基于叠栅条纹的光刻对准理论分析及标定方法

在线光栅用于纳米光刻对准理论的基础上,为实现光栅方向的标定和掩模硅片对准,提出一种利用相位斜率消除角位移的新方法,并给出线光栅标记及其对准原理。在对准前,掩模对准标记和硅片对准标记存在角位移,重点讨论了此种情况下叠栅条纹的特性以及与光栅物理参数的关系,并给出了相应的计算公式。基于傅里叶频域分析法,对叠栅条纹频率成分与条纹的关系做了简要分析。利用提取叠栅条纹行列方向的一维相位,通过数据拟合,得出了相位斜率与角位移的内在关系,实现了条纹方向的标定。模拟实验结果表明,该方法简单可靠,可分辨的最小角位移低于0.02°。     

基于优化电子散斑光谱的三维物体测量研究

用激光光束直接照射到测试表面,再用CCD采其变形前后表面散斑颗粒干涉形成的条纹,条纹图解析为测量点的位移量和变形量,进而得到其离面位移,在优化算法的时候采用π位相技术获取另一个π相移的变形条纹图像,将面内位移与离面位移分离,为了消除零级分量,让投影光栅移动1/2个周期.通过Matlab和四步位相算法给出了三维空间模型,得出变形后物体的离面位移数据.实验仿真数据表明其能够稳定地测量物体变形场三维分量,误差较低.     

Automatic Analysis of the Phase Object Using Projection Moire Deflectometry

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Measurement of vibration amplitude by an optical fiber-based moiré interferometer

A projected-fringe fiber-based moiré interferometer is proposed to measure the local amplitude vibration of a diffuse surface. The technique is based on an optical fiber interferometer which projects interference fringes on the object surface. The visibility of these carrier fringes is modulated by a function of local amplitude vibration. Full-field quantitative analysis is performed by analyzing the fringe pattern with a 2-D Fourier transform method. Theoretical details, and experimental results are presented.     

Phase-shifting whole-field speckle photography technique for the measurement of in-plane deformations in real time

A new real-time phase-shifting readout system is developed for quantitative evaluation of full-field correlation fringes obtained by means of Fourier filtering in speckle photography. The proposed method, which uses photorefractive crystals as the recording medium, is capable of mapping the whole-field displacement data from the recorded phase-shifted fringe patterns. Experimental results are presented on a diffuse surface subjected to rotation in its own plane.     

Shape identification using phase shifting interferometry and liquid-crystal phase modulator

A phase shifting technique using a Michelson interferometry system is presented and applied to surface contour measurement. Hyperbolic fringes are produced by the interference of two spherical wavefronts expanded from a beam expander. The fringe pattern is projected on an object surface and the deformed grating image is captured by a CCD camera for subsequent analysis by a PC. Phase variation is achieved by a liquid-crystal device incorporated in the Michelson interferometry system. Results obtained using the proposed method for objects of various shapes and sizes compared well with those from a conventional profilometer.     

Shifted-phase calibration for a 3-D shape measurement system based on orthogonal composite grating projection

This paper proposes a novel method for reducing measurement error caused by spectrum overlapping in orthogonal-composite-grating-based 3-D measurement method. For 3-D measurement systems based on orthogonal composite grating projection, spectrum overlapping causes phase of each deformed phase-shifting fringe changed differently, which violates the principle that the shifted phases between adjacent deformed fringes must be equivalent to 2π/3, and therefore results in phase measurement error. The proposed shifted-phase calibration method is based on that phase variation of each deformed fringe is independent of height and reflectivity of the measured object. Three composite gratings are projected on the reference plane, and each carrier channel includes three phase-shifting gratings needed in phase measuring profilometry (PMP). Because the adjacent phase-shifting fringes demodulated from the same carrier channel have the phase difference of 2π/3, we can respectively calculate the reference plane's phases of three carrier channels by the phase algorithm of PMP method, and the shifted phases between them are obtained. When an object is measured, the shifted phases between deformed phase-shifting fringes can be calibrated. A new 3-D measurement mathematical model is set to reconstruct object. Our experiments prove that the proposed method can effectively restrain the effect of spectrum overlapping and improve measurement accuracy almost one times.     

