高迁移率非晶铟镓锌氧化物薄膜晶体管的制备与特性研究

由于铟镓锌氧化物(IGZO) 薄膜具有高迁移率和高透过率的特点, 它作为有源层被广泛的应用于薄膜晶体管(TFT). 本文利用磁控溅射方法制备了TFT的有源层IGZO和源漏电极, 用简单低成本的掩膜法控制沟道的尺寸, 制备了具有高迁移率、底栅结构的n型非晶铟镓锌氧化物薄膜晶体管 (IGZO-TFT). 利用X 射线衍射仪(XRD) 和紫外可见光分光光度计分别测试了IGZO薄膜的衍射图谱和透过率图谱, 研究了IGZO薄膜的结构和光学特性. 通过测试IGZO-TFT的输出特性和转移特性曲线, 讨论了IGZO有源层厚度对IGZO-TFT特性的影响. 制备的IGZO-TFT器件的场效应迁移率高达15.6 cm²·V^-1·s^-1, 开关比高于10⁷. 关键词： 非晶铟镓锌氧化物 薄膜晶体管 有源层     

Effects of annealing process on characteristics of fully transparent zinc tin oxide thin-film transistor

Annealing effect on the performance of fully transparent thin-film transistor （TTFT）, in which zinc tin oxide （ZnSnO） is used as the channel material and SiO2 as the gate insulator, is investigated. The ZnSnO active layer is deposited by radio frequency magnetron sputtering while a SiO2 gate insulator is formed by plasma-enhanced chemical vapor deposition. The saturation field-effect mobility and on/off ratio of the TTFT are improved by low temperature annealing in vacuum. Maximum saturation field-effect mobility and on/off ratio of 56.2 cm2/（V.s） and 3×10^5 are obtained, respectively. The transfer characteristics of the ZnSnO TPT are simulated using an analytical model and good agreement between measured and the calculated transfer characteristics is demonstrated.     

Review of flexible and transparent thin-film transistors based on zinc oxide and related materials

Flexible and transparent electronics enters into a new era of electronic technologies.Ubiquitous applications involve wearable electronics,biosensors,flexible transparent displays,radio-frequency identifications(RFIDs),etc.Zinc oxide(ZnO) and relevant materials are the most commonly used inorganic semiconductors in flexible and transparent devices,owing to their high electrical performances,together with low processing temperatures and good optical transparencies.In this paper,we review recent advances in flexible and transparent thin-film transistors(TFTs) based on ZnO and relevant materials.After a brief introduction,the main progress of the preparation of each component(substrate,electrodes,channel and dielectrics) is summarized and discussed.Then,the effect of mechanical bending on electrical performance is highlighted.Finally,we suggest the challenges and opportunities in future investigations.     

Tuning the contact resistance in organic thin-film transistors with an organic-inorganic hybrid interlayer

We demonstrated the tunable contact resistance in pentacene thin film transistor (TFT) by inserting an organic-inorganic hybrid interlayer between Au electrode and pentacene layer. The contact resistance of pentacene-TFT varies with concentration of pentacene-TFT varies with concentration of MoO_x in organic-inorganic hybrid interlayer. MoO_x in organic-inorganic hybrid interlayer. The contact resistance of the device with 55 wt% MoO_x doped pentacene interlayer is about 7.8 times smaller than that of device without interlayer at the gate voltage of −20 V. Comparing the properties of pentacene-TFT without interlayer, the performance of the pentacene-TFT with 55 wt% MoO_x doped pentacene was significantly improved: saturation mobility increased from 0.39 to 0.87 cm²/V s, threshold voltage reduced from −21.3 to −7.2 V, and threshold swing varied from 3.75 to 1.39 V/dec. Our results indicated that the organic-inorganic hybrid interlayer is an effective way to improve the performance of p-channel OTFTs.     

Glass transition in charge carrier transport phenomena of amorphous photoconductive polymers

The critical temperature T_o in Gill's empirical equation for the charge carrier transport was found to have aclose connection with the glass transition temperature T_g for poly-N-vinylcarbazole containing model compound systems. Interpretations of T₀ and μ₀, i.e., the drift mobility at T₀, were presented.     

