硬X射线光子筛波导效应研究

基于快速傅里叶变换光束传播法,研究了硬X射线光子筛中高高宽比金属结构的波导效应,确定了硬X射线光子筛的物理边界条件,采用角谱法计算了硬X射线光子筛的点扩展函数,并分析了吸收体厚度对聚焦性能的影响.研究结果表明波导效应一定程度上有利于抑制光子筛高级衍射的产生,提高聚焦性能.在同样的特征尺寸下,硬X射线光子筛的空间分辨率优于菲涅尔波带片,其缺点是衍射效率的下降.吸收体厚度的提高有利于提高光子筛的聚焦性能和衍射效率,但是相应的纳米加工工艺难度会增加. 关键词： 菲涅尔波带片 硬X射线光子筛 光束传播法 角谱法     

Feasibility study of hard-x-ray nanofocusing above 20 keV using compound photon sieves

Combining the advantages of photon sieves (PSs) and compound Fresnel zone plates (CZPs), we designed compound photon sieves (CPSs) for hard-x-ray nanofocusing. A CPS consists of an inner PS using the first-order diffraction surrounded by an outer zone plate using the third-order diffraction. A robust digital prolate spheroidal window was used as an apodization window for the inner PS, making CPSs more flexible than CZPs. CPSs can provide not only slightly better resolution compared to CZPs, but also it can significantly suppress the sidelobes, leading to a high signal-to-noise ratio. Further improvement of the high-aspect-ratio metal nanostructure process will allow CPSs to be a promising candidate for hard-x-ray nanofocusing in the high-energy region above 20 keV.     

卢卡斯光子筛的聚焦特性研究

介绍了一种基于卢卡斯数编码设计的轴上四焦点光子筛,其各焦距分布与黄金分割比密切相关.实验上利用相移数字全息验证了设计器件具有轴上四焦点聚焦特性,测量结果表明:轴向焦距和横向焦斑光强分布与理论设计值一致.该振幅型光子筛具有体积小、重量轻、易加工等优点,可应用于X波段显微和生物细胞阵列成像等领域.     

Zone Plates for X-Ray Focusing (Review)

Various zone plates: amplitude, amplitude-phase, and phase ones (including Fresnel and Gabor zone plates, Laue- and Bragg-Fresnel lenses, photon sieves, and aperiodic zone plates), as well as their properties and X-ray focusing possibilities, are described and analyzed.     

Focusing contribution of individual pinholes of a photon sieve:dependence on the order of local ring of underlying traditional Fresnel zone plate

<正>A photon sieve can be composed of a large number of circular pinholes.Each circular pinhole has a contribution to the focusing.For the case of point-to-point imaging,the focusing contribution of an individual circular pinhole can be analytically given.We investigate the dependence of the focusing contribution on the order m of local ring of underlying traditional Fresnel zone plate.In particular,we find that the focusing contribution is simply inversely proportional to the order m.We also present an intuitive explanation. These results are helpful for better understanding of the focusing property of photon sieves.     

Toward two-dimensional nanometer resolution hard X-ray differential-interference-contrast imaging using modified photon sieves

In this Letter, we report a significant step forward in the design of single-optical-element optics for two-dimensional (2D) hard X-ray differential-interference-contrast (DIC) imaging based on modified photon sieves (MPSs). MPSs were obtained by a modified optic, i.e., combining two overlaid binary gratings and a photon sieve through two logical XOR operations. The superior performance of MPSs was demonstrated. Compared to Fresnel zone plates-based DIC diffractive optical elements (DOEs), which help to improve contrast only in one direction, MPSs can provide better resolution and 2D DIC imaging. Compared to normal photon sieves, MPSs are capable of imaging at a significantly higher image contrast. We anticipate that MPSs can provide a complementary and versatile high-resolution nondestructive imaging tool for ultra-large-scale integrated circuits at 45 nm node and below.     

Design and application of phase photon sieve

The imaging principle of Fresnel zone plate and photon sieve were analyzed in this paper. The design and fabrication of phase photon sieve were discussed. The feasibility of using phase photon sieve to realize nano-lithography was analyzed, a novel lithography experiment system based on phase photon sieve was presented, which not only has higher resolution and image contrast than the Fresnel zone plate lithography but also have higher diffractive efficiency than the amplitude photon sieve lithography.     

