共查询到20条相似文献,搜索用时 46 毫秒
1.
Li Feng Chen Sihai Luo Huan Zhou Yifan Lai Jianjun Gao Yiqing 《Optics & Laser Technology》2012,44(4):1054-1059
Concave microlens array is fabricated with PDMS (polydimethylsiloxane) material. Resist thermal reflow method and reverse pattern replication method are employed to fabricate the concave microlens array. The optical performance of the PDMS concave microlens array is analyzed with ray-trace method. Profile of the PDMS concave microlens array is observed by metallographic microscope and Talystep. It is indicated by the results that the surface profile of the PDMS concave microlens array is clear and distinct. Optical properties are also tested with Beamprofiler system. The shine spots on the focal plane of the microscope objective are of highly uniformity, and essentially coincide well with the simulation result. The PDMS concave microlens array has potential application in many optoelectronic devices, such as diffusers and scanners. 相似文献
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凹折射微透镜阵列的离子束刻蚀制作 总被引:1,自引:0,他引:1
利用光刻热熔成形工艺及离子束刻蚀制作 12 8× 12 8元凹微透镜阵列。所制硅及石英凹微透镜的典型基本图形分别为凹球冠形、凹柱形和矩顶凹面形。分析了在光致抗蚀剂柱凹微透镜图形制作过程中的膜系匹配特性 ,与制作该种微透镜有关的光掩模版的主要结构参数 ,以及光致抗蚀剂掩模工艺参数的控制依据等。探讨了在凹微透镜器件制作基础上利用成膜工艺开展平面折射微透镜器件制作的问题。采用扫描电子显微镜 (SEM)和表面轮廓仪测试了所制石英凹微透镜阵列的表面微结构形貌。给出了所制石英凹微透镜阵列远场光学特性的测试结果。 相似文献
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Fabrication of Refractive Microlens Array with no Dead Area 总被引:1,自引:1,他引:0
CHEN Bo GUO Lurong TANG JiyueZHEN Hongjun PANG Ling TIAN Weijian 《Chinese Journal of Lasers》1998,7(2):146-151
FabricationofRefractiveMicrolensAraywithnoDeadAreaCHENBoGUOLurongTANGJiyueZHENHongjunPANGLingTIANWeijian(InformationOpticsRe... 相似文献
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Yi Li Xinjian Yi Liping Cai 《International Journal of Infrared and Millimeter Waves》2000,21(9):1417-1425
Diffractive microlens arrays can completely collect the light at the focal plane and concentrate it into a smaller spot size on the detector plane, the photodetector area can be substantially reduced. Increased gamma radiation hardening and noise reduction result from the decrease in photodetector sensitive area. The diffractive microlens arrays have been designed by considering the correlative optical and processing parameters for PtSi focal plane array. They have been fabricated on the backside of PtSi focal plane array chip by successive photolithography and Ar+ ion-beam-etching technique. The alignment of microlens array with PtSi focal plane array was completed by a backside aligner with IR light source. The practical processes and fabrication method are discussed. The performance parameters of PtSi FPA with diffractive microlens array are presented. 相似文献
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Takashi Okamoto Ryo Ohmori Seiichiro Hayakawa Iwao Seo Heihachi Sato 《Optical Review》1997,4(4):516-520
A new fabrication method for polymer micro-optical elements is described which uses the contracting effect of photopolymers during the process of polymerization. Convex and concave microlens arrays and phase gratings were formed by irradiating a ultraviolet (UV)-curable monomer with incoherent UV light through an appropriate metallic mask. The morphological and optical characterization of the fabricated elements reveals that the surface profile of the elements depends on the pattern and aperture size of the mask employed. 相似文献
