表面等离子体共振膜系结构优化设计

Kretschmann型激发表面等离子体共振(SPR)膜系结构是探针诱导表面等离子体共振耦合纳米光刻技术(PSPRN)的关键部分之一。采用多层介质的特性矩阵法计算膜系结构的透射系数和反射率,对PSPRN所需的单膜层、双膜层及三膜层膜系结构进行了优化设计。计算结果表明,光波波长为514.5 nm时,对于选定材料的最佳膜系结构是Ag膜厚度为46 nm的单膜层结构,Ag膜厚度为24 nm,AgOx厚度为95 nm的双膜层结构及Ag膜厚度为44 nm,SiO2厚度为180 nm,AgOx厚度为10 nm的三膜层结构,提出了记录层材料应选择折射系数小且吸收系数尽可能小的光刻材料的观点。     

Mo/Si多层膜表面保护层设计

为提高Mo/Si多层膜的稳定性与使用寿命,通过分析多层膜驻波电场的分布,对表面保护层及多层膜最上层材料的厚度进行优化设计,使优化后的反射率最高.计算表明,一定厚度的表面保护层总对应一个最优的最上层材料厚度.在13.36 nm波长,膜对数为50的Mo/Si多层膜10度入射的理论反射率为74.47%;当添加厚度为2.3 nm的Ru作为表面保护层,对应多层膜最上层Si的优化厚度为3.93 nm,其理论反射率为75.20％.设计结果表明,通过优化设计表面保护层,可以提高多层膜稳定性,改善多层膜性能.     

膜层厚度对蓝宝石衬底上生长的ITO薄膜性质的影响

采用磁控溅射的方法在蓝宝石衬底上制备了氧化铟锡(ITO)透明氧化物薄膜;研究了不同厚度薄膜的结构、光学和电学特性。经X射线衍射(XRD)测量,发现在蓝宝石衬底上生长的ITO薄膜呈现了较高的(222)择优取向;随着膜层厚度的增加,该衍射峰对应的2θ衍射角逐渐向大角度方向移动,同时该衍射峰的半峰全宽逐渐减小,平均晶粒尺寸增大。 经光学透射光谱测量,发现随着膜层厚度的增加,光学透过率逐渐减小。膜层厚度为0.2 μm时,可见光透过率超过80%,当膜层厚度为0.8 μm时,可见光透过率下降到60%。电学测量结果表明,随着膜层厚度的增加,薄膜电阻率逐渐减小。膜层厚度为0.2 μm时,电阻率为9×10^-4 Ω·cm, 膜层厚度为0.8 μm时,电阻率为5.5×10^-4 Ω·cm。     

磁控溅射方法制备直径120mm高均匀性Mo/Si多层膜

为满足极紫外、软X射线和X射线大口径多层膜反射镜的需求,采用基板扫掠过矩形靶材表面的镀膜方法,在直径120 mm的平面基板上镀制了Mo/Si周期多层膜。通过调整基板扫掠过矩形靶材表面的速率修正了薄膜的沉积速率,极大地提高了薄膜厚度的均匀性。采用X射线衍射仪对反射镜不同位置多层膜周期厚度进行了测量,结果表明,在直径120 mm范围内,Mo/Si多层膜周期厚度的均匀性达到了0.26%。同步辐射测量多层膜样品不同位置处的反射率,结果表明,在直径120 mm范围内,多层膜的膜层厚度均匀,在入射角10°时13.75 nm波长处平均反射率为66.82%。     

Fe/Cr磁性多层膜的制备及其磁电阻测定

利用磁控溅射制备了不同非磁性层厚度的Fe/Cr多层磁性薄膜系统,利用四探针法测定了该多层膜系统在不同磁场下磁电阻效应,用饱和场法给予佐证,溅射制备的多层膜系统饱和场明显地随Cr层厚度增加而衰减振荡,得出了Fe/Cr多层膜的铁磁反铁磁耦合的交换耦合强度随非磁性层厚度变化的物理规律.     

Co/Cu多层膜反铁磁第一、第二峰耦合结构的磁电阻与结构研究

确定了Co/Cu多层膜的第一和第二反铁磁耦合对应的非磁层(Cu)的厚度,对相同厚度铁磁层(Co)制备了第一与第二反铁磁耦合的Co/Cu多层膜,利用同步辐射掠入射X射线散射(衍射)技术研究了耦合多层膜的界面结构,探索了耦合多层膜中磁电阻增强的可能原因.     

