射频辉光放电CH4等离子体中电子的能量分布

通过求解Lorentz简化的玻尔兹曼方程,得到射频放电CH₄等离子体中电子的能量分布函数.求解过程中使用一个简化的射频电场模型代替泊松方程求解放电电场.共计包含6类环境气体及27种电子碰撞反应.通过EEDF对等离子体中的电子反应率系数、电子平均能量、电子的传输率系数等进行求解分析.结果表明,在等离子体鞘层区域电子能量具有Maxwell分布形式,在正柱区域具有Druyvesteyn分布形式.最高电子能量和最大反应率系数出现在鞘层区域.电子的迁移率系数和扩散率系数随射频周期的演化时空分布不均匀.     

Effect of molecular nitrogen on the electron mobility in a mixture of argon and optically excited sodium vapor

A parametric study of the electron energy distribution function (EEDF) and the electron mobility in the mixture Na + Ar + N₂ is carried out. An analysis is made of the conditions that obtain in a photoplasma when the detachment of the mean electron energy from the neutral gas temperature is due to superelastic collisions (collisions of the second kind) with excited sodium atoms. The case of low ionization of the medium at low vibrational temperatures of the ground state of the nitrogen molecules is considered. To find the EEDF a numerical solution of the Boltzmann transport equation is carried out. It is found that in the indicated mixture the presence of nitrogen leads to a depletion of the EEDF in the region of efficient vibrational excitation of the molecules and promotes the formation of inversion in the EEDF ∂f(ɛ)/∂ɛ>0 in the energy range corresponding to the Ramsauer minimum in the cross section of elastic collisions of electrons with the argon atoms. It is shown that the nonequilibrium character of the EEDF leads to a complicated dependence of the electron mobility on the partial ratios of the components of the mixture, the degree of ionization of the medium, and the population of the resonantly excited sodium atoms. Zh. Tekh. Fiz. 69, 14–19 (April 1999)     

沿面闪络流体模型电离参数粒子模拟确定方法

介绍了粒子模拟确定高功率微波介质沿面闪络击穿流体模型相关电离参数的方法.对粒子模拟方法 (包括带电粒子动力学方程、次级电子发射以及蒙特卡罗碰撞模型)和流体整体模型方法 (包括连续性方程和能量守恒方程)做了简介.基于自编的1D3V粒子模拟-蒙特卡罗碰撞程序给出了在高(低)气压、不同气体种类以及不同微波场强和微波频率下流体模型电离参数的粒子模拟结果,包括电离频率、击穿时间、平均电子能量、电子能量分布函数类型.研究结果表明:平均电子能量与电子能量分布函数类型关系不大;中低气压下,电子能量接近Maxwell分布,电子能量分布函数类型对电离参数几乎没有影响;中高气压下,电子能量分布函数类型对电离参数有重要影响,其依赖系数X趋于高阶形式.不同气体的电子能量分布函数类型不同,需要利用粒子模拟对电子能量分布函数类型进行标定.同时,电子能量分布函数依赖系数与微波场强和频率也有关系,其随微波场强增加而增大,随微波频率增加而减小.在给定考察范围(微波场强在7 MV/m以下,微波频率在40 GHz以内),中低气压下,平均电子能量随微波场强增加而迅速增大,电离频率随微波场强增加先增大后降低,平均电子能量随微波频率增加而降低,电离频率随微波频率增加先增加后降低;高气压下,平均电子能量随微波场强增加而缓慢增大,电离频率随微波场强增加而增大,微波频率对平均电子能量和电离频率影响不大.     

