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1.
Diamond films were deposited in microwave plasma chemical vapor deposition (MPCVD) method on plain silicon substrates with (100) orientation. And the pinhole defects on them were investigated by optical microscopy and scanning electron microscopy (SEM). X-ray masks were fabricated with the films deposited by us. We found the pinhole defects in the film destroyed the gold absorber. The corrosion-resistance tests conducted in 30% KOH solution under 80℃showed that the diamond films with pinhole defects have lower corrosion-resistance. In addition, the possible mechanism of the formation of pinhole defects in diamond films was discussed. And we deduced that the defects on substrates, competitive growth of multi-phase in diamond films, lattice dislocation between substrates and diamond films could be associated with the defect formation. 相似文献
2.
Growth characteristics of diamond films synthesized by using a dc arc discharge plasma CVD were studied by means of XRD,SEM and reflection electron diffraction. The results showed that columnar growth of the diamond films was observed, the columns having an average diameter of about 15μm, with sharp and regular base edges. Diamond grains grows on the substrata were initially of uniform polygons. An interfacial transition layer of polycrystalline SiC was observed between the diamond film and Si substrate. Diamond grains grown during the early-stage on W substrate were also uniform, and an interfacial transition layer of polycrystalline WC was observed between the diamond film and the substrate. 相似文献
3.
Diamond films were deposited in microwave plasma chemical vapor deposition(MPCVD)method on plainsilicon substrates with(100)orientation.And the pinhole defects on them were investigated by opticalmicroscopy and scanning electron microscopy(SEM).X-ray masks were fabricated with the films depositedby us.We found the pinhole defects in the film destroyed the gold absorber.The corrosion-resistance testsconducted in 30% KOH solution under 80℃ showed that the diamond films with pinhole defects have lowercorrosion-resistance.In addition,the possible mechanism of the formation of pinhole defects in diamondfilms was discussed.And we deduced that the defects on substrates,competitive growth of multi-phasein diamond films,lattice dislocation between substrates and diamond films could be associated with thedefect formation. 相似文献
4.
Nano-Crystalline Diamond Films with Pineapple-Like Morphology Grown by the DC Arcjet vapor Deposition Method
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A nano-crystlline diamond film is grown by the dc arcjet chemical vapor deposition method. The film is characterized by scanning electron microscopy, high-resolution transmission electron microscopy (HRTEM), x-ray diffraction (XRD) and Ftaman spectra, respectively. The nanocrystalline grains are averagely with 80hm in the size measured by XRD, and further proven by Raman and HRTEM. The observed novel morphology of the growth surface, pineapple-like morphology, is constructed by cubo-octahedral growth zones with a smooth faceted top surface and coarse side surfaces. The as-grown film possesses (100) dominant surface containing a little amorphous sp2 component, which is far different from the nano-crystalline film with the usual cauliflower-like morphology. 相似文献
5.
Dynamic scaling and optical properties of Zn(S,O, OH) thin film grown by chemical bath deposition
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The scaling behavior and optical properties of Zn(S, O and OH) thin films deposited on soda-lime glass substrates by chemical bath deposition method were studied by combined roughness measurements, scanning electron microscopy and optical properties measurement. From the scaling behaviour, the value of growth scaling exponent β , 0.38±0.06, was determined. This value indicated that the Zn(S, O, OH) film growth in the heterogeneous process was influenced by the surface diffusion and shadowing effect. Results of the optical properties measurements disclosed that the transmittance of the film was in the region of 70%-88% and the optical properties of the film grown for 40 min were better than those grown under other conditions. The energy band gap of the film deposited with 40 min was around 3.63 eV. 相似文献
6.
Structures and local ferroelectric polarization switching properties of orthorhombic YFeO_3 thin film prepared by a sol–gel method
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《中国物理 B》2019,(3)
Orthorhombic YFeO_3 thin film was prepared on La_(0.67)Sr_(0.33)MnO_3/LaAlO_3 substrate by a sol-gel spin-coating method. The structures of the YFeO_3/La_(0.67)Sr_(0.33)MnO_3/LaAlO_3(YFO/LSMO/LAO) sample were detected by x-ray diffraction pattern, Raman spectrometer, scanning electron microscopy, and atomic force microscope. The local ferroelectric polarization switching properties of the orthorhombic YFO film were confirmed by piezoresponse force microscopy(PFM) for the first time. The results show that the YFO film deposited on LSMO/LAO possesses orthorhombic structure,with ultra-fine crystal grains and flat surface. The leakage current of the YFO film is 8.39 × 10~(-4) A·cm~(-2) at 2 V,with its leakage mechanism found to be an ohmic behavior. PFM measurements indicate that the YFO film reveals weak ferroelectricity at room temperature and the local switching behavior of ferroelectric domains has been identified. By local poling experiment, polarization reversal in the orthorhombic YFO film at room temperature was further observed. 相似文献
7.