Wet-etched diffractive lenses for hard X-rays

A method for the fabrication of linear transmission Fresnel zone plates for X-rays in the 8-15 keV photon energy range is presented. The diffractive elements are generated by electron-beam lithography and chemical wet etching of (110)-oriented silicon membrane substrates. Diffractive structures with aspect ratios of more than 30 for 300 nm-wide structures were obtained. The diffraction efficiency of such a lens was measured for 13.3 keV radiation to be 20%.     

Single order soft X-ray diffraction with quasi-random radius pinhole array spectroscopic photon sieves

A novel single order diffraction grating in the soft X-ray region, called quasi-random radius pinhole array spectro- scopic photon sieves （QRSPS）, is proposed in this paper. This new grating is composed of pinholes on a substrate, whose radii are quasi-random, while their centers are regular. Analysis proves that its transmittance function across the grating bar is similar to that of sinusoidal transmission gratings. Simulation results show that the QRSPS can suppress higher-order diffraction effectively. And the QRSPS would still retain its characteristic of single order diffraction when we take the effect of X-ray penetration into account. These properties indicate that the QRSPS can be used in the soft X-ray spectra measurement.     

一种新型透射式自聚焦光栅的设计及理论研究

结合普通透射光栅的分光特性和菲涅耳波带片的聚焦特性,提出一种应用于软X射线波段的新型透射式自聚焦光栅。根据菲涅耳衍射理论,对其衍射特性进行理论推导,证明该新型光栅存在一个与光栅平面垂直的焦平面,不同波长的光波聚焦于该焦平面的不同位置。在焦平面上,焦点位置随光子能量的变化是线性的,即能实现光子能量的线性测量。通过解析推导,得到在沿着焦平面和垂直于焦平面两个方向上光斑的展宽模式,发现该新型光栅在沿着焦平面的光斑展宽模式不同于普通光栅。根据基尔霍夫衍射公式,设置实用化参数,对其衍射模式进行了详细的数值模拟研究,并讨论了相应的测谱范围和谱分辨率。     

A super-resolution Fresnel zone plate and photon sieve

Realizing a smaller or sharper diffractive center spot is a valuable research aim in soft X-ray focus and other related research applications. Fresnel zone plates (FZP) and photon sieves (PS) are often used to focus the X-rays or other wavelength light at present. Here, we show that combination of a super-resolution phase mask (SPM) and an FZP (or PS) as one diffractive optical element can realize a smaller or sharper diffractive center spot without significantly increasing the fabrication difficulty. All these diffractive phase elements can be applied to beam shaping, mask-less lithography, energy congregation in high power lasers, soft X-rays focus, and any other field that requires a smaller or sharper diffractive center spot.     

准随机点阵二值化Gabor波带片聚焦特性的数值计算

 Fresnel波带片有多个焦点,作为单色器波长选择元件使用时会受到高级衍射的影响。而Gabor波带片只有一个焦点,有更好的聚焦特性,但制作难度较大,准随机点阵二值化Gabor波带片概念的提出则解决了这个问题。介绍了准随机点阵二值化Gabor波带片的设计,并利用优化的程序分别对Fresnel波带片和准随机点阵二值化Gabor波带片的聚焦特性进行了模拟计算,通过对计算结果进行分析比较,发现准随机点阵二值化Gabor波带片具有抑制高阶衍射的特性。     

Phase zone photon sieve

A novel diffractive optical element, named phase zone photon sieve (PZPS), is presented. There are three kinds of phase plates in PZPSs: PZPS1, PZPS2, and PZPS3. Each of the PZPSs has its own structure and is made on quartz substrate by etching. The three PZPSs have stronger diffraction peak intensity than a photon sieve (PS) when the margin pinhole and zone line width are kept the same. The PZPS3 can produce a smaller central diffractive spot than the ordinary PS with the same number of zones on the Fresnel zone plate. We have given the design method for and the simulation of PZPS and PS. PZPS has potential applications in optical maskless lithography.     

Lacunar fractal photon sieves

We present a new family of diffractive lenses whose structure is based on the combination of two concepts: photon sieve and fractal zone plates with variable lacunarity. The focusing properties of different members of this family are examined. It is shown that the sieves provide a smoothing effect on the higher order foci of a conventional lacunar fractal zone plate. However, the characteristic self-similar axial response of the fractal zone plates is always preserved.     

