共查询到19条相似文献,搜索用时 187 毫秒
1.
2.
《光学学报》2015,(6)
在分析Ronchi相移剪切干涉仪典型系统参数的基础上,系统研究了该干涉仪相位提取精度的主要影响因素。结合传统的五步相移算法,采用所提出的八步与十步相移算法,对Ronchi相移剪切干涉仪的相位提取误差进行理论分析和仿真计算。仿真结果说明,八步和十步相移算法可以有效地消除多级衍射光寄生干涉对相位提取精度的影响,且十步相移算法比八步相移算法具有更高的相位提取精度;为了提高测量精度,要求相移误差优于2%;探测器位数大于10位;光栅周期误差小于1%;光源空间相干性低于0.1。通过采用不同的相移算法、剪切率和光源空间相干性的三组对比实验,对理论分析的正确性进行了验证。 相似文献
3.
李宝顺蔡青青包亚萍李义丰 《光子学报》2014,(11):102-107
针对经典两步相移算法对光强不均匀分布和物体不均匀反射率处理能力不强的问题,分析相移量为90°的情况,采用光强模型,直接对光强进行数据操作,利用三角关系,给出了求解折叠相位相位半角的计算方法,通过高度-相位差公式得到物体的三维形貌数据,避免了因归一化操作过程中取最值方法引起的误差.实验对比分析了经典四步相移法和两步移相法,表明在环境光强可以忽略不计或足够小的情况下,该方法误差范围为±0.2mm,结果优于经典两步相移法,接近于测量误差最小的四步相移法. 相似文献
4.
5.
一种基于希尔伯特变换实施相移的相位解调算法 总被引:1,自引:0,他引:1
相移法因其精度高、运算简单,所以被广泛应用于形貌检测中的相位解调。该方法的弱点是:不仅要采集多幅相移图像,而且不能克服相移器的移相误差。将小波分析与希尔伯特变换结合起来,采用小波分析去除直流背景成分,利用希尔伯特变换方法实现90°相移;利用相移法解调形貌相位,由于是采用软件来实现相移的,因此只需采集一幅变形栅线图。对该方法与传统相移技术进行了模拟比较实验,结果表明,该方法具有较高的精度。 相似文献
6.
针对开环相移驱动下的单色光干涉测量,提出一种满足四步法的高精度相位识别的方法。首先选取干涉场中存在适当相位差的两像素点,建立相移驱动单周期内两像素点灰度序列值之间的干涉方程组。运用椭圆拟合获取相应干涉方程组参数,然后通过反算序列相位确定逐点驱动步长或序列相位信息。结合序列相位信息,运用Lagrange抛物插值算法,设计计算满足四步法的4幅干涉图,并计算各像素点的初相位。最后,运用多波长算法计算表面形貌并进行误差分析。实验表明:计算得到的方波多刻线样板的Ra值为0.439 0 m,测量误差为0.23%,此方法降低了对测量条件的硬件与环境要求,满足表面形貌高精度测量的要求。 相似文献
7.
8.
一种基于移相误差估计的5步移相算法 总被引:1,自引:0,他引:1
移相误差是用移相法进行相位测量的主要误差。本文提出一种 5步移相算法 ,分两步进行相位计算 ,首先估计实际步进移相的线性移相误差 ,然后再利用此移相误差估计值计算相位分布。移相误差估计公式和相位计算公式简洁 ,算法简单易行 ,对线性移相误差和二次谐波的敏感度低 ,可基本消除线性移相误差对解调相位的影响。对本文提出的算法进行了仿真研究 ,同时给出了 Hariharan 5步算法、Surrel 6步最小算法的仿真结果。结果表明 :本算法明显优于以上两种算法 ,可基本消除线性移相误差引起的相位偏移。本算法适用于作等步移相的相位测量或移相的标定。 相似文献
9.
10.
