偏振条纹扫描干涉仪

本文用位相物体偏振编码的观点,阐述了位相的偏振测量和干涉条纹的偏振扫描原理。文中指出了两类线偏振编码器的结构,提出了偏振条纹扫描小孔干涉仪,并详细分析了其原理、扫描误差及其修正。所提出的方法都得到实验的证实。     

扫描白光干涉测量技术的算法比较

干涉条纹零光程差位置的确定是扫描白光干涉测量的关键技术之一。介绍了扫描白光干涉法测量物体轮廓的原理,讨论了确定白光干涉条纹零级条纹位置的几种方法,并对随机生成的表面进行了大量的数字模拟测量和分析比较,得出了各种算法对测量准确度的影响。研究结果对白光干涉的应用研究提供了可靠的理论根据。     

X射线皮秒条纹相机时间分辨率测试

本文从X射线皮秒条纹变象管的工作原理入手,分析了影响X射线条纹相机时间分辨率的因素,就我所研制的X射线条纹相机的时间分辩率进行了测量。条纹相机中应用全雪崩晶体管高速扫描线路。它具有抖动小、延时小寿命长的特点。X射线皮秒脉冲是用激光打靶的方法产生。为了得到窄的X射线脉冲,用非共振环型腔YAG激光器作为激     

基于等色干涉的膜分析

基于膜等色干涉原理,将等色干涉条纹与已知线光谱在光谱仪谱面上叠加,通过对干涉条纹宽度及其变化的测量,可计算出膜厚、膜厚突变、膜厚渐变等.对膜进行扫描分析,膜的面积达10-2mm2数量级即可进行测量.     

非扫描激光主动成像制导技术研究

介绍了激光主动成像制导技术的基本原理。分析了基于相位法的非扫描激光成像技术和基于多狭缝条纹管的非扫描激光成像技术以及基于阵列的非扫描激光成像技术的原理、特点和发展现状,讨论了非扫描激光主动成像制导技术在巡航导弹中的应用。它们为非扫描激光主动成像制导技术在具体背景下的应用提供了一定的参考价值。     

扫描干涉场曝光系统中周期设定对曝光刻线相位的影响

扫描干涉场曝光系统中的干涉条纹周期是相位锁定系统的重要参数,其设定值与名义值之间的偏差会引起相邻扫描间的干涉条纹相位拼接误差。为获取以扫描曝光方式所制作光栅的衍射波前特征,根据步进扫描曝光的特点及动态相位锁定的工作原理,建立了扫描曝光的数学模型,给出了曝光刻线误差及曝光光栅周期的变化规律,并进行了相关实验验证。结果表明,相位锁定中周期设定误差会带来周期性的刻线误差。曝光光栅周期会随周期设定值的变化而改变,当周期设定误差较小时,曝光光栅周期等于周期设定值。对于曝光光斑束腰半径为0.9mm、曝光步进间隔为0.6mm、曝光条纹周期为555.6nm的系统参数,周期设定的相对误差小于278×10-6时,周期性的刻线误差小于1nm。若要求曝光对比度大于0.9,则周期设定的相对误差需要控制在92.6×10-6以内,周期设定值及曝光光栅周期的可变范围为102.8pm。     

数字散斑干涉术物体形变测量

基于数字散斑干涉术测量物体形变的原理,研究了物体面内位移及变形的测试技术.采用电荷耦合器件记录变形前后的两幅散斑图,取代传统散斑干涉术中的记录干板,省去传统方法中干板显影、定影的繁琐的化学湿处理过程.分别用菲涅尔散斑和像面散斑方法获得散斑干涉图,用相减技术得到含有物体形变信息的散斑干涉条纹.设计高斯低通滤波器,对干涉条纹进行处理,提高了干涉条纹的对比度.提出扫描条纹中心行方法,由条纹中心行一维位相分布获得一维物面变形,实现了散斑干涉条纹的自动判读.试验表明,该方法简洁且实用.     

