飞秒双脉冲激光照射金属薄膜的热行为

通过双温方程对飞秒单脉冲与双脉冲照射金薄膜进行了计算模拟分析,得到了金靶的电子温度和晶格温度随着时间空间的变化。在同样激光能量密度下,单脉冲与双脉冲使得金膜温度的变化表明双脉冲使得更多的激光能量渗透到靶材内部,这些能量可以使得烧蚀深度更深,有利于提高激光烧蚀靶材的效率。计算结果显示随着激光能量密度的增加熔化面深度逐渐增加,单脉冲与双脉冲熔化面深度的变化明显不同。在激光能量密度高于损伤阈值附近,单脉冲的烧蚀深度大于双脉冲的烧蚀深度,随着激光能量密度增加,双脉冲的烧蚀深度将大于单脉冲的烧蚀深度。     

长脉冲激光辐照LY—12铝靶烧蚀表面的后退速度

用烧穿靶法测量自由振荡长脉冲 1.06μm会聚激光束烧蚀LY-12铝合金靶时间,用电子微量天平、金相显微仪、收集器等测量激光烧蚀铝靶材参量Am和h的技术,给出激光束烧蚀铝靶的烧蚀表面后退速度和烧蚀速度的结果。当烧蚀靶材的激光通量I=10~5～10~7W/cm~2时,烧蚀表面后退速度为0.5～3.8m/s,烧蚀速度为 1～8g/s。     

高斯与平顶光束纳秒脉冲激光物质蒸发烧蚀动力学仿真研究

基于建立的纳秒脉冲激光与金属铝相互作用的二维轴对称模型,仿真研究了光束整形对纳秒脉冲激光烧蚀金属铝过程中蒸发烧蚀动力学的影响.结果表明:等离子体屏蔽对靶材的烧蚀特性具有显著影响,屏蔽效应主要体现在脉冲的中后期.对于3种激光轮廓,高斯光束的屏蔽效果最强,随着整形后的平顶光束直径的增大,屏蔽效果逐渐减弱.平顶光束与高斯光束作用下,靶材温度的二维空间分布较为不同.高斯光束作用时,靶材中心最先升温,随后温度沿径向和轴向扩散.由于平顶光束的能量分布更加均匀,因此一定径向范围内的靶材同时升温.光束整形对靶材的蒸发烧蚀动力学影响较大.对于高斯光束,靶材中心先烧蚀,随后产生径向烧蚀.由于整形后平顶光束的能量密度降低,因此靶面蒸发时间较高斯光束延后,并且一定径向范围内的靶材同时发生蒸发烧蚀.3种激光轮廓下,靶材的蒸发烧蚀形貌与光束的强度分布类似,其中高斯光束的烧蚀坑呈中间深两边浅的特点,平顶光束的烧蚀坑较为平坦.     

飞秒激光烧蚀镍钛形状记忆合金的蚀除机理

结合双温模型的分子动力学模拟方法,研究了飞秒激光脉冲辐照B2结构镍钛合金时烧蚀阈值附近的靶材蚀除机制,数值模拟了中心波长为800nm,脉宽为100fs,能量密度为25~50mJ/cm2的激光与90nm厚B2结构镍钛合金薄膜相互作用过程。确定了脉宽为100fs的脉冲激光与镍钛形状记忆合金相互作用的烧蚀阈值,发现烧蚀阈值条件下,靶材的蚀除机制是单纯基于应力作用的机械破碎;烧蚀阈值附近,未蚀除靶材受热影响发生无序化相变的区域较小,且随激光能量密度的降低而减小。提高激光功率密度,烧蚀同时呈现热机械蚀除和机械破碎机制。     

纳秒脉冲激光沉积薄膜过程中的烧蚀特性研究

研究了高能短脉冲激光薄膜制备的整个烧蚀过程.首先建立了基于超热理论的烧蚀模型，然 后利用较为符合实际的高斯分布表示脉冲激光输入能量密度，给出了考虑蒸发效应不同阶段 的烧蚀状态方程.结合适当的边界条件，以Si靶材为例，利用有限差分法得到了靶材在各个 阶段温度随时间和烧蚀深度的演化分布规律及表面蒸发速度与烧蚀深度在不同激光辐照强度 下随时间的演化规律.结果表明，在脉冲激光辐照阶段，靶材表面的蒸发效应使得靶材表面 温度上升显著放缓；在激光辐照强度接近相爆炸能量阈值时，蒸发速度与蒸发厚度的变化由 于逆流现象将显著放缓.还得到了考虑了熔融弛豫时间及蒸发效应的固-液界面随时间的演化 方程，这一结论较先前工作更具有普适性. 关键词： 脉冲激光烧蚀 热流方程 温度演化 有限差分法     