射频感应耦合Ar-N2等离子体物理特性的Langmuir探针测量及理论研究

分别通过Langmuir探针测量和动力学模型模拟方法研究了射频感应耦合Ar-N₂等离子体中电子能量分布、电子温度、电子密度等物理量随N₂含量的变化规律.实验研究结果表明：电子能量分布呈现出非Maxwell型分布,并由双温分布向三温分布过渡;电子温度在不同的气压下随N₂含量的增加呈现出不同的变化规律.在放电气压小于1.3 Pa时,电子温度随N₂含量的增加而下降;当气压大于1.3 Pa时,电子温度随N₂关键词： 感应耦合等离子体 2混合气体放电')" href="#">Ar-N₂混合气体放电 电子能量分布 Langmuir探针     

Floating double probe in non‐Maxwellian plasmas: Determination of the electron density and mean electron energy

A theoretical study of the floating double probe based on the Druyvesteyn theory is developed in the case of non‐Maxwellian electron energy distribution functions (EEDFs). It is used to calculate the EEDF in the electron energy range larger than –e(V_f ? V_p) from the I–V double probe characteristics. V_f and V_p are the floating and plasma potential, respectively. The analytical distribution function corresponding to the best fit of EEDF in the energy range larger than e(V_f ? V_p) allows the determination of the total electron density (n_e) and the mean electron energy (<?_e>). The method is detailed and tested in the case of a theoretical Maxwell–Boltzmann distribution function. It is applied for experiments that are performed in expanding microwave plasmas sustained in argon. Analytical EEDFs determined by this method are compared with those measured by means of single probes under the same experimental conditions. A good agreement is observed between single and double probe measurements. Results obtained under different experimental conditions are used to define the best conditions to obtain reliable results by means of the double probe technique.     

Electron temperature in a decaying krypton plasma in the presence of a low electric field

The influence of low electric fields on the average electron energy in an afterglow krypton plasma is studied by means of probe diagnostics and theoretical analysis. It is shown that, when the average electron energy is lower than the energy corresponding to the minimum scattering transport cross section, the degree of plasma ionization substantially affects the shape of the electron energy distribution function (EEDF). The nonequlibrium character of the EEDF results in the density dependence of the coefficient of ambipolar diffusion, which leads to a change in the radial profile of the charged particle density, an increase in the drop in the ambipolar potential across the plasma, and an increase in the rate of diffusive plasma decay. These effects substantially enhance the diffusive cooling of electrons, which is probably a decisive factor influencing the electron energy balance in high-Z noble gases.     

Pathways in the molecular fragmentation for the C2H5OH/He electrical discharge

ABSTRACT

This study focuses on the glow discharge generated with a gases mixture of Ethanol (C₂H₅OH) and Helium (He), at different concentrations maintained at a total pressure of 2.0 Torr. We used optical emission spectroscopy (OES) to analyze the discharge mixture at different concentrations of Helium. Single Langmuir probe data was used to determine the Electron Energy Distribution Function (EEDF). For the total C₂H₅OH/He mixture plasma concentrations, the EEDF has a Maxwellian distribution function. A decrease in He concentration results in significant changes in the EEDF, this behavior is related to the increase in the C₂H₅OH percentage must increase the energy loses of the electrons in the inelastic collision with C₂H₅OH producing a significant change in the EEDF, therefore, the EEDF pattern results in an increase of electron–molecule reaction rates. The rise in electron temperature for increasing Helium percentage is explained by the decreasing electron energy loss in the inelastic collisions with C₂H₅OH molecule. It observes a decrease of electron density ne as a function of the Helium percentage, which can be related to the ratio between ionization cross sections of Helium and C₂H₆O molecule. The active species are generated in the electron-molecule processes, which are associated with electron impact dissociation of C₂H₅OH and Helium electronic impact excitation in the gas phase. The emission optical spectra (OES) show changes in the intensity of the most important peaks of the plasma mixture, which indicates the dependence in the formation of the plasma as a function of the percentage of the gases. The changes in the intensities of the same observed species are due to different processes of excitation and ionization energies of the system, in addition to the increase of He metastable states He I. Hydrogen is the main product obtained from the decomposition of C₂H₅OH.     

