半导体氮化铟(InN)的电学性质

本文总结了近年来半导体InN薄膜材料(主要是六方纤锌矿结构的InN及异质结构)的电学性质研究进展,重点内容为InN的载流子浓度和迁移率,造成InN中高电子浓度现象的施主分析、载流子输运特性及表面、界面特性等。同时也涉及了部分立方闪锌矿结构InN的电学特性和InN在器件(主要是高电子迁移率晶体管器件)上的潜在应用。     

氮气流量对磁控溅射InN薄膜特性的影响

采用射频磁控溅射法在蓝宝石衬底上制备了InN薄膜. 研究了N2流量对InN薄膜的晶体结构、表面形貌、光学和电学特性的影响. X射线衍射(XRD)测试结果显示,InN呈六方纤锌矿结构,具有明显(002)择优取向;SEM与AFM图像显示InN薄膜均匀致密,低N2流量下随流量增加,表面逐渐趋于光滑平整,过高的N2流量使薄膜生长方式发生改变;通过检测薄膜吸收特性,利用线性外推法计算禁带宽度为1.81~1.96 eV;电学测试结果表明,制备的薄膜样品均呈现n型导电特性,且迁移率较低,最大为12.2 cm2/v∙s;载流子浓度较高,保持在1021 cm-3数量级;电阻率较小,范围是0.202~0.33 mΩ∙cm.     

应变Si/(001)S1－xGex本征载流子浓度模型

利用应变Si CMOS技术提高载流子迁移率是当前研究发展的重点,本征载流子浓度是应变Si材料的重要物理参数,也是决定应变Si器件电学特性的重要参量.本文基于K.P理论框架,从分析应变Si/（001）Si_1-xGe_x材料能带结构出发,详细推导建立了300K时与Ge组分（x）相关的本征载流子浓度模型.该数据量化模型可为Si基应变器件物理的理解及器件的研究设计提供有价值的参考. 关键词： 应变Si 有效态密度 本征载流子浓度     

采用Li3Nn型掺杂层作为电子注入层的OLED器件研究

相对于传统的无机半导体材料,有机半导体材料特别是有机电子传输材料的载流子浓度和迁移率较低,从而影响了有机发光器件的亮度、效率等性能.为了提高有机发光器件器件性能必须增强电子注入和传输能力,对有机电子传输材料进行n型电学掺杂能够有效地提高电子的注入和传输能力.本文利用Li3N作为n型掺杂剂,以掺杂层Alq3:Li3N作为...     

迁移率对单层有机发光器件中电场与载流子分布的影响

有机发光器件的宏观特性与有机层中的电场和载流子浓度分布密切相关。建立的有机电致发光器件模型是由两个金属电极中间夹一层有机发光薄膜材料组成的单层器件,金属与有机发光层之间为欧姆接触。模型以载流子运动的扩散-漂移理论为基础,利用数值方法研究了有机发光层中双极载流子注入时的电势、电场、载流子浓度和复合密度分布。分析结果表明:当两种载流子的迁移率相同时,电场强度、载流子浓度、复合密度的分布呈对称形式。而当电子和空穴的迁移率μn和μp相差比较大时,高迁移率的载流子不仅仅分布在注入端附近而且还有一小部分能够传输到另一端,而低迁移率的载流子只分布在其注入端附近;当μn、μp的大小相差不大时,载流子传输情况就介于两者之间。当μn/μp的比值变化时,电场强度的极大值向载流子迁移率小的注入端偏移。     

温度对单层有机电致发光器件电流平衡因子的影响（英文）

考虑有机薄膜中的陷阱,建立单层双极性有机发光器件的电学模型,研究了在不同的载流子迁移率和注入势垒条件下,器件工作温度对器件电流平衡因子的影响.研究表明:在低温工作区,当电子注入势垒和空穴注入势垒相等时,器件的电流平衡因子最大;在高温工作区,当电子迁移率大于空穴迁移率时,若电子注入势垒大于空穴注入势垒,器件的电流平衡因子最大,而当电子迁移率小于空穴迁移率时,情况恰好相反;当电子迁移率等于空穴迁移率时,电子注入势垒和空穴注入势垒相等时器件的电流平衡因子最大.此外,器件的电流平衡因子随着器件工作温度的升高而逐渐增大.可对设计高性能有机发光器件提供一定的理论参考.     

边修饰GeS2纳米带的电子特性及调控效应

GeS₂单层已成功制备,为了进一步扩展其应用范围以及发现新的物理特性,我们构建扶手椅型GeS₂纳米带(AGeS₂NR)模型,并采用不同浓度的H或O原子进行边缘修饰,且对其结构稳定性、电子特性、载流子迁移率以及物理场调控效应进行深入研究.研究表明边修饰纳米带具有良好的能量与热稳定性.裸边纳米带是无磁半导体,而边修饰能改变AGeS₂NR的带隙,使其成为宽带隙或窄带隙半导体,或金属,这与边缘态消除或部分消除或产生杂化能带有关,所以边缘修饰调控扩展了纳米带在电子器件及光学器件领域的应用范围.此外,计算发现载流子迁移率对边缘修饰十分敏感,可以调节纳米带载流子迁移率(电子、空穴)的差异达到1个数量级,同时产生载流子极化达到1个数量级.研究还表明半导体性纳米带在较大的应变范围内具有保持电子相不变的鲁棒性,对于保持相关器件电子输运的稳定性是有益的.绝大部分半导体性纳米带在较高的外电场作用下,都具有保持半导体特性不变的稳定性,但带隙随电场增大而明显变小.总之,本研究为理解GeS₂纳米带特性并研发...     