靶材吸收率变化与烧蚀过程熔融前靶材温度分布

讨论了脉冲激光沉积法中烧蚀阶段熔融前靶材吸收率的变化对于其温度分布的影响. 给出了靶材吸收率随时间的变化规律，并在此基础上，利用较为符合实际的高斯分布表示脉冲激光输入能量密度，建立了相应的热传导方程. 结合适当的边界条件，利用有限差分法，以硅靶材和钨靶材为例，给出了靶材熔融前温度分布随时间和深度变化的演化分布规律，同时对相关过程的物理图像进行详细的讨论.对于吸收率的变化与脉冲激光能量密度的分布对于相应过程的影响，进行了分析讨论. 结果表明，在脉冲激光中间的持续过程中，忽略靶材吸收率的变化对于最终的模拟结果有重要影响，从而导致理论结果与实验数据有较大差异. 关键词： 脉冲激光沉积 吸收率 有限差分 温度演化     

脉冲激光烧蚀中电声弛豫时间的确定

为了提高脉冲激光制备薄膜的质量,准确掌握电声弛豫时间是关键,它对脉冲激光脉宽和能量密度的选取起着决定性的作用. 文中以铝靶材为例,利用经典的双温方程通过时域有限差分法(FDTD)得到电子、离子亚系统的温度随时间和位置演化的图像,进而得到电声弛豫时间的准确值. 这样便能准确划分热烧蚀和非平衡烧蚀,从而更好地控制激光的烧蚀过程. 同时找出了电声弛豫时间随激光脉宽以及能量密度变化的规律. 关键词： 飞秒激光 电声弛豫时间 双温方程 激光能量密度     

基于双相延迟模型的飞秒激光烧蚀金属模型

为了分析飞秒激光烧蚀过程,在双相延迟模型的基础上建立了双曲型热传导模型.模型中考虑了靶材的加热、蒸发和相爆炸,还考虑了等离子体羽流的形成和膨胀及其与入射激光的相互作用,以及光学和热物性参数随温度的变化.研究结果表明:等离子体屏蔽对飞秒激光烧蚀过程有重要的影响,特别是在激光能量密度较高时;两个延迟时间的比值对飞秒激光烧蚀过程中靶材的温度特性和烧蚀深度有较大的影响;飞秒激光烧蚀机制主要以相爆炸为主.飞秒激光烧蚀的热影响区域较小,而且热影响区域的大小受激光能量密度的影响较小.计算结果与文献中实验结果的对比表明基于双相延迟模型的飞秒激光烧蚀模型能有效对飞秒激光烧蚀过程进行模拟.     

KTN薄膜脉冲激光沉积过程的机理研究

根据能量平衡原理,导出了脉冲激光作用靶材的烧蚀率公式,并根据流体动力学理论,得出了脉冲激光产生的等离子体的空间运动特性方程,将靶材烧蚀率公式与等离子体空间动力学方程结合起来,根据实验研究了不同激光功率密度和波长对Kta_0.65Nb_0.35O₃(KTN)薄膜沉积特性的影响,得到了一些有价值的结果,并对结果进行了详细的讨论,理论计算结果与实验大体符合. 关键词： PLD技术 烧蚀率 等离子体 KTN薄膜     

飞秒多脉冲激光烧蚀金属过程中的能量剩余现象

 提出了描述整个飞秒多脉冲激光烧蚀过程的物理模型,模型考虑了多脉冲烧蚀的新的特点,考虑靶材吸收率随温度的变化和蒸发效应,建立了激光烧蚀不同阶段的热传导方程,给出了相应的定解条件。以金靶材为例,利用有限差分法,求解了热传导动力学方程,分别给出单脉冲和多脉冲作用下相应的靶材电子和离子亚系统的温度演化图像,及多脉冲激光作用下能量剩余系数和脉冲个数的变化规律,发现理论曲线与相应的实验数据吻合较好。研究结果充分证明多脉冲激光烧蚀过程中剩余能量的存在。     

强脉冲CO2激光对红外材料的破坏现象

实验表明强激光对红外材料的破坏分为两种类型:烧蚀和冲击破坏。在空气中,光功率密度低于大气的光学击穿阈值时,以烧蚀为主。超过击穿阈值时,冲击破坏是主要的。在我们的实验条件下,用强激光辐照红外脆性材料的靶,靶极易产生微裂纹或粉碎性破坏,其破坏效果与激光的脉冲能量、功率密度、脉冲宽度,以及着靶面积有关。为了直观,文中给出了不少辐照损伤的照片。 关键词：     

激光对金属打孔的理论计算

建立毫秒脉冲激光束与金属相互作用的“矩形”唯象模型,功率密度大于破坏阈时,具有常数的烧蚀率,结合高斯光束的传输建立微分方程,通过数值求解,讨论了孔深、孔形与靶位、透镜焦距、激光方向性、激光能量之间的关系。     

Analysis of the formation and evolution of oriented microstructures on laser ablated silicon

A theoretical approach and qualitative analysis of the changes induced on the surface morphology and the formation of microstructures on silicon targets irradiated by excimer laser are presented. This study is based on theoretical principles of the laser ablation process, in particular, on the analysis of the contribution of the laser energy density, which involves the laser beam parameters and also the physical properties of the target material. For different laser incident angles, the formation of micro-columns oriented towards the laser incident direction is explained. Moreover, numerical simulations and ablation experiments carried out with an excimer laser corroborate the theoretical analysis.     