单周期条纹双四步相移投影仪的标定方法

针对投影仪标定方法中存在畸变及倾斜投影引起条纹周期、条纹级数变化的问题,提出一种单周期条纹双四步相移投影仪的标定方法.设计生成横向和纵向各两组单周期条纹图像,经投影仪投影到带有圆形标识的标定板上,相机同步采集标定板图像,叠加由双四步相移获得的两幅相位主值图,对叠加相位主值图相位展开,利用展开的绝对相位值计算投影仪像素坐标值,最终将投影仪标定转换为成熟的相机标定.实验结果表明:仿真投影仪标定实验准确度的最大重投影误差约为0.4pixel,均方根误差为0.132 96pixel;实际投影仪标定实验准确度的最大反投影误差约为0.46pixel,均方根误差为0.143 12pixel;实验结果与仿真结果的最大反投影误差相差15%,均方根误差相差7.6%.与现有的采用三频相位展开进行投影仪标定的方法相比,投影光栅图像数可减少8幅.该方法改善了现有投影仪标定方法的不足,标定准确度和标定效率均得到提高.     

Shape and slope measurement by source displacement in shearography

Shearography is a full field non-contact optical technique usually used to measure the gradient of the displacement of a surface subjected to thermal or mechanical loading. This paper describes the use of shearography for surface slope and shape measurement. Interferometric speckle patterns obtained before and after displacement of the optical source are correlated to yield correlation fringes which are, in general, a mixture of slope fringes and carrier fringes. This paper contains a full treatment of the sensitivity of slope fringes to the parameters; the illumination and the imaging geometry and the magnitude and the direction of the source displacement. The slope fringes are corrected for distortion, which is due to the necessary off-axis illumination, and are scaled using parameters calculated using a mathematical model. Experimentally generated phase-stepped slope fringes are unwrapped and integrated to recover the object shape.     

用阴影莫尔条纹偏折术测量反射表面角位移

介绍一种阴影莫尔条纹偏折术。利用光栅自成象面的倾斜引起莫尔条纹方向变化来测量反射表面的角位移。     

Identifying a dot-matrix hologram with the fringe-overlapping phenomena of grating dots

Dot-matrix holograms created by two-beam writers contain many grating dots. Because the phase difference between two laser beams for interference cannot be controlled accurately, the fringe positions of grating dots are randomly determined. Therefore, fringe positions are a good kind of tool to identify dot-matrix holograms. In this paper, a number difference between two special fringes of a target grating dot is used to identify a dot-matrix hologram. The two special fringes are determined by three grating dots with parallel fringes. The first special fringe is corresponding to a fringe pair with the best matching for the fringes of the target grating dot and the fringes of the second grating dot. The second special fringe is corresponding to a fringe pair with the best matching for the fringes of the target grating dot and the fringes of the third grating dot. An experiment has proved the proposed method practical and feasible. Because reproducing a grating dot with a specified fringe number difference is difficult, the proposed method is excellent for anti-counterfeiting.     

基于适度光反馈自混合干涉技术的振动测量

光反馈自混合干涉技术是一种新浮现的有别于传统双光束干涉的一类新的测试技术。为了在适度光反馈下进行振动的精密测量,提出了一种基于适度光反馈自混合干涉技术的振动测量方法。经对光反馈自混合干涉信号条纹分析,发现通过选定合适的光反馈水平及激光器线宽展宽因数,可以得到锯齿干涉条纹。这种干涉信号不仅包含振动幅度信息也包含振动方向信息。该振动测量方法利用锯齿干涉条纹的特点,首先通过条纹记数实现大范围振幅粗测,具有半波长位移分辨力;然后基于适度光反馈下小数条纹的特点,给出了小于半波长位移测量的线性表达式,从而实现位移的精测。仿真计算表明,该方法可以实现大量程高分辨力振动位移测量,在叠加20 dB的噪声下,振幅测量相对误差平均为0.5%。     

Circular carrier-frequency photography for observing phase objects

A circular grating is photographed through a phase object which deforms the image of the grating lines. By super-imposing these deformed lines with a master grating on photographic film, moiré patterns are observed. These patterns are interpreted as fringes of constant radial derivative.     

光栅成像反射莫尔干涉术

利用光栅成像效应可构成一种光栅成像反射干涉仪。配合莫尔技术,在自成像平面可获得表征镜状表面试件离面位移一阶偏导等值线的反射莫尔条纹。并给出了这种干涉术的理论分析及实验例证。     

Vibration analysis and non-destructive testing with real-time shearography

Real-time laser speckle shearography coupled with vibration stressing is shown to be an effective means of vibration analysis and non-destructive testing. The shearograms are modulated by a system of live fringes. These fringes are shown to be described by the zeroth-order Bessel function of the first kind and their visibility decreases with increasing fringe order. In vibration analysis, the instantaneous fringe pattern depicts the out-of-plane surface displacement gradient of the object surface at various resonance modes. In non-destructive testing, the flaw depth in a component can be determined without having to determine fringe orders. There is good agreement between the results obtained using the method and those from theory and time-average holography. A major advantage of real-time shearography is its facility for continuous assessment of a vibrating object without the need for secondary shearogram reconstruction.     

