Application of robust color composite fringe in flip-chip solder bump 3-D measurement

This study developed a 3-D measurement system based on flip-chip solder bump, used fringes with different modulation intensities in color channels, in order to produce color composite fringe with robustness, and proposed a multi-channel composite phase unwrapping algorithm, which uses fringe modulation weights of different channels to recombine the phase information for better measurement accuracy and stability. The experimental results showed that the average measurement accuracy is 0.43μm and the standard deviation is 1.38 µm. The results thus proved that the proposed 3-D measurement system is effective in measuring a plane with a height of 50 μm. In the flip-chip solder bump measuring experiment, different fringe modulation configurations were tested to overcome the problem of reflective coefficient between the flip-chip base board and the solder bump. The proposed system has a good measurement results and robust stability in the solder bump measurement, and can be used for the measurement of 3-D information for micron flip-chip solder bump application.     

移相器微位移旋转误差的分析及测试

以压电陶瓷(PZT)微位移器为主要研究对象, 引入一种处理静态干涉图的新方法--虚光栅移相叠栅条纹法,设计实验对一台实际使用的移相器微位移旋转误差进行测试研究,对其引起的波面旋转情况进行了定量的计算分析,并给出测试结果.用虚光栅移相叠栅条纹法处理实验中加有载频的干涉图时,不需要使用任何移相器件,可以进行动态位相的检测,整个移相过程用计算机进行控制,避免了引入额外的移相误差.     

Deformation field induced by spherical indentation: numerical analysis and experimental measurement by speckle interferometry

The present paper describes an experimental procedure for the measurement of the displacement field around a spherical indentation. The measurements were performed by a speckle interferometer designed for the detection on small areas of one or more oblique components of displacement; the indentations were made by a standard durometer used for metals.The experiments were carried out on a hardened and tempered steel, previously characterized by a standard tensile test; the results are in accordance with the numerical results obtained by an elasto-plastic FEM analysis.     

New algorithm of white-light phase shifting interferometry pursing higher repeatability by using numerical phase error correction schemes of pre-processor, main processor, and post-processor

White-light phase shifting interferometry (WLPSI) is frequently used for the precision measurement of 3D patterns in various fields. Phase error is one of the most dominant errors in WLPSI, and it is mainly generated by the scanner positioning error and mechanical vibrations. In this paper, phase error detection method by image analysis is proposed, and the numerical correction method for minimizing the phase error is also proposed. The image reconstruction method (IRM), iterative IRM (IIRM) as pre-processors, partial IRM (PIRM), least squares method (LSM) as a main processor, and surface compensation method (SCM) as a post-processor were developed for correcting phase errors. The five methods are implemented and simulated, and the pros and cons of each method are explained.Mirau type interferometry and the phase error generator using a PZT stage were used, and the measurements by WLPSI were done under various vibration conditions. The captured images were analyzed by the five correction methods, and the results were compared. Phase error was effectively minimized by the correction methods, and repeatability of 0.2 nm was obtained in the case of the specimen of 500 nm in height. Repeatability of 10 nm was obtained by conventional WLPSI algorithms for the same specimen.     

Securing color image by using phase-only encoding in Fresnel domains

We propose a novel color image hiding scheme with three channels of cascaded Fresnel domain phase-only filtering. The original color image is encoded into three phase masks by using the Gerchberg–Saxton iterative phase retrieval algorithm with another predefined phase key. The individual phase masks are placed in the inputs of the Fresnel domains of the red–green–blue channels and the phase key in the public channel, during the optical retrieval. The physical parameters in the optical system will be regarded as the additional keys for security enhancement. Numerical simulation is performed to test the validity of our scheme.     

Microscopic surface contouring by fringe projection method

This paper describes the use of optical fringe projection method for 3D surface profile and deformation measurement of micro-components. In this method, sinusoidal linear fringes are projected on a micro-component surface by a grating phase shifting projector and a long working distance microscope (LWDM). The image of the fringe pattern is captured by a high-resolution CCD camera and another LWDM and processed by phase-shifting technique. A simple procedure is described which enables calibration of the optical set-up for subsequent quantitative measurement of micro-components of unknown shapes. This method is relatively simple and accurate, and is capable of conducting fully automated measurements. In this paper, two micro-components, a micro-mirror (0.1 mm×0.1 mm) and a micro-electrode pad are used to demonstrate deformation measurement and microscopic surface contouring.     