Optodynamic study of multiple pulses micro drilling

This paper describes an analysis of pulsed lasers micro-drilling of different metals. Study focuses to an optodynamic phenomenon which appears as thermal effects induced by laser light pulses and leads to dynamic process manifested as ultrasonic shock waves propagating into the sample material. The shock waves are detected by a non-contact optical method by using arm compensated Michelson. Monitoring of the main parameters of the micro drilling such as material ablation rate and efficiency was realized by analysis of the optodynamic signals. The process is characterized by decreasing ablation rate that leads to the finite hole depth. The experimental part of study comprehends a comparison between various metals. In order to describe decreasing ablation rate a theoretical model based on the energy balance is proposed. It considers the energy/heat transfer from the laser beam to the material and predicts a decreasing drilling rate with an increasing number of successive laser pulses. According to the proposed model, the finite depth of the hole appears as a consequence of the increasing surface area through which the energy of the laser beam is conducted away to the material around the processed area. Decreasing ablation rate and the finite hole depth predicted by model were in good agreement with the experimental results.     

Glass processing using the fourth harmonic of nanosecond pulse Nd:YAG laser

Ablation processing of borosilicate glass was carried out using the fourth harmonic of the Q-switch Nd:YAG laser. The dependency of the ablation depth on irradiation pulse energy density and the dependency of the ablation depth on irradiation spot size were investigated. The average ablation depth increased with an increase in irradiation pulse energy density. When the irradiation pulse energy density was the same, the ablation depth of the focused beam with a large spot diameter was deeper than that of the focused beam with a small spot diameter. To shorten the processing time, an increase in the irradiation pulse energy density and use of a large spot size focused beam are effective. Using area scanning together with line scanning, a rectangular through hole (sub-mm size) without cracks or chips was formed in borosilicate glass of 140 μm in thickness. PACS 52.38.Mf; 42.70.Ce; 42.62.Cf     

High-aspect-ratio microdrilling in polymeric materials with intense KrF laser radiation

UV laser microdrilling of high-aspect-ratio holes has been studied by using an intense beam with a low numerical aperture (KrF laser). The UV laser ablation produces a minimum of thermal or mechanical damage on the target. Under some particular experimental conditions (many high-fluence pulses), it is shown that long deep holes are obtained with reproducible aspect ratio (up to K/d길) in a variety of materials. Experiments with polymers (PMMA, PC, PET, PI, PS, PEEK) show that the more absorbing the polymer is, the better the resolution. However highly absorbing materials exhibit a low ablation rate. These promising results on laser microdrilling can be extended to new applications, for example, when the beam/target relative movement is computer driven. For instance this approach can be applied to cutting micro-objects with complicated shape or to machining fragile or brittle materials.     

Numerical and Experimental Evaluation of Shine-Through Loss and Beam Heating Due to Neutral Beam Injection on EAST

This research applies experimental measurements and NUBEAM, ONETWO and TRANSP modules to investigate the shine-through(ST) loss ratio and beam heating percentage of neutral beam injection on EAST. Measurements and simulations confirm that the ST loss ratio increases linearly with beam energy, and decreases exponentially with plasma density. Moreover, using the multi-step fitting method, we present analytical quantitative expressions of ST loss ratio and beam heating percentage, which are valuable for the high parameter long-pulse experiments of EAST.     

强激光束与空腔靶相互作用实验研究

1.06μm波长的强激光束辐照Au材料制作的空腔靶,采用目前国内最先进的诊断设备。对腔内高温等离子体现象演变规律进行了实验观察,获得了反射激光、能量吸收、X光转换、亚千X光能谱及时空特性、辐射温度、超热电子等重要物理信息,并就实验结果作了必要的分析和讨论     

Theoretical determination of the ablation rate of metals in multiple-nanosecond laser pulses irradiation regime

A detailed understanding of the physical determinants of the ablation rate in multiple nanosecond laser pulses regime is of key importance for technological applications such as patterning and pulsed-laser deposition. Here, theoretical modeling is employed to investigate the ablation of thick metallic plates by intense, multiple nanosecond laser pulses. A new photo-thermal model is proposed, in which the complex phenomena associated to the ablation process are accounted for as supplementary terms of the classical heat equation. The pulsed laser ablation in the nanosecond regime is considered as a competition between thermal vapourization and melt ejection under the action of the plasma recoil pressure. Computer simulations using the photo-thermal model presented here and the comparison of the theoretical results with experiment indicate two different mechanisms that contribute to the decrease of the ablation efficiency. First, during the ablation process the vapour/plasma plume expanding above the irradiated target attenuates the laser beam that reaches the sample, leading to a marked decrease of the ablation efficiency. Additional attenuation of the laser beam incident on the sample is produced due to the heating of the plasma by the absorption of the laser beam into the plasma plume. The second mechanism by which the ablation efficiency decreases consists of the reduction of the incident laser intensity with the lateral area, and of the melt ejection velocity with the depth of the hole.