n型透明导电薄膜CdIn2O4电学性质的研究和大面积制备的最佳条件

在Ar+O2₂气氛中，采用射频反应溅射Cd-In靶制备CdIn2₂O4₄ 薄膜.制得的薄膜经x射线衍射（XRD）检测为CdIn2₂O4₄和CdO相组成的多晶.从理论上分析了热 处理前后氧空位、掺杂点缺陷和富氧电子陷阱在影响膜的载流子浓度和电子散射中所起的重要作用.同时，对样品 进行Hall效应、Seebeck效应测试并得出不同载流子浓度下的迁移率、有效质量、弛豫时间以及它们之间的相互关系，特别强调     

由缺陷引起的Burstein-Moss和带隙收缩效应对CdIn2O4透明导电薄膜光带隙的影响

在Ar+O2气氛，采用射频反应溅射Cd In靶制备CdIn2O4（CIO）薄膜.通过对不同衬底 温度下制备和沉积后在氩气流中退火的薄膜进行透射、反射和Hall效应的测量和分析发现， 随着衬底温度的降低，载流子浓度呈上升趋势，而吸收边呈现先是“蓝移”然后“红移”的 现象.从理论上阐述了高浓度的点缺陷对CIO氧化物薄膜的能带产生的重要影响，这些影响主 要体现在带尾的形成，Burstein Moss(B M)漂移和带隙收缩.另外，衬底温度的变化将对 薄膜的迁移率有重要影响.对于CIO薄膜，由缺陷产生的空穴浓度将对薄膜的带隙收缩产生重 要影响并将直接影响到薄膜的光透性.由于存在吸收带尾，利用传统的“外推法”获得薄膜 的光带隙并不适合简并半导体，而应使用更为准确的“拟合法”. 关键词： 射频反应溅射 CdIn2O4透明导电薄膜 Burstein Moss漂移 带隙收缩 电学性 质 光学性质     

由缺陷引起的Burstein-Moss和带隙收缩效应对CdIn2O4透明导电薄膜光带隙的影响

在Ar+O2气氛,采用射频反应溅射Cd-In靶制备CdIn2O4(CIO)薄膜.通过对不同衬底温度下制备和沉积后在氩气流中退火的薄膜进行透射、反射和Hall效应的测量和分析发现,随着衬底温度的降低,载流子浓度呈上升趋势,而吸收边呈现先是"蓝移"然后"红移"的现象.从理论上阐述了高浓度的点缺陷对CIO氧化物薄膜的能带产生的重要影响,这些影响主要体现在带尾的形成,Burstein-Moss(B-M)漂移和带隙收缩.另外,衬底温度的变化将对薄膜的迁移率有重要影响.对于CIO薄膜,由缺陷产生的空穴浓度将对薄膜的带隙收缩产生重要影响并将直接影响到薄膜的光透性.由于存在吸收带尾,利用传统的"外推法"获得薄膜的光带隙并不适合简并半导体,而应使用更为准确的"拟合法".     

基片温度和退火对DdIn2O4薄膜光学性质和载流子浓度的影响

对射频反应性溅射Cd-In合金靶制备的透明导电CdIn2O4薄膜，研究了基片温度及沉积后在氩气流中退火对薄膜的透射、反射和吸收光谱，光学常数和载流子浓度的影响。结果表明：提高基片温度减少了薄膜的载流子浓度，退火增加了薄膜的载流子浓度。随着基片温度提高，薄膜折射率n和消光系数κ的短波峰将逐渐蓝移，而退火使其出现红移。基片温度和退火对薄膜光学常数的影响与其对薄膜载流子浓度的影响是一致的。在制备CdIn2O4这样一种对于沉积方法和沉积条件极为敏感的透明导电薄膜的沉积过程中，这一现象对于实时监控具有极为重要的意义。     

基片温度和退火对CdIn2O4薄膜光学性质和载流子浓度的影响

对射频反应性溅射Cd In合金靶制备的透明导电CdIn2 O4薄膜 ,研究了基片温度及沉积后在氩气流中退火对薄膜的透射、反射和吸收光谱 ,光学常数和载流子浓度的影响。结果表明 :提高基片温度减少了薄膜的载流子浓度 ,退火增加了薄膜的载流子浓度。随着基片温度提高 ,薄膜折射率n和消光系数κ的短波峰将逐渐蓝移 ,而退火使其出现红移。基片温度和退火对薄膜光学常数的影响与其对薄膜载流子浓度的影响是一致的。在制备CdIn2 O4这样一种对于沉积方法和沉积条件极为敏感的透明导电薄膜的沉积过程中 ,这一现象对于实时监控具有极为重要的意义。     

