在随机和倾斜移相下光强归一化的迭代移相算法

由于存在振动和导向误差,干涉仪移相器在移相过程中产生随机的平移误差和倾斜误差,会给测量结果带来影响。因此高精度测量中对环境的稳定性和移相器的性能要求很苛刻。为了降低此种要求,针对随机和倾斜移相下干涉图背景光强和调制度的不均匀会影响移相平面计算的问题,对采集得到的干涉图做归一化处理,并利用迭代最小二乘法对归一化的干涉图做相位求解。迭代过程中,将干涉图分块来求解移相值,并对各移相值做平面拟合得到移相平面。仿真结果表明,该方法消除了背景光强和调制度的不均匀对倾斜系数计算的耦合作用,能够有效补偿倾斜移相误差对面形相位的影响,与其他方法相比,具有收敛速度快、求解精度高的特点。实验结果进一步验证了该方法的有效性。     

Parallel two-step phase-shifting microscopic interferometry based on a cube beamsplitter

Parallel two-step phase-shifting interferometry for microscopy is presented, and the recording condition for generalized two-step phase-shifting interferometry is discussed. A 45° tilted cube beamsplitter enables to replicate the orthogonally linear polarized object and reference waves into two parallel beams, respectively. As a consequence, two interferograms with quadrature phase shift are obtained along the two beams, and phase reconstructed with an improved algorithm. To reconstruct the phase distribution from the two-step phase-shifting interferograms, a certain recording condition should be satisfied. However, the recording condition has not ever been discussed before. In this paper, the recording condition for the two-step phase-shifting interferometry is derived and that is: the intensity of reference wave should be no less than two times object wave intensity.     

基于主元分析的随机相移算法

将统计理论中的主元分析应用到干涉条纹分析中,提出一种基于主元分析的随机相移算法。该算法先将多帧条纹数据分解成不相关的主元成分,然后从主元成分中提取2维相位信息。数值模拟结果表明:该算法不需要迭代运算就能从4帧完全随机相移干涉图中有效提取相位信息,运算时间少,精度高。实验结果表明主元分析相移算法比现有迭代相移算法更适合于随机相移干涉图分析。     

优化的两步相移算法在图像加密中的应用研究

优化了此前提出的两步相移算法,仅通过两幅去除背景光强(或抑制直流分量)后的干涉图数据和一个(0,π)区间的相移值,就可以成功再现出原始物波场信息,无需借助于物光光强、参考光光强等其他辅助测量信息.与菲涅耳域的双随机相位编码技术结合,该优化算法可以应用于图像加密方案中,通过计算机仿真实验验证了所提方案的可行性,并对几何密钥的灵敏度进行了测试分析.     

An effective method in calibrating nonlinear errors for phase-shifting interferometry

In phase measurement or digital holography for phase-shifting interferometry, the key role is the variation of reference light wave and recover algorithm based on interferograms and reference phase, so the calculation result is directly affected by phase-shift accuracy. However, because of the errors of nonlinear and other random factors, it is difficult to control the actual phase-shifting amount accurately. In this paper, we aim to propose an efficient method for phase-shifting interferometry which does not require accurate initial estimation of phase-shift amounts, only a few pixels with several randomly shifted interferograms are sufficient for accurate extraction of phase information. This method has reduced the dependence of reference phase, and can obtain phase-shifting amount directly without using complex revised algorithm for correcting phase-shifting nonlinear errors.     

3-D surface profilometry using simultaneous phase-shifting interferometry

Urgent needs for high-speed, non-contact and on-line measurement with high accuracy and repeatability are of great interest for automatic optical inspection (AOI) industries. Therefore, optical phase-shifting interferometry for precision 3-D surface profilometry has become an important metrological method due to its non-contact and high measurement accuracy. Traditional phase-shifting interferometry is very sensitive to vibrations because image acquisition in various phase-shifting sequences could easily introduce measurement errors from environmental influences, such as air disturbance and system structure vibrations. In this paper, we introduce a new simultaneous phase-shifting interferometer for 3-D surface profilometry which employs a single glass plate to generate simultaneous phase-shifted interferograms. Phase reconstruction is performed by using a developed phase-shifting algorithm which uses a three-step phase-shifting method with phase differences of 90°, 180°, and 270° for three interferograms. To verify measurement accuracy and repeatability, the system was employed to measure surface profiles of surface of a flat mirror and set of Mitutoyo gauge blocks. The experiment result shows that the method is proven to be capable of performing one-shot interferometric measurement and minimizing influences from environmental disturbances with measurement repeatability down to 10 nm or less.     

