用于半导体加工的腔耦合—磁多极型ECR源的研究

本实验室研制出一台谐振腔耦合－多极场位形的电子回旋共振（ＥＣＲ）微波等离子体源（ＭＥＰ）。采用朗谬探针和离子能量分析器，测量了ＭＥＰ中Ａｒ等离子体的放电特性。实验结果表明，ＭＥＰ能在很宽的运行参数范围，高效率地产生具有较高密度、较低离子温度和空间电位的大面积均匀等离子体，特别适合于半导体加工应用研究。     

ESR研究非晶Ag￣＋导体的晶化

用电子自旋共振（ＥＳＲ）方法对非晶Ａｇ￣＋离子导体０．８５ＡｇＩ～０．１５Ａｇ＿４Ｐ＿２Ｏ＿７的热处理晶化过程进行研究，在样品中掺入微量（约１×１０￣（－３）ｇ／ｇ）的Ｍｎ￣（２＋）或Ｖ￣（４＋）离子作为自旋探针离子，它们的ＥＳＲ谱强度随升温线性减弱，当样品完全晶化时ＥＳＲ谱消失。这样测定的样品完全晶化的温度分别为９８℃（掺Ｍｎ的）和１０８℃（掺Ｖ的）．本文还对Ｍｎ￣（２＋）和Ｖ￣（４＋）的ＥＳＲ谱进行了分析。     

高聚物（PEO）＿n－CuBr＿2薄膜在流体静高压下的离子导电性

用混溶蒸发法制备出高聚物（ＰＥＯ）＿ｎ－ＣｕＢｒ＿２（ｎ＝４，８，１２，１６，２４）薄膜。并详细测量它们在０．１３５０ＭＰａ静水压范围的复阻抗谱，以及在０．１－２４００ＭＰａ静水压范围的交流电导率。结果表明：离子电导率与压力的依赖关系可分解为四段相迭加的线性关系。根据Ｘ射线衍射物相分析，它们分别归于ＰＥＯ非晶相的压力效应，ＰＥＯ结晶相的压力效应和析出新相ＣｕＢｒ＿２的压力效应。最后给出克服办法——添加少量增塑剂碳酸乙烯酯可增加（ＰＥＯ）＿ｎ－ＣｕＢｒ＿２薄膜的弹性，使压力下的离子电导率提高一至两个数量级。     

高聚物(PEO)n-CuBr2薄膜在流体静高压下的离子导电性

用混溶蒸发法制备出高聚物（ＰＥＯ）_n－ＣｕＢｒ₂（ｎ＝４，８，１２，１６，２４）薄膜。并详细测量它们在０．１－３５０ＭＰａ静水压范围的复阻抗谱，以及在０．１－２４００ＭＰａ静水压范围的交流电导率。结果表明：离子电导率与压力的依赖关系可分解为四段相迭加的线性关系。根据Ｘ射线衍射物相分析，它们分别归于ＰＥＯ非晶相的压力效应，ＰＥＯ结晶相的压力效应和析出新相ＣｕＢｒ₂的压力效应。最后给出克服办法——添加少量增塑剂碳酸乙烯酯可增加（ＰＥＯ）_n－ＣｕＢｒ₂薄膜的弹性，使压力下的离子电导率提高一至两个数量级。 关键词：     

HT－6M装置上离子回旋波的传播和吸收

本文从波与粒子相互作用的线性理论出发，结合ＨＴ－６Ｍ托卡马克少数离子为氢，基本离子为氘［Ｈ（Ｄ）］的等离子体离子回旋共振加热（ＩＣＲＨ）为例，讨论了离子回旋波在这特定的等离子体中传播、吸收与少数离子氢的浓度ＲＨ（定义为ｎＨ／ｎｅ，ｎＨ为氢离子密度，ｎｅ是等离子体总密度）和平行波数ｋ‖的关系。文中最后还给出了ＨＴ－６Ｍ托卡马克离子回旋共振加热的优化实验方案。     