金刚石膜的厚度及背表面过渡层对热导率的影响

 采用微波等离子体化学气相沉积（MWPCVD）方法制备金刚石膜，研究了金刚石膜的厚度以及生长初期的SiC过渡层对其热导率的影响，给出了膜厚和背表面SiC过渡层减薄厚度与金刚石膜热导率的关系。     

SiO_2光学增透膜的制备及光学性能

在碱催化体系中以正硅酸乙酯 (TEOS)为前驱体制得SiO2 溶胶 ,采用旋转镀膜法 (spin coating)制备SiO2 光学增透膜。研究了在不同制备条件下对膜层光学性质的影响 ,推算了膜层的折射率及厚度 ,并由此给出膜层孔隙率以及膜层的厚度与转速的关系     

非晶态FeBSi/Si成份调制膜的磁性质和内转换电子Massbauer谱

采用高频溅射法成功地制成了非晶态FeBSi/Si成分调制膜,随Si层厚度增加,调制膜的饱和磁化强度成指数下降,这是死层效应引起的,Mossbauer谱测量表明,死层是由于界面处Fe和Si原子的互扩散而形成的顺磁性相,在非晶态FeBSi/Si成分调制膜中发现存在尺寸效应,它只与FeBSi层的厚度有关,而死层效应既与FeBSi层厚度有关,也与Si层厚度有关。     

AIN/Si3N4 纳米多层膜的外延生长与力学性能

采用射频磁控溅射方法制备单层AlN,Si3N4薄膜和不同调制周期的AlN/S3N4纳米多层膜.采用X射线衍射仪、高分辨透射电子显微镜和纳米压痕仪对薄膜进行表征.结果发现,多层膜中Si3N4层的晶体结构和多层膜的硬度依赖于Si3N4层的厚度.当AlN层厚度为4.0 nm、Si3N4层厚度为0.4nm时,AlN和Si3N4层共格外延生长,多层膜形成穿过若干个调制周期的柱状晶结构,产生硬度升高的超硬效应.随着Si3N4层厚的增加,Si3N4层逐步形成非晶并阻断了多层膜的共格外延生长,多层膜的硬度迅速降低,超硬效应消失.采用材料热力学和弹性力学计算了Si3N4层由晶态向非晶转变的临界厚度.探讨了AlN/Si3N4纳米多层膜出现超硬效应的机理.     

Hybrid Wavelength and Code Division Multiple Access in Optical Networks

A review of schemes for multiple access in fiber optic networks shows that a hybrid of wavelength and code division multiple access (WCDMA) combines the best features of both. In particular, the hybrid scheme retains the large information carrying capacity of wavelength division multiple access (WDMA) and flexibility of code division multiple access (CDMA). In this paper WDMA, optical CDMA (OCDMA), and WCDMA networks are discussed. In OCDMA networks, concept of incoherent and coherent coding including inverse decoding and matched filter is introduced. The delay performance of both WDMA and WCDMA networks, under the simple suboptimum access protocols based on cyclic search, is computed. It has been shown quantitatively that tuning delay significantly affects the delay performance of both WDMA and WCDMA networks. Futhermore, delay performance of WCDMA networks is always better than the WDMA networks for the same tuning delay, load, and number of users.     

Guided-Wave Two-Dimensional Acousto-Optic Scanner Using Proton-Exchanged Lithium Niobate Waveguide

Two-dimensional scanning of a 0.6328 mum guided-light beam has been realized using noncolinear acousto-optic (AO) coplanar Bragg diffraction together with colinear AO guided-mode to substrate radiation-mode conversion in a Z-cut Xpropagation LiNbO3 proton-exchanged (PE) waveguide. The two surface acoustic (SAW) waves utilized are at the center frequencies of 500 and 200 MHz, propagating in the Y and X axes, respectively. Two-dimensional scanning of approximately 720 resolvable light beam spots, namely, 18 40 (horizontal vertical) scanning, has been demonstrated using a light beam of 1.0 mm aperture. The total number of resolvable beam spots can be greatly increased from 720 by simply utilizing SAW transducers of larger bandwidth and a light beam of greater aperture. It should also be possible to significantly increase the diffraction efficiency from 3 % by optimizing the parameters of the PE waveguide and the SAWs.     

Femtosecond Transform-Limited Pulse Generation by Compensating for the Linear Chirp of SPM Spectra in Dispersion Shifted Fibers

A simple technique of pulse compression, based on the linear chirp compensation of self-phase modulation (SPM) spectra in dispersion shifted fibers, is demonstrated. The optimization procedure is carried out, for a short span of a single-mode fiber, using a parabolic law, which describes the behavior of the squared output pulse width versus the pump peak power in the case of Gaussian pulses. The experimental results give a minimum pulse duration of 233 fs, which is in good agreement with the model. Shorter and coherent pulses, down to 90 fs, have been obtained by inserting an interference filter at the optical output.     