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为了提高紫外焦平面阵列的填充因子,可以通过微透镜阵列与紫外焦平面阵列的集成,以改善紫外焦平面阵列的探测性能。根据标量衍射理论设计了用于日盲型紫外焦平面阵列的128×128衍射微透镜阵列,其工作中心波长为350nm,单元透镜F数为F/3.56。采用组合多层镀膜与剥离的工艺方法制备了128×128衍射微透镜阵列,对具体的工艺流程和制备误差进行了分析,测量了衍射微透镜阵列的光学性能。实验结果表明:衍射微透镜阵列的衍射效率为88%,与理论值95%有偏差,制备误差主要来自对准误差和线宽误差。紫外衍射微透镜阵列具有均匀的焦斑分布,与紫外焦平面阵列单片集成能较好地改善器件的整体性能。 相似文献
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We report a simple method for fabricating a concave refractive microlens array (MLA) in solgel glass by using a proximity-effect-assisted reflow technique. The solgel concave refractive MLA that we fabricated had excellent surface smoothness; good dimensional conformity, with an 8.23% nonuniformity of the microlens elements; and structural perfection, with a biggest deviation of 1% from a perfect concave spherical crown. The relative error between the measured and the designed values of the concave MLA's focal length was only 1.83%. Compared with the conventional fabrication techniques for concave MLAs, the proposed method has significant advantages including simplicity, low cost, good element conformity, and smooth device surface. 相似文献
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实现了一种采用聚苯乙烯纳米球自组装技术和微机械制造技术加工的场发射阴极用亚微米栅极微孔阵列。设计了一套完整的工艺实验方案,首先采用微球自组装技术获得了亚微米级金属网孔掩膜,然后通过反应离子刻蚀技术获得了亚微米栅极孔阵列,从而实现了集成度高、分布均匀的周期性亚微米孔洞阵列的制备,微孔集成度达到108cm-2。实验研究了氧气刻蚀聚苯乙烯微球的规律。采用金属掩膜,四氟化碳干法刻蚀二氧化硅,获得了深度为500 nm的微孔。实验结果证明该工艺方案是一种获得大面积、均匀分布、集成度高的场发射冷阴极栅孔阵列的有效方法。 相似文献
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This paper describes a cost-effective approach to fabricate intricate arrays of polydimethylsiloxane (PDMS) and polymeric
microstructures based on porous polystyrene (PS) films generated from arrays of water droplets. To start, a thin layer of
ethanol film is exposed to a humid air flow. Upon the evaporation of ethanol and simultaneous condensation of water as the
ethanol phase recedes, a Marangoni flow causes the flow of liquid from the ethanol phase into water fingers emerged along
the receding contact line, which finally detach to form ordered water droplet arrays behind the receding contact line. The
water droplet arrays are subsequently used as templates to generate porous PS films. The porous PS films are then used as
sacrificial layers and masters to fabricate various arrays of PDMS dots and PDMS stamps with posts, respectively. The PDMS
stamps containing various microstructures are further utilized to create polymer rings, PDMS dots, porous PDMS films, and
PDMS aperture rings, and for contact printing of patterns of self-assembled monolayers. 相似文献
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Zehua Xia Yan Li Xiaoya Su Yanhua Han Zhongyi Guo Jianmin Gao Qiaoqun Sun Shiliang Qu 《Current Applied Physics》2017,17(1):110-114