急性缺氧条件下EP、CM、CAP以及耳蜗毛细胞的形态学变化

本实验用同一根玻璃微电极在豚鼠耳蜗中阶记录ＥＰ（ＥｎｄｏｃｏｃｈｌｅａｒＰｏｔｅｎｔｉａｌ，耳蜗内电位）、ＣＭ（ＣｏｃｈｌｅａｒＭｉｃｒｏｐｈｏｎｉｃｓ，耳蜗振电压）、ＣＡＰ（ＣｏｍｎｏｕｎｄＡｃｔｉｏｎＰｏｔｅｎｔｉａｌ，复合动作电位），观察在不同缺氧状态下，三者动态变化过程．发现在缺氧初始（１—２分钟），ＣＭ和ＣＡＰ随ＥＰ同步迅速下降；但缺氧３—６分钟时，ＣＭ下降缓慢，似一“平台”，而ＣＡＰ和ＥＰ继续同步下降；缺氧７—１２分钟时，三者又倾于平行。扫描电镜观察：ＩＨＣ（内毛细胞）表面由底四到三圈出现广泛分泌物和球状物，ＯＨＣ汐（毛细胞）表面出现局限性分泌物和球状物，静纤毛融合。结果表明：ＯＨＣ和ＩＨＣ的功能状态与氧代谢密切相关，ＣＭ直接受ＯＨＣ和ＩＨＣ结构变化的影响。ＣＭ下降过程中的平台，则可能与盖膜（ＴＭ）的压电效应有关。ＣＡＰ的变化不完全依赖于ＣＭ。     

PEG-Na2SO4-PAR体系中Pd(Ⅱ)、U(Ⅵ)、Mo(Ⅵ)的萃取分离

本文研究了在聚乙二醇－２０００（ＰＥＧ）－硫酸钠（Ｎａ２ＳＯ４）－４－（２－吡啶偶氮）－间苯二酚（ＰＡＲ）体系中,Ｐｄ（Ⅱ）、Ｕ（Ⅵ）、Ｌａ（Ⅲ）、Ｍｏ（Ⅵ）的萃取行为。实验结果表明,在ｐＨ４．５￣７．５溶液中,Ｐｄ（Ⅱ）、Ｕ（Ⅵ）、可被ＰＥＧ相几乎完全萃取,Ｌａ（Ⅲ）部分被萃取,而Ｍｏ（Ⅵ）则不被蔺取,从而实现了Ｍｏ（Ⅵ）与Ｐｄ（Ⅱ）、Ｕ（Ⅵ）混合离子间的定量分离,并初步探讨了ＰＥＧ相的萃取机理     

MPEGD光源中的工作气体Ar的光谱特性的研究

本文介绍了一种改进型的微波等离子体增强辉光放电（ＭＰＥＧＤ）光源，对这种级联光源中的工作气体Ａｒ的光谱特性进行了较详细的考察，对单纯微波等离子体放电，单纯辉光放电以及微波等离子体增强辉光放电的Ａｒ谱线进行了研究，并讨论了微波功率等的影响，认为这种微波等离子体增强辉光放电光源在中低能级跃产生的谱线有明显的增强作用。     

等离子体浸没离子注入过程中离子质谱测量

用一个取样离子源－Ｅ×Ｂ质谱系统测定了等离子体浸没离子注入中氮等离子体的质谱，测量出的氮等离子体的离子比率作为计算机模拟ＴＡＭＩＸ程序的输入参数，以预测原子的浓度－深度分布曲线，氮注入的Ｔｉ６Ａｌ４Ｖ样品用扫描俄歇微探针（ＳＡＭ）分析，获得了原子浓度－深度分布的试验数据，理论预测和用俄歇分析的结果比较，显示出很好的一致性．     

