白光光源光谱对白光干涉信号的影响

传统白光光源一般由一个纯高斯函数来进行模拟,通过改变中心波长和带宽来调节干涉信号.本文分别利用高斯模型和洛伦兹模型来讨论白光干涉信号,得出中心波长与相干长度的比值越大,零级条纹可见性越高,以及高斯模型的可靠范围.鉴于现代白光光源与传统光源不同,以发光二极管(LED)为例,模拟研究现代白光光源对白光干涉信号的影响.利用洛伦兹模型模拟白色LED光源时干涉信号存在凹陷,通过合理调整LED拟合光峰值间的距离降低凹陷对零级条纹的影响,以期得到在实际应用中干涉特性较优的白光光源光谱.     

白光扫描干涉测量算法综述

白光扫描干涉测量是光学测量中一种非常重要的方法。在干涉仪的结构、光源的光谱宽度以及扫描步长一定的情况下,选择合适的算法对干涉信号进行处理能够达到更高的测量精度。对重心法、移相法、包络曲线拟合法以及空间频域算法分别加以介绍和比较,为白光干涉信号的算法选取提供了一份详尽的参考。     

高精度动态白光干涉测量方法

白光干涉测量技术具有精度高和非接触式测量的优点,是超精密加工领域中的一项重要测量手段。针对白光干涉测量技术容易受环境振动影响的问题,提出了一种动态垂直扫描干涉测量方法(DVSI)。该方法将白光干涉光路分为两个成像通道,得到与白光干涉图同步移相的准单色光干涉图。通过相位-倾斜迭代方法(PTI)对准单色光干涉图进行处理得到实际的移相扫描位置,对白光干涉信号进行相干峰位置的定位,并计算出粗糙的形貌分布,之后利用局部最小二乘方法(LLS)计算出精细的相位分布,将粗糙形貌以及精细相位相结合来复原出待测件的三维形貌。本研究通过数值仿真和实验对比对该方法进行了验证,结果表明本方法具有较好的抗振性能。     

垂直扫描白光干涉表面三维形貌测量系统

依据白光干涉理论,研制了垂直扫描白光干涉表面三维形貌测量仪。重点对实现垂直扫描运动的工作台进行了分析。所研制的测量系统具有1nm的垂直分辨力,可用于表面粗糙度、台阶、膜厚、球面等三维形貌测量。     

多光源白光干涉仪的最佳波长组合

使用多个宽带光源构成的组合光源的白光干涉仪,其干涉信号为单个光源干涉信号的叠加,从而使干涉信号强度重新分布。通过理论分析和计算机模拟,发现一个最佳波长组合,使干涉信号零级条纹与次级极大条纹的强度差变大,且由于它的使用可以更精确地确定零级中心条纹的位置,提高系统分辨率,降低对系统信噪比的要求,并提出了选择最佳波长组合的方法。     

基于宽光谱干涉系统的拼接主镜共相位检测技术

 针对拼接式大口径望远镜主镜,提出一种基于迈克尔逊干涉原理基础上的宽带光谱（白光）干涉检测方法,对拼接子镜间相位误差进行实时检测,进而对失调子镜进行相应校正,以实现拼接子镜的共面排布。子镜间相位误差通过干涉图形间的不匹配性进行提取。应用双中心波长组合白光源来提高白光中心条纹的可见度,通过理论仿真,对不同中心波长组合的白光中心条纹可见度进行比较,结果表明：该双中心波长组合白光源系统的应用,可以提高白光干涉中心条纹的信号分辨能力,借以提高检测精度,使得该白光干涉检测系统对拼接子镜间的相位失调误差进行高精度提取。     

基于白光干涉的ICF靶丸表面缺陷测量方法

针对激光惯性约束聚变实验中的靶丸等微球表面缺陷的真实高度测量问题,为解决现有测量方法存在的缺陷跃变处2π整数倍相位缺失问题,提出一种基于垂直扫描白光干涉技术的零位显微干涉测量方法。该方法采用白光球面零位干涉思想,通过垂直扫描球面干涉获取全视场白光干涉图,然后运用七步移相算法及蝙蝠翼校正算法实现靶丸表面缺陷的形貌计算,最后将白光干涉测量法与激光干涉测量法进行对比实验。结果表明,白光干涉法能够有效解决激光干涉法在缺陷跃变处的2π整数倍相位缺失问题,实现靶丸表面缺陷的真实高度测量,从而扩展靶丸类微球表面缺陷的测量范围。     

基于白光干涉测试技术的改进Carré相移算法

为了减小白光相移干涉法测量物体微观形貌时产生的误差,对极值法的搜索路径进行优化后与Carré相移算法相结合,提出一种基于白光干涉测试技术的改进Carré相移算法.该算法减小了光源扰动及电荷耦合元件散粒噪声带来的影响,且对相移器的线性误差不敏感,免去了相位解包裹过程,提高了运算效率.采用单刻线样块对扫描步距进行校准实现了光源中心波长的在线修正,减小了由于光源特性及环境扰动误差带来的影响.采用不同算法对标准粗糙度样块进行三维形貌恢复以及表面粗糙度的重复性测量实验,结果表明:该算法对表面粗糙度的测量结果较传统白光干涉算法准确度提高,测量重复性优于1%.     