On the coupling of electron energy distribution function and excited state distributions in pulsed microwave H$\mathsf{_{2}}$ plasmas

Time evolution of vibrationally and electronically excited states and their coupling with the electron energy distribution function (EEDF) were calculated for microwave pulsed discharges. Different situations have been considered by changing the period and the duty cycle, and considering different pressure values.The main result of this study was to evidence the change in the non-equilibrium character and dynamics of the different distributions depending on the pressure and the pulse period. In particular EEDF strongly deviating from the Maxwell behaviour appear as a consequence of inelastic and superelastic collisions at relatively high pressure and long period. Also, strong oscillation appears on the tail of the H₂ vibrational distribution at high pressure discharge conditions. At low pressure, the effect of superelastic and inelastic collisions appears to be less significant and most of the plasma characteristics may be deduced from a time averaged electron energy distribution function.Received: 15 January 2004, Published online: 29 June 2004PACS: 52.25.Dg Plasma kinetic equations - 52.20.Hv Atomic, molecular, ion, and heavy-particle collisions - 52.27.Cm Multicomponent and negative-ion plasmas     

Experimental investigation of nonlocality effects in the electron energy spectrum in an electronegative gas

The nonlocality of the electron energy distribution function (EEDF) in a dc discharge in oxygen is observed experimentally. A method is developed for measuring the isotropic part of the EEDF in a low-temperature plasma of electronegative gases. The radial dependence of the EEDF and the radial distributions of the electron density, the average electron energy, and the potential are determined. Pis’ma Zh. éksp. Teor. Fiz. 63, No. 7, 511–516 (10 April 1996)     

弱电离大气等离子体电子能量分布函数的理论研究

使用球谐展开的方法求解玻尔兹曼方程,得到了弱电离大气等离子体(79％氮气和21％的氧气)的电子能量分布函数(EEDF).发现当约化电场较小时(E/N＜100 Td),EEDF在2-3 eV急剧下降,在此情况下,高能尾部比麦氏分布要小;当约化电场增加,E/N＞ 400 Td,分布函数趋近于麦氏分布;当约化电场进一步增加,E/N＞ 2000 Td,EEDF的高能尾部(超过200 eV)相对于麦氏分布增加,在高频场作用下,EEDF更倾向于麦氏分布.当ω》vm时,有效电子温度只依赖于E/ω,而与碰撞频率无关;当ω《vm时,有效电子温度只依赖于E/N,与微波频率无关.与一些单原子分子等离子体中电子-电子碰撞在电离度大于10-6时就会影响EEDF不同,空气等离子体中,只有当电离度大于0.1％时,电子-电子碰撞才会对EEDF有明显影响.     

Nuclear spin induced collapse and revival shape of Rabi oscillations of a single electron spin in diamond

A collapse and revival shape of Rabi oscillations in an electron spin of a single nitrogen-vacancy centre has been observed in diamond at room temperature. Because of hyperfine interaction between the host ¹⁴N nuclear spin and the nitrogen-vacancy centre electron spin, different orientations of the ¹⁴N nuclear spins lead to a triplet splitting of the transition between ground state (m_s =0) and excited state (m_s =1). The manipulation of the single electron spin of nitrogen-vacancy centre is achieved by using a combination of selective microwave excitation and optical pumping at 532 nm. Microwaves can excite three transitions equally to induce three independent nutations and the shape of Rabi oscillations is a combination of the three nutations.     

Monte Carlo calculations of reaction rates and energy distributions among reaction products. Reactions of HF and DF with H and D-atoms

