掺杂分子束外延GaAs薄膜表面和GaAs-GaAs界面的光反射调制谱

报道了用光反射调制谱(PR)测量掺杂分子束外延GaAs薄膜表面和界面电场的结果。分别用He-Ne激光和He-Cd激光作调制光,由于它们的穿透深度不同,可以有效地区分来自表面和界面的PR信号。由PR谱推算出薄膜表面和界面的电场。研究了薄膜干涉效应对调制光谱的影响,对界面电场的成因进行了分析和讨论。 关键词：     

Temperature behavior of Franz-Keldysh oscillation and evaluation of interface electric fields attributed to strain effect of InAs/GaAs quantum dot

In this work, the electric field-induced Franz-Keldysh effect was used to investigate the localized electric fields in GaAs interfaces attributed to strain effect of InAs/GaAs quantum dots (QD). The electric fields were investigated by photoreflectance spectroscopy (PR). PR spectra of the InAs/GaAs QDs showed complex Franz-Keldysh oscillations (FKOs) with various temperatures. It is suggested that the FKOs originated from the interface electric fields predominately caused by the strain-induced polarization at GaAs interface near the InAs QDs. The InAs/GaAs QDs have a broad range of interface electric fields from ～10⁴ V/cm to ～2х10⁵ V/cm. Temperature behavior of FKO amplitude distribution is explained by temperature dependent carrier confinement effect.     

Investigation of various optical transitions in GaAs/Al0.3Ga0.7As double quantum ring grown by droplet epitaxy

This work examines the optical transitions of a GaAs double quantum ring (DQR) embedded in Al_0.3Ga_0.7As matrix by photoreflectance spectroscopy (PR). The GaAs DQR was grown by droplet epitaxy (DE). The optical properties of the DQR were investigated by excitation‐intensity and temperature‐dependent PR. The various optical transitions were observed in PR spectra, whereas the photoluminescence (PL) spectrum shows only the DQR and GaAs band emissions. The various optical transitions were identified for the GaAs near‐band‐edge transition, surface confined state (SCS), DQR confined state, wetting layer (WL), spin–orbital split (E_GaAs + Δ_o), and AlGaAs band transition. PR spectroscopy can identify various optical transitions that are invisible in PL. The PR results show that the GaAs/AlGaAs DQR has complex electronic structures due to the various interfaces resulting from DE.     

Photoreflectance study of InAs ultrathin layer embedded in Si-delta-doped GaAs/AlGaAs quantum wells

Photoreflectance and photoluminescence studies were performed to characterize InAs ultrathin layer embedded in Si-delta-doped GaAs/AlGaAs high electron mobility transistors. These structures were grown by Molecular Beam Epitaxy on (1 0 0) oriented GaAs substrates with different silicon-delta-doped layer densities. Interband energy transitions in the InAs ultrathin layer quantum well were observed below the GaAs band gap in the photoreflectance spectra, and assigned to electron-heavy-hole (E_e-hh) and electron-light-hole (E_e-lh) fundamental transitions. These transitions were shifted to lower energy with increasing silicon-δ-doping density. This effect is in good agreement with our theoretical results based on a self-consistent solution of the coupled Schrödinger and Poisson equations and was explained by increased escape of photogenerated carriers and enhanced Quantum Confined Stark Effect in the Si-delta-doped InAs/GaAs QW. In the photoreflectance spectra, not only the channel well interband energy transitions were observed, but also features associated with the GaAs and AlGaAs bulk layers located at about 1.427 and 1.8 eV, respectively. By analyzing the Franz-Keldysh Oscillations observed in the spectral characteristics of Si-δ-doped samples, we have determined the internal electric field introduced by ionized Si-δ-doped centers. We have observed an increase in the electric field in the InAs ultrathin layer with increasing silicon content. The results are explained in terms of doping dependent ionized impurities densities and surface charges.     

Photoreflectance study of InAs quantum dots on GaAs(n 1 1) substrates

InAs self-assembling quantum dots (SAQDs) were grown on GaAs(n 1 1) substrates (n=2,3,4,5) by molecular beam epitaxy. Their structural and optical properties were studied by reflection high-energy electron diffraction, atomic force microscopy (AFM) and photoreflectance spectroscopy (PR). The PR spectra from 0.7 to 1.3 eV presented transitions associated to the SAQDs. The energy transitions were obtained by fitting the PR spectra employing the third derivative line-shape model. For n=2,4,5, two functions were required to fit the spectra. For n=3 only one function was required, in agreement with the more uniform SAQDs size distribution observed by AFM on GaAs(3 1 1)A. Franz–Keldysh oscillations (FKO) were observed in the PR spectra at energies higher than the GaAs band gap. From the FKO analysis we obtained the GaAs built-in internal electric field strength (F_int) at the InAs/GaAs(n 1 1) heterointerface. From F_int we made an estimation of the GaAs strain at the heterointerface.     