High-performance amorphous indium gallium zinc oxide thin-film transistors with sol-gel processed gate dielectric and channel layer fabricated using microwave irradiation

In this study, we fabricated high-performance a-IGZO TFTs by forming Al₂O₃ and a-IGZO thin films for gate insulator and active channel layer, respectively, using a sol-gel process. MWI for low thermal budget process was used to condensate Al₂O₃ and a-IGZO films, which was compared with the CTA. It is found that the MWI is superior process to the conventional method in terms of precursor and solvent decomposition and has proven to be more effective for eliminating residual organic contaminants. In addition, the MWI-treated Al₂O₃ and IGZO films have smoother surfaces, higher visible light transmittance, lower carbon contamination and impurities than the CTA-treated films. We have demonstrated that a-IGZO TFTs with sol-gel solution-processed Al₂O₃ gate insulator and a-IGZO channel layer can achieve a field effect mobility of 69.2 cm²/V·s, a subthreshold swing of 86.2 mV/decade and a large on/off current ratio of 1.48 × 10⁸, by the MWI process even at temperatures below 200 °C. In addition, the MWI-treated a-IGZO TFTs have excellent resistance to electron trapping and good stability to positive and negative gate-bias stress. Therefore, the sol-gel processed a-IGZO TFTs with Al₂O₃ gate oxide and the MWI treatment with a low thermal budget are promising for emerging transparent flat panel displays applications.     

Enhanced contact properties of spray-coated AgNWs source and drain electrodes in oxide thin-film transistors

Facile patterning of electrodes is required for various electronic applications, particularly in solution-processed oxide thin-film transistors (TFTs). In this study, source and drain electrodes were prepared from silver nanowires (AgNWs) using spray-coating and hot press techniques. Although spray coating allowed production of AgNW patterns, which could function as electrodes in oxide TFT, the as-sprayed films did not provide a sufficient physical contact with oxide semiconductors and formed interspaces that impeded electron injection. At the same time, hot press technique produced denser AgNW networks that had a tight contact with the oxide semiconductors. As a result, hot-pressed films were considered as satisfactory source and drain electrodes for high-performance oxide TFTs, as they provided an easy electron injection. Finally, the prepared oxide TFTs with hot-pressed AgNW electrodes exhibited average field-effect mobility of 4.75 ± 1.5 cm²/V, significantly higher than that of the TFTs with as-sprayed AgNW electrodes (0.08 ± 0.05 cm²/V).     

非晶铟锌氧化物薄膜晶体管的低频噪声特性与分析

本文针对底栅结构非晶铟锌氧化物薄膜晶体管的低频噪声特性开展实验与理论研究.由实验结果可知:受铟锌氧化物与二氧化硅界面处缺陷态俘获与释放载流子效应的影响,器件沟道电流噪声功率谱密度随频率的变化遵循1/fγ(γ≈0.75)的变化规律;此外,器件沟道电流归一化噪声功率谱密度随沟道长度与沟道宽度的增加而减小,证明器件低频噪声来源于沟道的闪烁噪声,可忽略源漏结接触及寄生电阻对器件低频噪声的影响.最后,基于载流子数涨落及迁移率涨落模型,提取γ因子与平均Hooge因子,为评价材料及器件特性奠定基础.     

Effects of active layer thickness on performance and stability of dual-active-layer amorphous InGaZnO thin-film transistors

Dual-active-layer(DAL) amorphous InGaZnO(IGZO) thin-film transistors(TFTs) are fabricated at low temperature without post-annealing. A bottom low-resistance(low-R) IGZO layer and a top high-resistance(high-R) IGZO layer constitute the DAL homojunction with smooth and high-quality interface by in situ modulation of oxygen composition. The performance of the DAL TFT is significantly improved when compared to that of a single-active-layer TFT. A detailed investigation was carried out regarding the effects of the thickness of both layers on the electrical properties and gate bias stress stabilities. It is found that the low-R layer improves the mobility, ON/OFF ratio, threshold voltage and hysteresis voltage by passivating the defects and providing a smooth interface. The high-R IGZO layer has a great impact on the hysteresis, which changes from clockwise to counterclockwise. The best TFT shows a mobility of 5.41 cm~2/V·s, a subthreshold swing of 95.0 mV/dec, an ON/OFF ratio of 6.70 × 10~7, a threshold voltage of 0.24 V, and a hysteresis voltage of 0.13 V. The value of threshold voltage shifts under positive gate bias stress decreases when increasing the thickness of both layers.     

