An effective method in calibrating nonlinear errors for phase-shifting interferometry

In phase measurement or digital holography for phase-shifting interferometry, the key role is the variation of reference light wave and recover algorithm based on interferograms and reference phase, so the calculation result is directly affected by phase-shift accuracy. However, because of the errors of nonlinear and other random factors, it is difficult to control the actual phase-shifting amount accurately. In this paper, we aim to propose an efficient method for phase-shifting interferometry which does not require accurate initial estimation of phase-shift amounts, only a few pixels with several randomly shifted interferograms are sufficient for accurate extraction of phase information. This method has reduced the dependence of reference phase, and can obtain phase-shifting amount directly without using complex revised algorithm for correcting phase-shifting nonlinear errors.     

一种提高干涉相位识别精度的方法

针对开环相移驱动下的单色光干涉测量,提出一种满足四步法的高精度相位识别的方法。首先选取干涉场中存在适当相位差的两像素点,建立相移驱动单周期内两像素点灰度序列值之间的干涉方程组。运用椭圆拟合获取相应干涉方程组参数,然后通过反算序列相位确定逐点驱动步长或序列相位信息。结合序列相位信息,运用Lagrange抛物插值算法,设计计算满足四步法的4幅干涉图,并计算各像素点的初相位。最后,运用多波长算法计算表面形貌并进行误差分析。实验表明:计算得到的方波多刻线样板的Ra值为0.439 0 m,测量误差为0.23%,此方法降低了对测量条件的硬件与环境要求,满足表面形貌高精度测量的要求。     

基于联合变换相关和相移干涉的图像加密

提出了一种在联合变换相关器结构中引入三步相移干涉和二元置乱技术的图像加密方法.用纯相位空间光调制器同时调制原始图像和两个随机相位掩模,利用三步相移技术分别将图像信息和主密钥加密为全息图,并用CCD在输出面上接收,再利用二元置乱技术置乱图像信息的全息图.在获得置乱密钥和附加密钥的情况下,可以通过一定的算法快速、清晰的重建原始图像.用计算机仿真验证了它的可行性和有效性.     

基于菌紫质薄膜的相移器及其应用

设计了一种基于菌紫质光致各向异性的相移器,并把它用于相移干涉计量。取向随机分布的极性菌紫质分子对线偏振诱导光的选择性吸收导致分子取向分布不均匀,使其呈现宏观的各向异性,这种各向异性与诱导光的偏振特性密切相关,圆偏振光经过各向异性的菌紫质薄膜后,出射光的偏振特性完全由偏振诱导光决定。基于上述原理设计了一种新型的相移器,用琼斯矩阵法推导了基于相移器的相移干涉原理。该相移器在工作过程中不需要移动Mach-Zender干涉仪内部的任何器件,仅需要改变外部控制光路中诱导光的偏振取向就可以控制参考光的相位,有助于提高设备的抗振能力。用最小二乘法对相移干涉结果进行重建,得到了和实际相位一致的结果,验证了相移器的可行性。     

Parallel two-step phase-shifting microscopic interferometry based on a cube beamsplitter

Parallel two-step phase-shifting interferometry for microscopy is presented, and the recording condition for generalized two-step phase-shifting interferometry is discussed. A 45° tilted cube beamsplitter enables to replicate the orthogonally linear polarized object and reference waves into two parallel beams, respectively. As a consequence, two interferograms with quadrature phase shift are obtained along the two beams, and phase reconstructed with an improved algorithm. To reconstruct the phase distribution from the two-step phase-shifting interferograms, a certain recording condition should be satisfied. However, the recording condition has not ever been discussed before. In this paper, the recording condition for the two-step phase-shifting interferometry is derived and that is: the intensity of reference wave should be no less than two times object wave intensity.     

3-D surface profilometry using simultaneous phase-shifting interferometry

Urgent needs for high-speed, non-contact and on-line measurement with high accuracy and repeatability are of great interest for automatic optical inspection (AOI) industries. Therefore, optical phase-shifting interferometry for precision 3-D surface profilometry has become an important metrological method due to its non-contact and high measurement accuracy. Traditional phase-shifting interferometry is very sensitive to vibrations because image acquisition in various phase-shifting sequences could easily introduce measurement errors from environmental influences, such as air disturbance and system structure vibrations. In this paper, we introduce a new simultaneous phase-shifting interferometer for 3-D surface profilometry which employs a single glass plate to generate simultaneous phase-shifted interferograms. Phase reconstruction is performed by using a developed phase-shifting algorithm which uses a three-step phase-shifting method with phase differences of 90°, 180°, and 270° for three interferograms. To verify measurement accuracy and repeatability, the system was employed to measure surface profiles of surface of a flat mirror and set of Mitutoyo gauge blocks. The experiment result shows that the method is proven to be capable of performing one-shot interferometric measurement and minimizing influences from environmental disturbances with measurement repeatability down to 10 nm or less.     

