GaMnAs薄膜洛伦兹振子模型参数提取以及材料缺陷分析

利用改进的遗传算法从GaMnAs外延薄膜的远红外反射光谱中提取了GaMnAs薄膜的洛伦兹振子模型参数,发现GaAs掺入Mn后,ωTO向低频方向移动,ωLO基本保持不变,ε∞和εs均减小,γ有很大变化.并通过XRD以及近红外谱发现Mn的掺入会引入缺陷,这种缺陷会影响晶格质量,导致γ发生很大变化.     

超薄GaMnAs外延膜空穴浓度和应变弛豫研究

稀磁GaMnAs外延膜中的Mn含量会影响外延膜的空穴浓度和应变弛豫.Raman散射研究表明,Mn含量为3%的超薄GaMnAs样品的空穴浓度大于2%样品,4%样品的空穴浓度小于3%样品.应变弛豫理论和高分辨X射线衍射研究表明,Mn含量为2%和3%的超薄GaMnAs外延层分别处于准共格或低弛豫状态,Mn含量为4%的GaMnAs外延层的弛豫度明显大于3%样品的弛豫度.我们认为,准共格或低弛豫度状态对空穴浓度随Mn含量的变化趋势几乎没有影响,较大弛豫度的应变状态将导致样品外延层产生较多缺陷,影响能带结构和能级,引起空穴浓度异常减小. 关键词： 空穴浓度 应变弛豫 倒易空间图 准共格     

低温分子束外延生长的GaMnAs反射光谱的低能振荡现象

通过傅里叶变换红外光谱和光调制反射光谱技术测量了不同Mn含量的低温分子束外延生长在GaAs衬底上的GaMnAs样品的反射光谱.在低于Ga(Mn)As带边的红外反射光谱和光调制反射光谱上观测到低能振荡现象.通过分析振荡产生的原因并使用双层界面反射模型拟合了红外反射光谱的低能振荡过程,拟合结果与实验相符.研究表明,反射光谱的低能振荡是由于GaMnAs中空穴浓度的变化导致GaMnAs中的折射率发生变化,GaMnAs与衬底GaAs之间的折射率差导致了不同Mn含量的GaMnAs材料的反射谱的低能振荡现象.测量了不同 关键词： GaMnAs 反射光谱 空穴浓度 折射率     

In插入层对硅衬底外延InN晶体质量和光学特性的影响

在Si（111）衬底上分别预沉积0,0.1,0.5,1 nm厚度的In插入层后,采用等离子辅助分子束外延法制备了纤锌矿结构的InN材料,结合X射线衍射（XRD）、扫描电子显微镜（SEM）、吸收谱及光致发光谱研究了不同厚度的In插入层对外延InN晶体质量和光学特性的影响。XRD和SEM的测试结果表明,在Si衬底上预沉积0.5 nm厚的In插入层有利于改善外延InN材料的形貌,提高材料的晶体质量。吸收谱和光致发光谱测试表明,0.5 nm厚In插入层对应的InN样品吸收边蓝移程度最小,光致发射谱半峰宽最窄,并且有最高的带边辐射复合发光效率。可见,引入适当厚度的InN插入层可以改善Si衬底上外延InN材料的晶体质量和光学特性。     

LP-MOCVD异质外延ZnO薄膜中的应力及对缺陷的影响

利用低压金属有机化学气相淀积(LP-MOCVD)在Si基片上外延生长ZnO薄膜，制备了两类样品 ：一类是在Si上直接外延ZnO，另一类是在Si上通过SiC过渡层来外延ZnO.根据两类样品的拉 曼光谱、x射线衍射、原子力显微图和光致发光的结果，表明ZnO外延薄膜中的张应力对薄膜 的结晶状况有着重要的影响，使用SiC过渡层能够有效缓解ZnO薄膜中的张应力，减小缺陷浓 度，提高ZnO外延层的质量；然后根据缺陷的形成机制进一步提出，对于ZnO/Si，其中较大 的张应力导致了高浓度的非辐射复合缺陷的形成，使得样品的紫外和绿峰的发射强度均大大 降低；对于ZnO/SiC/Si，其中较小的张应力导致ZnO薄膜中主要形成氧替位缺陷O_{Zn，从而使发光中的绿峰增强. 关键词： ZnO薄膜 应力 缺陷 拉曼光谱}     

