Preparation and optical properties of composite thin films with embedded InP nanoparticles

InP nanoparticles embedded in SiO₂ thin films were prepared by radio-frequency magnetron co-sputtering. We analyzed the structure and growth behavior of the composite films under different preparation conditions. X-ray diffraction and Raman spectroscopy analyses indicate that InP nanoparticles have a polycrystalline structure. The average size of InP nanoparticles is in the range of 3–10 nm. The broadening and red shift of the Raman peaks were observed, which can be interpreted by the phonon confinement model. Optical transmission spectra indicate that the optical absorption edges of the films can be modulated in the visible light range. The marked blue shift of the absorption edge with respect to that of bulk InP is explained by the quantum confinement effect. The theoretical values of the blue shift predicted by the effective mass approximation model are different from the experimental results for the InP-SiO₂ system. Analyses indicate that the exciton effective mass of the InP nanoparticles is not constant and is inverse relative to the particles radius, which may be the main reason that results in the discrepancy between the theoretical and the experimental result. We discussed the possible transition of the direct band gap to the indirect band gap for InP nanoparticles embedded in SiO₂ thin films.     

Preparation and optical absorption of InAs nanocrystal-embedded thin films

InAs-SiO₂ nanocrystal-embedded films were prepared by using radio-frequency cosputtering. The growth behavior of InAs in the composite film has been studied by a transmission electron microscope. It has been found that with the increasing substrate temperature, InAs in the matrix undergoes transitions from an initial dispersed phase to a fractal structure of the lnAs phase, then to nucleation, and finally to grain growth. Large blueshift of the optical absorption edges of the films was observed from the optical absorption spectra. The relationship between the blueshift of optical absorption edge and the average size of the nanocrystals has been explained by the effective-mass approximation.     

Preparation of BST nanocrystals embedded in SiO<Subscript>2</Subscript> film by magnetron sputtering for nonvolatile memory applications

We develop a method that uses magnetron sputtering to fabricate barium strontium titanate (BST) nanocrystals embedded in dielectric SiO2 films.Transmission electron microscope images show that the BST nanocrystals have an average diameter of 5 nm and are well distributed in the SiO2 film.In addition,we also analyze the BST nanocrystals composition deviation during the sputtering process by electron dispersive spectroscopy.     

射频磁控溅射制备SiO_2薄膜及性能表征

采用射频磁控溅射技术,制备4种不同溅射时间的SiO2薄膜.用XRD、PL、FTIR、UV-Vis等对薄膜的微结构、发光、红外吸收以及透、反射进行表征.结果表明:SiO2薄膜仍呈四方晶体结构,平均晶粒尺寸在17.39～19.92nm之间;在430nm附近出现了发光峰,在1049～1022cm-1之间出现了明显的红外吸收峰,且随着溅射时间的增加发生红移;在可见光范围内平均透射率大于85%.     

含纳米硅粒SiO2薄膜的光致发光

采用RF磁控溅射技术制备含纳米硅的SiO2薄膜.通过对Si-SiO2复合靶的比分进行调节控制,并在不同的温度下进行高温退火得到不同粒径的纳米硅.利用XRD对样品进行分析得出纳米硅的平均粒径;对样品测量光致发光谱,其发光峰分别位于361 nm和430 nm,比较发现光致发光的峰位随比分的改变有微小的蓝移.文中对发光机理进行初步讨论.     

化学腐蚀法制备发光硅纳米颗粒

用硝酸和氢氟酸的混合酸液腐蚀普通硅粉,经过超声空化作用,分别在去离子水、无水乙醇中制备出硅纳米晶颗粒.硅纳米颗粒的平均粒径约为2 nm,它们或单独存在,或包裹于非晶态物质中.在320 nm的光激发下,硅纳米颗粒的悬浮液在390 nm处呈现一明显的紫外发光峰,理论分析证明该发光峰与硅量子点的量子限制效应有关.     

Uniform fabrication of Ge nanocrystals embedded into SiO2 film via neutro transmutation doping

Nanocrystalline74Ge embedded SiO2 films were prepared by employing ion implantation and neutron transmutation doping methods.Transmission electron microscopy, energy dispersive x-ray spectroscopy, and photoluminescence of the obtained samples were measured. The existence of As dopants transmuted from74 Ge is significant to guarantee the uniformity and higher volume density of Ge nanocrystals by tuning the system’s crystallinity and activating mass transfer process. It was observed that the photoluminescence intensity of Ge nanocrystals increased first then decreased with the increase of arsenic concentration. The optimized fluence of neutron transmutation doping was found to be5.5 1017 cm 2to achieve maximum photoluminescence emission in Ge embedded SiO2 film. This work opens a route in the three-dimensional nanofabrication of uniform Ge nanocrystals.     

