磁控溅射制备ZnO薄膜的结构及发光特性研究

采用射频反应磁控溅射法在玻璃衬底上制备出具有c轴高择优取向的ZnO薄膜,利用X射线衍射、扫描探针显微镜及荧光分光光度法研究了生长温度对ZnO薄膜微观结构及光致发光特性的影响。结果表明,合适的衬底温度有利于提高ZnO薄膜的结晶质量;在室温下测量样品的光致发光谱(PL),观察到波长位于400 nm左右的紫光、446 nm左右的蓝色发光峰及502 nm左右微弱的绿光峰,随衬底温度升高,样品的PL谱中紫光及蓝光强度逐渐增大,同时,绿光峰的强度也表现出一定程度的增强。经分析得出紫光应是激子发光所致,而锌填隙则是引起蓝光发射的主要原因,502 nm左右的绿光峰应该是氧的深能级缺陷造成的。此外,还测量了样品的吸收谱,并结合样品吸收谱的拟合结果对光致发光机理的分析作了进一步的验证。     

射频磁控溅射法制备SnO2:Sb薄膜的结构和光致发光性质研究

采用射频磁控溅射法在玻璃衬底上制备出锑掺杂的氧化锡(SnO2:Sb)薄膜.制备薄膜是具有纯氧化锡四方金红石结构的多晶膜薄,晶粒生长的择优取向为[110].室温下光致发光测量结果表明,在392 nm附近存在强的紫外-紫光发射,研究了不同氧分压对薄膜结构及发光性质的影响,并对SnO2:Sb的光致发光机制进行了探索性研究.     

退火对ZnS/PS复合体系光致发光特性的影响

用脉冲激光沉积(PLD)技术以多孔硅(PS)为衬底生长了ZnS薄膜,分别测量了ZnS、PS以及ZnS/PS复合体系在室温下的光致发光(PL)光谱。结果发现,ZnS/PS复合体系的PL光谱中PS的发光峰位相对于新制备的PS有所蓝移。把该ZnS/PS样品分成三块,在真空400℃分别退火10,20,30 min,研究不同退火时间对ZnS/PS复合体系光致发光特性的影响。发现退火后样品的PL光谱中都出现了一个新的绿色发光带,归结为ZnS的缺陷中心发光。随着退火时间的延长,PS的发光强度逐渐降低且峰位红移。把ZnS的蓝、绿光与PS的红光相叠加,整个ZnS/PS复合体系在可见光区450~700 nm形成一个较宽的光致发光谱带,呈现较强的白光发射。     

MOVPE 生长GaN薄膜的 光致黄带发光与激发光源的相关性

用四种不同光源作为激发光源,研究了蓝宝石衬底金属有机物汽相外延方法生长的氮化镓薄膜的光致发光特性。结果发现用连续光作为激发光源时,光致发光谱中除出现365 nm的带边发射峰外,同时观察到中心波长位于约550 nm 的较宽黄带发光;而用脉冲光作为激发光源时其发光光谱主要是365 nm附近的带边发光峰,未观察到黄带发光。氮化镓薄膜的光致发光特性依赖于所用的激发光源性质。     

氧化锌量子点浅施主能级增强绿色光致发光光谱的实验证明

利用溶胶-凝胶法制备了粒径在5 nm左右的氧化锌量子点,通过测量氧化锌量子点光致发光光谱、吸收光谱以及荧光寿命得到氧化锌量子点绿光光谱可分为两种且对应不同发光机理。较高能量的绿光光谱是电子由导带底跃迁至氧空穴辐射产生的,而较低能量的则归因于电子由浅施主能级跃迁到氧空位,这种浅施主能级能够增强绿光发射且激发光能量稍小于带隙时绿光光谱相对强度达到最大。其次,实验得到氧化锌量子点的蓝光光谱是由于激发电子从锌间隙能级跃迁至价带产生。该研究提出并分析了氧化锌量子点绿光光谱的两种发光机制,可为其在光学方面的应用提供参考。     

