基于DMD微光刻的导光板模板的制作方法

提出了一种基于数字微反射镜(DMD)微光刻的导光模板的制作方法.导光板的网点单元图形由DMD输入,经过缩微光学成像系统缩微后,在光刻胶干板上逐单元网点曝光,再经过显影、微电铸得到导光板模板,在PC薄板材上用微纳米压印制成导光板,厚度仅为0.381 mm.采用自行研制的SVGwriting-DMD激光直写系统,图形的最小分辨率为2 μm,DMD微光刻法无需掩膜版,可实现不同形状、大小、微结构的单元网点图形及网点的排布,便于大幅面的导光板模板的制作.     

数字微镜器件(DMD)杂散光特性测试方法及装置

为了获得数字微镜器件(DMD)的真实光学特性,提出了微镜单元杂散光分布测试方法,并搭建实验装置对2×2阵列区域微镜单元的杂散光分布情况进行测试.提出了一种杂散光测试方法,并针对微镜单元尺寸小、配置方式灵活的特点,设计了汇聚光斑大小连续可调的照明系统以及可以对微镜单元清晰成像的成像系统.通过实验得到了2×2阵列区域微镜单...     

Optical design and optimization of light emitting diode automotive head light with digital micromirror device light emitting diode

This research proposes a new method for light emitting diode automotive headlight design with digital micromirror device (DMD). The optical design is advanced because of the following features. First, this optical design controls the angle of light pattern without light masking so as to achieve much higher light efficiency compared with traditional optical design for headlight systems. Second, in view of the tendency that the advanced light emitting diode automobile headlight is designed to be a low beam light module and a high beam light still needs an auxiliary lighting system, the optical system designed in this research, mainly adopting DMD module as high/low beam light switch, can switch on and off both the high and low beam lights. Because DMDs function of accepting a bidimensional image, high/low beam light patterns can be determined by DMD. Third, a light pattern will be created and compensated simultaneously by DMD, which might replace mechanical adaptive front-lighting system in the future because DMD takes advantage of fast response and simultaneous compensation. Fourth, a design using a multiple reflection curved mirror is employed in this research to adjust light energy distribution; therefore, the articulation of the light pattern can be enhanced. For this method, experimental results of light efficiency are up to 85%, which is superior to current products in the market.     

Tailoring light with a digital micromirror device

A digital micromirror device (DMD) is a product of micromechanics. The DMD employs numerous micromirrors as the actuating components to switch small portions of light on and off. During the past few decades, such devices have been widely applied in digital light processing technology. The expanding range of applications makes the DMD increasingly important in various research aspects. Recent advances demonstrate that the DMD is potentially better than the traditional liquid crystal spatial light modulator in speed, spectrum sensitivity, and polarization modulation. These characteristics have been verified in a series of recently reported experiments. This review summarizes the related theory, experimental techniques, and applications for wavefront shaping with DMDs in both statically shaping various spatial modes and dynamically compensating for wavefront distortion caused by the scattering medium.

     

基于三维缺陷检测的DMD数字条纹投影光学系统设计

基于半导体行业中PCB焊膏印刷检测的实际应用,采用0.45 WXGA DMD芯片设计了数字条纹投影光学系统.以LED作为光源,结合透镜阵列照明DMD芯片;同时,为了减小投影三角关系造成的条纹周期不均匀性对检测结果的影响,采用双远心光路结构将DMD生成的条纹成像到待测表面,且适用的最小检测面积为1mm2.光学模拟结果表明,该数字投影系统在被投影表面上的照明均匀性为91%,投射条纹的对比度高于0.8,且条纹周期均匀,为实际应用与后续条纹分析提供了良好保障.     

数字微镜哈达玛光谱仪谱线弯曲的分析与修正

由于数字微镜（digital micro-mirror device, DMD)哈达玛变换光谱仪其成本低,光能利用率高及无运动部件等优势,逐渐成为光谱仪领域的研究重点。研制了一款基于DMD的哈达玛变换光谱仪。为了解决光谱仪谱线弯曲造成的光谱分辨率下降的问题,对基于DMD的哈达玛变换光谱仪中的谱线弯曲所引起的谱带混叠进行了分析。首先,导出了谱带混叠与谱线弯曲的关系式。然后,提出了两个过程来解决谱带混叠,一是通过调整DMD编码条纹,使DMD所编码的谱带最大限度地与标准谱带重合; 二是通过数据处理对谱带混叠进行修正。最后,通过对谱线曲率半径为5.8×104,7.8×104和9.7×104 μm等六种情况下谱带混叠进行了分析与修正,拟合出光谱混叠和修正效果与谱线曲率半径的关系。结果表明： 对于不同程度的谱线弯曲经过这两个过程修正后,分辨率都会改善到接近光学系统的分辨率, 说明这两个过程对修正谱线弯曲具有普适性、并且方法简单、有效。     