Recent contribution in color interferometry and applications to high-speed flows

Recent improvements brought to color interferometry for analyzing high-speed flows are described through different applications. First, the optical technique based on differential interferometry using a polarized white light and one or two Wollaston prisms allows to record high-speed interferograms of the flow downstream of a circular cylinder. Then, this technique has been applied to axisymmetric flows for studying an interaction between a supersonic hot jet and a coaxial supersonic flow. Another application concerns the study of hypersonic flows using Wollaston prisms with a large birefringence angle. Finally, the analysis of gaseous mixture and the evolution of two-gases interface submitted to an acceleration is presented. Interferograms analysis is made from a modeling of interference fringes versus the optical path difference which allows to easily extract quantitative information of the gas density. In order to obtain absolute measurements of the gas density, real-time holographic interferometry has been developed using a three-color laser source and a panchromatic holographic plate. The technique generates the achromatic white fringe which makes the zero order of interference fringes easy to identify. An application is presented in a 2D subsonic wind tunnel, in which the unsteady wake flow past a cylinder is recorded at high framing rate. In this optical setup, transmission holograms are used. As a conclusion, an approach is proposed to analyze the 3D flows from real-time color holographic interferometry using reflection holograms and the problems to solve are described.     

用待定系数法设计误差补偿相移算法

提出了一种以误差补偿为目的的新的相移算法设计方法—待定系数法,该方法首先在算法表达式中引入一系列待定参数,根据对误差补偿的要求提供约束方程,从而解出这些未知参数.待定系数法使得算法设计和误差分析是同时进行的,改变了以往先设计算法再进行误差分析和评价的过程,由待定系数法导出的相移算法对算法设计中所考虑的误差源具有良好的补偿性能.     

Measurement of surface figure of plane optical surfaces with polarization phase-shifting Fizeau interferometer

A Fizeau interferometer based set up for measurement of surface forms of plane optical surfaces has been discussed. Phase shifting interferometry has been applied using polarization phase shifter. A linearly polarized (632.8 nm) He–Ne laser has been used as the source. Light reflected from the object and the reference/master surfaces are made circularly polarized in opposite senses by means of two properly oriented quarter wave retardation plates placed at appropriate positions, one inside and other outside the interference cavity of the interferometer, and phase shifts are introduced between the object and the reference/master waves by varying angular orientation of a polarizer/analyzer. Final result is made free from any residual wave-front aberrations introduced by the (intra-cavity) wave plate by subtracting phase values obtained by PSI technique between a high optical quality master surface and the reference surface from that obtained for the test object surface with respect to the same reference surface for each point of the interference field. Results are shown for a plane surface.Advantages of the technique presented are linearity and high accuracy in phase stepping, no perturbation of the interference cavity during the phase shifting and possibility of real time or dynamic interferometry.     

Measurement of sub-surface delaminations in carbon fibre composites using high-speed phase-shifted speckle interferometry and temporal phase unwrapping

A high-speed phase-shifted speckle interferometer has been developed recently for studying dynamic events. Speckle interferograms are continuously recorded by a CCD camera operating at 1 kHz with temporal phase shifting carried out by a Pockels cell running at the same frequency. Temporal phase unwrapping through sequences of more than 1000 frames allows the determination of time-varying absolute displacement maps. This paper presents the application of this speckle interferometry system to the detection and measurement of sub-surface delamination defects in carbon fibre specimens. The influence of re-referencing the temporal phase unwrapping algorithm after different time intervals is analysed to reduce the random phase errors produced by speckle decorrelation and vibration. The performance of several phase-shifting algorithms to minimize the influence of the vibration noise caused by the vacuum pump used to load the specimen is also investigated.     

Phase retrieval in two-wavelength DSSI using a combined filtering method

Phase retrieval in two-wavelength DSSI (digital speckle shearing interferometry) using a combined filtering method is proposed for small deformation derivative measurement. A simultaneous two-wavelength illumination and 3-CCD camera are employed in the experimental setup. The proposed method, which uses a two-wavelength technique does not require the conventional spatial phase unwrapping and has the advantage of good noise suppression for phase retrieval. Experimental results obtained show that using the proposed combined filtering method sensitivity similar to the single wavelength technique can be achieved.     