氧化锌量子点浅施主能级增强绿色光致发光光谱的实验证明（英文）

利用溶胶-凝胶法制备了粒径在5nm左右的氧化锌量子点,通过测量氧化锌量子点光致发光光谱、吸收光谱以及荧光寿命得到氧化锌量子点绿光光谱可分为两种且对应不同发光机理。较高能量的绿光光谱是电子由导带底跃迁至氧空穴辐射产生的,而较低能量的则归因于电子由浅施主能级跃迁到氧空位,这种浅施主能级能够增强绿光发射且激发光能量稍小于带隙时绿光光谱相对强度达到最大。其次,实验得到氧化锌量子点的蓝光光谱是由于激发电子从锌间隙能级跃迁至价带产生。该研究提出并分析了氧化锌量子点绿光光谱的两种发光机制,可为其在光学方面的应用提供参考。     

石英衬底上Au缓冲层对ZnO薄膜微结构的影响

采用单源化学气相沉积(SSCVD)法,在石英衬底上以Au为缓冲层,Zn4(OH)2(O2CCH3)6.2H2O为固相源制备ZnO薄膜。SEM和XRD测试ZnO薄膜的微结构,结果表明:相对于SiO2衬底上生长的ZnO薄膜,Au/SiO2衬底上生长的ZnO薄膜具有较好的结晶质量和表面平整度;对制备ZnO薄膜的衬底温度进行了工艺优化,结果表明:500℃时制备的ZnO薄膜颗粒大小均匀,结晶质量较好;通过荧光光谱仪对Au/SiO2衬底上的ZnO薄膜进行光致发光(PL)谱测试,ZnO薄膜在400nm出现紫光发射峰,而没有出现与缺陷相关的深能级发射峰,表明ZnO薄膜具有较好的结晶质量。     

低温缓冲层对氧化锌薄膜质量的影响

利用金属有机化学气相沉积(MOCVD)法,在Si衬底上外延生长ZnO薄膜。为了改善氧化锌薄膜的质量,首先在Si衬底上生长低温ZnO缓冲层,然后再生长高质量的ZnO薄膜。通过XRD、SEM、光致发光(PL)光谱的实验研究,发现低温ZnO缓冲层可有效降低ZnO薄膜和Si衬底之间的晶格失配以及因热膨胀系数不同引起的晶格畸变。利用低温缓冲层生长的ZnO薄膜的(002)面衍射峰的强度要比直接在Si上生长的ZnO薄膜样品的高,并且衍射峰的半高宽也由0.21°减小到0.18°,同时有低温缓冲层的样品室温下的光致发光峰也有了明显的增高。这说明利用低温缓冲层生长的ZnO薄膜的结晶质量和光学性质都得到了明显改善。     

射频磁控溅射法制备SnO2:Sb薄膜的结构和光致发光性质研究

采用射频磁控溅射法在玻璃衬底上制备出锑掺杂的氧化锡（SnO2₂:Sb）薄膜.制 备薄膜是具有纯氧化锡四方金红石结构的多晶膜薄，晶粒生长的择优取向为［110］.室温下光致发光测量结果表明，在392nm附近存在强的紫外-紫光发射.研究了不同氧分压对薄膜结构及发光性质的影响，并对SnO2₂:Sb的光致发光机制进行了探索性研究.     

ZnO薄膜的制备和发光特性的研究

用射频磁控溅射的方法在石英衬底上沉积了氧化锌薄膜，在室温下测量了样品的XRD曲线、吸收光谱以及光致发光光谱。探讨了气氛中氧气与氩气比对制备薄膜的影响，从XRD谱中可以看出，样品具有较好的结晶状态。另外，样品在紫外有较强的吸收，而其光致发光也是较强的紫外发射，这表明带间跃迁占了主导地位，以上结果说明：用溅射方法制备的ZnO薄膜结晶质量较好，富锌状态有所改善。     

The investigation of photoluminescence centers in porous alumina membranes

To investigate the origin of blue photoluminescence (PL) in porous alumina membrane, we have prepared an anodic aluminum oxide film with a pore diameter of 40 nm in oxalic acid solution by a two-step anodization process. Our results show that the as-prepared alumina membrane is amorphous and exhibits a broad emission band peaking at around 452 nm with two sub-peaks located at 443 nm and 470 nm. As indicated by the PL excitation spectra, there are two excitation peaks which can account for the sub-peaks observed in the PL emission band. We have proposed that the broad emission band with two sub-peaks can be attributed to two luminescence centers in porous alumina membranes, namely, oxygen defects and oxalic impurities. Furthermore, we have rationalized that the two emission centers show similar influence on the PL band in the blue region based on a simple model. PACS 81.07.-b; 81.16.Dn; 79.60.Jv     

