基于飞秒光梳互相关的空间精密测距理论模型分析EI北大核心CSCD

飞秒光梳的出现为实现高精度绝对距离测量提供了诸多有效方法,并有望直接应用于激光雷达、卫星编队飞行和空间引力测量等空间探测任务。从未来空间精密测距的精度需求出发,提出在飞行时间法辅助测距的基础上利用光学脉冲互相关分析技术将目标距离测量直接溯源到光梳重复频率的测量方法,建立了飞秒光梳测距基本模型,进行了飞秒脉冲互相关理论分析,并开展了互相关及测距仿真实验。仿真结果表明,在目标距离为10 km以及重复频率扫描精度0.01 Hz条件下,进行非模糊量程内线性测距的测量精度优于450 nm,测距残余误差的峰谷(PV)值为780 nm,验证了该方法实现亚微米级甚至纳米量级大量程空间精密测距的可行性。     

精密测量中的纳米计量技术

随着纳米科学的迅速发展,对纳米计量技术也提出了更高要求。目前,纳米计量技术已经实现在几十微米量程范围内具有亚纳米甚至皮米量级的测量分辨率。回顾了现在主要的纳米计量技术,包括激光干涉仪、差拍F P干涉仪、X射线干涉仪、光学+X射线干涉仪、基于频率测量技术和光频梳技术等,介绍了其工作原理、技术特点、应用范围及其最新研究进展。     

基于飞秒光梳互相关的空间精密测距理论模型分析

飞秒光梳的出现为实现高精度绝对距离测量提供了诸多有效方法,并有望直接应用于激光雷达、卫星编队飞行和空间引力测量等空间探测任务。从未来空间精密测距的精度需求出发,提出在飞行时间法辅助测距的基础上利用光学脉冲互相关分析技术将目标距离测量直接溯源到光梳重复频率的测量方法,建立了飞秒光梳测距基本模型,进行了飞秒脉冲互相关理论分析,并开展了互相关及测距仿真实验。仿真结果表明,在目标距离为10 km以及重复频率扫描精度0.01 Hz条件下,进行非模糊量程内线性测距的测量精度优于450 nm,测距残余误差的峰谷(PV)值为780 nm,验证了该方法实现亚微米级甚至纳米量级大量程空间精密测距的可行性。     

激光全场模态测量技术研究

详细阐述了电子散斑时间平均法振动测量技术的原理,通过对影响测量精度的诸因素进行理论和实验分析,提出通过应用连续相位扫描技术克服相移系统相移不准确所带来的误差.通过散斑平均技术的实施,消除散斑对测量精度的影响.在实验中得到了满意的测量结果.通过线性近似法,解决了振幅低于30nm的振动测量问题,从而使系统分辨率达到亚纳米级,测量精度达到纳米级.     

基于白光频域干涉的大台阶高度测量方法

基于白光频域干涉的基本原理,提出了一种可实现高分辨率和大台阶高度测量的方法,利用该方法进行台阶高度测量时,其测量范围取决于所用干涉光源的中心波长和光谱仪的分辨率,可达mm量级。在原理验证性实验中,利用该方法已经实现了最大高度为298.57 m的台阶高度测量,多次重复测量的标准偏差不超过0.03 m,最大均方根误差为0.94 m,实验测量结果与台阶高度真实值具有很好的一致性。     

基于相位展开及拼接算法的一种高精度大量程宽光谱干涉显微术

宽光谱干涉显微术广泛应用于高精密检测领域,它测量样品形貌通常采用垂直扫描干涉术对亚微米至毫米级特征进行测量,以及相移干涉术对纳米级特征进行测量。其中,相移干涉术精度可达纳米级,但量程有限,高度变化对应的相位需限制在区间内。采用包裹相位展开算法可以扩展相移干涉术的量程,也仅适用于平滑表面,当高度起伏超出焦深或者光源相干长度的限定范围时,干涉条纹模糊或对比度丧失,所解算的结果将产生较大误差甚至错误。提出一种基于相位展开及拼接算法的高精度、大量程宽光谱干涉显微测量方法,以干涉条纹调制度量化条纹质量,条纹对比度高、成像清晰的区域对应调制度较高,定义当前焦面条纹调制度高于阈值的区域为理想区域,定义焦面条纹调制度低于阈值的区域为问题区域。以相位展开算法获得理想区域中的样品相位分布,问题区域的包裹相位不进行展开。使用微位移结构纵向移动物镜焦平面,选择合理的步长,使相邻焦面位置理想区域展开后的真实相位保持部分区域重合,根据重合区域的相位值均差可以实现不同焦面位置的高精度相位拼接,最终获得扩展量程的高精度真实相位结果,进而可以恢复样品完整的表面形貌分布。该算法通过对理想区域的筛选,避免了相位在问题区域展...     

