一种双质量硅微陀螺仪

双质量块结构形式的硅微陀螺仪能够有效消除轴向加速度等共模干扰的影响。利用结构解耦方法设计了一种新型的双质量双线振动式硅微机械陀螺仪。依据双质量硅微陀螺的结构和工作原理,通过简化的动力学方程,对该陀螺的驱动和检测模态进行了理论分析,并利用Ansys有限元软件对陀螺的驱动和检测模态进行了数值仿真。仿真结果表明,该陀螺结构设计能够实现驱动和检测模态的完全解耦,从而验证了设计思想的正确性。通过仿真,得到了驱动和检测模态的仿真频率值。在对微陀螺加工所采用的加工工艺进行简单介绍后,对加工出的硅微机械陀螺仪样品的模态频率值进行了电路测试。由于加工误差的存在,实验得到的驱动和检测频率值与仿真设计值存在1.6%的误差。最后在转台上对样品的标度因数进行了测定,得到了该双质量硅微陀螺仪的标度因数为2.518mV/((°)?s-1)。     

高性能对称解耦结构的线振动陀螺

为了最大限度克服微机电陀螺的两个模态的相互耦合作用,提高微机电陀螺的综合性能指标,采用国内现有MEMS标准工艺方法,设计和制作了一种高性能单晶硅对称解耦结构的线振动陀螺。采用对称结构形式和保证陀螺驱动和检测模态振型都是弯曲振动模式,易于模态匹配;由于采用驱动模态和检测模态结构解耦方式,从微结构设计上大大降低了正交耦合误差影响,使陀螺具有输出零位小、零偏稳定性好的优点。测试结果表明：初次加工的样机,在大气中驱动和检测模态固有频率分别在2430Hz和2580Hz左右,在150Hz带宽内具有0.1～0.5（°）/s的分辨率;随着加工精度的提高和检测电路的改进,该陀螺在大气中15Hz带宽内实现0.008（°）/s的分辨率,在真空状态下,这种高性能单晶硅对称解耦结构的线振动陀螺性能会有进一步的提高。     

MEMS陀螺仪结构模型及系统仿真

为了减小MEMS陀螺仪的正交误差,进一步提高陀螺精度,在Simulink环境中对陀螺结构和测控系统进行了建模和仿真。首先在理想状态的陀螺结构模型基础上建立了包含机械热噪声、模态间耦合等非理想因素的结构模型,并给出了陀螺结构的相关设计参数。其次在陀螺结构模型上以自激振荡和AGC控制技术为基础设计了驱动回路,该回路可在短时间内将驱动幅度稳定在10μm,且驱动频率为4048 Hz（驱动模态的谐振频率）。然后分析了模态间耦合信号的作用方式并建立了正交校正和检测闭环力反馈回路,仿真结果显示,在全闭环状态下检测模态所受耦合力的幅度比未校正状态下降了5个数量级,等效输入角速度也从205(°)/s下降到了6.58(°)/h。最后对陀螺模型进行了整体测试,得到其标度因数和阈值分别为21.76 mV/(°)/s和0.002(°)/s。     

硅微陀螺仪驱动模态离散控制分析

针对硅微陀螺仪数字控制系统,为了有效控制陀螺仪的驱动模态,采用离散域(Z域)分析方法,全面分析、研究并实现了基于数字锁相环(DPLL)和数字自动增益控制的(DAGC)驱动模态控制。分别建立了基于离散域分析的相位控制模型和幅度控制模型,给出了相应稳定控制的参数条件,并且进行了仿真验证。最后设计了一种基于FPGA的数字化双闭环驱动控制电路。试验结果表明,室温条件下,驱动检测幅度相对变化量小于2′10~(-5),在温度变化-40℃~60℃条件下,驱动频率与自然频率的最大相对误差为8′10-6数量级,频率跟踪特性和幅度控制稳定性均达到了良好的效果。试验验证了硅微陀螺仪驱动模态全数字化分析的可行性。该数字控制系统方案实现了陀螺驱动模态的高精度控制。     

基于参数激励的MEMS陀螺电馈通抑制方法

由于硅微陀螺仪材料和加工工艺以及电路上的非理想因素,驱动信号会对敏感检测端产生串扰。为抑制此种串扰,降低驱动激励幅度,采用了基于参数激励法的陀螺驱动模态激励系统。在锁相环控制中新增一个压控振荡器模块,用于输出稳幅的二倍谐振频率激励信号,即参数激励信号。将此信号与驱动激励信号一同对驱动激励电极进行激励,达到了降低刚度系数来减小驱动对敏感电馈通干扰的目的。实验结果表明,参数激励法对陀螺仪进行激励,将陀螺仪敏感输出信号幅度从141.25 m V降至38.75 m V,Allan方差零偏不稳定性从6.864 (°)/h降至4.316 (°)/h。表明了参数激励法对陀螺仪性能具有一定的提升作用。     

