Ultra low head–disk spacing measurement using dual beam polarisation interferometry

In this paper, a dual-beam normal incidence polarisation interferometer is proposed to measure the flying height or head–disk spacing. Using this interferometer, the head–disk spacing can be measured both in magnetic real disk condition and in glass disk condition. It has the advantage of both the currently popular intensity interferometry method and the oblique incidence polarisation interferometry method. With this polarisation interferometer, not only the flying height can be measured down to contact without losing accuracy, but the pitch and roll of the head-slider can also be detected dynamically. The optical parameters of the head-slider can also be determined. Design details and experimental study are presented.     

Electromagnetic backscattering from freak waves in(1+1)-dimensional deep-water

To study the electromagnetic (EM) backscatter characteristics of freak waves at moderate incidence angles, we establish an EM backscattering model for freak waves in (1+1)-dimensional deep water. The nonlinear interaction between freak waves and Bragg short waves is considered to be the basic hydrodynamic spectra modulation mechanism in the model. Numerical results suggest that the EM backscattering intensities of freak waves are less than those from the background sea surface at moderate incidence angles. The normalised radar cross sections (NRCSs) from freak waves are highly polarisation dependent, even at low incidence angles, which is different from the situation for normal sea waves; moreover, the NRCS of freak waves is more polarisation dependent than the background sea surface. NRCS discrepancies between freak waves and the background sea surface with using horizontal transmitting horizomtal (HH) polarisation are larger than those with using vertical transmitting vertical (VV) polarisation, at moderate incident angles. NRCS discrepancies between freak waves and background sea surface decreases with the increase of incidence angle, in both HH and VV polarisation radars. As an application, in the synthetic-aperture radar (SAR) imaging of freak waves, we suggest that freak waves should have extremely low backscatter NRCSs for the freak wave facet with the strongest slope. Compared with the background sea surface, the freak waves should be darker in HH polarisation echo images than in VV echo images, in SAR images. Freak waves can be more easily detected from the background sea surface in HH polarisation images than in VV polarisation images. The possibility of detection of freak waves at low incidence angles is much higher than at high incidence angles.     

Engineering issue study of triple harmonic method for in situ flying height analysis

In situ flying height testing technology is becoming more and more important in slider–disk interaction analysis and manufacturing quality control of disk drives and head-related components. Triple harmonic method is a quite promising choice for in situ flying height analysis, compared with other in situ methods reported up to now. This paper reports results of investigations on engineering issues of applying triple harmonic method for in situ flying height analysis. The paper reports results of analysis on the effects of various testing conditions on flying height testing repeatability and accuracy. Results suggest that working at reasonable high channel density and working on the ratio between third and first harmonics will be an advantage in terms of both flying height testing sensitivity and testing repeatability. Comparing with media thickness effect, the gap-length variation among different heads will be important if it is to study flying height difference among different heads and the testing is at high channel density. Also, it is suggested to work at AC erased track, in order to reduce the non-linearity caused by hard transition.     

一种可实现电子散斑干涉的新型大错位方棱镜

设计了一种可实现电子散斑干涉的大错位方棱镜.将普通方棱镜的一个面磨去一个楔角后变为斜面,该斜面和相邻的一个面镀反射膜,其他二个面镀增透膜.垂直入射的光线经过分光后变成二束光,分别经过平面反射和斜面反射,出射的二束光线就分开了.将该大错位方棱镜置于CCD镜头前,一个物体可以成二个错位的像;相邻的二个物体可叠加成像.错位量由楔角决定,错位量足够大,可实现大错位电子散斑干涉.根据试件大小和成像距离,楔角的大小可选择在1°到10°之间.对中心加载周边固定圆盘进行了电子散斑载频干涉实验,证明了大错位方棱镜能够高质量地实现电子散斑干涉,实现位移场测量.     

斜入射弹丸着靶位置立靶测量原理

常规的立靶测量装置要求弹道垂直预定靶面,当弹道不垂直预定靶面时,得到的测量结果是错误的。在终点弹道,有时很难保证靶面垂直飞行弹道。提出了一种由多光幕阵列组成的光幕立靶,可以实现小于70°入射角的弹丸着靶坐标的测量,不要求飞行弹道垂直靶面。在X和Y方向分别采用四个成固定角度的光幕来实现入射角度的测量,一次射击可得到弹丸的速度、速度方向上的空间角和着靶位置坐标。     

Determining large step heights using zero-order interference fringe identification and an external cavity diode laser

Zero-order interference fringe identification is a powerful tool for measuring large step heights. In contrast to white light scanning interferometry, this study utilizes an external cavity diode laser as the light source. The zero-path difference point can be accurately identified by combining wavelength scanning interferometry, in which the laser wavelength is continuously changed, with single wavelength interferometry, in which the laser wavelength is fixed. The experimental apparatus is a two-arm interferometer containing the sample in the measurement arm. The step height denotes the distance between two locations of a zero-order interference fringe, which are obtained by continuously varying the length of the reference arm. The accuracy of a sample of 10 mm step height was found to be 0.33 μm.     