共轭涡旋光干涉精密位移测量方法与系统

为实现高精度大量程精密位移测量，提出了一种基于涡旋光共轭干涉的精密位移测量方法。通过建立位移过程中涡旋光共轭干涉图样的旋转角弧度与位移之间的数学关系，实现了对旋转角弧度的精确提取，得到了高精度的精密位移测量结果。基于该原理对测量方案进行了光学系统设计与仿真，研制了实验系统并进行了实验测试。当标准位移为20 nm时，实验测量结果的误差为25 pm，相对误差为0.13%，证明了所提亚纳米级精密位移测量方案的有效性。所提系统还可通过计量干涉图样旋转圈数进行大测量范围的精密位移测量。实验结果表明，所提方案可在30μm范围内实现精密位移测量。     

基于白光频域干涉的大台阶高度测量方法

基于白光频域干涉的基本原理,提出了一种可实现高分辨率和大台阶高度测量的方法,利用该方法进行台阶高度测量时,其测量范围取决于所用干涉光源的中心波长和光谱仪的分辨率,可达mm量级。在原理验证性实验中,利用该方法已经实现了最大高度为298.57μm的台阶高度测量,多次重复测量的标准偏差不超过0.03μm,最大均方根误差为0.94μm,实验测量结果与台阶高度真实值具有很好的一致性。     

一种微米级高度台阶镜面条纹反射的三维测量系统

提出了一种检测微米级高度衍射台阶结构的条纹反射三维检测方法.对条纹反射光路的理论分析表明,合理选择入射光线角度和液晶屏放置角度以及液晶屏像素尺寸等系统参数,条纹反射系统能够分辨微米乃至亚微米级的镜面台阶.实际构建了一套微米级台阶镜面条纹反射测量实验装置;采用四步相移法进行条纹相位解算,运用移动屏幕方法确定反射光线方程,结合三角交汇原理,对待测台阶镜面进行三维重构.实际测量了名义值为5μm和10μm的台阶镜面,测量结果不确定度在0.5μm内,和商业仪器测量结果的偏差<0.5μm,证明了设计方法的可行性.本文结果对于包含衍射台阶结构的光学元件三维测量研究具有一定的借鉴意义.     

利用光频梳提高台阶高度测量准确度的方法

提出一种利用光频梳和可调谐半导体激光器提高台阶高度测量准确度的方法. 通过将可调谐激光器锁定至光频梳,可对激光器的输出波长进行精确锁定与测量.基于可调合成波长链原理,利用锁定后的半导体激光器构建了一套台阶高度测量方案,该方案可消除合成波长误差对台阶高度测量不确定度的影响. 采用一台可调谐半导体激光器和光频梳进行了5000 s的连续锁定实验, 结果表明,锁定后的可调谐半导体激光器的频率稳定度达 1.8×10^-12.该方法的理论测量不确定度约为7.9 nm, 且测量结果可溯源至时间频率基准.     

Determining large step heights using zero-order interference fringe identification and an external cavity diode laser

Zero-order interference fringe identification is a powerful tool for measuring large step heights. In contrast to white light scanning interferometry, this study utilizes an external cavity diode laser as the light source. The zero-path difference point can be accurately identified by combining wavelength scanning interferometry, in which the laser wavelength is continuously changed, with single wavelength interferometry, in which the laser wavelength is fixed. The experimental apparatus is a two-arm interferometer containing the sample in the measurement arm. The step height denotes the distance between two locations of a zero-order interference fringe, which are obtained by continuously varying the length of the reference arm. The accuracy of a sample of 10 mm step height was found to be 0.33 μm.     

基于飞秒光频梳的压电陶瓷闭环位移控制系统

利用飞秒光频梳、外腔可调谐半导体激光器和法布里-珀罗干涉仪建立了一套压电陶瓷亚纳米级闭环位移控制系统. 将可调谐半导体激光器锁定至光频梳, 通过精确调谐光频梳的重复频率, 实现了半导体激光器在其工作频率范围内的精密调谐. 利用Pound-Drever-Hall锁定技术将带有压电陶瓷的法布里-珀罗腔锁定至半导体激光器, 进而通过频率发生系统控制压电陶瓷产生亚纳米级分辨率的位移. 实验研究发现锁定至光频梳后可调谐半导体激光器1 s的Allan标准偏差为1.68×10^-12, 将其在30.9496 GHz范围内进行连续闭环调谐, 可获得压电陶瓷的位移行程约为4.8 μm; 以3.75 Hz的步长扫描光频梳的重复频率, 实现了压电陶瓷的450 pm闭环位移分辨率并测定了压电陶瓷的磁滞特性曲线. 该系统不存在非线性测量误差, 且激光频率及压电陶瓷位移均溯源至铷钟频率源. 关键词： 光频梳 压电陶瓷 法布里-珀罗腔 可调谐半导体激光器     

Two Step Deceleration of Cesium Atomic Beam by Frequency Modulated Diode Lasers

Two step white light slowing of a cesium atomic beam was demonstrated by using two kinds of frequency modulated diode lasers. In addition to a frequency modulated free-running diode laser used for the first step of wide range deceleration, a frequency modulated external cavity diode laser (ECDL) with narrower and sharper spectrum was used for the second step deceleration. It was shown that the number of slowed atoms was increased more than twofold by the two step deceleration which kept narrow velocity width of 27 m/s, which is smaller than that by only the single step deceleration.     