阈值光电子分析器及其在原子分子光电离研究中的应用

合肥国家同步辐射实验室（ＮＳＲＬ）光化学实验站上，国内首例用于研究原子、分子结构的阈值光电子谱（ＴＰＥＳ）技术。系统给出了阈值光电子分析器的结构和原理、检测控制系统、性能测试以及提高系统分辨率的措施和想法等，用该装置获得了一些分子的阈值光电子谱、及采用离子飞行时间质谱（ＴＯＦＭＳ）得到的光离子效率谱（ＰＩＥＳ）。用Ａｒ￣＋（￣２Ｐ＿（１／２）和Ｋｒ￣＋（￣２Ｐ＿（１／２）峰作标定，我们的阈值光电子分析器分别获得了２０ｍｅｖ和１７ｍｅＶ能量分辨（ＦＷＨＭ）。通过对Ｎ＿２分子在６３０－８１０振动态和Ｒｇｄｂｅｒｇ自电离态的初步探讨可知该系统性能。     

Experimental results of helicon sources

Helicon plasma sources are known as efficient generators of uniform and high density plasma.A helicon plasma source was developed for the investigation of plasma stripping and plasma lenses at the Institute of Modern Physics, CAS.In this paper, the characteristics of helicon plasma have been studied by using a Langmuir four-probe and a high plasma density up to 3.9×10~(13)/cm~3 has been achieved with the Nagoya type Ⅲ antenna.In the experiment, several important phenomena were found: (1) for a given magnetic induction intensity, the plasma density became greater with the increase of RF power; (2) helicon mode appeared at RF power between 300 W and 400 W; (3) the plasma density gradually tended to saturation as the RF power increased to the higher power; (4) a higher plasma density can be obtained by a good match between the RF power and the magnetic field distribution.The key issue is how to optimize the matching between the RF power and the magnetic field.Moreover, some tests on the extraction of ion beams were performed, and preliminary results are given.The problems which existed in the helicon ion source will be discussed and the increase in beam density will be expected by extraction system optimum.     

Fast wave heating in a mirror during plasma build-up

A heating method for partially ionized plasma has been described in reference [V.E. Moiseenko, Sov. J. Plasma Phys. 12, 427 (1986)]. It exploits the collisional damping of fast waves that is large owing to the high rate of charge exchange collisions. Since the time of heating is limited by the duration of neutral gas ionization, the heating needs to be strong enough to achieve a high final ion temperature. This heating method has been studied numerically in the framework of MHD-like (magneto-hydrodynamic) equations in inhomogeneous cylindrical plasma. The influences of the ratio of the mean free path of the neutral atoms to the plasma radius, the initial ion concentration, the characteristics of the interaction of the neutral atoms with the chamber wall and other parameters on the plasma heating dynamics are examined. A scenario for RF plasma heating in one central cell of the multi-mirror device GOL3 (Novosibirsk, Russia) is developed, in which the final ion temperature exceeds the ion oscillation energy in the RF field by one order of magnitude. The energy efficiency is high; only a small portion of the power is transferred by the neutral atoms to the chamber wall.     

Structure elucidation of fluorescent H1 antihistamines by ultraviolet resonance Raman spectroscopy: solvent structures of tripelennamine and mepyramine

