peak in the admittance spectrum of the quartz crystal.     

Transfer constant of a multilayer acoustic transducer at the direct and inverse transformation

The algorithms for calculating the direct and inverse transfer constants of an acoustic transducer with an arbitrary number of intermediate layers between the piezoelectric layer, the acoustic duct, and the rear acoustic load are described. The results of a numerical analysis are presented and discussed. As an illustration, a 100-MHz transducer formed by a (Y+36°)-cut LiNbO₃ plate fixed on a fused-quartz acoustic duct with the help of five metal layers is considered. The other side of the plate carries two metal layers and a rear load. The phase-frequency characteristics and the transformation loss as a function of frequency are analyzed for the cases of direct and inverse transformation under the assumption that the signal is supplied and retrieved by a two-wire line.     

压电条SH声辐射场研究

具有一定宽度和厚度的无穷长压电条置于均匀各向同性半空间上, 压电条在电激励下产生机械振动从而在整个空间产生声场. 将压电条取为6mm晶系, 其对称主轴沿长度方向. 针对这 种压电换能器结构, 深入研究了SH波的激发和辐射特性. 首先将压电条中的声场展开为傅里 叶级数, 而将压电条下的无界半空间中的声场展开为傅里叶积分, 然后根据边界条件得到了 整个空间中声场的求解方案, 通过数值模拟计算了声场的分布特性, 并和传统方法进行了定 量的对比和分析. 最后采用最陡下降法(鞍点法)研究并得到了压电条声辐射场的远场近似表 达式, 分析了声场的指向性规律. 结果表明只有当频率f和压电条宽度a的乘积 fa<1 kHz·m 时, 传统方法得到的结果是可靠的，当频率升高时，压电条内应力和位移呈振荡式分布，频率愈高振荡愈激烈，且与传统方法的差异愈大.本文对声学微系统与声传感器件的研究具有 重要意义. 关键词： 压电条 6mm晶系 表面位移 指向性因子     

Reflector-based phase calibration of ultrasound transducers

Recently, the measurement of phase transfer functions (PTFs) of piezoelectric transducers has received more attention. These PTFs are useful for e.g. coding and interference based imaging methods, and ultrasound contrast microbubble research. Several optical and acoustic methods to measure a transducer’s PTF have been reported in literature. The optical methods require a setup to which not all ultrasound laboratories have access to. The acoustic methods require accurate distance and acoustic wave speed measurements. A small error in these leads to a large error in phase, e.g. an accuracy of 0.1% on an axial distance of 10 cm leads to an uncertainty in the PTF measurement of ±97° at 4 MHz. In this paper we present an acoustic pulse-echo method to measure the PTF of a transducer, which is based on linear wave propagation and only requires an estimate of the wave travel distance and the acoustic wave speed. In our method the transducer is excited by a monofrequency sine burst with a rectangular envelope. The transducer initially vibrates at resonance (transient regime) prior to the forcing frequency response (steady state regime). The PTF value of the system is the difference between the phases deduced from the transient and the steady state regimes. Good agreement, to within 7°, was obtained between KLM simulations and measurements on two transducers in a 1-8 MHz frequency range. The reproducibility of the method was ±10°, with a systematic error of 2° at 1 MHz increasing to 16° at 8 MHz. This work demonstrates that the PTF of a transducer can be measured in a simple laboratory setting.     

Transmission characteristics of acousto-optic filter using sectioned transducer

The paper examines operation of a tunable acousto-optic filter applying a sectioned piezoelectric transducer. The analysis was carried out for a tellurium dioxide cell having 1.4-cm long transducer divided into 7 identical sections connected in series. Each section generated acoustic waves with a time delay relatively to adjacent sections. The time delay caused electric and acoustic phase shifts as well as inclination of a resulting acoustic wave front in the crystal. We showed that the inclination of the acoustic front influenced on shape of the filter transmission function causing asymmetry of side lobes. Investigation of the filter was carried out at the driving acoustic frequencies 100–240 MHz. The measurement proved that the electric phase shifts between the adjacent sections increased with the frequency up to 30°. Ratio of intensities of the first two side lobes in the transmission function was varying with the frequency from 0.9 to 0.5. Based on the carried out analysis, we discussed a prototype device using the acoustic beam steering effect. The device applied two sets of transducer sections that simultaneously generated two acoustic wave fronts tilted with respect to each other.