扫描白光干涉测量技术的算法比较

干涉条纹零光程差位置的确定是扫描白光干涉测量的关键技术之一。介绍了扫描白光干涉法测量物体轮廓的原理,讨论了确定白光干涉条纹零级条纹位置的几种方法,并对随机生成的表面进行了大量的数字模拟测量和分析比较,得出了各种算法对测量准确度的影响。研究结果对白光干涉的应用研究提供了可靠的理论根据。     

基于FDTD的高深宽比沟槽结构低相干显微干涉信号仿真分析

低相干垂直扫描干涉技术是微结构形貌特征参数无损检测的有效手段。但当微结构的沟槽深宽比高于5∶1时,遮挡效应以及阶跃边缘复杂的衍射效应会导致本应仅包含一个包络的垂直扫描测量干涉信号异常,形成两个甚至多个包络,继而影响形貌检测结果。本文解析低相干垂直扫描干涉的测量过程,采用时域有限差分法对低相干显微干涉测量系统的显微成像、相干扫描测量过程进行数值仿真,计算待测微结构表面返回场及显微成像后的像面干涉场,得到低相干显微干涉信号。分别仿真了深宽比为5∶1、80∶3的硅基沟槽微结构的干涉信号,并与实验室自研的Linnik型低相干垂直扫描干涉系统对沟槽微结构的检测信号进行对比,匹配其高深宽比沟槽结构干涉信号的双包络及幅频双峰性的特征,验证所提方法的准确性。该仿真方法可应用于实测前对被测结构低相干显微干涉信号的先验性仿真计算,通过提前分析信号特征,为形貌复原算法的选取及改进指引优化方向。     

Determining large step heights using zero-order interference fringe identification and an external cavity diode laser

Zero-order interference fringe identification is a powerful tool for measuring large step heights. In contrast to white light scanning interferometry, this study utilizes an external cavity diode laser as the light source. The zero-path difference point can be accurately identified by combining wavelength scanning interferometry, in which the laser wavelength is continuously changed, with single wavelength interferometry, in which the laser wavelength is fixed. The experimental apparatus is a two-arm interferometer containing the sample in the measurement arm. The step height denotes the distance between two locations of a zero-order interference fringe, which are obtained by continuously varying the length of the reference arm. The accuracy of a sample of 10 mm step height was found to be 0.33 μm.     

Inspection of a micro-cantilever’s opened and concealed profile using integrated vertical scanning interferometry

In this paper, we describe a method based on the proposed vertical scanning interferometry (VSI) for the measurement of both surface profile of the micro-cantilever and corresponding etching sacrificial layer beneath the cantilever by only one scanning. A white light source illuminates a micro-cantilever at a certain incident angle through a Mirau interference objective. With this arrangement the top surface of the cantilever and a normally obstructed surface profile beneath the cantilever can be assessed in the same system. A digital filtering technique based on Fourier transform and a Gaussian fit are implemented to simultaneously retrieve an envelope of two series of interferograms at the top surface of a cantilever and as well as area of interest underneath the cantilever. The retrieved envelope peaks, which represent the height information of points on the test surface, are plotted to show whole field surface contour and demonstrate its effectiveness as a means for micro-electro-mechanical systems (MEMS) dual/multi-layer inspection. Results obtained agree well with those of a commercial instrument and show that the proposed method is simple and accurate.     

基于散斑干涉光谱分布变化量探测瞬态高温的研究

为了提高瞬态高温检测的精度,利用快速傅里叶变换(FFT)对散斑干涉条纹进行光谱分析,提出了通过光谱分布的偏移及幅值变化反演温度的方法。当激光照射应变材料时,瞬态高温使材料发生形变从而使散斑干涉条纹改变,被测表面形变前后获得的干涉条纹由面阵CCD采集。由于其对应的光谱密度分布函数也会发生相应的改变,即中心波长位置偏移及振幅变化,通过其改变反演材料的瞬态温度。在分析推导了瞬态温度变化、材料应变及干涉条纹变化之间的函数关系后,仿真分析得到了瞬态温度正比于压强系数、反比于温度系数。实验采用660 nm半导体激光器,SI6600型面阵CCD探测器,从获得的光谱分布函数中提取中心波长的偏移量,经计算和标定所得数据与传统的干涉测温方法进行对比,探测精度可达0.3%。相比传统的直接检测干涉条纹的变化量,由被测面形变量推导温度的方法精度提高近3倍。     

