Photovoltaic substrates and hafnium based gate dielectrics characterized with total reflection X-ray fluorescence

In this study, the capabilities of total reflection X-ray fluorescence spectroscopy characterization for both the photovoltaic industry and advanced semiconductor processing were investigated. Analysis of single crystal silicon coupon samples from various cleans during photovoltaic processing showed that certain clean steps were more effective in removing trace metal contamination. The multicrystalline photovoltaic silicon sample also had detected, but difficult to quantify, metallic contamination. Changes in the silicon dioxide content of hafnium silicate films used in semiconductor processing were also characterized by total reflection X-ray fluorescence spectroscopy analysis.     

Ultra-clean Si(111) and Si(001) Surfaces Prepared by Advanced Wet Chemical Cleaning

Wet chemical cleaning of silicon is a critical step, e.g., pre-gate clean, in the semiconductor manufacturing^[1]. For example, pre-gate oxide cleaning demands ultra-clean silicon surface with least surface roughness. It is well known that metallic infinities and roughness cause the lower breakdown voltage in gate dielectric^[2]. It has stringent requirements for ultra-clean and atomically flat silicon surface as the thickness of gate oxide is decreasing. In the present work, we have extended our study on Si(100) surface13] and extensively investigated wet chemical cleaning of Si(111) and Si(100) surfaces in NH₄F-based solutions by using scanning tunneling microscopy (STM), attenuated total reflection Fourier transform infrared spectroscopy (ATR-FTIR), X-ray photoelectron spectroscopy (XPS) and total reflection X-ray fluorescence spectrometry (TXRF). Surface roughness, organic contamination, metallic impurities and surface termination on the silicon surfaces after wet chemical cleaning with various NH₄F-based solutions have been determined and compared with those treated with RCA cleans, HF solutions and other industrially used solutions. Our results indicate that ultra-clean and smooth Si(111) and Si(001) surfaces are obtained by treatment with NH4F-based solutions.     

Recent results of synchrotron radiation induced total reflection X-ray fluorescence analysis at HASYLAB,beamline L

At the Hamburger Synchrotronstrahlungslabor (HASYLAB), Beamline L, a vacuum chamber for synchrotron radiation-induced total reflection X-ray fluorescence analysis, is now available which can easily be installed using the adjustment components for microanalysis present at this beamline. The detector is now in the final version of a Vortex silicon drift detector with 50-mm² active area from Radiant Detector Technologies. With the Ni/C multilayer monochromator set to 17 keV extrapolated detection limits of 8 fg were obtained using the 50-mm² silicon drift detector with 1000 s live time on a sample containing 100 pg of Ni.Various applications are presented, especially of samples which are available in very small amounts: As synchrotron radiation-induced total reflection X-ray fluorescence analysis is much more sensitive than tube-excited total reflection X-ray fluorescence analysis, the sampling time of aerosol samples can be diminished, resulting in a more precise time resolution of atmospheric events. Aerosols, directly sampled on Si reflectors in an impactor were investigated. A further application was the determination of contamination elements in a slurry of high-purity Al₂O₃. No digestion is required; the sample is pipetted and dried before analysis. A comparison with laboratory total reflection X-ray fluorescence analysis showed the higher sensitivity of synchrotron radiation-induced total reflection X-ray fluorescence analysis, more contamination elements could be detected. Using the Si-111 crystal monochromator also available at beamline L, XANES measurements to determine the chemical state were performed. This is only possible with lower sensitivity as the flux transmitted by the crystal monochromator is about a factor of 100 lower than that transmitted by the multilayer monochromator. Preliminary results of X-ray absorption near-edge structure measurements for As in xylem sap from cucumber plants fed with As(III) and As(V) are reported. Detection limits of 170 ng/l of As in xylem sap were achieved.     

Analysis of sputter deposited and evaporated tantalum oxide layers on SiO2 by SNMS, XPS, TDS and TRFA

Summary Tantalum oxide films with a thickness of 100 nm for the application in high power laser systems have been prepared on SiO₂-substrates by ion beam sputtering or electron beam evaporation. Comparative analysis of both groups of dielectric films has been performed with the separate bombardment mode of secondary neutral mass spectrometry SNMS, X-ray induced photoelectron spectroscopy XPS, thermal desorption spectroscopy TDS and total reflection X-ray fluorescence analysis TRFA.

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Analyse von aufgesputterten und aufgedampften Tantaloxid-Schichten auf SiO₂ mit Hilfe von SNMS, XPS, TDS und TRFA

     

Spectrum Analysis of the Colored Pottery Figurines from Yangling Tombs of the Han Dynasty

ABSTRACT

The analysis of the colored pottery figurines from Yangling Tombs of the Han Dynasty was realized by X-ray diffraction, emission spectroscopy, infrared spectroscopy, X-ray fluorescence and fiber optics reflectance spectroscopy (FORS). Consequent results showed that the colored components were respectively mercuric(II) sulphide, ferric (III) oxide, and carbon, among which mercuric(II) sulphide was an artificial pigment.     