氧化铟掺铪红外透明导电薄膜

采用射频磁控溅射与退火工艺相结合的方法,分别在石英和硒化锌(ZnSe)衬底上制备了掺铪氧化铟(IHfO)薄膜,掺杂比例In2O3∶HfO2为98wt.%∶2wt.%.测试了薄膜的组成结构和3～5μm红外波段的光电性质,分析了退火温度、薄膜厚度和氧气流速对薄膜性能的影响.X射线衍射、扫描电子显微镜和X射线能谱表明,制备的IHfO薄膜具有氧化铟的立方体结构,掺杂铪并没有影响氧化铟的生长方向,但是减小了晶格间距,铪与铟外层电子形成新的杂化轨道.傅里叶变换红外光谱表明,随着退火温度的增加,IHfO薄膜在3～5μm波段的透过率逐渐下降,沉积在ZnSe衬底上的薄膜具有更平稳的透过率,厚度为100nm薄膜在3～5μm波段平均透过率为68%.测试霍尔效应表明,随着氧气流速的增加,IHfO薄膜电阻率逐渐增加,载流子浓度减小,霍尔迁移率变化不明显.晶界散射是影响IHfO薄膜迁移率的主要因素,当氧气流速为0.3sccm时,薄膜最佳电阻率为3.3×10~(-2)Ω·cm.与透可见光波段的导电氧化铟锡(ITO)薄膜相比,制备的IHfO薄膜可以应用在3～5μm红外波段检测气体,红外制导等领域.     

掺杂吡唑喹啉衍生物的聚乙烯基咔唑薄膜载流子传输性能的研究

对比研究了吡唑喹啉衍生物(PAQ5)的掺杂对聚N-乙烯基咔唑(PVK)聚合物薄膜载流子传输性能的影响.分析薄膜宏观的电流密度-电场关系发现:电场F在106~10~7 V·cm-1范围时,纯PVK薄膜中电流密度J∝F2.1,而在掺杂了PAQ5(4.8wt%)的PVK薄膜中J∝F2.9.掺杂薄膜导电能力的提高,除了有空穴从阳极注入PVK形成的空间电荷限制电流之外,也有PAQ5使电子从阴极注入和传输形成的传输电流.分析薄膜用飞行时间法测得的瞬态光电流谱可得:在1×105~2×10~5 V·cm-1的低场下,纯PVK薄膜中传导电流的主要是空穴载流子,其迁移率在7.6×10~(-5) cm~2·V~(-1)·s~(-1),而电子迁移的信息却很微弱,PAQ5掺杂浓度为2wt%的PVK薄膜载流子传输性能没有大的变化.在PAQ5掺杂浓度为5wt%的PVK薄膜中,空穴的迁移率为6.0×10-5 cm~2·V~(-1)·s~(-1),电子的迁移率为7.9×10-6cm~2·V~(-1)·s~(-1).掺入的PAQ5建立的电子传输通道使掺杂薄膜载流子的传输性能得到显著提高.     

铟锡氧化物薄膜表面等离子体损耗降低的研究

本文采用直流磁控溅射方法在普通浮法玻璃基底上制备了立方多晶铁锰矿结构的铟锡氧化物(indium tin oxide, ITO)薄膜,并对其进行了结晶性、表面粗糙度、紫外-可见吸收光谱、折射率、介电常数及霍尔效应的测试.研究了溅射时基底温度的改变对于ITO薄膜的光电、表面等离子体性质的影响.随着基底温度由100?C升高至500?C,其光学带隙(3.64—3.97eV)展宽,减少了电子带间跃迁的概率,有效降低了ITO薄膜的光学损耗.与此同时,对应ITO薄膜的载流子浓度(4.1×10~(20)-—2.48×10~(21)cm~(-3))与迁移率(24.6—32.2 cm~2·V~(-1)·s~(-1))得到提高,电学损耗明显降低.     

