化学增幅抗蚀剂用光产酸源

对化学增幅抗蚀剂体系的组成及化学增幅作用做了阐述。介绍了化学增幅作用中的关键组分——光产酸源和酸增殖剂的发展概况，并对重氮盐、锘盐、有机多卤化物、磺酸酯类化合物等产酸源的产酸机理、适用光源分别进行了阐述。从目前国际发展的趋势来看，硫锘盐和磺酸酯类的光产酸源占据主要地位，有机多卤化物中的三嗪化合物还有少量应用。频哪醇单磺酸酯类化合物作为酸增殖剂使用较为普遍。     

一种适用于193nm光刻胶的硫盐光产酸剂的制备与性质

制备了一种阳离子含有萘基,阴离子分别为对 甲苯磺酸、甲磺酸及三氟甲磺酸的硫盐.它们有高的热解温度和在常用有机溶剂中较好的溶解性.测定了此类光产酸剂在水溶液及聚乙二醇固体膜层中的紫外吸收特性.结果表明,阴离子不含苯基时,在193nm处有很好的透明性.考察了其在低压汞灯照射下的光解性质,在254nm附近的吸收峰随光解进行迅速减弱.此类光产酸剂适用于氟化氩激光(193nm)等的化学增幅型光致抗蚀剂.     

1-取代-顺式-1,2-环己二醇单磺酸酯类酸增殖剂的合成和性质研究

用过氧化氢氧化烯烃得到顺式邻环己二醇,继而和对甲苯磺酰氯反应得到两种1-取代-顺式-1,2-环己二醇单磺酸酯.以溴酚兰作指示剂,用作者自己的方法定量测定了它们在聚乙二醇膜层中的酸解性能.结果表明,在光产酸剂所产酸作用下,在加热条件下这些化合物发生分解并产酸.这两个磺酸酯的储存稳定性不是很好,在极性溶剂作用下易分解,限制了它们在化学增幅型成像材料中的应用.     

硫鎓盐产酸剂的合成及其产酸效率

合成了6种适用于248 nm光致抗蚀剂的硫鎓盐产酸剂,其中吩噻(噁)体系的产酸剂为自行设计合成. 利用IR、H NMR、UV等测试技术进行了结构表征和紫外吸收测定,各化合物的最大紫外吸收在250～285 nm之间,吸收域较宽,适用性较强.同时,利用酸敏染料罗丹明B遇酸异构变色的特点,使用紫外!可见分光光度计定量检测了6种产酸剂在乙腈溶剂中的产酸效率,其中硫杂蒽酮系列的产酸剂产酸性能最好. 最后使用荧光追踪法研究了溶剂极性对产酸效率的影响,发现产酸剂的产酸性能同溶剂的选取密切相关,随着溶剂极性的减小,产酸效率随之降低. 对6种硫鎓盐的产酸效率检测结果可以为产酸剂进一步用于248 nm光致抗蚀剂配方提供详细的参考.     

一种新型深紫外正型光致抗蚀剂材料的研究

通过松香酸和丙烯酸的Diels-Alder反应得到了一种二酸——丙烯海松酸.丙烯海松酸有大的脂环结构和良好的成膜性,在固体膜层中,它可以和二乙烯基醚,如1,3-二乙烯氧基乙氧基苯,在加热条件下(80℃以上)发生反应,产物在稀碱水中难溶.这样形成的产物在光产酸剂产生的强酸催化下,在温度高于100℃时,可以迅速分解,从而变成稀碱水易溶.因此,用此二酸、二乙烯基醚和产酸剂可组成一种正型的光致抗蚀剂,当用254 nm的低压汞灯曝光时,其感度在30 mJ/cm²以下.     

三嗪类化合物的合成及其产酸性能研究

合成了一系列的三嗪类光生酸剂1a—1e,确定了它们的结构,并对1e在乙腈溶剂中365和405nm光下的曝光分解产酸性能进行了初步的定量研究.结果表明,在测定浓度范围内分解量子产率和产酸量子产率基本上都不随浓度的变化而变化,在405nm光下比在365nm光下有更高的分解和产酸量子效率.有关这类化合物的光生酸性能与曝光波长的关系正在进一步研究中.     