Lineshape analysis of photoreflectance spectra from InGaAs/GaAs quantum wells

The fundamental optical transitions in In_0.15Ga_0.85As/GaAs single symmetric quantum wells (QWs) are studied through photoreflectance (PR) measurements and their dependence on the well distance from the surface. A phase rotation of the lineshape of the PR signal is observed as was predicted in our previous works. PR spectra of several samples, measured at 77 K, are compared with results of PR lineshape calculations, and a fairly good agreement is found. The quantum-confined Stark effect is shown to be the dominant modulation mechanism in the QW. Pronounced interference effects make PR spectra from QWs sensitive to the cap layer thickness.     

FRANZ-KELDYSH OSCILLATION FROM THE SPACE CHARGE REGION OF MBE GaAs FILMS

We have investigated doped MBE GaAs films using photoreflectance (PR) spec-troscopy. Special spectral structures have been observed in the vicinity of the funda-mental band gap, which are quite different from the Franz-Keldysh oscillation (FKO) from uniform electric fields under flatband modulations. Numerical analysis has been performed for FKO from electric fields in the space charge region under non-flatband modulations. Some typical FKO line shapes are illustrated. For moderately doped samples the calculated line shapes are basically consistent with experiments. The surface electric field and the Fermi level pinning have also been deduced from exper-iments.     

N-Composition and Pressure Dependence of the Inter Band Transitions of Ga(N,As)/GaAs Quantum Wells

A series of GaN x As 1 m x /GaAs quantum well structures with well widths of about 20 nm and x varying between 1% and 3.5% has been grown by metal-organic vapour phase epitaxy. We have studied the evolution of the quantum well states under hydrostatic pressure up to 20 kbar at 300 K by photomodulated reflectance (PR) spectroscopy. The energy positions of the quantum well transitions have been obtained by fitting the PR spectra. The pressure dependence of the allowed heavy-hole transitions e n hh n decreases with increasing n . This directly reflects the strong non-parabolic dispersion of the conduction band originating from the interaction of the N-impurity level with the bands of the GaAs host. The fitted energy positions and their pressure dependence can be well described by a 10 band k.p model. The observed splitting between the lowest light-hole and heavy-hole transitions are in agreement with a type I band alignment.     

半绝缘GaAs的双调制反射光谱研究

半导体材料电子能带结构的确定对研究其物理性质及其在半导体器件方面的应用有重要意义.光调制反射光谱是一种无损和高灵敏度的表征半导体材料电子能带结构的光学手段.光调制反射光谱中激光调制导致的材料介电函数的变化在联合态密度奇点附近表现得更为明显.通过测量这些变化,可以得到有关材料能带结构临界点的信息.然而在传统的单调制反射光谱中,激光调制信号的光谱线型拟合和临界点数目的分析往往被瑞利散射和荧光信号所干扰.本文将双调制技术与双通道锁相放大器结合,消除了瑞利信号和荧光信号的干扰,获得了具有较高信噪比的调制反射光谱信号.双通道锁相放大器可以同时解调出反射光谱信号及其经泵浦激光调制后的细微变化量,避免了多次采集时可能存在的系统误差.利用这种技术,在可见激光(2.33 eV)泵浦下,我们测量了半绝缘GaAs体材料从近红外至紫外波段(1.1-6.0 eV)的双调制反射光谱,获得了多个能带结构临界点的信息.探测到了高于泵浦能量之上的与GaAs能带结构高阶临界点对应的特征光谱信号,说明带隙以上高阶临界点的光调制反射光谱本质是光生载流子对内建电场的调制,并不是来自该临界点附近的能带填充效应.这一结果表明双调制反射光谱能够对半导体材料能带结构带隙及其带隙以上临界点进行更准确的表征.     