Aqueous Flow Injection Analysis with Fourier Transform Infrared Detection

Abstract

The combination of the automated sample handling capabilities of flow injection analysis combined with detection by attenuated total reflection infrared spectroscopy is presented. This automated system is used to quantitate aliphatic esters, such as dioctylsulfosuccinate, in aqueous solutions at the mg levels. Fairly high reproducibility, 1 to 5%, at a rate of at least 25 samples per hour is possible.     

Nano Silicon from Nano Silica Using Natural Resource (Rha) for Solar Cell Fabrication

Abstract

High purity (～99%) nano silica with an average particle size of ～100 nm was extracted at pH 3 at 650°C from a natural resource, rice husk, using alkaline extraction followed by acid precipitation method. Using nano silica as a precursor, silicon (Si) nanoparticles have been synthesized by high-temperature magnesiothermic reduction method. The prepared sample was characterized by X-ray diffraction, particle size analyzer, Fourier transform infrared spectroscopy, transmission electron microscopy, X-ray fluorescence analyzer, and UV–Vis spectroscopy. The comprehensive characterization studies indicate the pure phase formation of Si and the variation of particle size from 70 nm to 100 nm for samples synthesized at different sintering temperatures. Moreover, the silicon nanoparticles produced at 850°C have pure phase formation, high purity, and good absorption peaks. The efficiency calculated through IV characteristics is found to be increasing in silicon and ruthenium combination (2.67%), which is better than that achieved from the conventional solar cells. The produced silicon nanoparticles could be applied as an anode material for solar cell fabrication.     

Development of off-line layer chromatographic and total reflection X-ray fluorescence spectrometric methods for arsenic speciation

Rapid and low cost off-line thin layer chromatography–total reflection X-ray fluorescence spectrometry and overpressured thin layer chromatography–total reflection X-ray fluorescence spectrometry methods have been developed for separation of 25 ng of each As(III), As(V), monomethyl arsonic acid and dimethylarsinic acid applying a PEI cellulose stationary phase on plastic sheets and a mixture of acetone/acetic acid/water = 2:1:1 (v/v/v) as eluent system. The type of eluent systems, the amounts (25–1000 ng) of As species applied to PEI cellulose plates, injection volume, development distance, and flow rate (in case of overpressured thin layer chromatography) were taken into consideration for the development of the chromatographic separation. Moreover, a microdigestion method employing nitric acid for the As spots containing PEI cellulose scratched from the developed plates divided into segments was developed for the subsequent total reflection X-ray fluorescence spectrometry analysis. The method was applied for analysis of root extracts of cucumber plants grown in As(III) containing modified Hoagland nutrient solution. Both As(III) and As(V) were detected by applying the proposed thin layer chromatography/overpressured thin layer chromatography–total reflection X-ray fluorescence spectrometry methods.     

Combined IR and XPS analysis of the native (1 0 0) surface of single‐crystalline silicon after HFaq etching

A combined analysis, based on angle‐resolved X‐ray photoelectron spectroscopy and multiple‐internal‐reflection infrared spectroscopy, of the (1 0 0) silicon surface after etching in dilute aqueous solution of HF is presented. The analysis shows that the surface is mainly formed by a heterogeneous distribution of SiH, SiH₂ and SiH₃ terminations, but contains (in addition to sub‐stoichiometric oxidized silicon) a form of reduced silicon, not consistent with the currently accepted picture of the native HF_aq‐etched surface. Copyright © 2007 John Wiley & Sons, Ltd.     

Determination of trace impurities in electronic grade quartz: Comparison of inductively coupled plasma mass spectroscopy with other analytical techniques

An analytical procedure for the determination of uranium and thorium in the sub-ng/g range as well as of other trace elements in the ng/g to g/g range in high purity quartz samples is described. The results obtained by inductively coupled plasma mass spectroscopy (ICP-MS) are compared to those obtained by other analytical techniques (instrumental neutron activation analysis, INAA; flame atomic absorption spectrometry, AAS; Zeeman graphite furnace atomic absorption spectrometry, ZGFAAS; total reflection X-ray fluorescence analysis, TRFA; direct current arc optical emission spectrometry, DC-arc OES; and X-ray fluorescence analysis, XRFA). For the ICP-MS measurements, the decomposition of the samples is carried out with HF/HNO₃/H₂SO₄-mixtures. The results obtained by the different methods show reasonable agreement. For uranium and thorium, ICP-MS proves to be the most sensitive method: detection limits of about 50 pg/g can be achieved for both elements.Presented in part at the 1989 European Winter Conference on Plasma Spectrochemistry, Reutte, Austria     

