共查询到18条相似文献,搜索用时 62 毫秒
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由偏心静电单探针诊断了电子回旋共振等离子体增强化学汽相沉积(ECR-PECVD)反应室内等离子体密度的空间分布规律.结果表明在轴向位置Z=50cm处,直径Φ12cm范围内等离子体密度分布非常均匀.分析了等离子体密度径向均匀性对沉积速率均匀性和薄膜厚度均匀性的影响.讨论了沉积制备一定薄膜厚度的Si3N4薄膜的工艺重复性.研究了各种沉积工艺参数与Si3N4薄膜沉积速率的相互关系.得到了ECR-PECVD技术在沉积薄膜时的工
关键词: 相似文献
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利用原位扫描隧道显微镜和低能电子衍射分析了Si的纳米颗粒在Si3N4/Si(111)和Si3N4/Si(100)表面生长过程的结构演变.在生长早期T为350—1075K范围内,Si在两种衬底表面上都形成高密度的三维纳米团簇,这些团簇的大小均在几个纳米范围内,并且在高温退火时保持相当稳定的形状而不相互融合.当生长继续时,Si的晶体小面开始显现.在晶态的Si3N4(0001)/S
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氮化硅
扫描隧道显微镜
纳米颗粒 相似文献
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采用电子束蒸发Pt和后快速热退火的方法,研究了退火条件对Pt纳米晶的生长特性的影响,结果显示Pt纳米晶的密度随退火温度的升高和退火时间的延长均表现出先增大后减小的趋势.在800℃下退火20 s能得到分布均匀的、密度为30×1011 cm-2的Pt纳米晶.进一步研究了基于Al2O3/Pt纳米晶/HfO2叠层的MOS电容结构的存储效应,表明其在-3—+8 V扫描电压范围下C-V<
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Pt纳米晶
快速热退火
原子层淀积
存储效应 相似文献
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采用SiO2对NaYF4∶Yb,Er油相上转换纳米晶进行包覆以实现其水溶性,通过在SiO2壳表面吸附Au纳米粒子,进一步构建了NaYF4∶Yb,Er@SiO2与Au纳米粒子能量传递的体系,该体系可实现对NaYF4∶Yb,Er上转换纳米粒子红绿光比的连续可调。该研究结果有助于实现上转换发光纳米材料在生物成像、检测和传感等方面的应用。 相似文献
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A systematic investigation of nitrides R3Fe29-xCrxN4(R=Y, Ce, Nd, Sm, Gd, Tb, and Dy) has been performed. The nitrogen concentration in the nitride R3Fe29-xCrxNy was determined to be y=4. Nitrogenation leads to a relative volume expansion of about 5.3%. The lattice constants and unit cell volume decrease with in creasing rare earth atomic number from Nd to Dy, reflecting the lanthanide contraction. In average, the increase of Curie temperature upon nitrogenation is about 200 K, compared with its parent compound. The nitrogenation also results in a remarkable improvement in the saturation magnetization and anisotropy fields for R3Fe29-xCrxN4 at 4.2 K and room temperature, comp ared with their parent compounds. A spin reorientation of Nd3Fe24.5 Cr4.5N4 occurs at around 368 K, which is 138 K higher than that of Nd3Fe24.5Cr4.5.Magnetohistory effects of R3Fe29-xCrxN4(R=Nd and Sm) are observed in a low field of 0.04 T. First order magneti zation process occurs in Sm3Fe24.0Cr5.0N4 in magnetic fields of around 3.0 T at 4.2 K. After nitrogenation the easy magnetization direction of Sm3Fe24.0Cr5.0 is changed from the easy cone structure to the uniaxial. The excellent intrinsic magnetic properties of Sm3Fe24.0Cr5.0N4 make this compound a hopeful candidate for new high performance permanent magnets. 相似文献
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Earlier measurements of elastic moduli of nc-TiN/a-Si3N4 nanocomposites of different composition and hardness by means of vibrating reed and surface Brillouing scattering, that yield Young’s and shear modulus, as well as the Poisson’s ratio, have been confirmed by high-pressure X-ray diffraction measurements, that yield bulk modulus. It is found that elastic moduli of all measured samples are essentially the same within relatively small error of measurements, and only slightly lower than that of pure TiN. The nanocomposites are superhard thanks to their unique nanostructure with strengthened SiNx interface. 相似文献
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包钴型γ-Fe2O3磁粉的矫顽力可比原γ-Fe2O3磁粉提高8000—32000A/m。木文研究探讨了两种包钴型γ-Fe2O3磁粉(包钴γ-Fe2O3和包钴包亚铁γ-Fe2O3)的单轴各向异性的起源和矫顽力增大的机制。包钴γ-Fe2O3磁粉矫顽力
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本文应用透射法和超显微法对用金缀饰后的LiNbO3和LiTaO3单晶体进行了直接观测,观察到两种晶体中亚晶界的三维面貌,对亚晶界进行了极图分析,并进一步用Frank公式进行了定量验证。通过对位错网及三叉亚晶界的分析,表明该类晶体中存在的位错的Burgers矢量是:最短点阵平移矢量——六角晶胞的基矢<1210>,次短点阵平移矢量——菱胞基矢1/3<0111>,以及再次短点阵平移矢量——菱胞短体对角线分1/3<2021>。
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