We report a special phenomenon on switching behaviour and the electroluminescence (EL) spectrum shift of doped diamond thin films. Nitrogen and cerium doped diamond thin tilms were deposited on a silicon substrate by microwave plasma-assisted chemical vapour deposition system and other special teclmiques. An EL device with a three-layer structure of nitrogen doped diamond/cerium doped diamond/Si02 thin films was made. The EL device was driven by a direct-current power supply. Its EL character has been investigated, and a switching behaviour was observed. The EL light emission colour of diamond films changes from yellow (59Onm) to blue (454nm) while the switching behaviour appears. 相似文献
8.
OES study of the gas phase during diamond films deposition in high power DC arc plasma jet CVD system
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This paper used optical emission spectroscopy (OES) to study the gas
phase in high
power DC arc plasma jet chemical vapour deposition (CVD) during diamond films growth processes. The
results show that all the deposition parameters (methane concentration,
substrate temperature, gas flow rate and ratio of H2/Ar) could strongly
influence the gas phase. C2 is found to be the most sensitive radical
to deposition parameters among the radicals in gas phase. Spatially resolved
OES implies that a relative high concentration of atomic H exists near the
substrate surface, which is beneficial for diamond film growth. The
relatively high concentrations of C2 and CH are correlated with high
deposition rate of diamond. In our high deposition rate system, C2 is
presumed to be the main growth radical, and CH is also believed to
contribute the diamond deposition. 相似文献
9.
《中国物理快报》2002,19(9):1371-1373
Twin diamond crystals grown at high temperature and high pressure (HPHT) in the presence of FeNi catalyst have been examined by transmission electron microscopy(TEM).Direct observation by TEM shows that there are a large amount of twins which lie on the {111} planes in the HPHT-grown diamonds.The twins in the diamond may be formed and may extend into the inner crystal from the twin nucleus formed in the nucleation process.The twins can be formed due to the carbon atoms falling mistakenly into positions where a twin crystal can form during diamond growth,or condensation of supersaturated vacancies on the {111} plane.some hexagonal dislocation loops related to supersaturated vacancies are found on the twins.The Moire fringe image reveals that stacking faults terminate on the intersecting twin boundary.This suggests that,at the temperature that the HPHT diamond is grown,the bordering partial has propagated by gliding up to the twin interface,which can be described by the reaction of a Shockley partial dislocation with a twin on the {111} plane. 相似文献
10.
A heterojunction diode has been fabricated by boron-doped p-type diamond thin film grown epitaxially on a silicon-doped n-type cubic boron nitride bulk crystal using the conventional hot filament chemical vapour deposition method.The ohmic electrode of Ti(50nm)/Mo(100nm)/Au(300nm)for the p-type diamond film and the bulk crystal of the c-BN were deposited by the rf planar magnetron method.Then the device was annealed at 410℃ in air for 1h in order to form ohmic metal alloy,The current-voltage characteristics of the heterojunction diode were measured and the result indicated that the rectification ratio reached 10^5,and the turn-on voltage and the highest current were 7V and 0.36mA,respectively. 相似文献
11.
ABSTRACTThe use of nanopolycrystalline diamond has allowed a systematic study on deformation of polycrystalline diamond composites (PCDCs). Bulk PCDCs samples containing either Co or SiC as a binding agent were deformed under high pressure and temperature to strains up to 18% at strain rates ~10?5?s?1. All samples exhibit strong work hardening. The strength of PCDCs depends on the amount and type of binding agents and is consistently weaker than that of diamond single crystals. The weakening may be due to the binder materials, which play an important role in affecting grain boundary structures. In SiC-based PCDC, significant grain fragmentation occurs. Nearly all grain boundaries are wetted by SiC after large deformation, resulting in lower strength. In Co-based PCDC, the microstructure is dominated by dislocations, deformation twins, and separated grain boundaries. The density of deformation twins increases significantly with strain, with the twin domain width reaching as low as 10–20?nm at 14% strain. 相似文献
12.
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14.