Effects of X-ray radiation on hydrogenated amorphous silicon thin-film transistors and characteristics of tungsten shield layer

Hydrogenated amorphous silicon (a-Si:H) thin-film transistors (TFTs) which have tungsten shield layer for AMOLED were fabricated. E-beam evaporation is useful method to prepare cathode layer above organic layers with high throughput and no damage to the organic layers but TFTs are damaged by X-ray radiation generated during the e-beam process. When the thickness of the tungsten layer was increased to 2000 Å, it was found that the characteristics of TFTs, such as threshold voltage, field effect mobility and sub-threshold slope, were slightly varied by X-ray radiation.     

源漏电极的制备对氧化物薄膜晶体管性能的影响

本文采用钼-铝-钼(Mo/Al/Mo)叠层结构作为源漏电极,制备氧化铟锌(IZO)薄膜晶体管(TFT).研究了Mo/Al/Mo源漏电极中与IZO接触的Mo层溅射功率对TFT器件性能的影响.随着Mo层溅射功率的增加,器件开启电压(Von)负向移动,器件均匀性下降.通过X射线光电子能谱(XPS)深度剖析发现IZO/Mo界面有明显的扩散;当Mo层溅射功率减小时,扩散得到了抑制.制备的器件处于常关状态(开启电压为0.5 V,增强模式),不仅迁移率高(～13 cm2·V-1·s-1),而且器件半导体特性均匀.     

Improvement in the electrical performance and bias-stress stability of dual-active-layered silicon zinc oxide/zinc oxide thin-film transistor

Si-doped zinc oxide(SZO) thin films are deposited by using a co-sputtering method,and used as the channel active layers of ZnO-based TFTs with single and dual active layer structures.The effects of silicon content on the optical transmittance of the SZO thin film and electrical properties of the SZO TFT are investigated.Moreover,the electrical performances and bias-stress stabilities of the single- and dual-active-layer TFTs are investigated and compared to reveal the effects of the Si doping and dual-active-layer structure.The average transmittances of all the SZO films are about 90% in the visible light region of 400 nm-800 nm,and the optical band gap of the SZO film gradually increases with increasing Si content.The Si-doping can effectively suppress the grain growth of ZnO,revealed by atomic force microscope analysis.Compared with that of the undoped ZnO TFT,the off-state current of the SZO TFT is reduced by more than two orders of magnitude and it is 1.5 × 10~(-12) A,and thus the on/off current ratio is increased by more than two orders of magnitude.In summary,the SZO/ZnO TFT with dual-active-layer structure exhibits a high on/off current ratio of 4.0 × 10~6 and superior stability under gate-bias and drain-bias stress.     

载流子迁移率对单层有机发光二极管复合效率的影响

建立了在单层有机发光二极管中电场强度不太大(E≤104Vcm)的情况下,载流子注入、传输和复合的理论模型.通过求解非线性Painleve方程得出了电场强度随坐标变化的解析函数关系式以及电流密度随电压变化关系,给出了电流密度以及器件的复合效率在不同的载流子迁移率情况下随电压变化关系图像.结果表明,复合效率受载流子迁移率影响较大,在器件中多数载流子应具有较低的迁移率,而少数载流子应具有较高的迁移率,这样有利于载流子的注入和传输,从而可提高发光效率.并且得出当空穴迁移率大于电子迁移率时,复合区域偏向阴极,反之亦 关键词： 单层有机发光二极管 复合效率 迁移率     

Thickness dependence of surface morphology and charge carrier mobility in organic field-effect transistors

With the aim of understanding the relationships between organic small molecule field-effect transistors (FETs) and organic conjugated polymer FETs, we investigate the thickness dependence of surface morphology and charge carrier mobility in pentacene and regioregular poly (3-hexylthiophene) (RR-P3HT) field-effect transistors. On the basis of the results of surface morphologies and electrical properties, we presume that the charge carrier mobility is largely related to the morphology of the organic active layer. We observe that the change trends of the surface morphologies (average size and average roughness) of pentacene and RR-P3HT thin films are mutually opposite, as the thickness of the organic layer increases. Further, we demonstrate that the change trends of the field-effect mobilities of pentacene and RR-P3HT FETs are also opposite to each other, as the thickness of the organic layer increases within its limit.     