Ultraviolet Resonance Raman (UVRR) spectroscopy—a Raman technique that combines high sensitivity with high selectivity and does not suffer from background fluorescence—is applied to the fluorescent H₁ antihistamines tripelennamine (TRP) and mepyramine (MEP) in aqueous solution to elucidate their molecular structure as a function of pH. In a previous investigation of these compounds (C. Tardioli, G. Gooijer G. van der Zwan, J. Phys. Chem. B, 113 , (2009), 6949), the presence of gauche conformers caused by intramolecular interaction of the protonated alkylamine tail with the pyridine nitrogen was assumed to explain the pH dependence of the fluorescence properties. In order to validate this assumption, use is made of the resonant excitation of the aminopyridine chromophore in TRP and MEP. In that way, structural information associated with the vibrations of that moiety can be obtained, and the changes it undergoes upon protonation can be monitored. Assignment of the vibrations was achieved with the help of a number of other compounds, and quantum chemical calculations. N,N‐Dimethylaminopyridine (2DMP) and its mono‐protonated form (2DMPH⁺) were investigated, since this molecule was shown to have optical properties closely resembling those of the aminopyridine moiety in TRP and MEP. Assignment of the vibrations of 2DMP was accomplished by comparison with the resonance Raman spectra of two other reference structures, 2‐aminopyridine and dimethylaniline—for which ordinary Raman data are available—and by Gaussian calculations. UVRR spectra of TRP and MEP could be readily interpreted on the basis of vibrational assignments of the parent chromophores, i.e. 2DMP and 2DMPH⁺. Vibrations of the aminopyridine chromophore in TRP and MEP at neutral pH, where the aminoalkyl chain is protonated, are modified when compared to the vibrational pattern recorded for a fully neutral molecule in alkaline solution. This implies an electronic redistribution in the ring originating from internal hydrogen bonding between the aminoalkyl tail and the aminopyridine chromophore. Copyright © 2010 John Wiley & Sons, Ltd.     

Computer Simulation of High-Power Ion Beam Generation Using the Plasma Erosion Opening Switch and Microsecond Store Systems

This paper deals with computer simulation of plasma erosion opening switch (PEOS) operation in the context of short-pulse high-power ion beam (HPIB) generation in microsecond store systems. The scaling of PEOS parameters and ion diode characteristics with various operating conditions was determined. The simulations showed the best PEOS characteristics for a hydrogen plasma (i.e., the lowest mass) with a high flow velocity and low density, although for some applications a plasma with A/Z > 1 may be preferable. It was shown that the efficiency of HPIB generation in the diode depends on its location relative to the PEOS, the time delay of anode plasma formation, the use of a spiral electrode in the PEOS region, and the use of an arrangement involving an ion return current bypass through the PEOS region. The optimization of the PEOS and ion diode with coaxial configurations and 100 kJ stored in the 600-kV Marx yielded a 16-percent overall efficiency HPIB generation in the diode, with a diode voltage and power of 4.2 MV and 0.42 TW, respectively.     

Simulation of ion beam extraction and focusing system

The characteristics of ion beam extraction and focused to a volume as small as possible were investigated with the aid of computer code SIMION 3D version 7.This has been used to evaluate the extraction characteristics(accel-decel system)to generate an ion beam with low beam emittance and high brightness.The simulation process can provide a good study for optimizing the extraction and focusing system of the ion beam without any losses and transported to the required target.Also,a study of a simulation model for the extraction system of the ion source was used to describe the possible plasma boundary curvatures during the ion extraction that may be affected by the change in an extraction potential with a constant plasma density meniscus.     

Dynamic nature of the ion wake in dusty plasmas

The dynamic nature of the ion wake formed downstream a dust particle immersed in a plasma with flowing ions has been investigated via Particle-in-Cell simulation. It is found that the wake oscillates in time and the motion is characterized by some dominant frequencies. By means of signal processing analysis, three harmonics are detected (two at low frequencies and one at high frequencies) and compared to the characteristic plasma frequencies given by the dispersion relations for ions and electrons. Good matching is found between the high frequency harmonic and the electron plasma frequency, and between the low frequency harmonics and the ion acoustic and ion plasma frequencies.     