Accurate monitoring of an interferometric fiber-optic sensor with a multimode semiconductor laser

A technique for monitoring interferometric sensors by correlation of the optical signal from the sensor with the signal from a phase-modulated reference interferometer is described. The technique is applied to temperature measurement with a fiber Fabry-Perot sensing head. We extend the 7 degrees C unambiguous measurement range obtained with a 1.3-mum laser diode as the light source to 43 degrees C by adding a second laser diode emitting at 1.55mum . Experimentally, a rms phase-measurement error of +/-0.28rad , corresponding to a temperature error of +/-0.32 degrees C , was achieved with a low-quality multimode Fabry-Perot laser. The phase error was improved to +/-0.14rad , corresponding to a temperature error of +/-0.16 degrees C , by use of a distributed-feedback laser diode.     

Research on micro-vibration measurement by a laser diode self-mixing interferometer

The self-mixing vibration signals are observed in the laser diode when the optical beam is back-scattered into the laser cavity which causes laser output power modulated. Based on these properties, a laser diode self-mixing vibrometer with wide dynamic range is proposed. This current investigation further reports new work to improve the accuracy and range of the measured vibration signals. Numerical simulations and experimental results are given and discussed. The experimental results show that the frequency measurement range can be achieved up to 22 kHz with 0.241% maximum relative error while utilizing the reflecting film. For amplitude measurement utilizing the same reflecting film, the error of measurement result is 4.77 nm which has approached nanometer order of magnitude.     

激光器特性在痕量气体检测中的影响

研究了激光器扫描步长和线宽两种特性对可调谐半导体激光吸收光谱检测系统的影响,理论上推导出激光与气体吸收谱线的作用原理,分析出扫描信号(锯齿波)的台阶间隔和高度影响激光器中心波长的扫描原理.设定了仿真参数,仿真出锯齿波台阶数与最大扫描误差关系曲线,得出扫描信号的一个周期内具有4000个台阶时,半高全宽(FWHM)大于0.01 cm-1,误差小于1‰;仿真出激光器线宽与最大幅值、线宽误差关系曲线,给出线宽误差最大为1%,0.5%时激光器线宽对应的最小FWHM.在温度系数n取0.9,大气展宽系数γair取0.005的条件下,给出温度T,压强P与FWHM关系图,推出了适用的压强与温度范围.为指导选取激光器与气体吸收谱线、提高系统检测限提供了相关理论依据.     

Electro-optic holography fringe control using diode laser current modulation

Electro-optic holography (EOH) is a whole field, laser-based, vibration measurement technique. Highly dense, unresolvable fringe patterns often limit the EOH measurement range. This paper presents a technique for increasing the measurement range of an EOH system using diode laser current modulation. This technique is known as frequency translated electro-optic holography (FTEOH). Using diode laser current modulation, the fringe patterns are based on higher-order Bessel functions and the sensitivity of the EOH system can either be increased or decreased. The amount of sensitivity reduction is limited only by the frequency limit of the signal generator that modulates the current supplied to the diode laser. EOH and FTEOH experimental results are presented and shown to closely compare.     

Laser diode interferometer used for measuring displacements in large range with a nanometer accuracy

In this paper, the displacement of an object is measured with a photothermal phase-modulating laser diode interferometer. A feedback control system is designed to reduce the measurement errors caused by the fluctuations in the optical wavelength of the laser diode and the vibrations of the optical components in the interferometer. A new method is proposed to enlarge the measuring range of displacement. Using this method, the measuring range is enlarged from half wavelength to nearly 125 μm and the measurement accuracy is about 1 nm. The simulation and experimental results have shown the usefulness of the method and the feedback control system.     

Wavefront measurements of diode laser beams with large dynamic ranges

We propose and demonstrate a method for the measurement of the wavefronts of high-power diode laser beams with large dynamic ranges. Our wavefront sensor consists of a movable pinhole and a wavefront-slope detector. The measurement results show that the wavefront sensor exhibits a large dynamic range of pi/2 to -pi/2 and a high precision on the measured average wavefront slope. The wavefronts of high-power diode laser beams having large divergence angles at arbitrary locations (including near and far fields) can be reconstructed via the wavefront measurement at a given location. The amplitude and phase distributions of a laser beam could be determined from the measured optical field data using diffraction theory. The experimental measurement of the wavefront of a 980 nm diode laser beam will be presented and discussed.