We proposed a novel method for fabricating polymer compound microlenses (PCMLs) using micro-inkjet technique and subsequent curing process. Two different types of PCMLs with sandwich microstructure (PDMS-Glycerol-PDMS), concave and convex PCMLs, have been designed and fabricated in experiments. Convex PCML has two real images and two foci. The concave PCML has one real and one virtual focal planes, which can generate one real image and one virtual image respectively. Moreover, the diameter of concave PCML can be controlled by adjusting the curing time and temperature. The proposed method is simple, efficient and suitable for realizing large-scale high numerical aperture PCMLs array, which has potential applications in diverse optical systems such as optical storage and three-dimensional imaging. 相似文献
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扩展微透镜数值孔径范围的阶梯光刻热熔法研究 总被引:4,自引:1,他引:3
在微透镜阵列的光刻热熔制作法中,临界角效应严重影响了微透镜的制作范围和面形质量。在对临界角效应定性研究的基础上,提出了用阶梯光刻熔法来扩展热熔型微透镜阵列的数值孔径范围。实验结果表明,采用这一方法制作的微透镜,其单元孔径范围扩展为50 ̄900μm,相对口径范围扩大到为F/1 ̄F/10,并有效地改善了临界角效应对大孔径微透镜面形质量的影响。 相似文献
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飞秒激光微加工作为一种新型微纳制造技术,在复杂三维构型制作方面具有其独特的优势,但激光加工效率问题严重制约了飞秒激光微加工技术走向实际工程应用,提出一种飞秒激光湿法刻蚀微纳制造方法,以提高飞秒激光微加工的效率为突破口,通过调控激光与物质相互作用获得材料的目标靶向改性,进而结合化学湿法刻蚀实现硬质材料上的高效和高精度三维微加工,采用这一方法制作出的微透镜尺寸为80 m,球冠高6.7 m,表面粗糙度小于10 nm。利用这种方法,实现了不同结构与特性的高质量微透镜阵列的超精密制备,在石英内部也实现了螺旋微通道的复杂三维结构,螺旋通道直径为20 m,长径比超过100。 相似文献
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The planar microlens arrays is a two-dimensional array of optical component which is fabricated monolithically available. Imaging properties of planar microlens arrays are described, which provide both image multiplexer and erect, unit magnification images. 相似文献
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光学相控阵光束扫描技术在激光雷达、空间光通信和光开关等领域拥有巨大的应用潜力。微透镜阵列光学相控阵可以通过微透镜阵列间μm量级的相对位移同时对多个出射光束的二维倾斜相位进行调制,从而实现大角度二维光束扫描,具有出射口径大、结构简单、体积小、微惯性、多功能等优点。首先介绍了微透镜阵列光学相控阵的扫描原理,之后对微透镜阵列光学相控阵国内外的发展现状、应用和现阶段存在的问题进行了阐述,最后对微透镜阵列光学相控阵的发展趋势进行了展望。
相似文献18.
实现了一种采用聚苯乙烯纳米球自组装技术和微机械制造技术加工的场发射阴极用亚微米栅极微孔阵列。设计了一套完整的工艺实验方案,首先采用微球自组装技术获得了亚微米级金属网孔掩膜,然后通过反应离子刻蚀技术获得了亚微米栅极孔阵列,从而实现了集成度高、分布均匀的周期性亚微米孔洞阵列的制备,微孔集成度达到108cm-2。实验研究了氧气刻蚀聚苯乙烯微球的规律。采用金属掩膜,四氟化碳干法刻蚀二氧化硅,获得了深度为500 nm的微孔。实验结果证明该工艺方案是一种获得大面积、均匀分布、集成度高的场发射冷阴极栅孔阵列的有效方法。 相似文献
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Hsin-Ta Hsieh 《Optics Communications》2011,284(21):5225-5230
In this paper, we present microlens arrays (MLA) with long focal length (in millimeter range) based on thermal reflow process. The focal length of microlens is usually in the same order of lens diameter or several hundred microns. To extend focal length, we made a photoresist (SU-8) MLA covered by a Polydimethylsiloxane (PDMS) film on a glass substrate. Because the refractive index difference between PDMS and photoresist interface is lower than that of air and MLA interface, light is less bended when passing through MLA and is focused at longer distance. Microlenses of diameters from 50 μm to 240 μm were successfully fabricated. The longest focal length was 2.1 mm from the microlens of 240 μm diameter. The numerical aperture (NA) was reduced 0.06, which is much lower than the smallest NA (~ 0.15) by regular thermal reflow processes. Cured PDMS has high transmittance and becomes parts of MLA without too much optical power loss. Besides, other focal lengths can be realized by modifying the refractive index different between two adjacent materials as described in this paper. 相似文献