溅射功率对氧化铝薄膜结构和光学性能的影响

采用射频反应磁控溅射法,在K9双面抛光玻璃基底上制备了一系列不同溅射功率的Al2O3薄膜,并对部分薄膜进行退火处理.利用X线衍射法对Al2O3薄膜退火前后的晶体结构进行分析,采用椭圆偏振光谱仪对薄膜的厚度、折射率和消光系数进行测试和拟合.实验结果表明:测射功率在100~300 W时,沉积的Al2O3薄膜退火前后均为非晶态;薄膜在可见光范围内具有良好的透光性能,透射率接近90%,为透明膜;薄膜的沉积速率随溅射功率的增大而增大;薄膜在可见光波段的折射率n随波长的增大而减小,平均值随溅射功率的增大呈现出先增大后减小的变化趋势;薄膜消光系数k的平均值亦随溅射功率的增大呈现先增大后减小的变化趋势.     

a—Si／SiO2多量子阱材料光致发光特性

近年来硅发光已成为理论和材料研究的一个新热点,ａ－Ｓｉ／ＳｉＯ２多量子阱材料就是人们研制出的一种新的量子结构。有关理论表明,ａ－Ｓｉ／ＳｉＯ２多量子阱中硅层的电子和空穴都受到很强的量子限制效应,硅层能带有可能由体硅的间接带隙转变为准直接带隙,该量子阱材料有可能具有较强的发光特性。     

中频反应磁控溅射制备具有光致亲水性TiO2薄膜

采用中频反应磁控溅射方法在玻璃表面制备了TiO2薄膜,为使薄膜获得理想的化学配比和较高的沉积速率,使用了等离子体发射光谱监控法(Plasma Emission Monitor,PEM)对溅射过程进行控制。对部分样品进行了退火处理。利用台阶仪测膜厚,X射线衍射(XRD)对薄膜的沉积速率及结构进行测试分析,并对部分沉积态和经过热处理的薄膜样品进行了透光性测试和光照实验。研究了温度,PEM工作点等不同工艺条件对薄膜光致亲水性等性能的影响。部分薄膜经过1h左右的紫外光照射,得到了很好的亲水性效果,其表面的水接触角达到了小于1°的水平。     

高温超导薄膜射频溅射靶的简便制作

本文报导了一个极其简便的高温超导薄膜溅射靶的制作方法。并制得可控制名义组分的Bi-Sr-Ca-Cu-O的超导薄膜,其T_(CM)温度为84K,零电阻温度为60.3K。     

硼碳氮薄膜的制备及其光透过性质研究

利用射频磁控溅射方法以不同的氮气分压比（1/10-2/3）在玻璃衬底上制备出一组硼碳氮薄膜.傅里叶变换红外光谱测量发现样品的组成原子之间均实现了原子级化合.氮气分压比对薄膜的组分和透过率有很大影响,其通过改变薄膜组分而影响透过率,并且碳原子数小的样品具有较高的透过率.     

射频磁控溅射沉积SiO2膜的研究

研究以射频磁控溅射法在Ｓｉ衬底上沉积ＳｉＯ２膜．这一方法避免了高温氧化法对器件性能的损害．在结构和物理性能上对ＳｉＯ２进行了多方面的测试和分析．结果表明，ＳｉＯ２膜具有：１）微晶结构，结构致密、表面均匀、无针孔等．２）优良的物理性能，腐蚀速率（在Ｐ腐蚀液中）０．２０～０．２４ｎｍ／ｓ，击穿场强２．６×１０７～４．４×１０７Ｖ／ｃｍ．可以得出结论：射频磁控溅射法沉积的ＳｉＯ２膜与热氧化法沉积的ＳｉＯ２膜具有相同的物理性质．     

DC反应磁控溅射制备VO2薄膜及XPS分析

文章通过改变玻璃基温度和靶基间距,采用m(O2)/m(A r)为1∶12.5,溅射功率为190 W,工作真空度为2.2 Pa,用DC磁控溅射法在玻璃基上沉积VO2薄膜,并经真空退火处理,制备的试样通过XPS测试分析薄膜表面的元素组成及成分。测试分析结果表明,基片温度在室温或超过350℃,易于生成VO2薄膜,真空退火可以显著改善制备薄膜的氧缺陷,提高V与O的化学计量比。     

Preparation and properties of AZO thin films on different substrates

Al doped ZnO (AZO) films were deposited on glass, polyethylene naphthalate (P EN) and polyethylene terephthalate (PET) at room temperature by radio frequency magnetron sputtering. The structural, surface morphology, electrical and optical properties of the AZO films were characterized by X-ray diffractometry (XRD), atomic force microscopy (AFM), Hall effect measurement and ultraviolet-visible spectrometer, respectively. The films exhibit highly c-axis preferred orientation, a nd AZO film on glass exhibits compressive stress while that on plastic subs trates presents tensile stress. The electr ical property of the AZO film on glass is the best among the films on three kinds of substrates. The value of the figure of merit for the AZO film on PEN is much better than that of the AZO film on PET and is close to that of AZO on glass in the wavelength range of 500? 900 nm.     

