In0.5(Ga1-xAlx)0.5P合金的掺杂生长特性

利用LP-MOCVD分别生长Zn和S掺杂的In0.5(Ga1-xAlx)0 5P外延层,研究生长温度、掺杂源流量、V/Ⅲ比、Al组分以及衬底晶向偏离等生长条件对外延层掺杂浓度的影响.实验结果表明:降低生长温度和Al含量、增加DEZn流量、选择由(100)向(111)A偏6～15的衬底都有利于增加IRGaAlP合金中Zn的掺杂浓度;提高生长温度和增加SIH4流量、减小Al含量和V/Ⅲ比,都有助于增加Si掺杂浓度,而衬底晶向对Si掺杂浓度无影响.     

高In组分InGaNAs/GaAs量子阱的生长及发光特性

采用分子束外延技术(MBE)在Ga As衬底上外延生长高In组分(40%)In Ga NAs/Ga As量子阱材料,工作波长覆盖1.3~1.55μm光纤通信波段。利用室温光致发光(PL)光谱研究了N原子并入的生长机制和In Ga NAs/Ga As量子阱的生长特性。结果表明:N组分增加会引入大量非辐射复合中心;随着生长温度从480℃升高到580℃,N摩尔分数从2%迅速下降到0.2%;N并入组分几乎不受In组分和As压的影响,黏附系数接近1;生长温度在410℃、Ⅴ/Ⅲ束流比在25左右时,In_(0.4)Ga_(0.6)N_(0.01)As_(0.99)/Ga As量子阱PL发光强度最大,缺陷和位错最少;高生长速率可以获得较短的表面迁移长度和较好的晶体质量。     

量子垒结构对Si衬底GaN基绿光LED光电性能的影响

在Si衬底上外延生长了3种不同量子垒结构的绿光外延片并制作成垂直结构芯片,3种量子垒结构分别为Ga N、In0.05Ga0.95N/Al0.1Ga0.9N/In0.05Ga0.95N、In0.05Ga0.95N/Ga N/In0.05Ga0.95N,对应的3种芯片样品为A、B、C,研究了3种样品的变温电致发光特性。垒结构的改变虽然对光功率影响很小,但是在光谱性能上会引起显著改变,结果如下:在低温(13 K)大电流下,随着电流密度的增大,样品的EL谱峰值波长蓝移更为显著,程度依次为BA≈C;在高温(300 K)小电流下,随着电流密度的增大,样品EL谱的峰值波长蓝移程度的大小依次为ABC。在同一电流下,随着温度的升高,样品在大部分电流下的EL谱峰值波长出现"S"型波长漂移,在极端电流下又表现出不同的漂移情况。这些现象与局域态、应力、压电场、禁带宽度等因素有关。     

生长温度和结构参数对InGaAs／GaAs量子阱光学特性的影响

研究了不同生长温度下制备的In0.15Ga0.85As/GaAs应变量子阱的PL谱,结果表明,生长温度越高,In偏析和In-Ga互混越严重,同时,导致更多的In脱附,PL谱发光峰蓝移。对不同In含量的和不同InGaAs厚度的InGaAs/GaAs量子阱进行PL谱测试,分析表明In含量<0.2,生长温度低于560℃时,In含量和InGaAs层量子阱的厚度对In偏析、脱附和In-Ga互混基本没有影响。     

垂直腔面发射激光器的结构生长及特性研究

在偏〈111〉A 2°的GaAs (100) 衬底上生长了Al0.9Ga0.1As /Al0.2Ga0.8As周期结构的垂直腔面发射激光器（VCSEL）外延片P 型DBR的周期数为24.5对,N型DBR的周期数为34.5对.用光荧光 (PL) 谱、扫描电子显微镜 (SEM)和X射线双晶衍射 (XRD) 方法对VCSEL的光学特性和结构特性进行了分析室温量子阱材料的PL谱峰值波长为837.0 nm,半高宽达到28.9 nm在X射线双晶衍射回摆曲线中,除了“0”级衍射峰外,还观察到一级和二级卫星峰.“0”级双晶衍射峰的半高宽为12.56弧秒(″),衬底GaAs的衍射峰半高宽为11.79″.“0”级衍射峰半高宽与衬底GaAs的衍射峰半高宽比较接近,表明晶格具有很高的完整性.实验结果表明腔模波长为837.2 nm,腔模波长与PL谱峰值波长相匹配.     