非离子型产酸剂——N-羟基邻苯二甲酰亚胺对甲苯磺酸酯的合成与性能研究

以邻苯二甲酸酐、盐酸羟胺和对甲苯磺酰氯为起始原料,合成了非离子型光致产酸剂——N-羟基邻苯二甲酰亚胺对甲苯磺酸酯,对其进行了红外、核磁共振和紫外表征,测定了其化学结构、溶解性和紫外吸收等性能.结果表明,这种非离子型产酸剂较离子型产酸剂在常用溶剂中有非常良好的溶解性,并在248 nm处有好的透明性,可用于深紫外光刻工艺体系.     

新型锍鎓盐类光生酸剂的合成及产酸性能研究

成功合成了两种新型锍鎓盐类光生酸剂,其结构经¹1HNMR和MS分析确认,并对其基本物性及在405、365nm光下乙腈溶液中的分解及产酸性能进行了研究,通过计算得出了分解及产酸量子产率.结果表明,两种化合物有较高的热分解温度和在常用有机溶剂中有较好的溶解性;在405nm光源下,4-(9′-苯基蒽基)苯基三氟甲磺酸锍鎓盐(PAGS1)和4-(4′-N,N-二乙基-1′-苯乙烯基)苯基三氟甲磺酸锍鎓盐(PAGS2)的分解量子产率分别为10%和15%,产酸量子产率为8.1%和13%;但在365nm光源下,分解及产酸量子产率均很低,说明两种光生酸剂对于405nm波长的光较敏感,适宜作为405nm光源下的光生酸剂.     

新型硫鎓盐产酸剂的合成及其产酸效率研究

本文合成了六种适用于248nm光致抗蚀剂的产酸剂,其中吩噻口恶 体系的产酸剂由本研究室自主设计合成。六种产酸剂均通过IR,HNMR,UV等进行了结构表征,并利用酸敏染料遇酸异构变色的特点定量检测了六种产酸剂的产酸效率,同时使用荧光追踪法研究了溶剂极性对产酸效率的影响,优选出了硫杂蒽酮系列的产酸剂,为进一步用于248nm光致抗蚀剂提供参考。     

含环状原酸酯侧基的两亲性嵌段共聚物及其酸敏感胶束状聚集体

合成了含有环状原酸酯基团的单体,甲基丙烯酸5-(5-甲基-2-乙氧基-1,3-二氧六环)甲酯(EDMM),以PEO大分子引发剂引发,通过原子转移自由基聚合方法制备了两个疏水链段(PEDMM)长度不同的酸敏感两亲性嵌段共聚物,PEO-b-PEDMM17和PEO-b-PEDMM34.两个聚合物在水溶液中形成粒径约为60～200nm的球型聚集体,通过动态光散射、透射电镜、荧光探针等手段表征了所得聚集体.结果显示,疏水链段较短的共聚物的临界聚集浓度较高,形成的聚集体尺寸较小.核磁和荧光探针结果表明,胶束状聚集体在中性(pH7.4)水溶液中比较稳定,在酸性水溶液中其疏水核的极性因原酸酯的水解而增加.该类酸敏感胶束状聚集体有望用于肿瘤、细胞内给药等药物传递体系.     

405 nm成像体系用三嗪类光生酸剂的制备、性质和应用研究

制备了5种三氯甲基取代的三嗪类光生酸化合物,其结构经1HNMR、IR等分析确认,分别考察了它们在有机溶剂中的溶解性,通过TG测定确定了其热分解性能,并测定了它们的紫外可见吸收光谱,以及对在405、365 nm光源下的光分解及产酸性能进行了研究.成像实验表明,它们可用于405 nm的成像组成物中.     

双光子技术在光生酸剂中的应用研究

自2000年以来,双光子技术开始应用于光生酸剂体系中,并取得了一定的研究进展。双光子技术在光生酸剂中的应用主要有两种情况:一是单分子体系,即光生酸剂分子本身具有较高的双光子吸收截面,可以在双光子激发下产生光酸;二是双分子体系,由具有较高吸收截面的敏化剂分子和光生酸剂分子组成,通过分子间电子转移的方式产生光酸。本文就这一类具有特殊光学性质的有机分子体系的构成及其应用进行了综述,介绍了不同类型的可以利用双光子技术的光生酸剂体系,总结了双光子技术在光生酸剂发展中面临的一些关键问题,展望了双光子技术在光生酸剂中的发展方向。     