基于最小二乘迭代的多表面干涉条纹分析 总被引:1,自引:1,他引:0
为了准确地测量透射平行平板,提出了基于最小二乘迭代的多表面干涉条纹分析方法.依据波长调谐相移的原理,通过最小二乘迭代准确地求得每组双表面干涉条纹的实际相移值.从而准确地提取平板前后表面面形及厚度变化等信息.模拟计算结果表明.当相移值有微小偏差(小于0.2 rad)时,通过10次迭代后求得相位的峰值(PV)误差为0.005 rad,均方根(RMS)误差为0.002 rad,而相应Okada算法的PV误差为0.512 tad.RMS误差为0.103 rad.实验结果验证了该箅法的有效性. 相似文献
11.
12.
We report our experimental results of phase-shifting interferometry with an iterative least-squares fitting technique to estimate both the wave front phases and the phase shifts. The method allows phase retrieval from phase-shifting interferograms even though the calibration data of the phase shifter is unknown. The algorithm is used to analyze two sets of experimental interferograms. One records by moving a piezoelectric transducer shifter randomly and therefore has embedded random phase shifter errors, and the other samples the interference movie recorded by a video recorder while driving a stepping motor and therefore has embedded random intensity noises. The results are comparable with that of the conventional M-frame algorithm. Investigation of the effects of the intensity noises and phase shift errors shows the algorithm to perform well in both. Problems such as convergence, unique solution and reliability are also discussed. 相似文献
13.
14.
移相干涉术的一种新算法:重叠四步平均法 总被引:18,自引:3,他引:15
提出了一种能大大地减小由于移相器的位移误差而引起相位复原误差的新方法,即重叠四步平均法(Overlapping Averaging 4-Frame (OAF) Algorithm)。给出了这种方法的盯们复原精度与移相器的位移误差之间的关系式,从关系式中可见,OAF算法大大地减小由于移相器的位移误差而引起相位复原误差,通过计算机模拟,得到了各种算法的相位复原精度与移相器的位移误差之间的关系曲线,分析 相似文献
15.
WEI Chunlong CHEN Mingyi WANG Zhijiang 《Chinese Journal of Lasers》1999,8(2):179-182
1IntroductionPhasestepsaregeneralyimplementedbymovingthereferencemirormountedonaPZT(piezoelectrictransducer).SincethePZTisnon... 相似文献
16.
17.
Different from most of the electronic speckle pattern interferometry (ESPI) approaches, which involve the correlation fringe formulation followed by speckle noise elimination (or filtering), to develop a wrapped phase map, this study adopts the approach proposed by Creath in 1985 instead. However, Creath's approach is so critical of its applying interferograms, the influence of which is dependent on the robustness of the applied phase-shifting algorithm and the accuracy of the phase shifter. The self-marking technique proposed by Huang and Chou in 2000 is adopted herein to help overcome any unfavorable conditioning, including hysteresis, nonlinearity or plane tilting, of the pieozo-electrical transducer (PZT), to enable the successful implementation of the Creath's method. With its help, the whole phase stepping history of a practical work (i.e., an ESPI experiment for the present study) can be fully recorded and monitored. Thus, the required phase stepping frames can be accordingly decided and their further calculation will yield a phase map with least number of residues. 相似文献
18.
Instantaneous phase shifting arrangement for microsurface profiling of flat surfaces 总被引:1,自引:0,他引:1
Phase shifting interferometry is a well-established technique for non-contact surface profile measurement. Though phase shifting technique has many advantages, it is marred by a few inaccuracies due to the vibration and mechanical movement of the phase shifter itself. Significant amount of work is reported to theoretically compensate these error sources. But for a few works, prominent achievements have not been reported in eliminating these error sources in phase shifting interferometry. In this paper, a novel optical layout, in combination with instantaneous phase shifting interferometry is described. Experiments were carried out with this setup on a super mirror with a λ/20 surface roughness, to demonstrate the validity of the principle. 相似文献
19.
1IntroductionPhasesteppinginterferometryhasbeenextensivelyappliedinmanyaspects.Conventionalphaseunwrappingisimplementedbyth... 相似文献