Phase aberration compensation of digital holographic microscopy based on least squares surface fitting

Digital holographic microscopy allows the numerical reconstruction of the complex wavefront of samples, especially biological samples such as living cells. In digital holographic microscopy, a microscope objective is introduced to improve the transverse resolution of the sample; however a phase aberration in the object wavefront is also brought along, which will affect the phase distribution of the reconstructed image. We propose here a numerical method to compensate for the phase aberration of thin transparent objects with a single hologram. The least squares surface fitting with points number less than the matrix of the original hologram is performed on the unwrapped phase distribution to remove the unwanted wavefront curvature. The proposed method is demonstrated with the samples of the cicada wings and epidermal cells of garlic, and the experimental results are consistent with that of the double exposure method.     

并行共焦测量中的并行光源技术综述

并行共焦测量技术的核心是将单点共焦测量变成多点同时扫描测量,从而使共焦测量速度显著提高。本文介绍了共焦测量技术原理,综述了用于并行共焦的并行光源技术,分析了这些方法的优点和不足。结合作者近年来的研究成果,重点阐述了基于微透镜阵列和数字微镜器件(DMD)产生并行光源的新方法。分析和研究了DMD的空间光调制机理,最终建立了一种单光源双光路并行像散共焦测量系统。     

Characterisation of light emitting diodes (LEDs) for application in digital holographic microscopy for inspection of micro and nanostructured surfaces

Partial coherent light sources open up prospects for phase noise reduction in digital holographically reconstructed phase distributions by suppressing multiple reflections in the experimental setup. Thus, light emitting diodes (LEDs) are investigated for application in digital holographic microscopy. First, the spectral properties and the resulting coherence length of an LED are characterised. In addition, an analysis of dispersion effects and their influence on the hologram formation is carried out. The coherence length of LEDs in the range of a few micrometers restricts the maximum interference fringe number in off-axis holography for spatial phase shifting. Thus, the application of temporal phase-shifting-based digital holographic reconstruction techniques is compared to spatial phase-shifting-based methods. It is demonstrated that LEDs are applicable for digital holographic microscopy in connection with both spatial and temporal phase-shifting-based techniques for reduction of noise in comparison to a laser-light-based experimental setup.     

Dual-axes differential confocal microscopy with high axial resolution and long working distance

We discover that the slight transverse offset of a point detector results in a shift of the axial intensity response curve in a dual-axes confocal microscopy (DCM). Based on this, we propose a new dual-axes differential confocal microscopy (DDCM) with high axial resolution and long working distance, in which two point detectors are placed symmetrically about the collection axis. And a signal is obtained through the differential subtraction of two signals received simultaneously by the two point detectors. Theoretical analyses and preliminary experiments indicate that DDCM is feasible and suitable for the high precision tracing measurement of microstructures and surface contours.     

一种非连续纳米氧化层自旋阀的显微结构研究

利用高分辨电子显微学方法(HREM)研究了纳米氧化层镜面反射自旋阀多层结构Ta(35nm)Ni80Fe20(2nm)Ir17Mn83(6nm)Co90Fe10(15nm)NOL1Co90Fe10(2nm)Cu(22nm)Co90Fe10(15nm)NOL2Ta(3nm).该自旋阀的巨磁电阻(GMR)效应高达15%,较无此镜面反射纳米氧化层(NOL)的自旋阀提高近1倍,同时交换偏置场亦有所增强.高分辨显微结构分析表明,介于钉扎层与被钉扎层之间的氧化层(NOL1)并未完全氧化,即除氧化过程生成的CoFe氧化物 关键词： 自旋阀 纳米氧化层 高分辨电子显微学 巨磁电阻效应     

基于空间光调制器与CCD的衍射和干涉定量实验

利用空间光调制器与CCD摄像机,取代传统的光刻掩膜板及白屏,构建成新型光衍射与干涉定量实验系统,将PC机软件绘制的狭缝小孔等衍射图案传输至空间光调制器,用CCD接收其远场衍射和干涉图样,再用PC机处理图像,做定量分析.可验证狭缝和圆孔衍射公式;对形状和空间关系复杂的异形孔,也可方便地实现衍射干涉图样的观察存储与测算.     

Matching of light fluxes in the analysis of measurement data with different space resolutions

We investigate the effect of the dimensions of instantaneous visual fields and the time of accumulation of a signal on the magnitude of light fluxes, recorded by means of charge-coupled device (CCD)-receivers, in scanning different kinds of surfaces. We show that, to compare light fluxes, it is necessary to introduce weight coefficients that take into account the time during which an area measured with a high space resolution is in the visual field of instrumentation with a low space resolution. Errors in the determination of light fluxes, when data obtained with a high space resolution are summed up with equal weight coefficients, have been evaluated. Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 67, No. 1, pp. 123–126, January–February, 2000.     