ZnO薄膜的射频磁控溅射法制备及特性

利用射频磁控溅射镀膜工艺,在石英玻璃衬底上成功制备了ZnO薄膜．采用原子力显微镜、X射线衍射、拉曼光谱、荧光分光光度计及椭偏等检测手段对其特性进行了测试、分析．研究结果表明：该薄膜具有良好的C轴取向结晶度;最佳激发波长为265．00nnl,光致发光峰分别位于362．00、421．06和486．06nm;437cm^-1是ZnO晶体的特征拉曼峰,该峰的出现与最强的X射线衍射(002)峰相对应;薄膜折射率为2．01．     

硅基低维结构的电子态和光学性质

Canham的文章发表以后，引起了世界范围的研究热潮，目的是实现硅基的集成光电子技术．其中一个主要的研究方向是多孔硅的发光机制．根据各自的实验结果提出了不同的模型：量子限制、表面态复合、硅氧烷及其衍生物、以及声子辅助跃迁等．同时开始了理论计算，方法包括：紧束缚、经验赝势、和基于局域密度泛函的第一原理方法等．大部分理论计算研究的是量子限制对多孔硅和纳米硅晶发光的效应．计算得到的辐射寿命比直接能隙GaAs中激子的长得多，说明量子限制不能完全解释多孔硅的高发光效率．提出了一个经验赝势的同质结模型来计算多孔硅和纳米硅晶的电子结构．多孔硅的波函数用一组体Si波函数展开，它们的波矢满足周期性边界条件．利用简并微扰论计算了S量子线、量子孔、量子阱层和棱柱晶粒的电子态和光跃迁几率(寿命)．用紧束缚集团模型研究了表面键饱和对Si纳米晶体发光的效应．取表面Si原子的悬键与吸附原子之间的相互作用能量Vs为不同的值，代表不同的吸附原子．发现当Vs的绝对值变小时，能隙减小，同时跃迁几率增加约2个数量级．     

制备形貌可控的多晶纳米镍

采用液相化学还原法,在1,2-丙二醇体系中,分别使用吐温-80(Tween-80)、聚乙二醇-6000(PEG-6000)和十二烷基硫酸钠(SDS)与聚乙二醇-6000(PEG-6000)的混合物作为修饰剂,利用1,2-丙二醇还原相同母体醋酸镍,制备形貌分别为海绵体、纤维状、雪花状多晶纳米镍;在水体系中,使用SDS为修饰剂,利用水合肼还原相同母体醋酸镍,制备球形多晶纳米镍.通过X射线衍射(XRD)、透射电子显微镜(TEM)、选区电子衍射(SAED)对所制备的纳米镍样品进行表征.利用傅立叶红外(FTIR)分析初步解释不同形貌纳米镍的形成机理.将纳米镍样品添加到15W/40SF汽油机油中,在UNT-Ⅱ摩擦磨损试验机上进行考察.结果表明:纳米镍样品的形貌不同,其对汽油机油摩擦学特性的改性亦不相同,纤维状纳米镍的改性效果最佳.     

Ga掺杂70Ge纳米晶的制备与研究

通过离子注入及中子嬗变掺杂制备了Ga(镓)掺杂70Ge(锗)纳米晶,并对样品进行了质子激发X射线荧光分析谱(PIXE)、光致发光谱(PL)、激光拉曼散射谱(LRS)的测量与研究.结果表明：随着Ga杂质浓度的增加,580 nm附近的荧光峰的发光强度不断地下降,这可能是非辐射的俄歇复合过程与纳米晶数量的减少共同作用的结果.此外,从PL上面看到580 nm附近的荧光峰蓝移则可能是由纳米晶尺寸的减小和非辐射的俄歇复合过程引起的.     

Preparation of PZT thin films by magnetron sputtering with metal and metal oxide composite target

This article mainly deals with the preparation and properties of PZT thin films. A new type of Metal-Metal Oxide composite target was developed. Relating factors have been discussed. The electrical and optical properties of PZT thin films have also been studied. Zhou Zhenguo: born in Feb. 1939, Associate professor. Current research interest is in thin film material Supported by the National Natural Science Foundation of China