入射角对Al0.5Ga0.5As-AlAs分布布拉格反射器反射光谱的影响

采用传输矩阵法对Al0.5Ga0.5As-AlAs材料的发光二极管分布布拉格反射器进行入射角的反射光谱研究,计算发现反射偏振光p和s随入射角的增大呈“V”形变化,在49.8°处有最小反射值。不同入射介质[以空气和限制层(Al0.7Ga0.3)0.5In0.5P材料]下的反射光谱受入射角的影响差异很大,其中入射角对空气入射介质的反射谱影响较小,由0°入射的反射率88.13%降至45°的84.94%,反射峰值波长蓝移仅10 nm;但入射角对(Al0.7Ga0.3)0.5In0.5P入射介质的反射谱影响很大,仅从0°到45°入射,反射率降幅就超过45%,反射峰值波长蓝移超过127 nm。为了减缓这种影响,提出了多波长布拉格反射器结构设计。计算表明多波长分布布拉格反射器在0ο~45°的入射角内比传统的分布布拉格反射器有更好的光谱特性,这对提高发光二极管的出光效率有现实意义。     

基于共振腔发光二极管的DBR温度特性研究

分布式布拉格反射镜（DBR）是共振腔发光二极管（RCLED）的主要组成部分,其温度特性对RCLED的性能有着重要影响。基于650 nm红光RCLED,设计出由Al0.5Ga0.5As和Al0.95Ga0.05As组成的DBR结构。首先通过AlxGa1-xAs材料折射率的色散关系分析温度对AlxGa1-xAs材料折射率的影响,进而模拟了DBR反射谱的温度特性,得到随着温度升高DBR反射谱红移的结论,温漂速率为0.048982 nm/℃。通过MOCVD制备出30对Al0.5Ga0.5As和Al0.95Ga0.05As组成的DBR外延结构,并对其进行反射谱测试,发现随着温度升高反射谱出现了红移现象,温漂速率为0.049277 nm/℃,与模拟结果相近,验证了温度升高导致反射谱红移结论的正确性。     

InGaN/GaN多量子阱蓝光LED外延片的变温光致发光谱

利用MOCVD在Al_2O_3(0001)衬底上制备InGaN/GaN MQW结构蓝光LED外延片。以400 mW中心波长405 nm半导体激光器作为激发光源,采用自主搭建的100～330 K低温PL谱测量装置,以及350～610 K高温PL测量装置,测量不同温度下PL谱。通过Gaussian分峰拟合研究了InGaN/GaN MQW主发光峰、声子伴线峰、n-GaN黄带峰峰值能量、相对强度、FWHM在100～610 K范围的温度依赖性。研究结果表明:在100～330 K温度范围内,外延片主发光峰及其声子伴线峰值能量与FWHM温度依赖性,分别呈现S与W形变化;载流子的完全热化分布温度约为150 K,局域载流子从非热化到热化分布的转变温度为170～190 K;350～610 K高温范围内,InGaN/GaN MQW主发光峰峰值能量随温度变化满足Varshni经验公式,可在MOCVD外延生长掺In过程中,通过特意降温在线测PL谱,实时推算掺In量,在线监测外延片生长。以上结果可为外延片的PL发光机理研究、高温在线PL谱测量设备开发、掺In量的实时监测等提供参考。     

Zn杂质扩散诱导AlGaInP/GaInP量子阱混杂

杂质扩散诱导量子阱混杂技术可用于制作腔面非吸收窗口,提高大功率半导体激光器的输出功率.以Zn2As2为扩散源,采用闭管扩散方式,在550℃下对650 nm半导体激光器的外延片进行了一系列Zn杂质扩散诱导量子阱混杂的实验.实验发现,随着扩散时间从20～120 min,样品光致发光(PL)谱蓝移偏移增加,峰值波长蓝移53 nm;当扩散时间超过60 min后,样品的PL谱中不仅出现了常见的蓝移峰,同时还出现了红移峰,峰值波长红移32 nm.分析表明PL谱蓝移来自Zn扩散引起的AlGaInP/GaInP间的量子阱混杂;红移来自Zn杂质扩散对样品中Ga0.51In0.49P缓冲层的影响.还研究了扩散温度(550℃)和扩散时间对样品晶体品质的影响,并在理论上计算了AlGaInP/GaInP量子阱混杂巾的Al-Ga的互扩散系数.     

应力导致InAs/In0.15Ga0.85As量子点结构中 In0.15Ga0.85As阱层的合金分解效应研究

利用固源分子束外延技术,在In0.15Ga0.85As/GaAs量子阱生长了两个InAs/In0.15Ga0.85As量子点(DWELL)样品.通过改变其中一个InAs DWELL样品中的In0.15Ga0.85As阱层的厚度和生长温度,获得了量子点尺寸增大而且尺寸分布更均匀的结果.结合光致发光光谱(PL)和压电调制光谱(PzR)实验结果,发现该样品量子点的光学性质也同时得到了极大的优化.基于有效质量近似的数值计算结果表明:量子点后生长过程中应力导致In0.15Ga0.85As阱层合金分解机理是导致量子点尺寸和光学性质得到优化的主要原因.     