Discussions about FFT-based two-step phase-shifting algorithm

An FFT-based two-step phase-shifting (TPS) algorithm is described in detail and implemented by use of experimental interferograms. This algorithm has been proposed to solve the TPS problem with random phase shift except π. By comparison with the visibility-function-based TPS algorithm, it proves that the FFT-based algorithm has obvious advantages in phase extracting. Meanwhile, we present a π-phase-shift supplement to the TPS algorithm, which combines the two interferograms and demodulates the phase map by locating the extrema of the combined fringes after removing the respective backgrounds. So combining this method and FFT-based one, one could really implement the TPS with random phase shift. Whereafter, we systematically compare the TPS with single-interferogram analysis algorithm and conventional three-step phase-shifting one. The results demonstrate that the FFT-based TPS algorithm has a satisfactory accuracy. At last, based on the polarizing interferometry, a schematic setup of two-channel TPS interferometer with random phase shift is suggested to implement the simultaneous collection of interferograms.     

Phase-Measuring Algorithms to Suppress Spatially Nonuniform Phase Modulation in a Two-Beam Interferometer

Phase modulation of presently used phase-shifting interferometers is assumed to be spatially uniform across the observing aperture. However, calibration errors or the configuration of an interferometer can cause a spatial nonuniformity in the phase modulation. Spatial nonuniformity causes a significant error in the measured phase when the phase modulator has nonlinear sensitivity. An even-order nonlinearity in the phase modulation in particular contributes to the errors. Lowest-order errors can be suppressed by adding a new symmetry to the sampling functions of the phase-shifting algorithm, however the algorithm suffers from large random noise. The random noise is shown to be decreased substantially by applying one more sampled frame to the algorithm. We derive new seven-sample and eight-sample algorithms that can compensate for a nonuniform phase shift and has much less random noise than the previous algorithm we proposed.     

Measurement of sub-surface delaminations in carbon fibre composites using high-speed phase-shifted speckle interferometry and temporal phase unwrapping

A high-speed phase-shifted speckle interferometer has been developed recently for studying dynamic events. Speckle interferograms are continuously recorded by a CCD camera operating at 1 kHz with temporal phase shifting carried out by a Pockels cell running at the same frequency. Temporal phase unwrapping through sequences of more than 1000 frames allows the determination of time-varying absolute displacement maps. This paper presents the application of this speckle interferometry system to the detection and measurement of sub-surface delamination defects in carbon fibre specimens. The influence of re-referencing the temporal phase unwrapping algorithm after different time intervals is analysed to reduce the random phase errors produced by speckle decorrelation and vibration. The performance of several phase-shifting algorithms to minimize the influence of the vibration noise caused by the vacuum pump used to load the specimen is also investigated.     

General Phase-stepping Algorithm Using Lissajous Figures Technique

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General Phase-stepping Algorithm Using Lissajous Figures Technique

A new phase-stepping algorithm is proposed, the algorithm can be implemented without knowing or calculating the phase steps. New phase extraction expressions based on using Lissajous figures and ellipse fitting are derived by introducing a simple difference transform for the intensity of the interferograms. The simulating results indicate that the new algorithm is insensitive to phase-stepping errors and the accuracy of the new algorithm is only limited by the computation truncation errors.     

基于联合变换相关和相移干涉的图像加密

提出了一种在联合变换相关器结构中引入三步相移干涉和二元置乱技术的图像加密方法.用纯相位空间光调制器同时调制原始图像和两个随机相位掩模,利用三步相移技术分别将图像信息和主密钥加密为全息图,并用CCD在输出面上接收,再利用二元置乱技术置乱图像信息的全息图.在获得置乱密钥和附加密钥的情况下,可以通过一定的算法快速、清晰的重建原始图像.用计算机仿真验证了它的可行性和有效性.     

相移相位测量的全息再现算法及测量误差分析

用全息原理和方法研究相移相位测量,得到了N步整周期相移再现物光波复振幅同步叠加函数(N步相移函数),同时提出一种新的相移相位测量误差分析和最大误差估计方法。N步相移干涉图是以理想平行光为参考光的无衍射同轴全息图,将其与对应的相移参考光相乘后求和得到N步相移函数;在理想情况下,这是一种复振幅分离、测量和物光波复振幅函数同步叠加方法,存在误差时计算出的相位是最小二乘方法的最佳期望结果。利用N步相移函数得到的N 1步相移函数,说明非理想N步相移函数是理想N步相移函数与误差函数之和,可以把相位型误差转化为与振幅和强度相对误差同等的误差来对待,降低了相位测量中误差估计的难度,给出了N步相移算法最大误差的估计方法和公式。     