双质量硅微机械陀螺仪正交校正系统设计及测试

为了减小正交误差对双质量硅微机械陀螺仪性能的影响,进一步提高陀螺精度和工程化成品率,对双质量结构正交耦合刚度校正法进行了研究。首先,针对双质量陀螺结构的特殊形式,分析了其左、右结构中正交耦合刚度不相等的原因,并结合相敏检测相位误差对正交耦合刚度值进行了计算,进一步量化了其对输出信号的影响;其次,结合正交校正梳齿结构介绍了耦合刚度校正法的工作原理,并基于左、右结构单独校正的方法设计了双质量结构正交校正控制系统;最后,对正交校正前后的双质量微机械陀螺仪进行了详细测试,结果证实了双质量单独校正比整体校正效果更好,各项参数均有较大提高,其中零偏稳定性从校正前的540(°)/h提高到了正交后的24.05(°)/h(1σ),证明了提出的两质量块单独校正方法的可行性和实用性。     

硅微机械陀螺仪的新进展及其方案分析

介绍了国外硅微机械陀螺仪的新进展，综述了梳状驱动振动陀螺仪、压电棒式振动陀螺仪、电磁驱动音叉陀螺仪、振环陀螺仪、静电悬浮转于陀螺仗和微机械加速度计陀螺仪的结构、原理及性能。关键词     

一般非对称非经典结构响应的二阶实振子精确解耦法

为使现代一般非对称非经典结构的分析和设计法等同于基于物理意义明确的二阶标准振子传统经典结构,对该类结构响应的二阶标准实振子精确解耦法进行了系统研究。首先,运用复模态法对具有一般非对称质量和刚度矩阵及非对称非经典阻尼矩阵结构的响应进行精确解耦;其次,构造复响应量与实响应量的变换关系,运用拉氏变换,通过实矩阵坐标变换法,将一般非对称非经典结构及被动减震结构的位移与速度响应精确解耦为系列二阶标准实振子位移与速度响应及地震位移与速度响应的线性组合,并使系列标准振子的广义荷载仅为原始荷载的实数线性组合;最后,对实振子与实模态解耦法进行了对比分析。结果表明:实模态解耦法是实振子解耦法的特殊情况;当一般非对称非经典结构退化为经典结构时,实矩阵坐标变换法退化为实模态坐标变换法,实振子解耦法退化为实模态解耦法。此外,运用本文所建立的方法,可将现有的成熟经典结构体系的分析与设计法直接推广到一般非对称非经典复杂结构体系。     

基于低频调制激励的硅微陀螺仪自动模态匹配技术

根据二阶质量-弹簧-阻尼系统的幅频特性和相频特性关于谐振频率对称的特点,提出了一种低频振荡激励的实时模态匹配技术,根据检测模态的输出响应来判别驱动模态和检测模态的匹配程度。首先简要介绍了带频率调谐功能的双质量线振动硅微陀螺仪,该陀螺利用负刚度效应来调节检测模态的谐振频率;然后通过理论推导以及系统仿真验证了基于低频调制激励的自动模态匹配技术的可行性和有效性;最后设计了一种基于现场可编程逻辑阵列(FPGA)的数字控制电路,并且对同一测试陀螺进行了模态匹配和模态不匹配下的性能对比。试验结果表明,相比模态不匹配条件下,陀螺零偏稳定性从5.89(°)/h提高到1.26(°)/h,角度随机游走从0.36(°)/√h提高到0.079(°)/√h,性能分别提高了4.7倍和4.6倍。     

微机械陀螺仪结构误差的控制技术

研究了与加工精度相关的结构误差以及结构参数随环境改变产生的仪表误差。在分析机理的前提下,提出了采用数字控制技术来抑制陀螺结构误差的技术方案,即结构的反馈解耦控制,驱动模态的恒频恒幅控制以及检测模态的力反馈解耦控制。利用平均和摄动理论分别对上述控制回路进行建模,并给出了仿真结果。分析和仿真结果表明,上述控制方案能有效消除结构的耦合运动,降低陀螺输出对结构参数的依赖。     

一种解耦的微机械陀螺研究

设计了一种解耦的微机械陀螺，它能够极大地降低正交误差信号的影响，从而大大地提高佗螺的性能；制造了一批样机，进行了初步的驱动特性和敏感特性的实验研究。研制结果表明，陀螺性能符合设计要求。     