Effects of C3-aromatic heterocycles on 1,3,5-triaryl-2-pyrazoline sulfonium salt photoacid generators as light-emitting diode-sensitive cationic photoinitiators

Four 1,5-diphenyl-3-aromatic heterocyclyl-2-pyrazoline-based sulfonium salt photoacid generators (PAGs) with different aromatic heterocycles substituted on C3 atom and dimethyl sulfonium group on C5 atom were synthesized. These PAGs were highly photosensitive in the 365–425 nm light-emitting diode region, and the intramolecular charge transfer from the pyrazoline ring to sulfonium salts induced efficient photolysis and high Φ_H⁺. The heterocycles as well as their substituted positions significantly influenced the energy of the S₂ orbital, which was determined by the electrochemical and absorption properties of the PAGs. The raising of the S₂ orbital energy enlarged the energy gap of S₀–S₂ and S₁–S₂, resulting in blue shift of the absorption spectra and increase in the quantum yield of photoacid generation (Φ_H⁺), respectively. When the energy of excited electrons was higher than that of the S₂ orbital, the transition from S₀ to S₂ (π–π*) occurred before the C-S cleavage on S₁ and the PAGs showed high Φ_H⁺ values (0.52–0.72). The transition from S₀ to S₁ (π–σ*) occurred when the energy of electrons is lower than that of the S₂ orbital, and the PAGs showed low Φ_H⁺ value. The photopolymerization kinetics demonstrated that these PAGs were highly efficient cationic photoinitiators.     

Electroluminescent copolymers based on dihexylfluorene and 2‐{2,6‐bis[2‐(4‐diphenylaminophenyl)vinyl]pyran‐4‐ylidene}malononitrile units

A series of statistical copolymers (poly[(9,9‐di‐n‐hexylfluorene)‐co‐2‐{2,6‐bis‐[2‐(4‐diphenylaminophenyl)vinyl]pyran‐4‐ylidene}malononitrile) were synthesized by the Suzuki coupling reaction. The copolymers showed absorption bands at 379 and 483–489 nm, which were attributed to the oligofluorene segments and the segments containing 2‐[2,6‐bis(2‐{4‐[(4‐bromophenyl)phenylamino]phenyl}vinyl)pyran‐4‐ylidene]malononitrile ( 3 ), respectively. The absorption band around 483–489 nm increased with the feed ratio of 3 . The photoluminescence (PL) spectra of the copolymers showed emission bands at 420 and 573–620 nm. As the feed ratio of 3 increased, the PL emission in the longer wavelength region redshifted, and the intensity increased as well. The electroluminescence (EL) spectrum of the copolymers showed a very weak emission at 420 nm. The PL and EL emission colors redshifted dramatically with the increase in the feed ratio of 3 . The highest occupied molecular orbital and lowest unoccupied molecular orbital levels of the model compound (2‐{2,6‐bis[2‐(4‐diphenylaminophenyl)vinyl]pyran‐4‐ylidene}malononitrile) were determined to be ?5.34 and ?3.14 eV, respectively. It was concluded that energy transfer took place from the oligofluorene blocks to the segments containing 3 and that direct charge trapping occurred in the segments containing 3 during the EL operation. The Commission Internationale de l'Eclairage (CIE) chromaticity coordinates of the copolymer (x = 0.63, y = 0.37) containing 10 mol % 3 were very close to those (x = 0.67, y = 0.33) for National Television System Committee (NTSC) red with a maximum photometric power efficiency of 0.27 cd/A. © 2006 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 44: 3729–3737, 2006     

Bis‐substituted thiophene‐containing oxime sulfonates photoacid generators for cationic polymerization under UV–visible LED irradiation

Three novel types of thiophene‐containing oxime sulfonates with a big π‐conjugated system were reported as non‐ionic photoacid generators. The irradiation of the newly synthesized photoacid generators using near UV–visible light‐emitting diodes (LEDs) (365–475 nm) results in the cleavage of two weak N O bonds in single molecules, which lead to the generation of different sulfonic acids in good quantum and chemical yields. The mechanism for the N O bond cleavage for acid generation was supported by the UV–visible spectra and real‐time ¹H NMR spectra. They are developed as high‐performance photoinitiators without any additives for the cationic polymerization of epoxide and vinyl ether upon exposure to near‐UV and visible LEDs (365–475 nm) at low concentration. In the field of photopolymerization, especially visible light polymerization, it has great potential for application. © 2018 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2018 , 56, 776–782     