光照下高电子迁移率晶体管特性分析

以光照下耗尽型AlGaAs/GaAs高电子迁移率晶体管为例,考虑了光生载流子对半导体内电荷密度的影响和光压效应,采用器件的电荷控制模型,分析了光照对器件夹断电压、二维电子气浓度、I-V特性以及跨导的影响.与无光照的情况相比较,夹断电压变小,二维电子气浓度 增大,从而提高了器件的电流增益,增大了跨导.     

利用空间电荷限制电流方法确定三(8-羟基喹啉)铝的电子迁移率特性初步研究

材料的迁移率是其关键电学特性之一.有机材料迁移率的研究对于有机电致发光器件、 有机太阳电池、有机薄膜场效应晶体管性能的提高有重要的意义. 应用简单易行的空间电荷限制电流方法,对基于三(8-羟基喹啉)铝(Alq₃) 的四种单载流子器件电流密度-电压曲线特性进行研究, 根据空间电荷限制电流模型,拟合出Alq₃材料在四种器件中的零场电子迁移率和电场依赖因子,并且给出Alq₃电子迁移率随外加偏压的变化趋势. 实验结果表明,顶电极铝蒸镀到缓冲层氟化锂(1 nm)和Alq₃ (100 nm)的表面后, 可以明显改善Alq₃的零场迁移率和电场依赖因子. 认为产生这种现象的原因是氟化锂可以使铝和Alq₃发生络合反应, 形成Li⁺¹Alq^-1粒子,形成良好的欧姆接触,使得电子的注入效率大大提高.     

单层MoSe2单晶的光学及电学性能探究

采用Au箔作为生长衬底,通过化学气相沉积法制备了高质量的单层MoSe₂单晶.通过光学显微镜、扫描电子显微镜、扫描透射电子显微镜等对其形貌和结构进行了表征,研究了单层MoSe₂单晶的光学及电学特性.结果表明：单层MoSe₂具有非线性光学特性,并具有直接带隙结构(带隙宽度约为1.56 eV)及较好的光致发光特性.当其作为场效应晶体管器件的半导体沟道材料时,器件的载流子迁移率为1.6 cm²/(V·s),开关比约为10⁴.     

Temperature dependence of infrared reflectance spectra of InN

To investigate both the optical and electrical properties of InN, we have measured the infrared reflectance spectra of InN thin films and performed the fitting analyses of the infrared spectra to obtain not only phonon frequencies and the damping factors but also the carrier concentration of InN. In this paper, we extend the aim of those analyses to the electron mobility and demonstrate that the temperature dependence of the electron mobility can be discussed using the infrared reflectance spectra analyses.     

六方InN薄膜的载流子输运特性研究

关键词：     

Growth and Characterization of InN Thin Films on Sapphire by MOCVD

Indium nitride thin films are grown on sapphire substrates by metal-organic chemical vapour deposition （MOCVD） By employing three-step layer buffers, the mirror-like layers on two-inch sapphire wafers have been obtained. The structural, optical and electrical characteristics of InN are investigated by x-ray diffraction, scanning electron microscopy, atomic force microscopy, photoluminescence and infrared optical absorption. The photoluminescence and the absorption studies of the materials reveal a marked energy bandgap structure around 0.70eV at room temperature. The room-temperature Hall mobility and carrier concentration of the film are typically 939 cm^2 /Vs, and 3.9 × 1018cm^-3, respectively.     

氢退火对LPCVD生长的ZnO薄膜光学和电学性能的影响

采用低压化学气相沉积(LPCVD)在玻璃衬底上制备了B掺杂ZnO(BZO)薄膜,研究了氢气气氛退火对BZO薄膜光学性能和电学性能的影响。结果表明:在氢气气氛下退火后,BZO薄膜的物相结构和透光率基本无变化,但BZO薄膜的导电能力却明显提高。Hall测试结果表明:在氢气下退火时载流子浓度基本保持不变,但迁移率却明显提高。实验结果可为进一步提高BZO薄膜的光学电学综合性能提供借鉴。     

The growth temperatures dependence of optical and electrical properties of InN films