缓冲层对InSb/GaAs薄膜质量的影响

InSb是制作3~5μm红外探测器的重要材料。在GaAs衬底上外延生长InSb,存在的主要问题在于两种材料间14.6%的晶格失配度,会引入较大的表面粗糙度以及位错密度,使外延材料的结构和电学性能均会受到不同程度的影响。通过系列实验,研究了在生长过程中缓冲层对薄膜质量的影响。利用高能电子衍射仪(RHHEED)得到了合适的生长速率和Ⅴ/Ⅲ比,研究了异质外延InSb薄膜生长中低温InSb缓冲层对材料生长质量以及不同外延厚度对材料电学性质的影响。采用原子力显微镜(AFM)、透射电子显微镜(TEM)、X射线双晶衍射(DCXRD)等方法研究了InSb/GaAs薄膜的表面形貌、界面特性以及结晶质量。通过生长合适厚度的缓冲层,获得了室温下DCXRD半高峰宽为172″,77 K下迁移率为64300 cm²·V^-1·s^-1的InSb外延层。     

截止波长12 μm的p型-InAs0.04Sb0.96材料的熔体外延生长

为了获得p-型的长波长InAsSb材料并研究掺杂剂Ge对材料特性的影响,用熔体外延法生长了掺Ge的波长为12 μm的p型-InAsSb 外延层.用傅里叶红外光谱仪、Van der Pauw 法和电子探针微分析研究了材料的透射光谱、电学性质以及组分的分布.结果表明,两性杂质Ge在熔体外延生长的InAs0.04Sb0.96材料中起受主杂质作用.当外延层的组分相同时,材料的截止波长不随掺Ge浓度的变化而变化,但是随着外延层中掺Ge量的增加,外延层的透射率下降.掺杂原子Ge在外延层的表面及生长方向的分布都是相当均匀的.77 K下测得,载流子浓度为9.18×1016 cm-3的掺Ge的p型-InAs0.04Sb0.96样品,其空穴迁移率达到1 120 cm2·Vs-1.     

截止波长12μm的p型-InAs_(0.04)Sb_(0.96)材料的熔体外延生长

为了获得P型的长波长InAsSb材料并研究掺杂剂Ge对材料特性的影响,用熔体外延法生长了掺Ge的波长为12μm的P型-InAsSb外延层．用傅里叶红外光谱仪、VanderPauw法和电子探针微分析研究了材料的透射光谱、电学性质以及组分的分布．结果表明,两性杂质Ge在熔体外延生长的InAs0.01Sb0.96材料中起受主杂质作用．当外延层的组分相同时,材料的截止波长不随掺Ge浓度的变化而变化,但是随着外延层中掺Ge量的增加,外延层的透射率下降．掺杂原子Ge在外延层的表面及生长方向的分布都是相当均匀的．77K下测得,载流子浓度为9．18×10^16cm^-3的掺Ge的P型-InAS0.01Sb0.96样品,其空穴迁移率达到1120cm^2·Vs^-1.     

截止波长12 μm的p型-InAs0.04Sb0.96材料的熔体外延生长

为了获得p-型的长波长InAsSb材料并研究掺杂剂Ge对材料特性的影响,用熔体外延法生长了掺Ge的波长为12 μm的p型-InAsSb 外延层.用傅里叶红外光谱仪、Van der Pauw 法和电子探针微分析研究了材料的透射光谱、电学性质以及组分的分布.结果表明,两性杂质Ge在熔体外延生长的InAs0.04Sb0.96材料中起受主杂质作用.当外延层的组分相同时,材料的截止波长不随掺Ge浓度的变化而变化,但是随着外延层中掺Ge量的增加,外延层的透射率下降.掺杂原子Ge在外延层的表面及生长方向的分布都是相当均匀的.77 K下测得,载流子浓度为9.18×1016 cm－3的掺Ge的p型-InAs0.04Sb0.96样品,其空穴迁移率达到1 120 cm2·Vs－1.     

GaN外延层中的缺陷对光学性质的影响

用金属有机化合物气相外延（ＭＯＶＥＰ）方法生长具有不同表面形貌的非掺杂ＧａＮ，并对部分样品的外延层表面进行镜面加工．用阴极射线发光、光散射和拉曼散射方法观察ＧａＮ中深能级发光、缺陷散射光分布和拉曼散射光频移．结果表明，缺陷不但影响ＧａＮ的发光和光散射，而且影响拉曼频移     

Effect of annealing on the electric and magnetic properties of GaMnAs and Be-codoped GaMnAs

GaMnAs and Be-codoped GaMnAs films grown via molecular beam epitaxy (MBE) were heat treated and the stability of Mn in the matrix was investigated. MnAs had a stable phase at the low growth temperature, but MnGa was stable at the annealing temperature. Be-codoping did not prevent the precipitation processes, but Be itself was stable during the annealing process to maintain the GaAs matrix at the high conductivity.     