Consideration and compensation of calibration falloff for optical flying height measurement

In sub-10 nm low flying height (FH) region, system calibration is a significant challenge to achieve precise FH measurement. Unloading calibration mechanism is utilized for every FH measurement using three-wavelength interferometry. Our experiment has shown that the cutoff frequency of photodetectors and the bandwidth of optical filters induce calibration falloff during the calibration process. As a result, the FH measured is underestimated, i.e., the FH measured is lower than its true value. In this paper, mathematical models are proposed to eliminate the side effects due to the bandwidth of optical filters and the cutoff frequency of photodetectors. Results indicate that the proposed compensation schemes are effective in terms of improving the calibration accuracy.     

Effect of pattern shape on etching wall profile in slider fabrication

The effect of pattern shape on etching wall profile in slider fabrication is studied. The testing results show: (1) the wall profile of round pattern is steeper than that of long rectangular; (2) for round patterns, the smaller the radius is, the steeper the wall profile is; (3) the profile of outer angle is steeper than that of inner angle. The flying height offset caused by wall profile with different shapes can be 8% of total flying height, so it is necessary to consider the effect of pattern shape on etching wall profile in ABS design, especially for ultra low flying height slider.     

一种实用的消除干涉合成孔径声纳的水平地形效应的方法

本文根据干涉合成孔径声纳的特点给出了一种结合干涉图和部分系统参数的消除水平地形效应方法。基于干涉合成孔径声纳的几何结构,给出了一种依赖于参考高度的水平地形相位公式。然后利用干涉图条纹选取合适的参考高度。湖试数据的处理结果证明了该方法的可行性。     

表面粗糙度测量的磁光位相调制和锁相干涉

提出了一种表面粗糙度测量的新方法，该方法采用了微分偏振干涉的原理，利用由法拉第磁光调制器所组成的调制系统对偏振干涉光路的位相进行调制，利用锁相干涉原理对位相进行探测，该方法可实现无参考面快速非接触测量，在普通实验条件下，也可保持良好的稳定恶性循环 ，实验装置即可给出表面的轮廓又可给出其它统计数据，其横向分辨率为１．２μｍ纵向为２ｎｍ。     

A new and original practical method for detecting the spectral properties of monolayers of molecular material on homogeneous inhomogeneous substrates

A theoretical method is described of using power reflection spectroscopy to detect the spectral properties of layers of molecular material on homogeneous or inhomogeneous solid substrates. Results are presented for non-reflective, partially reflecting and highly reflecting substrates at various angles of incidence in σ and π polarisation. At angles near the Brewster angle of the substrate the nature of the spectrum in pi polarisation is such that a spectral feature due to a surface layer only 1.0 Å thick is visible in the form of a small “blip” on a constant background. For non-metallic and metallic substrates the spectrum is extremely sensitive to the thickness of the liquid layer, polarisation, and angle of incidence, so much so that this method provides a large amount of new information per experiment, much more so than conventional absorption spectroscopy.     

Sub-mm disk waviness characteristics and slider flying dynamics under thermal FH control

The flying dynamics and flying stability of a slider are the key issues at sub-5 nm flying height (FH) under thermal FH control. The resonant frequencies of current sliders are at 100 kHz level. At present linear disk velocities, the disk waviness at sub-mm level and 10 micron level can excite the resonant modes of the slider and induce FH modulation. This work uses the triple-harmonic method to monitor the dynamic FH signal during the process of thermal FH control. As the FH reduces, the same disk waviness characteristics excite larger dynamic FH modulation.     

Reflexion und Brechung des Lichtes an einer anisotropen Schicht

Reflection and Refraction of Light by an Anisotropic Layer The linear problem of reflection and refraction of plane monochromatic electromagnetic waves by a plane-parallel homogeneous anisotropic layer between (in general different) homogeneous optically isotropic semiinfinite media is treated on the basis of MAXWELL 's equations and the boundary conditions following from them. The permittivity tensor of the anisotropic layer is assumed to be widely arbitrary and therefore asymmetric, neglecting only the spatial dispersion, i. e., the dependence on the wave vector. The electrical fields of reflected, refracted, and transmitted waves are calculated in dependence on the electric field of the incident wave. The conditions for waveguide modes of the layer in the absence of incident waves are obtained from the vanishing of a determinant. The general formulae are specialized to the cases of normal incidence and also of perpendicular and parallel polarisation, relatively to the plane of incidence, of the refracted partial waves in the anisotropic layer thus obtaining simplifications in these cases. The interesting cases of uniaxial layers, when the optic axis lies either parallel or perpendicular to the plane of incidence, belong to the last mentioned special cases of perpendicular and parallel polarisation relatively to the plane of incidence.     