Optical properties of GaNAs/GaAs triple quantum well structures

Optical properties of the GaNAs/GaAs triple quantum well structures were characterized by using photoreflectance and photoluminescence spectroscopy at different temperatures. The excitonic interband transitions of the triple quantum well systems were observed in the spectral range above hν=E_g(GaN_xAs_1−x). A matrix transfer algorithm was used to match the GaN_xAs_1−x/GaAs boundary conditions and calculate the triple quantum well subband energies numerically for theoretical comparison. The internal electric field in the system was extracted from Franz-Keldysh oscillations in the photoreflectance spectra. The influences of the annealing treatment on the transition energy and the internal electric field are also analyzed.     

Optical characterization of InGaAsN/GaAsN/GaAs quantum wells with InGaP cladding layers

Optical properties of InGaAsN/GaAs and InGaAsN/GaAsN/GaAs quantum well structures with InGaP cladding layers were studied by photoreflectance at various temperatures. The excitonic interband transitions of the InGaAsN/GaAsN/GaAs QW systems were observed in the spectral range above hν=E_g(InGaAsN). The confinement potential of the system with strain compensating GaAsN barriers became one step broader, thus more quantum states and larger optical transition rate were observed. A matrix transfer algorithm was used to calculate the subband energies numerically. Band gap energies, effective masses were adopted from the band anti-crossing model with band-offset values adjusted to obtain the subband energies to best fit the observed optical transition features. A spectral feature below and near the GaAs band gap energy from GaAs barriers is enhanced by the GaAs/InGaP interface space charge accumulation induced internal field.     

GaAs/Al0.23Ga0.77As双量子阱的带边不连续性和阱间耦合

本文报道在300和77K对一组具有不同垒宽L_b0.23Ga_0.77As双量子阱样品的光调制反射谱(PR)的研究结果。除观察到11H,11L和22H等容许跃迁外,同时还识别一个从Al_0.23Ga_0.77As价带顶至量子阱第一电子束缚能级的跃迁,另一个从量子阱第一轻空穴束缚能级至Al_0.23Ga_0.77As导带底的跃迁。利用这些跃迁确定导带边不连续性为0.63。对L_{b关键词：}     

Photoreflectance spectroscopy of semiconductor structures at hydrostatic pressure: A comparison of GaInAs/GaAs and GaInNAs/GaAs single quantum wells

The pressure dependence of optical transitions in Ga_0.64In_0.36As/GaAs and Ga_0.64In_0.36N_0.01As_0.99/GaAs single quantum well (SQW) structures were studied in photoreflectance (PR) spectroscopy. In order to apply high hydrostatic pressure, up to ∼11 kbar, the liquid-filled clamp-pressure cell with a sapphire window for optical access has been adopted in the PR set-up with the so called ‘bright configuration’. It has been found that the linear hydrostatic pressure coefficient for the ground state transition are equal to 8.6 and 7.3 meV/kbar for the GaInAs/GaAs and GaInNAs/GaAs SQWs, respectively. This result shows that the incorporation of only 1% of N atoms into GaInAs/GaAs leads to ∼15% decrease in the pressure coefficient. In addition, a non-linearity in the pressure dependence of the ground state transition has been resolved for the GaInNAs/GaAs SQW.     

Optical transitions in AlGaAs/GaAs quantum wires on GaAs(6 3 1) substrates studied by photoreflectance spectroscopy

We present the synthesis and characterization of a system of self-assembling GaAs quantum wires (QWRs) embedded in Al_x Ga_1−x As barriers grown by molecular beam epitaxy on GaAs(6 3 1)-oriented substrates. We studied the optical transitions in the QWRs as a function of temperature (T) by photoreflectance (PR) spectroscopy. The energy transitions were extracted from the PR spectra employing the third-derivative functional form, and they were compared with the transitions theoretically calculated from both, a model of QWRs with cylindrical geometry and a model of a conventional square quantum well. The results show a good agreement between experimental and theoretical data in the case of the QWR model, and from this comparison we were able to identify up to 12 different transitions in the PR spectra and to study their behavior dependent on temperature.     