Distinguishing between Fraunhofer and Fresnel diffraction by the Young's experiment

Theoretical considerations, simulations and experiments have been carried out to distinguish between Fresnel and the Fraunhofer diffraction regarding the formation of interference patterns by a conventional Young's double-pinhole arrangement with variable separation, which is illuminated by a coherent plane wave. We show that the optical path difference introduced by this setup fits the Fresnel's phase difference between the pinholes. Consequently, it is possible to determine the number of Fresnel zones subtended by a circle centered on one of the pinholes and with radius equals to the pinhole separation. Then, we propose a criterion for distinguishing between Fresnel and Fraunhofer diffraction based on this number of Fresnel zones, which is applicable for diffracting apertures with any shape.     

Development of laser deposited multilayer zone plate structures for soft X-ray radiation

As a novel approach, the combination of pulsed laser deposition and focused ion beam was applied to fabricate different types of multilayer zone plate structures for soft X-ray applications. For this purpose, high quality non-periodic ZrO₂/Ti multilayers were deposited by pulsed laser deposition on planar Si substrates and on rotating steel wires with layer thicknesses according to the Fresnel zone plate law. Linear focusing optics were fabricated by cutting slices out of the multilayers by focused ion beam and placing them directly over pinholes within Si₃N₄ substrates. Additionally, it was shown that laser deposition of depth-graded multilayers on a wire is also a promising way for building up multilayer zone plates with point focus. First experiments using a table-top X-ray source based on a laser-induced plasma show that the determined focal length and spatial resolution of the fabricated multilayer Laue lens corresponds to the designed optic.     

高衍射效率衍射望远镜系统的设计/加工及成像性能测试

为提高衍射效率,设计并制作了口径为300mm的衍射成像系统.该系统的物镜是由一块四台阶位相型菲涅尔波带片通过激光直写套刻和Ar离子束物理刻蚀技术在石英玻璃基板上加工而成.测试了衍射物镜的衍射效率,实验结果表明:衍射物镜在波长632.8nm处的衍射效率为66.4%,达到理论值的82%.搭建了衍射成像系统光路,分别采用10μm星点孔与分辨率板,测试了系统的成像性能.实验测得星点像直径为44μm,分辨率板的极限分辨率达到84lp/mm,接近该系统的理论计算值,表明该衍射成像系统具有较好的成像性能.     

大数值孔径光子筛偏振特性研究

根据角谱理论建立不同偏振照明条件下的光子筛矢量衍射模型。在此基础上,对入射光分别为线偏振光、径向偏振光、切向偏振光三种特殊偏振状态下的光子筛聚焦光强分布进行了模拟分析。研究结果表明,对于大数值孔径光子筛,入射光的偏振特性将对光子筛聚焦光强分布产生巨大影响。线偏振光将使聚焦光斑沿偏振方向拉伸,切向偏振光产生的聚焦光斑具有"中空"结构,而径向偏振光所产生的聚焦光斑呈较为规则的圆形,且其焦深优于线偏照明情况。在激光直写及高分辨成像等光子筛典型应用中采用径向偏振照明将进一步提高系统分辨力。     

Diffraction of entangled photon pairs by ultrasonic waves

In this paper, we have presented and established a new theoretical formulation of photon optics based on photon path and Feynman path integral idea. We have used Feynman path integral approach to discuss Fraunhofer, Fresnel diffraction of single photon and entangled photon pairs by ultrasonic wave and obtained the following results: i) quantum state and probability distribution of single photon and entangled photon pairs by Fraunhofer and Fresnel ultrasonic diffraction, ii) oblique incidence Raman-Nath and Bragg diffraction conditions, iii) total correlation state and its probability distribution. Our calculation results are in agreement with the experiment results. Comparing one-photon and two-photon diffraction effects by ultrasonic waves, we have found that two-photon diffraction by ultrasonic waves is also a sub-wavelength diffraction.     

X射线波带片的制作及其应用

波带片的低衍射效率限制其在可见光波段的使用,可是在Ｘ射线波段,波带片是唯一达到衍射极限的光学元件,因而引起人们的极大兴趣。本文介绍了当前国际上Ｘ射线波带片的主要制作方法及其应用,同时回顾了用于Ｘ射线聚焦、成像的光学元件——Ｘ射线菲涅耳波带片及近几年才出现的布拉格－菲涅耳波带片的历史背景、基本概念和主要类型。