Photo-induced electrical instability in hydrogenated amorphous silicon based thin-film transistors and the effect of its phase transition

We investigate the origin of photo-induced electrical instability in hydrogenated amorphous silicon based thin-film transistors (a-Si:H TFTs). Photo instability alone was accompanied by a positive shift in the threshold voltage (V_TH) caused by photo irradiation, and even larger positive or negative shift further exacerbated the instability caused by photo-induced electrical bias stress. Such phenomena can occur as a result of extended charge trapping and/or the creation of defect-states at the semiconductor/dielectric interface or in the gate dielectric. The mechanism for such is difficult to describe through chemical interactions of electron-donating and -withdrawing molecules that exhibit a shift in V_TH in only one direction. We also prove that a transition from an amorphous to a protocrystalline phase improves the photo-induced electrical stability. Such results originate from a reduction in the density of the localized states in protocrystalline-Si:H films relative to that of a-Si:H. We believe that this study provides significant information on the device physics of optoelectronics, which commonly exhibit photo-induced instability and charge transport, as a result of prolonged exposure to photo irradiation.     

Interfacial interaction in a composite based on multi-walled carbon nanotubes and amorphous tin oxide

The specific features of changes in the electronic structure of multi-walled carbon nanotubes (MWCNTs) due to the interaction with an amorphous tin oxide in the SnO_x/MWCNT composite formed by magnetron sputtering have been investigated using X-ray spectroscopy. It has been shown that the formation of chemical bonds responsible for significant changes in the local and electronic structures of the outer layers of MWCNTs occurs at the boundaries of the “amorphous oxide/MWCNT” contacts. The vacuum annealing of the composite leads to the disturbance of the chemical interaction at interfaces of the composite and to a partial recovery of the local structure of the outer layers of MWCNTs. A decrease in the amount of oxygen in the tin oxide under vacuum annealing conditions causes an increase in the number of unpaired Sn 5s electrons, which, in turn, enhances the charge transfer through the interfaces in the composite and leads to a splitting of the π^*-subsystem of the outer layers of MWCNTs.     

Doping effect on the carrier scattering in iron-pnictide superconductors studied by charge transport

In order to reveal the role of “carrier doping” in the iron-based superconductors, we investigated the transport properties of the oxygen-deficient iron-arsenides LnFeAsO_1−y (Ln=La, Ce, Pr and Nd) over a wide doping range. We found that the effect of “doping” in this system is mainly on the carrier scattering rather than carrier density, quite distinct from that in high-T_c cuprates. In the case of La system with lower T_c, the low temperature resistivity is dominated by T² term and fairly large magnetoresistance is observed. On the other hand, in the Nd system with higher T_c, carriers are subject to stronger scattering showing nearly T-linear resistivity and small magnetoresistance. Such strong scattering appears intimately correlated with high-T_c superconductivity in the iron-based system.     

Improvement of the light output and contact resistance of InGaN-based light-emitting diodes based on tantalum-doped indium tin oxide as p-type electrodes

This paper reports that highly transparent and low resistance tantalum-doped indium tin oxide (Ta-doped ITO) films contacted to p-type GaN have been prepared by the electron-beam evaporation technique. The Ta-doped ITO contacts become Ohmic with a specific contact resistance of $\sim 5.65\times 10^{ - 5}$~$\Omega \cdot$cm$^{2}$ and show the transmittance of $\sim $98% at a wavelength of 440~nm when annealed at 500~\du. Blue light emitting diodes (LEDs) fabricated with Ta-doped ITO p-type Ohmic contact layers give a forward-bias voltage of 3.21~V at an injection current of 20~mA. It further shows that the output power of LEDs with Ta-doped ITO contacts is enhanced 62% at 20~mA in comparison with that of LEDs with conventional Ni/Au contacts.