LP MOVPE growth of AlGalnP/GalnP and its application to visible laser diodes

High-quality and uniform bulk layers of (Al _x Ga_1–x )_0.5In_0.5P (x=0–0.7) and AlGalnP/GainP quantum wells (QWs) are grown on 2°-off (100) GaAs substrates by low-pressure metal organic vapour phase epitaxy at a low growth rate of 0.3 nm s^-1. The amount of lattice mismatch and the variation of PL peak energy of (Al_0.5Ga_0.5)_0.5In_0.5P on the 50-mm substrate are less than 6×10^-4 and 2 meV, respectively. (Al_0.5Ga_0.5)_0.5In_0.5P/Ga_0.5In_0.5P SQWs show narrow PL spectra even from a 0.6 nm well measured at 20 K. The variation of PL peak energy from (Al_0.5Ga_0.5)_0.5In_0.5P/Ga_0.5In_0.5P MQWs is less than 10 meV. Also, as-cleaved AlGalnP/GalnP lasers fabricated by a three-step MOVPE show a pulsed threshold current of 82 mA at room temperature, output power of 12 mW, and the lasing wavelength at 668.2 nm.     

Energy sublevels in an Al0.5Ga0.5As/GaAs/Al0.5Ga0.5As quantum wire

We report the successful fabrication of a V-grooveAl_0.5Ga_0.5As/GaAs/Al_0.5Ga_0.5As quantum wire system and the temperature-dependent photoluminescence (PL) measurement. The PL spectra are dominated by four features at 681, 642, 635 and 621 nm attributed to the luminescences from quantum wire, top, vertical and side-wall well regions by micro-PL measurements. By the calculations of the energy structure, discrete states (localized sublevels) in the quantum wire region and continuum states (extended along the side-wall and vertical quantum wells) in side-wall and vertical quantum wells have been obtained in both the conduction and valence bands. The calculated excitation energies explain very well the peak positions and their temperature dependence in the photoluminescence measurements.     

Structural and optical properties of In0.5Ga0.5As/GaAs quantum dots in an In0.1Ga0.9As well using repeated depositions of InAs/GaAs short-period superlattices for the application of optical communication

We report structural and optical properties of In_0.5Ga_0.5As/GaAs quantum dots (QDs) in a 100 Å-thick In_0.1Ga_0.9As well grown by repeated depositions of InAs/GaAs short-period superlattices with atomic force microscope, transmission electron microscope (TEM) and photoluminescence (PL) measurement. The QDs in an InGaAs well grown at 510 °C were studied as a function of n repeated deposition of 1 monolayer thick InAs and 1 monolayer thick GaAs for n=5–10. The heights, widths and densities of dots are in the range of 6–22.0 nm, 40–85 nm, and 1.6–1.1×10¹⁰/cm², respectively, as n changes from 5 to 10 with strong alignment along [1 −1 0] direction. Flat and pan-cake-like shape of the QDs in a well is found in TEM images. The bottoms of the QDs are located lower than the center of the InGaAs well. This reveals that there was intermixing—interdiffusion—of group III materials between the InGaAs QD and the InGaAs well during growth. All reported dots show strong 300 K-PL spectrum, and 1.276 μm (FWHM: 32.3 meV) of 300 K-PL peak was obtained in case of 7 periods of the QDs in a well, which is useful for the application to optical communications.     

调制掺杂的应变In0.60Ga0.40As/In0.52Al0.48As多量子阱结构的光致发光谱研究

报道了调制掺杂的应变In_0.60Ga_0.40As/In_0.52Al_0.48As多量子阱中室温光致发光光谱.观察到n=1和2电子子带到n=1重空穴子带的强发光峰.在低温下可以观察到n=1电子子带到n=1轻空穴弱发光肩胛.通过对发光强度随激发功率及温度依赖关系以及理论模型的分析研究,认为该调制掺杂量子阱中辐射复合效率降低的主要机制是应变失配位错对载流子的陷阱作用.界面上的失配位错是陷阱的主要来源.并用静态的光致发光理论模型 关键词：     

Influence of Ga(Al)As substrates on surface morphology and critical thickness of InGaAs quantum dots

Influence of Ga(Al)As substrates on surface morphology of InGaAs quantum dots and critical thickness of In_0.5Ga_0.5As film grown by molecular beam epitaxy is investigated. The In_0.5Ga_0.5As quantum dots are grown on (001) surfaces of GaAs and Al_0.25Ga_0.75 A at 450 °C, scanning tunneling microscope images show that the size of quantum dots varied slightly for 10 ML of In_0.5Ga_0.5As grown on GaAs and Al_0.25Ga_0.75As surfaces. Reflection high energy electron diffraction (RHEED) is used to monitor the growth of 4 monolayers (ML) In_0.5Ga_0.5As on Al_0.25Ga_0.75As and GaAs surfaces during deposition. The critical thickness is theoretically calculated by adding energy caused by surface roughness and heat from substrate. The calculations show that the critical thickness of In_0.5Ga_0.5As grown on GaAs and Al_0.25Ga_0.75As are 3.2 ML and 3.8 ML, respectively. The theoretical calculation agrees with the experimental results.     