SEM扫描云纹法的相移技术研究

提出一种扫描电镜(SEM)扫描云纹法的相移新技术,通过SEM系统控制电镜电子束扫描线移动,对获取的云纹图像实现0-2π范围内的四步相移,从而获得了更高的位移测量灵敏度。同时对SEM扫描云纹法的测量原理以及相移实验技术的原理进行了详细的阐述。并将该技术应用到电子封装试件栅的相移分析中。实验结果证明了该方法的可行性,该方法为微米云纹法的条纹处理提供了一种新途径。     

扫描干涉场曝光系统中干涉条纹周期精确测量方法

扫描干涉场曝光系统中的干涉条纹周期是相位锁定系统的重要参数,为精确测量干涉条纹周期,根据扫描干涉场曝光系统的特点提出了分束棱镜移动测量干涉条纹周期的方法,根据高斯光束传播理论,分析了该方法的理论误差;提出了周期计数法对周期测量数据进行计算。为降低对系统二维工作台运行及稳定精度的要求,提出了小行程高精度位移台辅助测量周期的方法,并进行了相关实验验证。结果表明:小行程位移台辅助周期测量方法在原理上可行,对于干涉条纹线密度1800 line/mm的系统参数,小行程位移台辅助周期测量的重复性可达到1.08×10-5(σ值),曝光实验的实测值与理论模型之间一致性较好,验证了该周期测量方法的可行性。     

延时法测量条纹相机μs档扫描非线性

为实现μs档条纹相机扫描非线性标定,建立了基于延时可调信号源和外触发激光器的条纹相机μs档扫描非线性标定系统,弥补了标准具法的不足。系统通过延时值的递增,得到条纹相机扫描速度在全扫程的变化。系统中时间关系抖动来源主要是测试设备延时抖动和条纹相机触发延时抖动。时间抖动测试与分析显示,条纹相机延时抖动±0.6ns,测试设备延时抖动±0.3ns,系统总时间抖动±0.7ns。系统时间抖动会造成最终时间轴信息的起伏。大量数值模拟分析表明,时间轴起伏对系统时间抖动的影响±2ns,在可以接受的范围内。因此,该系统能够胜任条纹相机μs扫程时间信息的测量标定。     

A review of phase unwrapping techniques in fringe analysis

There has been an increasing interest in the automation of fringe analysis over the last decade. In recent years a number of researchers have addressed the problem of automatic phase unwrapping in fringe analysis. The advent of phase stepping and the development of FFT techniques has moved the emphasis in automated techniques away from fringe tracking and towards fringe counting or scanning approaches, but a major difficulty with such scanning techniques has been their susceptibility to noise. However, several alternative noise-immune phase unwrapping strategies have been proposed, but these approaches have not addressed the problems caused by large scale discontinuities such as those produced by aliasing. Other methods have been developed which confront this last difficulty. This paper gives an overview of the phase unwrapping problem and describes fringe tracking, fringe scanning, noise-immune and region processing techniques that have been developed in the search for the fully automated solution.     

CG光学扫描全息术和FZP光学扫描全息术分辨率比较

本文通过计算机仿真对ＦＺＰ 光学扫描全息术和ＣＧ 光学扫描全息术的横向和纵向分辨率进行了比较。无论是ＦＺＰ 还是ＣＧ 光学扫描全息术,其系统的分辨率与它们的环数有关,当环数越多时,分辨率越高。对于同样大小的ＦＺＰ 和ＣＧ,ＣＧ 光学扫描全息系统的分辨率比ＦＺＰ 光学扫描全息系统的分辨率要好     

Automatic fringe analysis for moiré topography

Two digital systems are developed for the automatic measurement of 3-D shapes using moiré techniques—an automatic 3-D shape measuring system using the scanning moiré method and an interactive fringe analysing system for moiré fringe photographs. In the automatic 3-D shape measuring system, a deformed grating is scanned and sampled with an electronic image scanning device so that moiré fringes are generated in a computer. This technique of electronic fringe generation eliminates ambiguity with regard to the sign of the moiré fringes. The interactive fringe analyser provides a flexible and versatile tool for moiré fringe analysis. Medical applications of these analysing systems are discussed.     