Optical anisotropy and surface morphology of InGaAs lattice-mismatched with GaAs(0 0 1)

We investigated surface morphology and optical anisotropy of strained InGaAs films grown on GaAs(0 0 1) substrate using atomic force microscopy (AFM) and reflectance difference/reflectance anisotropy spectroscopy (RDS/RAS). High temperature (HT)-grown samples were found to have a rippled surface structure, however for films grown using a low temperature (LT) growth technique, the surface morphology was significantly improved, without the ripple structure seen on the HT samples. Furthermore, ex situ RD spectra of LT-grown samples showed notable peaks near the critical energies of band structure originated from bulk electronic transitions.     

Imaging polycrystalline and smoke MgO surfaces with atomic force microscopy: a case study of high resolution image on a polycrystalline oxide

Atomic force microscopy in contact, non-contact and in high resolution modes have been used to image MgO powder samples, obtained at different degree of sintering, starting from Mg(OH)₂ decomposition or obtained in form of smoke. From high resolution AFM images of MgO smoke, the lattice periodicity on regular surfaces has been revealed for the first time, under ambient conditions. The high surface perfection of the microcrystals has been further confirmed by HRTEM analysis. To obtain more information on the local structure of the single faces, in terms of type and distribution of the surface active sites, the adsorption of a simple probe molecule (CO) on such surfaces has been investigated by means of FTIR spectroscopy.     

基于有延展反射面的挡光板的多曲面前照灯的光学设计

挡光板是近代投射式汽车前照灯用于调节近光灯配光性能的重要部件。采用聚焦法调整挡光板拐点的位置可以有效地抑制投射式前照灯近光照射时光型截止线上的色差和梯度问题,具有提高驾驶员视觉舒适度和行车安全指标的功能。采用一种基于有延展反射面的挡光板的多曲面LED前照灯的光学设计,使用NX10.0建立结构模型,LucidShape软件进行仿真,配光屏幕最大照度值为51.9 lx。研究基于有延展反射面的挡光板的光学设计与常规挡光板的光学设计的配光差异,以及两者在吉利汽车2017年提出的近光路照标准下两者数据对比情况。结果表明:具有延展反射面的挡光板可以有效提高配光Ⅲ区各点的基础数值,进一步提高行车时道路前方40 m～50 m处的视觉亮度,利于辨清道路前方及行人情况。     

光栅光阀光学特性分析及其在热敏CTP中的应用

光栅光阀(GLV)是一种衍射MOEMS空间光调制器,利用其对激光束的调制作用,可成功地应用于计算机直接制版(CTP)系统中。提出了简化的光栅光阀光学模型,并根据夫琅和费单缝衍射理论和多光束干涉理论对光栅光阀的光学特性进行了理论分析。介绍了光栅光阀在热敏CTP系统中的应用,分析了光栅光阀光学记录设备的结构和成像原理。得出了基于GLV技术的热敏CTP数字成像过程,为国内印刷企业使用这种热敏成像技术提供了理论依据。     

利用部分相干光和同心角偏差透镜列阵实现二维靶面均匀辐照

提出利用部分相干光通过透镜列阵系统实现靶而的均匀辐照, 透镜列阵能获得边缘陡峭且顶部较平坦的准近场焦斑, 透镜列阵的适当同心度偏差又使各子束的斑纹相互稍微错开, 使干涉斑纹变密, 而入射的激光是空间相干性减少了的部分相干光, 可进一步抑制了透镜列阵系统焦斑的小尺度不均匀性. 使用广义衍射积分理论, 对高斯-谢尔光束通过透镜列阵光学系统的焦斑光强分布进行了详细的二维模拟研究, 比较了完全相干光与部分相干光经过透镜列阵的匀滑效果. 数值模拟表明, 应用同心度偏差和适当离焦时, 可实现焦斑均匀性和能量利用率同时达到最佳的效果.     

Simultaneous imaging of the In and As sublattice on InAs(110)-(1×1) with dynamic scanning force microscopy

Distance-dependent dynamic scanning force microscopy (SFM) measurements of InAs(110)-(1×1) acquired in ultrahigh vacuum at low temperatures are presented. On this surface, the atoms of the As sublattice are lifted by 80 pm with respect to the In sublattice and terminate the surface. Thus, since in most dynamic SFM images only protrusions with the periodicity of one sublattice are observed, these protrusions are correlated with the positions of the As atoms. However, under certain conditions, an additional contrast is visible which can be attributed to an interaction between the foremost tip atoms and the In atoms. Possible contrast mechanisms are discussed in terms of tip–sample distance and tip structure.