Identifying a dot-matrix hologram by checking the intersecting angles of its gratings

Three features about the intersecting state of two gratings are used to identify dot-matrix holograms created by two-beam writers in this paper. The first feature is the intersection angle of the fringes of two gratings. The second feature is the ratio of the pitches of two lowest-order moiré-patterns formed by overlapping two gratings. The third feature is the length ratio of the two diagonal lines of a parallelogram constructed by two neighboring fringes of a first grating and two neighboring fringes of a second grating. All the three features are equivalent, i.e. they are all relative to the intersection angle of two gratings. Because the grating orientations of grating dots cannot be accurately reproduced for the orientation uncertainties of the components used by a two-beam writer, the intersection angles of the gratings of grating dots cannot be easily counterfeited. Therefore, the proposed methods are practical and feasible for the anti-counterfeiting applications of dot-matrix holograms.     

Digital moiré fringe measurement method for alignment in imprint lithography

Accurate layer-to-layer alignment, which is of prime importance for the fabrication of multilayer nanostructures in integrated circuits, is one of the main obstacles for imprint lithography. Current alignment measurement techniques commonly involve an image detection process for coarse alignment followed by a grating interference process for fine alignment. Though this kind of two-level alignment system is reasonable for measurement, when it is used in real imprint lithography, it is inconvenient because of the existence of a complex loading system that needs space for alignment. In this study, we propose a fine alignment method using only image detection using grating images and digital moiré fringe technology. In this method, though the gratings are also selected as alignment marks for accurate measurement, they do not interfere with the physics. The grating images captured from the template and wafer are used to measure angular displacement and to form parallel digital moiré fringes. The relative linear displacement between the template and wafer is determined by detecting the spatial phase of parallel digital moiré fringes. Owing to the magnification effect of digital moiré fringes, this method is capable of generating accurate measurements. According to the experimental results, this digital moiré fringe technique is accurate to less than 10 nm. In addition, without a complex grating interference system, this method has the advantage of being easy to operate.     

Formation of unsymmetric moiré fringes and their use in moiré topography

An analytical method of predicting the intensity profile of the moiré fringes formed by a three-dimensional grating is proposed. The proposed method is proved to be effective in determining the appropriate structure of the grating and the experimental conditions for directional moiré topography.     

Experimental and numerical investigations of resonant vibration characteristics for piezoceramic plates.

Electronic speckle pattern interferometry (ESPI) is a full field, non-contact technique for measuring the surface displacement of a structure subjected to static loading or, especially, to dynamic vibration. In this article we employ an optical system called the amplitude-fluctuation ESPI with out-of-plane and in-plane measurements to investigate the vibration characteristics of piezoceramic plates. Two different configurations of piezoceramic plates, namely the rectangular and the circular plates, are discussed in detail. As compared with the film recording and optical reconstruction procedures used for holographic interferometry, the interferometric fringes of AF-ESPI are produced instantly by a video recording system. Because the clear fringe patterns will be shown only at resonant frequencies, both the resonant frequencies and the corresponding mode shapes are obtained experimentally at the same time by the proposed AF-ESPI method. Excellent quality of the interferometric fringe patterns for both the in-plane and out-of-plane vibration mode shapes is demonstrated. The resonant frequencies of the piezoceramic plates are also measured by the conventional impedance analysis. From experimental results, we find that the out-of-plane vibration modes (type A) with lower resonant frequencies cannot be measured by the impedance analysis and only the in-plane vibration modes (type B) will be shown. However, both the out-of-plane (bending) and in-plane (extensional) vibration modes of piezoceramic plates are obtained by the AF-ESPI method. Finally, the numerical finite element calculations are also performed, and the results are compared with the experimental measurements. It is shown that the numerical calculations and the experimental results agree fairly well for both the resonant frequencies and the mode shapes.     

Influence of out-of-plane deformation and its elimination in white light speckle photography

The aim of this paper is to present the white light speckle method as a practical tool in metrology and to search for the optimum conditions for its application. In particular, the study provides evidence that the white light speckle technique is not exclusively sensitive to the in-plane components of displacement. Consequently, the interpretation of the Young's fringes as pure in-plane fringes is prone to inaccurate measurements. The errors so introduced are systematically analysed for various optical parameters. Some practical considerations are then pointed out to aid in the design of an error-tolerance limited white light displacement measurement system to suit a particular need. two complementary techniques are next proposed which promise to eliminate the influence of the out-of-plane movements on the measurement of the lateral components of displacement. The proposed methods not only allow an increase in the accuracy of in-plane measurements, but also permit mapping of the out-of-plane movements undergone by the object surface. The techniques presented, apply equally to coherent speckle photography where the same problems are manifest, and should pave the way for the application of these methods to concrete engineering problems.