多孔氧化铝薄膜的制备和光学特性研究

采用阳极氧化法制备了二维有序纳米孔氧化铝膜.研究了工艺参数对多孔薄膜有序性、孔径、膜厚度等的影响，测量了多孔氧化铝有序膜的光透过、光吸收和光发射等光学特性.结果表明，在波长360 nm附近多孔氧化铝有序膜的光透过谱线和光吸收谱线发生突变，波长大于360 nm时，光透过增强；波长小于360 nm时，光吸收增强.多孔氧化铝有序膜的光致发光强度和峰位与激发光波长有关，光致发光谱范围在340~600 nm.     

Optical Analysis of Nanocrystalline ZnO Films Coated on Porous Silicon by Radio Frequency (RF) Magnetron Sputtering

Zinc oxide thin films have been deposited onto porous silicon (PSi) substrates at high growth rates by radio frequency (RF) sputtering using a ZnO target. The advantages of the porous Si template are economical and it provides a rigid structural material. Porous silicon is applied as an intermediate layer between silicon and ZnO films and it contributed a large area composed of an array of voids. The nanoporous silicon samples were adapted by photo electrochemical (PEC) etching technique on n-type silicon wafer with (111) and (100) orientation. Micro-Raman and photoluminescence (PL) spectroscopy are powerful and non-destructive optical tools to study vibrational and optical properties of ZnO nanostructures. Both the Raman and PL measurements were also operated at room temperature. Micro-Raman results showed that the A₁(LO) of hexagonal ZnO/Si(111) and ZnO/Si(100) have been observed at around 522 and 530 cm^–1, re- spectively. PL spectra peaks are distinctly apparent at 366 and 368 cm^–1 for ZnO film grown on porous Si(111) and Si(100) substrates, respectively. The peak luminescence energy in nanocrystalline ZnO on porous silicon is blue-shifted with regard to that in bulk ZnO (381 nm). The Raman and PL spectra pointed to oxygen vacancies or Zn interstitials which are responsible for the green emission in the nanocrystalline ZnO.     

ZnO nanorods/plates on Si substrate grown by low-temperature hydrothermal reaction

The zinc oxide (ZnO) nanorods/plates are obtained via hydrothermal method assisted by etched porous Al film on Si substrate. The products consist of nanorods with average diameter of 100 nm and nanoplates with thickness of 200-300 nm, which are uniformly distributed widely and grown perpendicularly to the substrate. The ZnO nanoplates with thickness of 150-300 nm were grown on Si substrate coated with a thin continuous Al film (without etching) in the same aqueous solution. The growth mechanism and room temperature photoluminescence (PL) properties of ZnO nanorods/plates and nanoplates were investigated. It is found that the introduction of the etched Al film plays a key role in the formation of ZnO nanorods/plates. The annealing process is favorable to enhance the UV PL emissions of the ZnO nanorods/plates.     

Effects of polyethylenimine on morphology and property of ZnO films grown in aqueous solutions

Morphologies and properties of well-aligned ZnO films were controlled using zinc nitrate-hexamethylenetetramine aqueous solutions with the addition of polyethylenimine as a surfactant. Porous and dense ZnO films were fabricated with and without polyethylenimine, respectively. The addition of polyethylenimine proceeded to form porous ZnO whiskers film by preferential adsorption to nonpolar crystal faces and modifications of the surface free energy and growth rate. Dense ZnO film showed high transmittance of 80%, and low intensity of fluorescence and photo-induced current. Porous ZnO whiskers film showed low transmittance of 70%, while high intensity of fluorescence and high photo-induced current were detected because the porous ZnO nanowhisker film possessed a large interior surface area which can capture large amounts of DNA molecules labeled with dye molecules on the surface of ZnO crystals. High performance dye-sensitized sensors can be produced using ZnO whisker films prepared from an aqueous solution.     