Absolute Positioning of Scanning Probe Microscope Tip by Two-Wavelength Synthetic Method

In this paper, we describe the absolute positioning of a probe tip in a scanning Wiener fringe optical microscope (SWOM) using a synthetic wavelength method. Two laser beams with different wavelengths are superimposed and are incident on a sample surface. A synthetic fringe which has a longer period than that of the Wiener fringe obtained with a single wavelength is formed on the surface. The order of Wiener fringe which is utilized as a feedback signal in the microscope can be determined by the synthetic fringe. A sample with known structure was observed for various defined fringe orders using the SWOM.     

Binarization of scanning Moiré fringe pattern

This paper describes a digital picture processing method to obtain a binary scanning moiré pattern. In this method, a bias component due to the illumination light distribution is eliminated from the scanning moiré fringe pattern to detect the zero-crossing points of the moiré profile. The binary fringe pattern is then obtained from the zero-crossing points. Experiments indicate that the method is useful for facilitating three-dimensional automatic measurement using moiré topography.     

Scanning schemes in white light photoelasticity – Part II: Novel fringe resolution guided scanning scheme

Varied spatial resolution of isochromatic fringes over the domain influences the accuracy of fringe order estimation using TFP/RGB photoelasticity. This has been brought out in the first part of the work. The existing scanning schemes do not take this into account, which leads to the propagation of noise from the low spatial resolution zones. In this paper, a method is proposed for creating a whole field map which represents the spatial resolution of the isochromatic fringe pattern. A novel scanning scheme is then proposed whose progression is guided by the spatial resolution of the fringes in the isochromatic image. The efficacy of the scanning scheme is demonstrated using three problems – an inclined crack under bi-axial loading, a thick ring subjected to internal pressure and a stress frozen specimen of an aerospace component. The proposed scheme has use in a range of applications. The scanning scheme is effective even if the model has random zones of noise which is demonstrated using a plate subjected to concentrated load. This aspect is well utilised to extract fringe data from thin slices cut from a stereo-lithographic model that has characteristic random noise due to layered manufacturing.     

Relationship between the fringe number of the scanning beam and the twin-image noise

A method of digital filtering for eliminating the twin-image noise of reconstructed images in optical scanning holography is proposed and demonstrated by the example of slit objects. The fringe number of the scanning beam in relation to the twin-image noise is investigated in detail. Some results of computer simulations are obtained. In the far field, the further object scanned by the scanning beam with fewer fringes has lower and flatter amplitude of the twin-image noise for reconstructed images. However, being independent of the fringe number the twin-image noise affects seriously on the reconstruction in the near field. So the twin-image noise should be considered in reconstruction in the near field.     

Testing micro devices with fringe projection and white-light interferometry

Optical sensors are very suitable for the analysis of microscopic structures and micro devices. We compare two very promising methods: the white-light interferometry and the fringe projection technique for the application to this task. The fringe projection is very useful for fast measurement of objects with vertical dimensions of some μm. White-light interferometry is especially useful for highly resolved 3-D measurements. Furthermore, we present a new technique, the scanning fringe projection (SFP), which enables absolute 3-D measurements with one single grating period.     

Measurement of a transparent object by using an automated Talbot interferometer

It is reported that the first partial derivative of the phase distribution for a transparent object can be measured automatically by a personal computer with an image processor. The moire pattern is formed by superimposing the Fourier image distorted by the transparent object on the master grating. But if only the moire patterns are observed, it is not shown if the fringe order numbers increase or decrease. The fringe scanning method is presented to overcome the fringe order numbers. The four-step method is used to calculate the first partial derivative. By a simple experiment, the first partial derivative can be shown in the three dimensional graphics.     

Determining large step heights using zero-order interference fringe identification and an external cavity diode laser

Zero-order interference fringe identification is a powerful tool for measuring large step heights. In contrast to white light scanning interferometry, this study utilizes an external cavity diode laser as the light source. The zero-path difference point can be accurately identified by combining wavelength scanning interferometry, in which the laser wavelength is continuously changed, with single wavelength interferometry, in which the laser wavelength is fixed. The experimental apparatus is a two-arm interferometer containing the sample in the measurement arm. The step height denotes the distance between two locations of a zero-order interference fringe, which are obtained by continuously varying the length of the reference arm. The accuracy of a sample of 10 mm step height was found to be 0.33 μm.