D‐π‐a‐type oxime sulfonate photoacid generators for cationic polymerization under UV–visible LED irradiation

Four D‐π‐A‐type nonionic oxime sulfonate photoacid generators (PAGs) have been designed and synthesized for use in light‐emitting diode (LED) excitable cationic photoinitiators, in which N,N‐diphenylamino was used as electron donor with trifluoroacetophenone‐based oxime sulfonates (trifluoromethanoesulfonate and p‐toluenesulfonate) as electron acceptor and substituted fluorene and biphenyl groups as the π‐conjugated systems. PAG‐Ben‐Tol (with biphenyl and p‐toluenesulfonate) and PAG‐Flu‐Tol (with fluorene and p‐toluenesulfonate) showed high quantum yields of photoacid generation (0.33–0.50) and very good thermal stability (over 250 °C). The absorbance spectra of these PAGs were consistent with the emission spectra of commercially gained UV–visible LED light sources. The potential of these PAGs for cationic photoinitiators was tested in two cationic monomer systems. These PAGs needed low light intensity and low concentration for photopolymerization with high conversions of monomer, for example, over 80%, gained at 3.0 mW cm⁻² from 365 to 470 nm LEDs. The photochemical mechanisms of these PAGs are comprehensively investigated and discussed in detail. © 2018 Wiley Periodicals, Inc. J. Polym. Sci., Part A: Polym. Chem. 2018 , 56, 1146–1154     

Near‐infrared spectroscopy investigation of water effects on the cationic photopolymerization of vinyl ether systems

Real‐time Fourier transform near‐infrared spectroscopy has been used to monitor monomer and water concentrations simultaneously during cationic vinyl ether photopolymerization. The use of near‐infrared peak area methods allows the water content to be conveniently and nondestructively determined in any monomer or polymer for which the water peak has previously been calibrated by gravimetric analysis. Although the shape of the absorption band due to absorbed water in a monomer changes with the quantity of water, the integrated intensity from about 5350 to 4900 cm^?1 can be correlated directly to the water concentration, and this region is well removed from the vinyl‐based absorption at approximately 6190 cm^?1. This approach provides a highly informative, dynamic technique for examining the influence of moisture on polymerization reactions. Significant differences have been observed in the effects of absorbed water on the cationic photopolymerization kinetics of vinyl ether monomers with or without an ? OH group. Along with the rapid consumption of water coupled to vinyl ether polymerization, acid‐catalyzed hydrolysis reactions have also been spectroscopically observed, giving rise to the formation of aldehyde groups. © 2004 Wiley Periodicals, Inc. J Polym Sci Part A: Polym Chem 42: 1985–1998, 2004     

Photochemical addition reaction of a polymer-bearing pendant vinyl ether with various thiol compounds

Photochemical addition reaction of the pendant vinyl ether group in the polymer ( P-1 ), which was synthesized by the alternate ring-opening copolymerization of glycidyl vinyl ether with phthalic anhydride, with various thiol compounds such as benzenethiol, phenylmethanethiol, 2-mercaptoacetic acid, ethyl 2-mercaptoacetate, N-acetyl-L -cysteine (AcCys), and 1,4-phenylenedi(methylthiol) was carried out using benzophenone (BP) as the photosensitizer in the THF solution. Each reaction proceeded very smoothly to give the corresponding polymers with high conversion, although the degree of reaction of the pendant vinyl ether group in P-1 was affected by the molar ratio between the thiol compounds and the vinyl ether group, and the amounts of photosensitizer BP added. Furthermore, it was also found that optically active polymer containing pendant N-acetyl-L -cysteine residue was synthesized by the photochemical addition reaction of P-1 with AcCys. The reactions of P-1 with dithiol or bisazide compounds occurred effectively to give gel products in the film state, and it was found that the polymer film containing P-1 and those compounds can be applied as negative-type photoresists with high practical photosensitivity. © 1993 John Wiley & Sons, Inc.