Rate coefficients are calculated for the reactions of H and D-atoms with vibrationally excited HF and DF molecules. Three-dimensional classical trajectories of the collision dynamics of these reactions have been calculated by means of the London-Eyring-Polanyi-Sato (LEPS) potential energy surface. The Monte Carlo procedure is used to start each collision trajectory. Results of this study indicate that (a) chemical exchange provides an efficient mechanism for relaxing vibrationally excited HF and DF molecules by H and D-atoms; (b) multiple-quantum transitions are important in the deactivation processes; and (c) both vibration-translation and vibration-rotation energy transfers contribute to vibrational relaxation of vibrationally excited HF and DF molecules by H and D-atoms. The vibrational relaxation of HF (v = 1) by H-atoms is faster than the vibrational relaxation of DF (v = 1) by H-atoms. A similar effect is indicated for D-atoms; i.e. the vibrational relaxation of DF (v = 1) by D-atoms is faster than the vibrational relaxation of HF (v = 1) by D-atoms. Room temperature vibration to translation-rotation (V → T, R) relaxation rates in units of (μsec Torr)^-1 are as follows: 13·8 × 10^-2 for HF (v = 1) by H, 3·1 × 10^-2 for DF (v = 1) by D, 5·5 × 10^-3 for HF (v = 1) by D, and 1·9 × 10^-2 for DF (v = 1) by H. Rates of deactivation of vibrationally excited HF and DF molecules by H and D-atoms are very fast. Rate coefficients are provided for many reactions that have not been measured experimentally.     

Observation and reaction control of a singlet born radical pair formed photochemically in an SDS micelle by pulsed microwave irradiation

The photochemical reaction of tetraphenylhydrazine in an SDS micellar solution is studied using a transient absorption detected magnetic resonance (ADMR) method. This system is photo-dissociated via the singlet excited state and forms a transient radical pair. Strong microwave irradiation of this system under an × band EPR magnetic field provides an ADMR spectrum of the singlet born radical pair as the optical absorbance change of the diphenylaminyl radical. The employment of a short duration microwave pulse that efficiently flips the electron spin quantum (Δm _s = 1) controls the reaction of the radical pair, and the reaction rate constant of this system is determined. Furthermore, changing the microwave duration shows the quantum beat of this system induced by the electromagnetic field. This beat signal carries both a single beat that corresponds to the Rabi frequency and a double-frequency beat that is due to simultaneous two-spin controlling.     

Rydberg states of the HeH+ ion calculated by ab initio methods: potential energies and effective principal quantum numbers

More than 80 excited electronic states of the hydrohelium ion HeH⁺ of ^{1, 3}Σ⁺, ^{1, 3}Π, ^{1, 3}Δ, ^{1, 3}Φ and ^{1, 3}Γ symmetry have been calculated ab initio up to n = 6 for internuclear distances ranging from 0.5 to 100 bohr. The computations involve a configuration interaction (CI) treatment based on a home-made suite of programs that uses special basis sets designed for the representation of molecular Rydberg states. The results are compared with previous computations where these are available (up to n = 4), and it is found that except for the very lowest excited states, the present energies are consistently lower than those obtained previously, with an average lowering corresponding to several hundred cm^?1. It is shown that with the exception of its ground state, HeH⁺ is an effective one-electron system having an overall electronic structure similar to H⁺₂. The interaction of the excited electron with the He⁺ 1s core electron causes small singlet–triplet splittings to appear and ?-mixing interactions to occur, that are not present in H⁺₂.     

射频低压等离子体电子能量分布函数的探针诊断

本文对于无内电极放电的射频低压等离子体,采用探针电流调制法,设计并建立了三探针诊断电子能量分布函数的测量系统,测量了压力在10^-3—10^-1Torr下氮气等离子体的电子能量分布函数。从理论和实验上研究了探针鞘层上射频干扰电压对测量电子能量分布函数的影响,给出了确定射频干扰值以及对射频干扰的影响进行修正的方法,并采用该方法对实验数据进行了修正,得到了正确的电子能量分布函数。根据所得到的电子能量分布函数计算的电子平均能量,与由探针伏安特性计算得到的电子平均能量相差不超过5％,该结果间接证明了本文实验测量系统的可靠性以及对射频干扰影响进行修正的正确性。     

Non-Maxwellian electron energy distribution function in He,He/Ar,He/Xe/H<Subscript>2</Subscript> and He/Xe/D<Subscript>2</Subscript> low temperature afterglow plasma

Experimental studies of the electron energy distribution function “EEDF” under well defined conditions in flowing afterglow plasma, using a Langmuir probe are reported. The EEDF is measured in He₂ ⁺ and Ar⁺ dominated plasmas and in XeH⁺ and XeD⁺ dominated recombining plasmas. He is used as a buffer gas at medium pressures in all experiments (1600 Pa, 250 K). The deviation of the measured EEDF from Maxwellian distribution is shown to depend on plasma composition and on the processes governing the plasma decay. The influence of energetic electrons produced during the plasma decay on the body and tail of the EEDF is observed. The mechanism of energy balance in afterglow plasma is discussed.     