基于倾斜相位的抗振动干涉面形测量

环境振动会在干涉测量过程中产生随机倾斜、移相误差,导致测量精度下降。为了降低环境振动对移相干涉测量的影响,提出了一种基于倾斜相位的抗振动干涉面形测量方法。首先,利用Fourier变换将干涉图变换到频域;然后,利用频域细分操作对峰值坐标进行亚像素精度定位,求解出振动倾斜平面;最后,利用最小二乘法计算出待测面的相位分布。实验结果表明,本方法与同步移相法的复原结果具有高度一致性,波面峰谷值和均方根值的偏差较小;且本方法无需对硬件进行改动,可为振动环境下的移相干涉测量提供一种低成本、高精度的解决方案。     

Evaluation of spectral phase in spectrally resolved white-light interferometry: Comparative study of single-frame techniques

Spectral phase in a white-light interferogram contains information about the absolute optical path difference (OPD) in the interferometer. Evaluation of spectral phase is therefore important in applications such as profilometry with white light. In spectrally resolved white-light interferometry (SRWLI) the white-light interferogram is spectrally decomposed by a spectrometer in order to determine this phase. Several single-frame techniques in SRWLI have been proposed for the evaluation of the phase including Fourier transform, Hilbert transform, spatial phase shifting, windowed Fourier transform and wavelet transform. In this paper we present a comparative study of these techniques in this application in relation to the temporal phase-shifting technique which is a multi- frame method. Further, we also propose a modified method to remove the influence of source spectrum modulation in Hilbert transform procedure.     

Four-step spatial phase-shifting shearing interferometry from moiré configuration by triple gratings

A spatial phase-shifting shearing interferometry is presented in this paper. The whole optical configuration is simple and consists of three Ronchi gratings. Four phase-shifted shearing interferograms can be obtained simultaneously. The explicit intensity distributions of shearing interferograms are given and a corresponding four-step spatial phase-shifting algorithm is proposed to extract phase information from the new interferometry. This spatial phase-shifting configuration is applied to extract phase projection of a propane flame and a mathematical error analysis is presented.     

两步广义相移干涉术的光学实验验证

提出了一种基于两步广义相移干涉术的波前再现技术以及基于衍射场统计特性的未知相移值提取算法,并且进行了光学实验验证.该方法中可仅利用两幅干涉图及一次不需精确预设的未知相移,参照物光光强和参考光光强,即可通过计算提取真实的相移量,进而恢复出物波波前复振幅,而无需借助傅里叶谱分析或数字滤波等操作.在光学实验中,对借助于空间光调制器（SLM）的间接输入和三维漫反射物体直接输入两种情况进行了详细地研究,得到的光学实验结果验证了所提方案的有效性和可行性. 关键词： 信息光学 相移干涉术 波前再现 数字图像处理     

相移数字全息子图拼接研究

 将全息图拼接技术应用到相移数字全息术中,改善再现像的质量。用全息图强度相关原理进行全息图拼接,再通过标准四步算法对拼接后的全息图进行运算,恢复原始物光。作为对比,对没有拼接的全息图进行了同样的操作。计算机模拟实验证明该全息图拼接技术可明显提高再现像的质量。同时,通过对光学实验获得的全息图进行零填充和拼接对比研究证明,前者只能提高系统成像的细节显示能力,后者能够提高再现像的分辨率和视场大小。     

移相器微位移旋转误差的分析及测试

以压电陶瓷(PZT)微位移器为主要研究对象, 引入一种处理静态干涉图的新方法--虚光栅移相叠栅条纹法,设计实验对一台实际使用的移相器微位移旋转误差进行测试研究,对其引起的波面旋转情况进行了定量的计算分析,并给出测试结果.用虚光栅移相叠栅条纹法处理实验中加有载频的干涉图时,不需要使用任何移相器件,可以进行动态位相的检测,整个移相过程用计算机进行控制,避免了引入额外的移相误差.     

Punctuated quadrature phase-shifting interferometry

We describe a method and algorithm for reducing the sensitivity of phase-shifting interferometry to external vibrations. Using an interline-transfer camera, a shutter, and a fast phase shifter, we acquire a series of paired interferograms in quadrature, with the pairs spaced to maximize residual phase-error cancellation. The rapid acquisition of quadrature pairs significantly improves resistance of interferometry to low-frequency vibrations.     