Simple method of determination of copper,mercury and lead in potable water with preliminary pre-concentration by total reflection X-ray fluorescence spectrometry

Total reflection X-ray fluorescence spectrometry and chemical pre-concentration procedures have been applied for the analysis of trace concentrations of copper, mercury, and lead in drinking water samples. A simple total reflection module has been used in X-ray measurements. The elements under investigation were pre-concentrated by complexation using a mixture of carbamates followed by solvent extraction with methyl isobutyl ketone. The preconcentration procedure was tested with the use of twice-distilled water samples and samples of mineral and tap water spiked with known additions of copper, mercury, and lead. The obtained recovery and precision values are presented. The minimum detection limits for the determination of these elements in mineral and tap water samples were found to be 40 ng l⁻¹, 60 ng l⁻¹, and 60 ng l⁻¹, respectively.     

Dose determination of nickel implantations in silicon wafers

Summary The dose of nickel ions implanted with an energy of 300 keV or 6 MeV, respectively, into silicon wafers was measured by X-ray fluorescence analysis (XRFA) after the implantation process. Dose values for Ni were determined within the range from 5×10¹⁵ to 1×10¹⁸ ions/cm². The detection limit of this simple and non-destructive procedure amounts to about 10¹⁴ atoms/cm². The accuracy was confirmed by flame atomic absorption spectrometry (FAAS), total-reflection X-ray fluorescence analysis (TXRFA), and by Rutherford-backscattering spectroscopy (RBS). The study confirms XRFA to be a suitable method for dose determinations after the implantation process.     

Syntheses and mesomorphic properties of novel triphenylene liquid crystals with 15-crown-5 unit as side-chain

Two novel triphenylene liquid crystals with 15-crown-5 unit as side-chain 4a and 4b were designed and synthesised by simple procedures in ideal yields. Their structures were confirmed by Fourier transform infrared spectroscopy (FT-IR), nuclear magnetic resonance spectroscopy (¹H NMR), electrospray ionization mass spectrometry (ESI-MS) and elemental analysis. Their liquid-crystalline behaviours before and after complexation with metallic salts were studied by differential scanning calorimetry, polarising optical microscopy and X-ray diffraction. Neat compounds 4a and 4b show mesophase with triphenylene column, while complexes of 4a and 4b with metallic salts exhibit no mesophase but higher melting point.     

Total reflection X-ray fluorescence spectrometers for multielement analysis: status of equipment

Multielement analysis by total reflection X-ray fluorescence spectrometry has evolved during two decades. At present commercial equipment is available for chemical analysis of all types of biological and mineral samples. The electronic industry has also benefited from scientific and technological developments in this field due to new instrumentation to determine contamination on the surface of silicon wafers (the equipment will not be covered in this paper). The basic components of the spectrometers can be summarized as follows: (a) excitation source; (b) geometric arrangement (optics) for collimation and monochromatization of the primary radiation; (c) X-ray detector; and (d) software for operation of the instrument, data acquisition and spectral deconvolution to determine the concentrations of the elements (quantitative analysis). As an optional feature one manufacturer offers a conventional 45° geometry for direct excitation. Personal communications of the author and commercial brochures available have allowed us to list the components used in TXRF for multielement analysis. Excitation source: high-power sealed X-ray tubes, output from 1300 to 3000 W, different mixed alloy anodes Mo/W are used but molybdenum, tungsten and copper are common; single anode metal ceramic low power X-ray tubes, output up to 40 W. Excitation systems can be customized according to the requirements of the laboratory. Detector: silicon–lithium drifted semiconductor detector liquid nitrogen cooled; or silicon solid state thermoelectrically cooled detector (silicon drift detector SDD and silicon-PIN diode detector). Optics: multilayer monochromator of silicon–tungsten, nickel–carbon or double multilayer monochromator. Electronics: spectroscopy amplifier, analog to digital converter adapted to a PC compatible computer with software in a Windows environment for the whole operation of the spectrometer and for qualitative/quantitative analysis of samples are standard features in the production of this instrument. The detection limits reported in the literature are presented; pricing, analytical capability, ease of operation, calibration and optical alignment as well as technical support are also discussed.     

Applications of total reflection X-ray fluorescence spectrometry in trace element and surface analysis

Total reflection X-ray fluorescence spectrometry (TXRF) is presented as a genuine surface analytical technique. Its low information depth is shown to be the characteristic feature differentiating it from other energy dispersive X-ray fluorescence methods used for layer and surface analysis. The surface sensitivity of TXRF and its analytical capability together with the limitations of the technique are discussed here using typical applications including the contamination control of silicon wafers, thin layer analysis and trace element determination. For buried interfaces and implantation depth profiles in silicon a combination of TXRF and other techniques has been applied successfully. The TXRF method has the particular advantage of being calibrated without the need for standards. This feature is demonstrated for the example of the element arsenic.     