InN films grown on sapphire at different substrate temperatures from 550°C to 700°C by metalorganic chemical vapor deposition were investigated. The low-temperature GaN nucleation layer with high-temperature annealing (1100°C) was used as a buffer for main InN layer growth. X-ray diffraction and Raman scattering measurements reveal that the quality of InN films can be improved by increasing the growth temperature to 600°C. Further high substrate temperatures may promote the thermal decomposition of InN films and result in poor crystallinity and surface morphology. The photoluminescence and Hall measurements were employed to characterize the optical and electrical properties of InN films, which also indicates strong growth temperature dependence. The InN films grown at temperature of 600°C show not only a high mobility with low carrier concentration, but also a strong infrared emission band located around 0.7 eV. For a 600 nm thick InN film grown at 600°C, the Hall mobility achieves up to 938 cm²/Vs with electron concentration of 3.9 × 10¹⁸ cm⁻³. Supported by the National Basic Research Program of China (Grant No. 2006CB6049), the National Natural Science Foundation of China (Grant Nos. 6039072, 60476030 and 60421003), the Great Fund of the Ministry of Education of China (Grant No. 10416), the Specialized Research Fund for the Doctoral Program of Higher Education of China (Grant No. 20050284004), and the Natural Science Foundation of Jiangsu Province of China (Grant Nos. BK2005210 and BK2006126)     

InN的光致发光特性研究

研究了利用金属有机化学气相淀积生长的氮化铟薄膜的光致发光特性. 由于氮化铟本身具有很高的背景载流子浓度, 费米能级在导带之上, 通过能带关系图以及相关公式拟合光致发光图谱可以得到生长的氮化铟的带隙为0.67 eV, 并且可以计算出相应的载流子浓度为n=5.4×10¹⁸ cm^-3, 从而找到了一种联系光致发光谱与载流子浓度两者的方法. 另外通过测量变温条件下氮化铟的发光特性, 研究了发光峰位以及发光强度随温度的变化关系, 发现光致发光强度随温度的升高逐渐降低, 发光峰位随温度的升高只是红移, 并没有出现"S"形的非单调变化, 这种差异可能是由于光致发光谱的半高宽过高导致, 同时也可能与载流子浓度以及内建电场强度有关. 关键词： 氮化铟 金属有机化学气相淀积 光致发光 载流子浓度     

镧掺杂BaSnO3薄膜的电学和光学特性

利用射频磁控溅射法在(LaAlO₃)_0.3(SrAl_0.5Ta_0.5O₃)_0.7 (001)单晶基底上生长了镧掺杂BaSnO₃外延薄膜. 通过Hall效应和热电势测量证实了镧掺杂BaSnO₃薄膜具有n型简并半导体特征, 并且基于载流子浓度和Seebeck系数计算出电子的有效质量为0.31m₀ (m₀为自由电子质量). 镧掺杂BaSnO₃薄膜在可见波段具有良好的透明性(透过率大于73%). 基于介电模型对薄膜的透过率曲线进行拟合, 从拟合结果中不仅得到了薄膜的厚度为781.2 nm, 能带宽度为3.43 eV、 带尾宽度为0.27 eV和复光学介电常数随波长的变化规律, 而且也强力地支持了基于电学参数计算电子有效质量的正确性.     

Effect of carrier concentration of InN on the transport behavior of InN/GaN heterostructure based Schottky junctions

We present the study involving the dependence of carrier concentration of InN films, grown on GaN templates using the plasma assisted molecular beam epitaxy system, on growth temperature. The influence of InN carrier concentration on the electrical transport behavior of InN/GaN heterostructure based Schottky junctions is also discussed. The optical absorption edge of InN film was found to be strongly dependent on carrier concentration, and was described by Kane's k.p model, with non-parabolic dispersion relation for carrier in the conduction band. The position of the Fermi-level in InN films was modulated by the carrier concentration in the InN films. The barrier height of the heterojunctions as estimated from I–V characteristic was also found to be dependent on the carrier concentration of InN.     

厚度对MOCVD生长InN薄膜位错特性与光电性质的影响

研究了金属有机物化学气相沉积法制备的不同厚度InN薄膜的位错特性与光电性质.基于马赛克微晶模型,通过X射线衍射非对称面摇摆曲线测量,拟合出样品刃型位错密度分别为4.2×10¹⁰cm^-2和6.3×10¹⁰cm^-2,并发现样品的微晶扭转角与位错密度随薄膜厚度增加而减小.通过室温霍尔效应测量得到样品载流子浓度分别为9×10¹⁸cm^-3和1.2×10¹⁸cm关键词： 氮化铟 位错 载流子起源 局域态     

High temperature growth of InN on various substrates by plasma-assisted pulsed laser deposition

InN has attracted much attention due to its optical and electrical properties that make it suitable for the fabrication of infrared optical devices and high-speed electronic devices. In this work we report on the structural properties and morphology of InN thin films grown on different substrates by radiofrequency plasma beam assisted pulsed laser deposition. Sapphire and silicon substrates were considered for the growth of these films. The influence of substrate type and growth parameters on the morphology and structural properties of the resulting InN thin films is discussed. The structural analysis of the samples was performed by means of X-ray diffraction. The morphology of the thin films was investigated through atomic force microscopy. Although growth of InN from a metallic In target using nitrogen radiofrequency plasma assisted pulsed laser deposition was achieved for all the samples, growth conditions were found to play an important role on the crystal quality of the resulting thin films.