Optical properties of GaInNAs/GaAs prepared by molecular beam epitaxy

Optical properties of GaInNAs are studied with emphasis on photoluminescence (PL) and photoreflectance (PR) using GaInNAs single quantum wells (GaInNAs-SQW) and thick GaInNAs layers lattice-matched to GaAs (LM-GaInNAs) grown by solid-source molecular-beam epitaxy. First, a blue-shift of band-gap energy as a result of a rapid thermal annealing (RTA) has been confirmed by both PL and PR. Temperature-dependent PL and PR spectra were measured. At low temperature, GaInNAs-SQWs exhibited a PL due to the localized exciton (LE), and the localization was strongly reduced by RTA. A very high-quality GaInNAs-SQW exhibited very intense PL with small half-width (10–20 meV for 8–300 K) without LE emission. In LM-GaInNAs, low-temperature PL exhibited both the LE emission and a deep PL band. Temperature-dependent PL showed that LM-GaInNAs contains large number of non-radiative centers. PR spectra of LM-GaInNAs were composed of more than two transitions, and their relative intensity depended on temperature and annealing.     

Investigation of populated InAs/GaAs quantum dots by photoluminescence and photoreflectance

We studied self-assembled InAs/GaAs quantum dots by contrasting photoluminescence and photoreflectance spectra from 10 K to room temperature. The photoluminescence spectral profiles comprise contributions from four equally separated energy levels of InAs quantum dots. The emission profiles involving ground state and excited states have different temperature evolution. Abnormal spectral narrowing occurred above 200 K. In the photoreflectance spectra, major features corresponding to the InAs wetting layer and GaAs layers were observed. Temperature dependences of spectral intensities of these spectral features indicate that they originate from different photon-induced modulation mechanisms. Considering interband transitions of quantum dots were observed in photoluminescence spectra and those of wetting layer were observed in photoreflectance profiles, we propose that quantum dot states of the system are occupied up to the fourth energy level which is below the wetting layer quantum state.     

Al/GaAs表面量子阱界面层的原位光调制反射光谱研究

用分子束外延（MBE）方法在GaAs表面量子阱上外延生长不同厚度的Al层，以超高真空下的原位光调制光谱（PR）作为测量手段，研究Al扩散形成的表面势垒层对于GaAs表面量子阱中带间跃迁峰位和峰形的影响.根据跃迁峰的变化，采用有效质量近似理论计算出了Al和GaAs 的互扩散长度为0.5nm，这是半导体工艺中的一个重要常数. 关键词： Al GaAs 原位光调制反射光谱（PR） 分子束外延（MBE）     

Observation of symmetery forbidden transitions in the room temperature photoreflectance spectrum of a GaAs/GaAlAs multiple quantum well

We have measured the room temperature photoreflectance spectrum from a 100A/150A GaAs/GaAlAs multiple quantum well (MQW) (x ≈ 0.17). The entire spectrum from the MQW has been fit by a third-derivative functional form lineshape expression. In addition to all the allowed quantum transitions we have clearly observed features from several symmetry forbidden transitions. There also appears to be evidence for unconfined transitions, i.e. energies above the band gap of the GaAlAs barrier layer. There is good agreement between the experimentally determined energies of the various features and a theoretical calculation.     

Photoreflectance spectroscopy of a Ga0.62In0.38N0.026As0.954Sb0.02/GaAs single quantum well tailored at 1.5 μm

Optical properties of a Ga_0.62In_0.38As_0.954N_0.026Sb_0.02/GaAs single quantum well (SQW) tailored at ∼1.5 μm have been investigated by photoreflectance (PR) spectroscopy. The identification of the optical transitions was carried out in accordance with theoretical calculations, which were performed within the framework of the usual envelope function approximation. Using this method, four confined states for both electrons and heavy holes have been found and the optical transitions between them have been determined. The obtained result corresponds to a conduction band offset ratio close to 80%. In addition, the effect of ex situ annealing has been investigated. Lineshape analysis of the PR transitions shows that one of the phenomena responsible for the blueshift of QW transitions is the change in the nitrogen nearest-neighbour environment from Ga-rich to In-rich environments.     

Oscillator strength of type-II light-hole exciton in InxGa1−xAs/GaAs strained single quantum wells

We have investigated the excitonic properties of In_0.15Ga_0.85As/GaAs strained single quantum wells by using photoreflectance spectroscopy and a variational calculation method. We clearly detected the photoreflectance signal of the type-II light-hole exciton, which consists of an electron confined in the InGaAs layer and a light hole located in the thick GaAs layer, in addition to the type-I heavy-hole exciton confined in the InGaAs layer. The calculated results of the overlap integral of the envelope function in the type-II light-hole exciton predict that the oscillator strength is remarkably enhanced with decreasing the InGaAs-layer thickness. This is demonstrated by the layer-thickness dependence of the photoreflectance intensity of the type-II light-hole exciton.