Highly accurate film thickness measurement based on automatic fringe analysis

This paper describes an automated multiple-beam interferometry for measuring a calibrated step height of (27.00 ± 3.00) nm nominally. The fringes captured from the multiple-beam Fizeau–Tolansky interferometer were thinned by using a written program to obtain accurate measurement. We claim that multiple-beam interferometry based on automatic fringe thinning process can provide a real time solution for calibrating step heights precisely and with high accuracy. The uncertainty budget of the multiple-beam interferometry method due to incomplete parallelism of the incident beam and the inhomogeneity of the reflecting layers was calculated automatically with a written ray tracing program. The uncertainty budget in multiple-beam interferometry was estimated to be of the order of 3.00 nm.     

基于多物理场的TFC磁头热传导机理及其影响因素仿真研究

为了利用微尺度热效应的热致飞高控制(TFC)磁头技术实现磁头飞行高度的精确控制,分析了工作状态下TFC滑块在多物理场综合作用下所呈现出来的传热特性及其主要影响因素,考虑了磁头磁盘间超薄气膜的稀薄效应,建立滑块导热、空气轴承表面传热、气膜流动等模型,利用有限元法,对磁头热变形作用机理及热传导特性对滑块动力学特性影响进行了仿真研究,结果表明,建立的传热模型及对雷诺方程的修正适用于求解磁头磁盘界面气膜传热问题和磁头滑块的动力学问题;影响滑块热力学性能的因素主要可以归结为加热器高度、热生成率以及材料的传热系数;空气轴承力及工作表面热变形的双重作用决定了滑块飞行高度的改变.仿真结果为磁头滑块加热器的设计及空气轴承动力学特性分析提供了依据.     

Die Polarisation der Fluoreszenz organischer Szintillationskristalle bei Anregung durchα-Strahlen

The polarisation of the fluorescence spectra of the organic scintillation crystals naphthalene, anthracene, terphenyl, quaterphenyl and stilbene is measured by excitation with α-particles. The measurements are carried out with thin crystal plates of different crystallographic orientation and for different angles of incidence of α-particles. Careful experiments showed that the polarisation values of anthracene do not depend on the angle of incidence of α-particles. A simple model is proposed for explaining the results and the polarisation values are discussed and compared with corresponding values of UV-investigations of other authors.     

基于迈克尔逊干涉的傅里叶变换散斑形貌测量技术

提出了电子散斑干涉载频调制测量物体形貌的方法。采用典型的迈克尔逊干涉光路,将物体偏转一微小角度（等效为物面与参考面间形成空气楔）产生等厚干涉,可在物体的表面引入包含物体高度信息的载波干涉条纹。用CCD采集该载波条纹图,利用傅里叶变换法可解调出物体高度的位相信息,从而实现物体的形貌测量。介绍了电子散斑干涉载频调制测量物体形貌的原理,并进行了实物测量,给出了实验结果。由于该方法采用散斑干涉方法测量物体形貌,所以具有灵敏度高的优点。     

The influence of surface microtopography in metallic electroreflectance

Electroreflectance in an electrochemical cell has been measured on a variety of copper single crystal faces at normal incidence of the light. Striking crystallographic and polarisation anisotropies are observed which cannot be explained within a free electron model. Surfaces with the most open structural arrangement, which give rise to substantial smoothing of the electron density distribution, are shown to exhibit the largest electroreflectance effect.     

Transmission measurement of three-dimension profile based on infrared-light interference technology with wafer compensation

A new method of three-dimension profile measurement is proposed based on infrared-light interference technology, which is extended from visible-light region to infrared-light region for white-light scanning interferometry. Microstructure with two steps of different heights is used to be demonstrative sample to prove the property of designed system based on linnik-type interferometric microscope with phase-stepping algorithm. Three-dimension profile and step height can be obtained accurately with GaAs wafer transmission compensation and are highly consistent with the results that obtained from the famous commercial instrument MSA 400. The novel method has widely potential applications in the field of MEMS, such as reconstructing the internal profile of encapsulation devices and analyzing the quality evaluation of bonding interface based on semiconductor materials.     

Shape measurement by multi-illumination method in digital holographic interferometry

In this paper, temporal phase unwrapping and short time Fourier transform (STFT) are proposed for shape measurement of an object with height steps by digital holographic interferometry (DHI). A series of digital holograms is recorded with a high-speed CCD camera using a multi-illumination method. Each pixel is processed along the time axis independently of other pixels. Two novel methods are proposed to process the wrapped phase maps: the first method is based on complex phasor (CP) and temporal phase unwrapping, and the second method is based on CP and STFT. In the STFT method, continuous phase maps are obtained by integration of the exacted instantaneous frequency. The continuous phase map can characterize the profile of the object with height steps. An experiment is conducted to verify the validity of the proposed methods.