Nanocrystalline ZnO Film Grown on Porous SnO2/Si(111) Substrate

Porous tin oxide was prepared on silicon(111) substrate by the sol–gel route. Then, the samples were dried in air at 600°C for 30 min in an electric furnace. Scanning electron microscope (SEM) images indicated the high density of the pores. Circular microvoids formed by the rigid shaped microarray network of 200–300 nm sizes are clearly seen in the plan view SEM image. The high homogeneity and uniformity of the porous region could also be visualized by this easy method. Nanocrystalline zinc oxide (ZnO) thin films have been deposited onto porous SnO₂substrates at high growth rates by radio frequency (RF) sputtering using a ZnO target. The surface morphology of the nanocrystalline ZnO films was characterized by scanning electron microscope (SEM). Photoluminescence (PL) spectroscopy is a powerful, contactless and excellent nondestructive optical tool to study the acceptor binding energy of ZnO nanostructures. The PL measurements were also operated at room temperature. The peak luminescence energy in nanocrystalline ZnO on porous SnO₂ is blue-shifted with regard to that in bulk ZnO (381 nm). PL spectra peaks are distinctly apparent at 375 nm for ZnO film grown on porous SnO₂/Si(111) substrates.     

Morphology and transmittance of porous alumina on glass substrate

The porous optical film has higher threshold of laser-induced damage than densified films, for the study of mechanism of laser-induced damage of porous optical film with ordered pore structure. Porous anodic alumina (PAA) film with high transmittance on glass substrate has been prepared. Aluminum film was deposited on glass substrate by means of resistance and electron beam heat (EBH) evaporation. Porous alumina was prepared in oxalic acid solution under different anodizing conditions. At normal incidence, the optical transmittance spectrum over 300-1000 nm spectra region was obtained by spectrophotometer. SEM was introduced to analysis the morphology of the porous alumina film. The pore aperture increased with the increase of anodizing voltage, which resulted in a rapid decrease of the pore concentration and the optical thickness of porous alumina film. Damage morphology of porous alumina film is found to be typically defects initiated, and the defect is the pore presented on the film.     

Growth of ZnO Nanostructures on Porous Silicon and Oxidized Porous Silicon Substrates

We have investigated an oxidation of substrate effect on structural morphology of zinc oxide (ZnO) rods. ZnO rods are grown on porous silicon (PS) and on thermally oxidized porous silicon substrates by carbothermal reduction of ZnO powder through chemical vapour transport and condensation. Porous silicon is fabricated by electrochemical etching of silicon in hydrofluoric acid solution. The effects of substrates on morphology and structure of ZnO nanostructures have been studied. The morphology of substrates is studied by atomic force microscopy in contact mode. The texture coefficient of each sample is calculated from X-ray diffraction data that demonstrate random orientation of ZnO rods on oxidized porous silicon substrate. The morphology of structures is investigated by scanning electron microscopy that confirms the surface roughness tends to increase the growth rate of ZnO rods on oxidized PS compared with porous silicon substrate. A green emission has been observed in ZnO structures grown on oxidized PS substrates by photoluminescence measurements.     

两步法制备空间取向高度一致的ZnO纳米棒阵列

采用两步法,即先用磁控溅射在Si(100)表面生长一层ZnO籽晶层、再利用液相法制备空间取向高度一致的ZnO纳米棒阵列.用扫描电子显微镜、X射线衍射、高分辨透射电子显微镜和选区电子衍射对样品形貌和结构特征进行了表征.结果表明,ZnO纳米棒具有垂直于衬底沿c轴择优生长和空间取向高度一致的特性和比较大的长径比,X射线衍射的(XRD)(0002)峰半高宽只有0.06°,选区电子衍射也显示了优异的单晶特性.光致发光谱表明ZnO纳米棒具有非常强的紫外本征发光和非常弱的杂质或缺陷发光特性. 关键词： ZnO纳米棒阵列 ZnO籽晶层 两步法 液相生长     

激光分子束外延方法生长的ZnO薄膜的发光特性

研究了不同温度和不同光激发强度下激光分子束外延方法生长的ZnO薄膜样品的发光性能,发现YAG脉冲激光激发,强度超过一定值时会在长波方向上出现一个新的发光峰,此峰可能起源于电子-空穴的复合。室温下氙灯激发的光谱中可以看到峰值位于381nm的近带边紫外发射峰和位于450nm的强的蓝绿带发射,根据光致发光激发光谱的特征给出了一个简单的蓝光发射模型。对比YAG脉冲激光激发和氙灯激发得到的实验光谱,我们认为不同的光谱特征和样品发光的激发机制有关,紫外峰发射需激发强度超过一定值才能观察到,而蓝带发射则在一定的激发强度下迅速饱和。