α-Si_(1-x)C_x∶H薄膜材料的弹性反冲探测分析

介绍在中国原子能科学研究院HI 13串列加速器上,对α Si1-xCx∶H薄膜样品进行弹性反冲探测分析的方法和结果.用该加速器提供的高品质127I束流轰击α Si1-xCx∶H薄膜材料样品,用ΔE(gas) E(PSD)望远镜探测器,在前角区(30°角)测量从该样品中反冲的各元素的能谱.然后用离子束分析(IBA)程序SIMNRA对能谱进行拟合,得到样品中H,C和Si的比分及深度分布.     

高分辨的弹性反冲探测分析技术

在中国原子能科学研究院HI－13串列加速器上建立了一套高分辨的弹性反冲探测分析技术,用高质量的127I重离子束轰击薄膜或块材靶样品,利用Q3D磁谱仪及其焦面探测器和纵向型双向型双电离室ΔE－E望远镜探测器两套探测系统,在前角区测量了靶中各种元素的反冲能谱,利用卢瑟福散射截离子在靶材料中的阻止本领,将能谱转换成元素的深度分布,利用Q3D磁谱仪系统,对C和H等轻元素的分析得到纳米级的深度分频谱,用ΔE－E望远镜探测器可同时得到靶材料上从轻至中重各种元素的深度分布,其深度分辨率达0－30nm。     

用弹性反冲探测方法分析材料中的氢分布

利用2.0—2.5MeV ⁴He 的弹性反冲探测方法,测量了二氧化硅和氮化硅膜层中的氢分布,并给出氢含量与淀积工艺条件的关系.讨论了在给定的实验条件下最大的探测深度、探测灵敏度极限和深度分辨率.     

弹性反冲探测分析技术在材料氦行为研究中的应用

弹性反冲探测分析技术（ERDA）对轻元素的测定具有灵敏度高、包含深度信息的优势,因此在材料氦行为研究中发挥着重要作用。镍基哈氏N合金被认为是未来熔盐堆的结构材料,氦脆是其服役性能下降的主要因素之一。利用掠入射模式的ERDA,解析了哈氏N合金样品中的氦原子浓度及其分布,但仅局限于0~175 nm深度范围内。结果表明:在800℃的退火条件下,距离样品辐照表面~33 nm深度区域内,出现了氦原子逃逸现象。更高温度的退火（1 050℃）可加剧氦原子的逃逸,但样品中仍有氦原子滞留。另外,采用透射式的ERDA,极大地扩大了对氦原子分析的深度范围,得到了纯镍薄膜在0~950 nm深度区域内的氦原子浓度分布。这表明将块体材料制备成薄膜样品,利用透射模式的ERDA,将可以得到氦原子在更大范围内的扩散、逃逸行为。Since the elastic recoil detection analysis (ERDA) technique has the advantages of high sensitivity and deep information in analyzing the light elements, it plays an important role in the study of helium behavior in materials. Helium embrittlement is one of the main reasons for the degradation of the Hastelloy N alloy, which has been considered as the promising candidate structural material for the further molten salt reactor. In this work, the profile of helium concentrationin sample of Hastelloy N alloy was analyzed by ERDA experiments applying grazing-incidence geometry. However, the result was limited within the depth range of 0~175 nm, and it shown that helium atoms escaped in the range from the irradiated surface of the sample to the depth of ~33 nm when annealing the sample at 800℃ The annealing at higher temperature (1 050℃) increased the escape of helium atoms, but a small fraction of helium atoms still trapped in the sample. In addition, the profile of helium concentration was obtained in the helium-irradiated pure nickel film in the depth range of 0~950 nm, using the ERDA experiments in transmission geometry. This indicates that the diffusion behavior of helium atoms in bulk samples can be completely obtained using the ERDA experiments in tranmission geometry if the bulk material can be prepared into a thin film sample.