2 cm电子回旋共振离子推力器离子源中磁场对等离子体特性与壁面电流影响的数值模拟

电子回旋共振离子推力器(electron cyclotron resonance ion thruster,ECRIT)离子源内等离子体分布会影响束流引出,而磁场结构决定的ECR区与天线的相对位置共同影响了等离子体分布.在鞘层作用下,等离子体中的离子或电子被加速对壁面产生溅射,形成壁面离子或电子电流,造成壁面磨损和等离子体损失,因此研究壁面电流与等离子体特征十分重要.为此本文建立2 cm ECRIT的粒子PIC/MCC(particle-in-cell with Monte Carlo collision)仿真模型,数值模拟研究磁场结构对离子源内等离子体与壁面电流特性的影响.计算表明,当ECR区位于天线上游时,等离子体集中在天线上游和内外磁环间,栅极前离子密度最低,故离子源引出束流、磁环端面电流和天线壁面电流较低.ECR区位于天线下游时,天线和栅极上游附近的等离子体密度较高,故离子源引出束流、天线壁面电流和磁环端面电流较高.腔体壁面等离子体分布与电流受磁场影响最小.     

Feasibility study on high current ion beam extraction from anode spot plasma for large area ion implantation

In this paper, we have investigated the feasibility of the high current beam extraction from anode spot plasma as an ion source for large area ion implantation. Experiments have been carried out with the ambient plasma produced by inductive coupling with radio-frequency (RF) power of 200 W at the frequency of 13.56 MHz. Anode spot plasmas are generated near the extraction hole of 2 mm in diameter at the center of a bias electrode whose area exposed to the ambient plasma can be changed. It is found that the maximum ion beam current is extracted at the optimum operating pressure at which the area of bias electrode exposed to ambient plasma is fully covered with the anode spot plasma whose size is dominantly determined by the operating pressure for given gas species. It is also observed that the extracted ion beam current increases nonlinearly with the bias power due to the changes in size and shape of the anode spot plasma. With the well-established anode spot plasma operating at the optimum gas pressure, we have successfully extracted high current ion beam of 6.4 mA (204 mA/cm²) at the bias power of 22 W (∼10% of RF power), which is 43 times larger than that extracted from the plasma without anode spot. Based on the experimental results, criteria for electrode design and operating pressure for ion beam extraction from larger extraction aperture are suggested. In addition, the stability of anode spot plasma in the presence of ion beam extraction through an extraction hole is discussed in terms of the particle balance model.     

电子回旋波驱动的托卡马克芯部等离子体极向旋转

提出了一个驱动托卡马克芯部等离子体极向旋转的新途径：用电子回旋波产生芯部等离子体极向旋转.物理机制如下：在高功率的电子回旋波加热的托卡马克等离子体中，共振局域化现象将产生极向电场从而形成极向外高内低的离子密度分布；这个极向离子的积累可以克服来自磁泵的阻尼而使等离子体极向旋转退稳定.从流体力学方程和漂移动力学方程中，得到了等离子体旋转退稳的判别式.结果表明现有的电子回旋波加热功率水平可以驱动芯部等离子体的极向旋转. 关键词：     

Production of high-current large-area H- beams by abucket-type ion source equipped with a magnetic filter

A negative-ion-based neutral beam injection (NBI) system is planned for plasma heating of the Large Helical Device (LHD). We have developed a negative ion source, which is 1/3 the scale of the source for the NBI. A magnetic filter held was generated by external permanent magnets to lower the electron temperature in a large-area bucket plasma source (35 cm×62 cm) for efficient H^- production. We investigated the magnetic field configuration and found a low electron temperature high density plasma (<1 eV, 10¹²/cm³) could be achieved with an optimized configuration, The filter strength (B_max=70 G, line-integral flux=780 G cm at the center axis of the source) was proved to be enough to lower the electron temperature below 1 eV at high arc discharge power (100 kW) and low pressure (0.4 Pa). We injected cesium vapor into the plasma source to enhance H^- production efficiency and obtained a 16.2-A H^- beam current (31 mA/cm², 47 kV) using a large-area, four-grid electrostatic extraction system (25 cm×50 cm). This satisfied the development target (>15 A: 1/3 current of LHD ion source). Based on the results, we are designing a negative ion source for the LHD