Excitonic photoluminescence properties of nanocrystalline GaSb and Ga0.62In0.38Sb embedded in silica films

The GaSb and Ga_0.62In_0.38Sb nanocrystals were embedded in the SiO₂ films by radio-frequency magnetron co-sputtering and were grown on GaSb and Si substrates at different temperatures. We present results on the 10 K excitonic photoluminescence (PL) properties of nanocrystalline GaSb and Ga_0.62In_0.38Sb as a function of their size. The measurements show that the PL of the GaSb and Ga_0.62In_0.38Sb nanocrystallites follows the quantum confinement model very closely. By using deconvolution of PL spectra, origins of structures in PL were identified.     

Electromodulation spectroscopy of In0.53Ga0.47As/In0.53Ga0.23Al0.24As quantum wells

In_0.53Ga_0.47As/In_0.53Ga_0.23Al_0.24As quantum wells (QWs) of various widths have been grown by molecular beam epitaxy on the InP substrate and investigated by electromodulation spectroscopy, i.e. photoreflectance (PR) and contactless electroreflectance (CER). The optical transitions related to the QW barrier and the QW ground and excited states have been clearly observed in PR and CER spectra. The experimental QW transition energies have been compared with theoretical predictions based on an effective mass formalism model. A good agreement between experimental data and theoretical calculations has been observed when the conduction band offset for the In_0.53Ga_0.47As/In_0.53Ga_0.23Al_0.24As interface equals 60%. In addition, it has been concluded that the conduction band offset for the In_0.53Ga_0.23Al_0.24As/InP interface is close to zero. The obtained results show that InGa(Al)As alloys are very promising materials in the band gap engineering for structures grown on InP substrate.     

Annealing effect on the optical properties in Si delta-doped Al0.24Ga0.76As/In0.15Ga0.85As/GaAs pseudomorphic high electron mobility transistor structures

The optical properties of Si delta-doped Al_0.24Ga_0.76As/In_0.15Ga_0.85As/GaAs pseudomorphic high electron mobility transistor structure (PHEMTs) are estimated after the process of rapid thermal annealing (RTA) in the temperature range 500–750°C. After layer intermixing and decrease of 2DEG densities of PHEMTs just occurs around the annealing temperature of 650°C, the 12H transition peak at 1.354 eV above the annealing temperature of 650°C is newly observed from the photoluminescence (PL) and photoreflectance (PR) spectra. From the results of PL and PR measurements in the annealed PHEMTs, it is found that remarkable modification of band profile in InGaAs QW occur at annealing temperature above 650°C.     

应力导致InAs/In0.15Ga0.85As量子点结构中In0.15Ga0.85As阱层的合金分解效应研究

利用固源分子束外延技术，在In_0.15Ga_0.85As/GaAs量子阱生长了两个InAs/In_0.15Ga_0.85As量子点(DWELL)样品.通过改变其中一个InAs DWELL样品中的In_0.15Ga_0.85As阱层的厚度和生长温度，获得了量子点尺寸增大而且尺寸分布更均匀的结果.结合光致发光光谱(PL)和压电调制光谱(PzR)实验结果，发现该样品量子点的光学性质也同时得到 关键词： 合金分解效应 0.15Ga_0.85As量子点')" href="#">InAs/In_0.15Ga_0.85As量子点 光致发光光谱 压电调制光谱     

自发有序Ga0.5In0.5P合金的静压光致发光研究

在０—７ＧＰａ静压范围内测量了自发有序Ga_0.5In_0.5P合金的室温光致发光谱．三块样品的常压带隙能量分别比无序样品低１１５，９２和４３ｍｅＶ，它们的压力系数也从无序样品的９２ｍｅＶ／ＧＰａ分别减小到７５，８１和８３ｍｅＶ／ＧＰａ．用Γ-Ｌ相互作用模型可以同时解释有序合金的带隙能量的降低以及压力系数的减小．得到的Γ-Ｌ相互作用势分别为０.１９，０.１５和０.１０ｅＶ．表明在自发有序Ga_0.5In_0.5P合金中存在着的