掺铪氧化锌红外透明导电薄膜

采用射频磁控溅射法在蓝宝石衬底上制备了Hf∶ ZnO (HZO)薄膜,研究了氧气流速和退火温度对薄膜微观结构和光电性能的影响.为了提高薄膜的结晶性,将制备的薄膜在800℃下退火30 min,并自然冷却到室温.测试、分析了退火后薄膜的微观结构和光电性能.研究发现,随着氧气流速从0增加到0.6 mL/min,薄膜的致密度逐渐增大,电阻率逐渐降低,而当氧气流速继续增大到0.8 mLL/min时,薄膜的结晶性恶化,电阻率突然升高.氧气流速为0.6 mL/min时制备的薄膜光电性能最佳,利用傅里叶红外光谱仪和霍尔测试仪进行测试,得到薄膜在3～5 μm波段的平均透过率为83.87％,电阻率为1.66×10-2 Ω·cm,载流子迁移率为13.4 cm2·V-1·s-1,载流子浓度为2.82×1019 cm-3.利用X射线衍射仪进行测试,发现薄膜样品具有ZnO的六方纤锌矿结构,并沿(002)方向择优生长,通过扫描电子显微镜可以看到薄膜表面生成致密均匀的球状结构颗粒.这种薄膜可以用作3～5 μm波段的透明窗口.     

氩气压强对射频磁控溅射ZnO：Al薄膜结构和性能的影响

以ZnO:Al2O3为靶材在石英玻璃衬底上射频磁控溅射制备多晶ZnO:Al(AZO)薄膜,通过XRD、AFM以及Hall效应、透射光谱等测试研究了RF溅射压强对薄膜结构、电学与光学性能的影响.分析表明:所制备的薄膜具有c轴择优取向,当压强为1.2Pa时薄膜的电阻率降至最低(2.7×10-3Ω·cm).薄膜在可见光区平均透射率高于90%,光学带隙均大于本征ZnO的禁带宽度.     

Investigation of ultrafast electron dynamics of nickel film and micro-nano-structure film

The electron thermalization and relaxation processes in ferromagnetic nickel thin film and micro-nano- structure film have been studied by measuring the transient change after excitation by a femtosecond laser pulse. The measurements indicate that the electron thermalization time is between 18 and 47 fs. This is somewhat faster than the value reported before. And the thermalization time of the micro-nano-structure film is much longer than the nickel film. We deduce that it is caused by the discontinuity of the electron band close to the Fermi level in the micro-nano-structure nickel film.     

Plasmonic interactions between a perforated gold film and a thin gold film

Based on the finite difference time domain method,we investigated theoretically the optical properties and the plasmonic interactions between a gold film perforated with periodic sub-wavelength holes and a thin gold film.We showed that the plasmon resonant energies and intensities depend strongly on the thicknesses of the two films and the lattice constant.Based on the distributions of normal electric field component E z,tangential electric field component E y and total energy,we showed that the optical transmission is due to the collaboration of the localized waveguide resonance,the surface plasmon resonance and the coupling of the flat-surface plasmon of the two layers.     

Influence of film morphology on thin film ferromagnetism

Cobalt, nickel and their alloy, Co₁Ni₉, films were epitaxially grown on Cu(100) under different growth conditions and subsequent treatments and studied using surface magneto-optic Kerr effect (SMOKE) in an attempt to understand the effects of film morphology on the magnetic properties. CO contamination can significantly reduce the magnetization and Curie temperature. Thermal desorption spectroscopy (TDS) shows that CO desorbs at 422 K from Ni and 410 K from Co₁Ni₉ at a heating rate of 6 K per minute. Annealing the films below 450 K produces smooth and clean films with stable magnetic behavior. However, annealing at higher temperatures results in Cu segregation and island formation leading to the finite-size ferromagnetic or even superparamagnetic behavior.     

Langmuir-Blodgett film and nematic interface

The orientation induced by a Langmuir-Blodgett film on a Nematic Liquid Crystal (NLC) is theoretically analyzed. We show that the effective surface energy is due to different contributions connected with steric and van der Waals interactions between the nematic and the solid substrate. The analysis shows that the Langmuir-Blodgett film orientation depends on the surface density of the molecules. The initial homeotropic orientation may become unstable giving rise to a tilted film. The average orientation of the nematic molecules is also analyzed. We show that, in the event in which the steric interaction Nematic-Langmuir-Blodgett film is very large with respect to the dispersion interaction Nematic-Substrate, the nematic orientation coincides with the one of the film. On the contrary, when the two interactions are comparable, the orientation of the two media may differ. In particular, we analyze how the stable orientation depends on the surface molecular density of the film.     