Effect ofγ-radiation on the spectral luminescence characteristics of impure cadmium tungstate crystals

Results of a study of the effect of γ-radiation on the spectral luminescence properties of cadmium tungstate crystals doped with silver, bismuth, and molybdenum cations are presented. Spectral characteristics of the nondnnnoped crystals are briefly described. Absorption and photo and X-ray luminescence spectra of the crystals taken before and after exposure to γ-radiation (5.5·10⁴ Gy) are compared. It is found that the spectral characteristics of the crystals doped with silver, bismuth, and molybdenum cations do not change markedly after the exposure. The relation between the type of impurity-induced defects, individual characteristics of the impurity cations, and the character of the effect of γ-radiation on the spectral luminescence properties of impure crystals is analyzed (preliminarily). Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 64, No. 1, pp. 55–60, January–February, 1997.     

Research on beamforming method for dual-line array with space mismatch between the two line arrays

The performance of port/starboard discrimination of dual-line array will be seriously degraded when the space between the two line arrays of the dual-line array is mismatched. The directivity function of the delay-sum and delay-subtract beamforming is deduced and the port/starboard discrimination of the delay-sum and delay-subtract beamforming is also studied both under the ideal status and the status under which the space between the two line arrays of the dual-line array is mismatched. Analysis results show the delay-subtract beamforming has better performance of port/starboard discrimination. At last, the sea trial results demonstrate the theoretical results.     

Sorting of bending magnets for the SSRF booster

The Shanghai Synchrotron Radiation Facility(SSRF)booster ring,a full energy injector for the storage ring,is deigned to accelerate the electron beam energy from 150MeV to 3.5GeV that demands high extraction efficiency at the extraction energy with low beam loss rate when electrons are ramping.Closed orbit distortion(COD)caused by bending magnet field uniformity errors which affects the machine performance harmfully could be effectively reduced by bending magnet location sorting.Considering the affections of random errors in measurement,both ideal sorting and realistic sorting are studied based on measured bending magnet field uniformity errors and one reasonable combination of bending magnets which can reduce the horizontal COD by a factor of 5is given as the final installation sequence of the booster bending magnets in this paper.     

Retrieval of ultraviolet skylight radiances and O3 slant column densities from balloon-borne limb spectrometer

With a novel light-weight and absolutely calibrated ultraviolet （UV） spectrometer, UV skylight radiances and O3 slant column densities are measured by balloon-borne limb measurements in Xinjiang area, China. UV skylight radiances measured at the height of 31 km are compared with the results from Modtran in the wavelength range from 290 to 420 nm. O3 slant column densities are derived from radiance spectra in the Huggins bands （320 - 335 nm） using differential optical absorption spectroscopy method. And the parameter exhibits a good correlation with the same value simulated by radiative transfer model （Tracy）. The O3 profile simultaneously measured by an O3 sonde is used as input in Tracy calculations. The O3 sonde is launched on the same balloon.     

Design optimization of highly sensitive LSPR enhanced surface plasmon resonance biosensors with nanoholes

For breaking through the sensitivity limitation of conventional surface plasmon resonance (SPR) biosensors, novel highly sensitive SPR biosensors with Au nanoparticles and nanogratings enhancement have been proposed recently.But in practice, these structures have obvious disadvantages.In this study, a nanohole based sensitivity enhancement SPR biosensor is proposed and the influence of different structural parameters on the performance is investigated by using rigorous coupled wave analysis (RCWA).Electromagnetic field distributions around the nanohole are also given out to directly explain the performance difference for various structural parameters.The results indicate that significant sensitivity increase is associated with localized surface plasmons (LSPs) excitation mediated by nanoholes.Except to outcome the weakness of other LSP based biosensors, larger resonance angle shift, reflectance amplitude, and sharper SPR curves' width are obtained simultaneously under optimized structural parameters.     

Polymer gratings based on photopolymerization for low-order distributed feedback polymer lasers

Novel polymer distributed feedback(DFB)gratings are fabricated based on photopolymerization to reduce lasing threshold of polymer lasers.A photopolymer formulation sensitive to 355-nm ultraviolet(UV)light is proposed for the fabrication of polymer gratings and it can be used to form polymer films by spin-coating process.A very low surface-relief depth ranging from 12.5 to about 1.0 nm has been demonstrated with a refractive-index modulation of about 0.012.The experimental results indicate that such polymer gratings have promising potentials for the fabrication of low-order DFB organic semiconductor lasers.     

A novel methodology for photometric compensation of projection display on patterned screen

We propose a novel methodology based on the projector-camera (ProCam) system to address the photometric compensation issue for the projection display on the patterned screen.The patterned screen is treated as the combination of a perfect white screen and a color modulator.The perfect white screen is used to automatically and accurately characterize the ProCam system offline using the polynomial model,and the parameters of the color modulator can be efficiently recovered by employing only two gray images based on the linear reflectance model.The experimental results show that the color artifacts of the display image can be greatly improved with this methodology,which demonstrates its feasibility and validity in the photometric compensation.