A comparative study of phase-shifting algorithms in digital speckle pattern interferometry

Digital speckle pattern interferometry (DSPI) is a tool for making qualitative as well as quantitative measurements of deformation of objects. Phase-shifting algorithms in DSPI are useful for extracting quantitative deformation data from the system. Comparative studies of the different phase-shifting algorithms in DSPI for object deformation measurement are presented. Static and quasi-dynamic deformation of the object can be measured using these algorithms. Error compensating five-step phase-shifting method is used for the algorithms.     

Whole-field determination of isoclinic parameter by five-step color phase shifting and its error analysis

Combining color imaging with phase shifting, a technique named five-step color phase shifting is presented to determine the whole-field isoclinic parameter. Relevant theory is derived and explicit conditions for directly determining the isoclinic parameter in the range of [0,π/2] are given. The unloaded light intensity of the model is systematically studied. A color camera recorded five isoclinic images coupled with isochromatics from a plane polariscope with five different settings, respectively. Experiments have been carried out with a circular disk under diametral compression and errors have been analyzed and estimated. This technique utilizes white light, which avoids undefined isoclinics near the locations where the isochromatics exist and will have active effect on experimental stress analysis and structural strength design.     

Speckle interferometry for measurement of continuous deformations

Improvements of a method for measurement of continuous displacements and deformations with digital phase shifting speckle pattern interferometry are presented. The method is based on an algorithm that, with the knowledge of the initial phase, only needs one image at a time to evaluate continuos phase changes due to object deformations. In the improved method, the initial random phase of the speckle pattern is evaluated using a number of phase-shifted images before the deformation under study. This is used for increasing the accuracy of the initial phase estimation and reducing influences from image noise and other measurement disturbances. The phase-shifted speckle patterns are used as references for comparison with the speckle patterns of the deformed object, thereby increasing the reliability and accuracy of the phase estimations of the deformed patterns. The technique can be used for measuring deformations such as transients and other dynamic events, heat expansion as well as other phenomena where it is difficult to accomplish phase shifting during deformation.     

Depth sensing using coherence mapping

A method for depth sensing based on sensing the visibility associated with the coherence function of a laser source is presented. The setup is based on an electronic speckle pattern interferometric (ESPI) setup, where the object depth is encoded into the amplitude of the interference pattern without the need for depth scanning. After performing phase-shifting method, the object three-dimensional (3-D) shape is reconstructed by means as a range image from the visibility of the image set of interferograms and where each gray level represents a given object depth. Experimental results validate the proposed approach for reflective diffuse objects at different measurement distances.     

A full-field approach for the elastic characterization of anisotropic materials

In the paper a procedure is described whereby the characterization of isotropic and anisotropic laminae is carried out by full-field measurement of the surface rotations under proper flexural loads. The analytic formulation does not necessarily imply a numerical calibration and the elastic constants are determined by integrating the whole experimental data on the surface of the specimen. Measurements were carried out by phase-stepped speckle interferometry using a shearometer based on Michelson design. The experimental instrumentation, including the loading device, and the procedures for the manipulation of experimental data are detailedly described; experimental results obtained on a steel specimen and a composite laminate are also reported.     

基于模糊推理的纹理图像融合方法研究

研究了模糊逻辑方法在图像特征层融合中的应用,介绍了两种模糊推理方法—Mamdani型和Sugeno型模糊逻辑推理系统,以及基于Sugeno型模糊推理的自适应模糊神经网络系统;在红外-可见光双通道图像融合实验中,采用Gabor滤波提取两幅图像的纹理特征,并分别采用两种模糊推理方法进行特征层融合。对融合效果进行了分析,结果表明两种模糊逻辑方法在不同应用环境下都可以取得了较好的融合效果。     

结合颜色和纹理特征的树冠提取方法

提出了一种结合颜色信息和纹理特征的树冠提取方法。该方法结合了树冠在图像中明显的颜色信息和独特的纹理特征,能够准确地将树冠从复杂的城市背景中提取出来,并在提取结果的基础上,利用圆模型对单个树冠进行了描绘和标注。     

散斑错位干涉术条纹的形成与特性分析

通过相关计算及滤波分析,建立了散斑错位干涉术条纹强度的统计分布,从而得到了这类条纹更为一般的特征属性.