Externally applied stress sign and film elastic properties effects on brittle film fracture

Rectangular stainless steel samples with TiN film deposited on the front lateral surface were loaded in three-point bending to the maximum normal strain of 6%. Scanning electron microscopy showed that vertical cracks appeared in the tension zone when the tensile strain exceeded 1.5%, while horizontal cracks appeared in the compression zone when the compressive strain exceeded –2.9%. Film cracks in the compressive zone originate from the tensile stress imposed by the plastically deformed substrate due to the Poisson’s expansion. Taking plastic deformation and Poisson’s expansion of the substrate in compression into account, theoretical analysis of normal stress distribution along the cracked film segment in compression is presented. Substrate strain and film elastic properties affect film cracking in the compressive zone. At larger compressive strain, some transverse cracks along with buckling cause the film spallation. The presented method is useful for studying brittle film fracture with variable strain levels in a single sample.     

Convenient and inexpensive determination of optical constants and film thickness of blended organic thin film

This work presents the study of optical constants and film thickness of blended organic thin films, emphasizing on the modeling procedure with modified genetic algorithm aided by absorption or transmittance spectra of both pure materials and the blends. Taking the blending of copper phthalocyanine(Cu Pc) and fullerene(C60) as an example, a simple, convenient and low-cost method for the determination of the optical constants and film thickness of blended organic thin films was demonstrated. New scheme for optical modeling of blended organic thin film was proposed by introducing peak energies of Cody-Lorentz oscillators of the pure materials, which were determined by fitting the film absorption of pure materials. These oscillators of pure materials could be recognized in the transmittance spectrum of their blends, and were further used as the initial searching ranges in the simulation of blended films. As a result, the constraint bounds of the unknown parameters were significantly reduced and modeling efficiency as well as fitting accuracy was improved. For instance, the fitting of the transmittance curves of blended films with different blending ratios reached reliable results in comparison with extinction coefficients obtained from experiment.     

Characteristics of Scholte wave and film characterization in layered thin film overlying substrate structures

The layered film-substrate structure is widely used in many fields such as microelectronic devices, but the ultrasonic measurement of film material parameters, especially the characterization of shear wave velocity, is a difficult problem. In this paper, the dispersion characteristics of Scholte wave at the liquid-solid interface and the acoustic pressure response generated by a pulse excitation are theoretically analyzed. The results show that the Scholte wave dispersion at the liquid-solid int...     

Determination of thin film refractive index and thickness by means of film phase thickness

A new approach for determination of refractive index dispersion n(λ) (the real part of the complex refractive index) and thickness d of thin films of negligible absorption and weak dispersion is proposed. The calculation procedure is based on determination of the phase thickness of the film in the spectral region of measured transmittance data. All points of measured spectra are included in the calculations. Barium titanate thin films are investigated in the spectral region 0.38–0.78 μm and their n(λ) and d are calculated. The approach is validated using Swanepoel’s method and it is found to be applicable for relatively thin films when measured transmittance spectra have one minimum and one maximum only.      

微通道板碘化铯膜层抗潮解超薄保护膜层北大核心CSCD

碘化铯膜层对紫外光以及X射线具有很高的光电转换效率,但在空气中容易发生潮解。介绍了微通道板碘化铯膜层抗潮解超薄保护膜层的制备与保护效果。使用扫描式电子显微镜(scanning electron microscope,SEM)对碘化铯薄膜光阴极微通道板的镀膜深度和厚度进行测试,采用氧化铝作为碘化铯薄膜光阴极的保护膜层,并分别制备了厚度为2 nm、5 nm和10 nm的氧化铝保护膜层。在空气中存放不同时间后,碘化铯薄膜光阴极微通道板表面未发生明显潮解变化,其增益约为8800,暗计数率约为4.1 counts·s^(−1)·cm^(−2)。试验证明,氧化铝能够作为微通道板碘化铯膜层抗潮解超薄保护膜层。