Synthesis,crystal structure,and characterization of two lanthanide coordination polymers based on isonicotinate ligand

Two new europium complexes [Eu(inic)₃(H₂O)] (1) and [Eu(inic)₃] (2) [inic = isonicotinate] have been structurally determined by single-crystal X-ray diffraction and characterized by elemental analysis, infrared spectroscopy, fluorescence, and thermogravimetric analysis. In the two complexes, bifunctional isonicotinate ligands interlink europium metal ions to construct 2-D (for 1) and 3-D (for 2) coordination polymeric networks.     

Synthesis and structure of a new polyoxometalate-based inorganic–organic hybrid and application as a chemically bulk-modified electrode

A new Keggin-type polyoxometalate-based inorganic–organic hybrid, [Cu(H₂O)₂(daphen)]₂[SiW₁₂O₄₀]·9H₂O (1) (daphen?=?5,6-diamino-1,10-phenanthroline), was hydrothermally synthesized, and characterized by single-crystal X-ray diffraction, elemental analysis, infrared spectroscopy, fluorescence spectra, and thermal analysis. Single-crystal X-ray diffraction analysis reveals that in 1, [SiW₁₂O₄₀]^4? is a tetradentate ligand with its four terminal oxygens coordinating to four Cu(II)–daphen fragments to form a 2D sheet with (4,4) topology. On the basis of the insolubility of 1 in water and common organic solvent and its reversible multielectron redox processes, 1 was used to fabricate a bulk-modified carbon paste electrode (1-CPE) by direct mixing. Electrochemistry indicated that 1-CPE is stable over hundreds of cycles and possessed electrocatalytic activity toward the reduction reactions of nitrite.     

Nickel(II) complexes of N-(dialkylcarbamothioyl)-4-nitrobenzamide as single-source precursors for the deposition of nanostructured nickel sulfide thin films by chemical vapor deposition

Nickel(II) complexes of N-(di-alkyl-carbamothioyl)-4-nitrobenzamide (alkyl?=?ethyl or n-propyl) have been synthesized and characterized by infrared spectroscopy, elemental analysis, nuclear magnetic resonance spectroscopy, and mass spectrometry. The structures of bis[N-(diethylcarbamothioyl)-4-nitrobenzamide]nickel(II) (2a) and bis[N-(dipropylcarbamothioyl)-4-nitrobenzamide]nickel(II) (2b) have been determined by X-ray crystallography. FTIR and NMR of the nickel complexes showed the absence of the N–H proton resonance and the N–H stretch and shift of ν _C=O and ν _C=S as expected. Both complexes have been used as single-source precursors for the deposition of nickel sulfide nanostructured thin films by aerosol-assisted chemical vapor deposition. The nanostructured thin films were characterized by X-ray powder diffraction, scanning electron microscopy, energy dispersive X-ray analysis, and atomic force microscopy.     

Integrated analytical techniques for the study of ancient Greek polychromy

The materials used in the decoration of three painted astragaloi (knucklebones) from the Koroneia cave (Greece) were investigated by means of sequential application of non-destructive and destructive techniques: optical microscopy, environmental scanning electron microscopy coupled with X-ray microanalysis (ESEM-EDX), Fourier transform infrared spectroscopy (FTIR) with micro-attenuated total reflection (μ-ATR) technique, high performance liquid chromatography (HPLC) coupled with UV-fluorescence and gas chromatography-mass spectrometry (GC-MS) were used.The main results highlighted that the three astragaloi were prepared with a ground of ochre or iron clay and painted with a proteinaceous matter such as binder egg tempera. Both FTIR and GC-MS agree in the detection of lipids that can be related to egg. Organic dyestuffs identified as madder lake and shellfish purple were used together with inorganic pigments.     

Chemical and statistical characterization of selected documents from the archives of the Palazzo Ducale (Venice, Italy)

Inks and paper are the main materials and components of library and archive collections. Since the beginning of paper and ink production empirical recipes have been followed, but in the 19th century with the transformation of Europe during the Industrial Revolution, the continent became the main leader for the discovery of new products and new industrial production processes. The aim of this study is to shed light on paper and ink production processes during this key historical period. In this study we have chosen some documents preserved in the archive of the Soprintendenza dei Beni Architettonici e Paesaggistici (B.A.P.) di Venezia e Laguna, held in the Palazzo Ducale (Ducal Palace) of Venice. Attenuated total reflection Fourier transform infrared spectroscopy (ATR-FT-IR), and inductively coupled plasma-mass spectrometry (ICP-MS) allowed us to obtain a qualitative and quantitative characterization of the organic and inorganic components in both paper and inks. Cluster analysis and principal component analysis (PCA) were employed for statistical analysis of the results.