宽谱段相移干涉多自由度采集系统设计与分析

为了满足现代工业领域中对复杂结构产品的高精度多自由度测量需求,构建了多自由度联合采集系统模型。建立了宽谱段相移干涉多自由度采集系统模型,并对系统中的光学部件进行了设计;以相移干涉技术为基础,提出了多自由度联合测量算法,并分析验证了所设计系统的合理性;根据仪器的物理和光学参数对算法进行了具体实现,基于Simulink的仿真试验结果表明:深度测量精度在μm级,测量范围在m级;光谱检测分辨率在nm级,测量带宽300 nm,覆盖整个可见光区域,光谱准确度为0.2 nm,误差率小于0.1%。该系统满足了现代工业精密测量中高深度分辨率、宽深度测量范围、高光谱准确度、高光谱分辨率的要求。     

基于飞秒光梳多路同步锁相的多波长干涉实时绝对测距及其非模糊度量程分析

飞秒光梳被广泛用于时间频率技术和精密光谱测量,由其时频特性所衍生的绝对测距技术以可溯源、大尺寸、高精度等优点有望成为未来长度计量的最重要手段.本文提出了一种基于飞秒光梳多路同步锁相的多波长干涉实时绝对测距方法,使多个连续波激光器通过光学锁相环技术同步锁定到飞秒光梳梳模上,通过多路同步相位测量和小数重合算法最终实现绝对距离测量.所提测量方法不仅能保留传统激光干涉测距的高分辨力和精度,而且可溯源至时间频率基准,对高精度长度测量、尤其是对物理复现“米”的定义具有重要计量意义.测距实验证明,四波长干涉测距的非模糊度量程达到44.6 mm,折射率波动导致非模糊度量程变化为纳米量级;多波长干涉测距的非模糊度量程也受制于空气折射率的测量误差,多波长干涉绝对测距的非模糊度量程在实验室环境下可达数米、甚至几十米,并通过2米线性位移实验证明了多波长绝对测距的大量程和线性测量性能.     

载波相移云纹干涉法研究

通过对载波技术研究,提出载波相移云纹干涉法,采用该方法可以实现云纹干涉条纹信息的自动识别,给出了灵敏度和载波频率的定量关系式;同时,对载波数字相移云纹干涉法测试的精度进行了系统分析。     

Spectrally resolved phase-shifting interferometry for accurate group-velocity dispersion measurements

We report an accurate method to measure the group-velocity dispersion (GVD) of transparent materials by use of spectrally resolved phase-shifting interferometry. The GVD of silica glass slide measured using an eight-step phase-shifting algorithm agrees well with that calculated using the Sellmeier dispersion equation over the entire visible wavelength region, with a rms error of < or =0.0036 microm(-2), better than that of other measurement methods reported so far.     

Dual-channel phase-shifting interferometry for microscopy with second wavelength assistance

Dual-channel phase-shifting interferometry for simultaneous phase microscopy is presented. Red and blue light beams are used for microscope illumination. A 45 tilted beamsplitter replicates the object and reference waves in red light together with the object wave in blue light into two parallel beams. The two resulting quadrature phase-shifting interferograms in red light and the object waves in blue light are generated in the two channels. The two interferograms are recorded simultaneously by a color charge-coupled device (CCD) camera, and can be separated via RGB components of the recorded color patterns without crosstalk. As a result, the phase of tested specimen can be retrieved. The feasibility of the proposed method is demonstrated by test performed on a microscopic specimen.     

Generalized phase-shifting algorithm for dynamic phase measurement in electron-wave interferometry

A generalized phase-shifting algorithm is implemented in the electron-wave interferometry with a transmission electron microscope, based on simultaneous measurement of the initial phases of the interferograms. The initial phase of each interferogram that has inherent linear carrier fringes is calculated using the Fourier co-efiicients of the interferogram itself corresponding to the carrier-frequency. Taking advantage of this phase-shifting method in both spatial resolution and precision, the phase distribution of a biological weak phase object is successfully measured. This promises to be one of the most spectacular application fields for this new technology.     

Removal of residual images in parallel phase-shifting digital holography

Parallel phase-shifting digital holography (PPSDH) is a technique of single-shot phase-shifting digital holography. We found that there are two problems with this technique. (1) Some extraneous noises caused by the intensity unevenness of the reference wave become slightly superimposed on the object image. (2) The conjugate image cannot be completely removed. This is because the object wave causes the phase-shift error by illuminating an image sensor with a large incident angle. To solve these problems, we propose an algorithm for removing residual 0th-order diffraction and conjugate images in PPSDH. In the proposed algorithm, we modified phase-shifting interferometry in order to work through the unevenness of the intensity distribution and applied the Fourier transform technique to PPSDH to remove the residual conjugate image. The effectiveness of the proposed algorithm was experimentally verified.