The source of room temperature ferromagnetism in granular GaMnAs layers with zinc blende clusters

Granular GaAs:(Mn,Ga)As films were prepared by annealing the Ga_0.985Mn_0.015As/GaAs layers at 500 °C or 600 °C. It is commonly accepted that this processing should result in the formation of cubic or hexagonal MnAs clusters, respectively. We demonstrate that such a priori assumption is not justified. If in the as grown sample there are not many defects with the interstitial Mn atoms, only small cubic clusters can be formed even after annealing at 600 °C. Moreover, in a sample containing solely cubic GaMnAs clusters, the Mn ions are ferromagnetically coupled at room temperature. This fact was explained by the existence of GaMnAs solid solution in the clusters, with content of Mn close to 20% (higher than ever found in the layers) as was confirmed by experiment and theory. Extended X‐ray absorption spectroscopy studies excluded the possibility of formation of the hypothetic zinc blende MnAs clusters. Not more than one Mn atom was detected in the second shell around central Mn atom. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Comparison of annealing effects on Zn-doped GaMnAs and undoped GaMnAs epilayers

To compare the annealing effects on GaMnAs-doped with Zn (GaMnAs:Zn) and undoped GaMnAs (u-GaMnAs) epilayers, we grew GaMnAs thin films at 200 °C by molecular beam epitaxy (MBE) on GaAs substrates, and they were annealed at temperatures ranging from 220 °C to 380 °C for 100 min in air. These epilayers were characterized by high-resolution X-ray diffraction (XRD), electrical, and magnetic measurements. A maximum resistivity at temperatures T_m close to the Curie temperatures T_c was observed from the measurement of the temperature-dependent resistivity ρ(T) for both the GaMnAs:Zn and the u-GaMnAs samples. We found, however, that the maximum temperature T_m observed for GaMnAs:Zn epilayers increased with increasing annealing temperature, which was different from the result with the u-GaMnAs epilayers. The formation of GaAs:Zn and MnAs or Mn-Zn-As complexes with increasing annealing temperature is most likely responsible for the differences in appearance.     

Effect of thermal annealing on the magnetic anisotropy of GaMnAs ferromagnetic semiconductor

We have systematically investigated the influence of annealing on the magnetic anisotropy properties of GaMnAs film using an epilayer with a Mn concentration of 6.2%. The GaMnAs epilayer was grown by molecular beam epitaxy and the planar Hall effect measurement was used to monitor the magnetic anisotropy of the film. We found significant annealing-induced changes in the magnetic anisotropy properties of the GaMnAs film that depended on the annealing conditions. For example, the cubic anisotropy that gave a four-fold symmetry of magnetic easy axes decreased while the uniaxial anisotropy that gave a two-fold symmetry of magnetic easy axes increases in the samples annealed temperature below 300 °C. In particular, the uniaxial anisotropy along the [010] direction in as-grown GaMnAs film changed to the [100] direction by rotating by 90° after the sample was annealed at 300 °C for 3 h. This investigation thus indicates that the magnitude and the direction of the magnetic anisotropy in the GaMnAs film can be effectively controlled by choosing an appropriate annealing time and temperature.     

Optical characteristics of MBE grown GaMnAs embedded with MnAs clusters

Photoluminescence (PL) measurements of the GaMnAs layers embedded with MnAs clusters have been performed. It was shown that the presence of MnAs clusters in the semiconducting matrix leads to appearance in the PL spectra a broad peak with local maximums at 1.36 and 1.33 eV, which are related with the defects generated in the phase separation process. The effect of the MnAs clusters on the temperature dependent band gap of GaMnAs was also observed.     

Determination of the local concentrations of Mn interstitials and antisite defects in GaMnAs

We present a method for the determination of the local concentrations of interstitial and substitutional Mn atoms and As antisite defects in GaMnAs. The method relies on the sensitivity of the structure factors of weak reflections to the concentrations and locations of these minority constituents. High spatial resolution is obtained by combining structure factor measurement and x-ray analysis in a transmission electron microscope. We demonstrate the prevalence of interstitials with As nearest neighbors in as-grown layers.     

Magnetic behavior of MnAs precipitates in Ga1−xMnxAs diluted magnetic semiconductor

Ferromagnetic Ga_1−xMn_xAs layers (where x≈4.7–5.5%) were grown on (1 0 0) GaAs substrates by molecular beam epitaxy. These p-type (Ga,Mn)As films were revealed to have a ferromagnetic structure and ferromagnetism is observed up to a Curie temperature of 318 K, which is ascribed to the presence of MnAs secondary magnetic phases within the film. It is highly likely that the phase segregation occurs due to the high Mn cell temperature around 890–920 °C, as it is well established that GaMnAs is unstable at such a high temperature. The MnAs precipitate in the samples with x≈4.7–5.5% has a Curie temperature T_c≈318 K, which was characterized from field-cooled and zero-field-cooled magnetization curves.