Electron impact dissociation of ND<Superscript>+</Superscript>: formation of D<Superscript>+</Superscript>

Absolute cross sections for electron impact dissociation of ND⁺ leading to the formation of D⁺ have been measured by applying the animated electron-ion beam method in the energy range from the reaction threshold up to 2.5 keV. The maximum inclusive cross section is observed to be (16.8 ± 0.8) × 10⁻¹⁷ cm² at the electron energy of 65.1 eV. The appearance energy for the D⁺ production is measured to be (4.0 ± 0.5) eV. Collected data are analyzed in details by means of an original procedure in order to determine separately the contributions of dissociative channels. A specific Monte Carlo modeling has been developed, which is proven to reconstruct adequately the dissociative ionization cross section. The present energy thresholds provide information about the ground and excited states of the molecular ion, as well as about the possible population of the vibrational levels. The reaction D₂(v) + N⁺ (or H₂(v) + N⁺) is a probable source for that population and it constitutes the first step of the molecular activated processes, so the corresponding chain of reactions has to be considered to study the chemistry of plasma sources.     

低压氢等离子体发光光谱

本实验使用2.45 GHz微波(100～200 W)激励产生低压(1～4 kPa)氢等离子体,通过光纤光谱仪探测氢等离子体的发射光谱,并分析了特征谱线分布及谱线强度随压强、功率的变化情况,计算了氢等离子体的电子激发温度.实验结果表明,压强由1 kPa增加至4 kPa,谱线强度减小;功率由100 W增大至200 W,谱线强度增大.随着压强的增大,电子激发温度减小或先减小后增大.     

Optical emission spectra from microwave oxygen plasma produced by surfatron discharge

This paper is devoted to a systematic study of the production of molecular and atomic ions and excited atoms in a microwave oxygen plasma generated by surfatron in a quartz tube (i.d. 6 mm). The content of O ₂ ⁺ , O⁺ and O is measured, using the optical emission spectroscopy, in a wide range of oxygen pressures (from 3.5 Pa to 10² Pa) and microwaves powers (from about 30 W to 300 W) delivered into the plasma. It is shown that the content of individual species O2⁺, O⁺ and O strongly depends on the conditions, particularly operating pressurep and the microwave powerP, under which plasma is created. It means that the chemical reactivity of microwave plasma also strongly depends onp andP. It is of great importance for many practical applications, e.g. for a reproducible production of thin films with prescribed properties.The authors wish to express their thanks to the Grant Agency of Academy of Sciences of the Czech Republic for the support of this research. This work was done under Academy of Sciences Grant No. 11020.     

Radiative Transitions and Temperature Time Dependences in Pulse Excited Microwave Discharges – (N2, Ar + N2)

Quantitative spectral and microwave measurements of vibrational temperatures and electron densities were performed for 2400 MHz non-isothermic pulse excited discharges in flowing nitrogen and argon at pressures (60–2700) Pa. A detailed analysis of the N₂ vibrational states population for the N₂ C³Π_u, X¹Σ_g⁺ electronic states has been carried out. The basic difficulties encountered when comparing the spectroscopically determined values of vibrational temperatures with corresponding quantities of the ground electronics state are mentioned and the time resolved dependences of the translational gas temperature in N₂ during the microwave pulse is evaluated. The steady state in the nitrogen pulse excited microwave plasma is reached within 3 · 10^?4 s, but generally, this time depends on the gas pressure in the discharge tube. In the Ar + N₂ mixtures the excitation conditions are complicated by the metastable argon atoms (3P_2,0) creating the nonequilibrium populations of electronic, vibrational and rotational N₂ states.