Thermodynamic and kinetic study on interfacial reaction and diamond graphitization of Cu Fe-based diamond composite
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Cu-Fe based diamond composites used for saw-blade segments are directly fabricated by vacuum and pressure- assisted sintering. The carbide forming elements Cr and Ti are added to improve interfacial bonding between diamond and the Cu-Fe matrix. The interfacial reactions between diamond/graphite and Cr or Ti, and diamond graphitization are investigated by thermodynamics/kinetics analyses and experimental methods. The results show that interfacial reactions and graphitization of diamond can automatically proceed thermodynamically. The Cr3C2 , Cr7C3 , Cr23C6 , and TiC are formed at the interfaces of composites by reactions between diamond and Cr or Ti; diamond graphitization does not occur because of the kinetic difficulty at 1093 K under the pressure of 13 MPa. 相似文献
15.
A. Niedbalska 《高压研究》2013,33(1-6):708-710
Abstract In the paper the conception of the natural diamond growth as a result of the organic compounds reaction in the presence of noncompensated spin was checked. They might have played the essential role in the nucleation of diamond crystals. In the experiments, the partly carbonized phenolformal-dehyde resin instead of graphite was used as a carbon source. The final result of the process of the diamond growth depended on the temperature of resin carbonization as well as on the temperature and pressure of synthesis. The 3,8 GPa pressure, which is less than needed for graphite to diamond transformation in the classic industrial process, was sufficient to produce transparent and colourles diamond crystal of the size up to 0,7 mm. 相似文献
16.
1796年英国科学家S.Tennant的精确燃烧实验,首次揭示金刚石是由纯碳构成的宝石,从此人类开始了漫长的人工合成金刚石的探索.金刚石通常只能在极端条件下形成,因此,合成技术的突破是人类合成水平提高的一个重要标志,文章对这一领域一些重要工作做了简单回顾,也讨论了作者在合成金刚石方面的工作.我们在440℃的低温条件下,用碱金属(Li,Na,K)还原超临界CO2,得到透明、大尺寸的金刚石晶体,首次实现了金刚石燃烧实验的逆过程,即把低能、直线型CO2分子变成了碳-碳四面体连接的金刚石,开辟了人工合成金刚石的新途径.也讨论了它与天然金刚石起源之间的可能联系. 相似文献
17.
人工合成金刚石研究进展 总被引:2,自引:0,他引:2
1796年英国科学家S.Tennant的精确燃烧实验,首次揭示金刚石是由纯碳构成的宝石,从此人类开始了漫长的人工合成金刚石的探索.金刚石通常只能在极端条件下形成,因此,合成技术的突破是人类合成水平提高的一个重要标志,文章对这一领域一些重要工作做了简单回顾,也讨论了作者在合成金刚石方面的工作.我们在440℃的低温条件下,用碱金属(Li,Na,K)还原超临界CO2,得到透明、大尺寸的金刚石晶体,首次实现了金刚石燃烧实验的逆过程,即把低能、直线型CO2分子变成了碳-碳四面体连接的金刚石,开辟了人工合成金刚石的新途径.也讨论了它与天然金刚石起源之间的可能联系. 相似文献
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19.
通过X射线应力测试和有限元分析相结合的方法,研究了金刚石层厚度对聚晶金刚石复合片(PDC)残余应力的影响,并根据实验测试结果推导出了PDC表面中心与边缘的应力随金刚石层厚度变化的关系式。随着金刚石层厚度由0.5 mm增加到2.0 mm,PDC表面中心的压应力从1 800 MPa下降至700 MPa左右,而边缘部分的应力逐渐由压应力转为拉应力。金刚石层加厚虽然对边缘部分的最大拉应力影响不大,但使PDC边缘拉应力区宽度由0.76 mm增加到了2.85 mm。金刚石层厚度的增加还使得PDC边缘界面附近y方向的最大拉应力和位于界面边缘处的最大剪应力显著加大,这是金刚石层较厚的PDC界面容易产生裂纹的主要原因。 相似文献
20.
纳米金刚石膜具有高耐磨能力和低摩擦系数,在多个领域有广阔的应用前景。纳米金刚石膜可通过热丝化学气相沉积方法进行制备。其中,系统压力是关键的参数,适当的压力下可生长纳米金刚石膜,而改变压力则金刚石膜的表面形态将发生变化。实验通过不同压力下制备金刚石膜,采用扫描电镜进行形貌观察,并通过拉曼光谱确定纳米金刚石结构。实验表明,金刚石膜形态随压力变化而改变,一定压力下生长出纳米金刚石膜,降低压力则晶体颗粒变粗。分析其原因是与氢原子的运动密切相关。 相似文献