用于全场光学相干层析成像的无色散相移器研究

提出了基于旋转λ/2波片无色散相移器的理论模型,和实施该相移器功能的全场光学相干层析成像(Optical coherence tomography,OCT)系统,为实现快速、高分辨光学相干层析成像提供了一种有效方法。该相移器能在宽光谱范围内无色散地获得八倍于λ/2波片旋转角的相移量,避免了利用单色光相移算法提取信号时存在的系统误差。针对修正Carré算法和三步相移算法所要求的不同相移量,在240 nm波长范围内,对相移器的性能进行了数值分析。结果表明,在给定光谱范围内,相移量越大,相移误差的绝对值也越大,幅值比变化范围也越大。用于实施无色散相移器功能的全场光学相干层析成像系统结构,与现有结构相比,具有一些有益的特点。     

Polarization phase-shifting Jamin shearing interferometer

The Jamin shearing interferometer is very useful in wavefront testing, especially for the low coherent light. Based on this interferometer, a polarization phase-shifting Jamin shearing interferometer is proposed to improve the performance. In the interferometer, two interference beams are linearly polarized and a polarization phase shifter is applied to realize the phase shifting. Different types of configurations of the interferometer are given. With phase-shifting interferograms, the precision of the interferometer can be improved. The interferometer is kept as an equal optical path system and its shearing amount remains changeable with simple structure and easy operation. In experiments, phase-shifting interferograms are obtained by rotating the analyzer. The usefulness of the interferometer is verified.     

基于二维光栅分光的同步移相干涉测量技术

为了干涉测量的抗振目的,提出了一种新的同步移相干涉测量方案并搭建了实验装置。整个测量系统在迈克耳孙偏振移相干涉仪的基础上,利用一个正交的二维光栅产生对称分光,选取对于理想光栅衍射效率一致的(±1,±1)级衍射光作为测量分光路,使之分别通过偏振方向依次相差45°的一个偏振片组,从而分别形成0°、90°、180°和270°相移的四幅移相干涉图,按照传统的四步移相算法,对被测波面进行了复原。分析了光强畸变和移相误差对系统的测量误差的影响。利用该系统测量一球面系统,结果与在ZYGO干涉仪上相比较,球面系统的均方根误差相差0.012λ,峰谷值相差0.051λ。     

基于倾斜相位的抗振动干涉面形测量

环境振动会在干涉测量过程中产生随机倾斜、移相误差,导致测量精度下降。为了降低环境振动对移相干涉测量的影响,提出了一种基于倾斜相位的抗振动干涉面形测量方法。首先,利用Fourier变换将干涉图变换到频域;然后,利用频域细分操作对峰值坐标进行亚像素精度定位,求解出振动倾斜平面;最后,利用最小二乘法计算出待测面的相位分布。实验结果表明,本方法与同步移相法的复原结果具有高度一致性,波面峰谷值和均方根值的偏差较小;且本方法无需对硬件进行改动,可为振动环境下的移相干涉测量提供一种低成本、高精度的解决方案。     

基于两步正交相移干涉的振幅图像光学加密技术

提出一种基于两步正交相移干涉的光学图像加密技术.这种相移干涉数字全息只要记录两幅干涉图,不需要记录物光波和参考光波的强度信息,就可以再现没有零级像和共轭像的再现像.物光波对应的光路经过两次菲涅尔变换,并结合双随机相位编码.参考光分别引入0和π/2相位,用数字化记录介质记录两幅数字全息图作为加密图像.解密时只要获得正确的密钥,经过简单的计算就可以重建清晰的原始图像.模拟实验验证了它的可行性和有效性,分析了抗裁剪和噪音的鲁棒性.     

Punctuated quadrature phase-shifting interferometry

We describe a method and algorithm for reducing the sensitivity of phase-shifting interferometry to external vibrations. Using an interline-transfer camera, a shutter, and a fast phase shifter, we acquire a series of paired interferograms in quadrature, with the pairs spaced to maximize residual phase-error cancellation. The rapid acquisition of quadrature pairs significantly improves resistance of interferometry to low-frequency vibrations.     

Rapid phase extraction method based on the difference image between interferograms with unknown phase-shifting amount

In phase-shifting interferometry, based on the difference image between interferograms with unknown phase-shifting amount, a rapid phase extraction method is proposed. In this method, first, by means of the simple subtraction operation between interferograms captured in one phase-shifting period, a sequence of difference images are generated easily; second, to decrease the random phase-shifting errors induced during the phase-shifting procedure, the summation operation is performed for these difference images; third, based on one time phase recovery operation and one time phase-unwrapping operation, the measured phase with high precision can be obtained rapidly. Moreover, in the proposed method, by means of a simple phase summation operation for all pixel-phases in one interferogram, the corresponding phase-shifting amount of interferogram can be determined conveniently.