An approximate decoupled dynamics and kinematics analysis of legless locomotion

We present a novel analysis technique to understand the dynamics of a recently described locomotion mode called legless locomotion. Legless locomotion is a locomotion mode available to a legged robot when it becomes high-centered, that is, when its legs do not touch the ground. Under these conditions, the robot may still locomote in the plane by swinging its legs in the air, rocking on its body, and taking advantage of the nonholonomic contact constraints. Legless locomotion is unique from all previously studied locomotion modes, since it combines the effect of oscillations due to controls and gravity, nonholonomic contact constraints, and a configuration-dependent inertia. This complex interaction of phenomena makes dynamics analysis and motion planning difficult, and our proposed analysis technique simplifies the problem by decoupling the robot’s oscillatory rotational dynamics from its contact kinematics and also decoupling the dynamics along each axis. We show that the decoupled dynamics models are significantly simpler, provide a good approximation of the motion, and offer insight into the robot’s dynamics. Finally, we show how the decoupled models help in motion planning for legless locomotion.     

Effect of decoupled fluid loading on nonlinear vibration of a flat plate

Numerical simulations of nonlinear responses of a flat plate subject to decoupled fluid loading are carried out. Under clamped boundary conditions and subject to forced vibration at its natural frequency corresponding to the (5,1) mode, the various response modes of the plate are determined. It is found that increasing the excitation amplitude, the response changed from periodic to chaotic. In addition, the fluid-wall shear stresses are found to change the response from linear to nonlinear and vice versa depending on their magnitudes. When a static pressure load is combined with fluid-wall shear stresses and low excitation amplitude, the resulting response was chaotic.     

A numerical comparison of two decoupled methods for the simulation of viscoelastic fluid flows

Two decoupled methods for the finite element solution of the planar stick-slip transition problem with Oldroyd-B fluids, namely the method of characteristics and the Lesaint-Raviart technique, are presented and compared. These procedures are used for the local treatment of the stress transport equation imbedded in the constitutive law and allow the approximation of stresses with discontinuous shape functions. Computations are carried out up to a Deborah number of 4 and the methods are shown to yield fairly similar results.     

UDE-based decoupled full-order sliding mode control for a class of uncertain nonlinear MIMO systems

In this paper, a generalized control scheme for the class of nonlinear multiple-input multiple-output (MIMO) uncertain system with cross-coupling and nonlinearity in their input channels under the influence of external disturbances is presented. This is accomplished using full-order model following sliding mode control based on uncertainty and disturbance estimator (UDE) technique. The fourth-order uncertain nonlinear MIMO system is separated into multiple single-input single-output double integrator subsystems by considering the effect of input coupling and nonlinearity as a disturbance. The UDE is designed to estimate the plant uncertainties as well as external disturbances without the knowledge of the bounds on the uncertainties. The proposed method decouples the system and overcomes the problem of high initial control which ultimately eliminates the reaching phase and the chattering phenomenon which is generally occurred in sliding mode control. The effectiveness of the proposed control scheme is demonstrated through numerical simulation of two-link manipulator.     

A semi-analytical method with a system of decoupled ordinary differential equations for three-dimensional elastostatic problems

In this paper, a new semi-analytical method is presented for modeling of three-dimensional (3D) elastostatic problems. For this purpose, the domain boundary of the problem is discretized by specific subparametric elements, in which higher-order Chebyshev mapping functions as well as special shape functions are used. For the shape functions, the property of Kronecker Delta is satisfied for displacement function and its derivatives, simultaneously. Furthermore, the first derivatives of shape functions are assigned to zero at any given node. Employing the weighted residual method and implementing Clenshaw–Curtis quadrature, coefficient matrices of equations’ system are converted into diagonal ones, which results in a set of decoupled ordinary differential equations for solving the whole system. In other words, the governing differential equation for each degree of freedom (DOF) becomes independent from other DOFs of the domain. To evaluate the efficiency and accuracy of the proposed method, which is called Decoupled Scaled Boundary Finite Element Method (DSBFEM), four benchmark problems of 3D elastostatics are examined using a few numbers of DOFs. The numerical results of the DSBFEM present very good agreement with the results of available analytical solutions.     

A new decoupled finite element algorithm for viscoelastic flow. Part 1: Numerical algorithm and sample results

This paper presents an algorithm for two-dimensional Steady viscoelastic flow Simulation in which the Solution of the momentum and continuity equations is decoupled from that of the constitutive equations. The governing equations are discretized by the finite element method, with 3 × 3 element subdivision for the stress field approximation. Non-consistent Streamline upwinding is also used. Results are given for flow through a converging channel and through an abrupt planar 4:1 contraction.     

A new decoupled finite element algorithm for viscoelastic flow. Part 2: Convergence properties of the algorithm

We present the results of some numerical experiments which were carried out in order to investigate the general characteristics of the algorithm described in Part I of this paper.