High sensitivity micro-displacement homodyne interferometry北大核心CSCD

Interferometry is widely used in nano-scale micro-topography measurement. In order to improve its accuracy and sensitivity, a high-sensitivity homodyne interferometry based on white light interference and laser secondary interference was proposed. A high-sensitivity homodyne interferometry system was designed, and the zero point of the laser secondary interference was used to locate the dark striation of white light interference, so that it could reach the maximum slope when optical path difference was zero. The signals of white light and laser were analyzed by using the wave principle and intensity formula of interference fringes, and a sensitivity calculation method based on the combination of white light and laser interference signal was proposed. The system and its sensitivity were simulated. Finally, the optical path was built, and the white light interference fringes were adjusted to the dark striations position, so as to locate the zero position of laser secondary interference and carry out the data acquisition. It is showed that the sensitivity of the measurement method is at least 1 832 times higher than that of the laser secondary interference, and the corresponding measurement uncertainty is only ±0.288 7 mV. The measurement system can effectively solve the problem of large amount of calculation in traditional interferometry, and has high sensitivity, stability and reliability. Copyright ©2022 Journal of Applied Optics. All rights reserved.     

Moiré interferometric fringe patterns about crack tips: Experimental observations and numerical simulation

The local deformation about fatigue cracks has been investigated by the coherent optics method of moiré interferometry. The complexity of the interference fringe patterns motivated the parallel development of companion numerical models for simulating moiré interferometric response for known boundary conditions. Experimental patterns are here examined in the light of computer-generated fringe systems for a stationary crack in elastic as well as elastic-plastic solids. Various effects due to material plasticity, specimen-dependent non-singular stress, and mixed mode loading are identified in the fringe patterns.     

一种基于电光调制光频梳光谱干涉的绝对测距方法

提出了一种基于电光调制光学频率梳的光谱干涉测距方法.理论分析了电光调制光学频率梳的数学模型和光谱扩展原理,并分析得出了光谱干涉测距方法的非模糊范围和分辨力的影响因素.在实验中,使用三只级联的电光相位调制器调制单频连续波激光生成了40多阶高功率梳齿状边带,并通过单模光纤和高非线性光纤对电光调制器输出的激光进行光谱扩展,得到重复频率为10 GHz,光谱宽度达30 nm的光学频率梳.将该光频梳作为光谱干涉测距装置的光源,可以实现无"死区"的绝对距离测量.另外,使用等频率间隔重采样和二次方程脉冲峰值拟合算法对测量结果进行数据处理,可以修正系统误差,提升测距精度.实验结果表明,在1 m的测量范围内,使用该装置可以在任意位置达到±15μm以内的绝对测距精度.     

Measurement of fiber chromatic dispersion using spectral interferometry with modulation of dispersed laser pulses

We propose and experimentally demonstrate a method for fiber dispersion measurement based on the modulation of laser pulses stretched by the fiber under test. The measured spectrum of the modulated pulses is the result of the interference between the stretched pulse spectra shifted by the modulation harmonics. The interference pattern is processed as in Fourier transform spectral interferometry. Unlike to conventional spectral interferometry, environmental conditions do not affect the interferogram due to the lack of any interferometer; additionally, large dispersions can be characterized by the method proposed. Its high accuracy is demonstrated in experimental comparison with the widely used phase shift technique.     

利用矢量海洋环境噪声提取声场格林函数

考虑到矢量水听器在垂直方向上具有8字形指向性,能够有效抑制远方非平稳噪声源的干扰,提出了一种矢量环境噪声相关函数(NCF)提取声场时域格林函数(TDGF)的方法。基于简正波理论建立了声压和垂直振速垂直相关性模型。在此基础上,给出了声压和垂直振速相关函数提取声场纵向格林函数的过程.数值仿真对比和实验数据分析表明,相对于声压提取方法,垂直振速提取方法能够有效消除直达波前出现的亮纹与亮区干扰。此外,对于同等时间长度噪声序列,声压提取方法只提取到直达波路径,而垂直振速提取方法还提取到了我们更为关心的海底反射路径。利用直达波与海底反射波到达时延差估计的海深与实测海深吻合较好。      

垂直扫描白光干涉术用于微机电系统的尺寸表征

随着微机电系统的发展,器件设计和加工过程中的表征成为一个主要问题。提出了将扫描白光干涉表面轮廓测量方法用于微结构和器件的几何特性检测上。测量系统采用了米劳显微干涉仪,利用压电陶瓷物镜纳米定位器实现垂直方向100μm范围内的精确扫描,并通过傅里叶变换算法获取条纹包络峰的位置,进而得到器件的整体集合尺寸信息,与相移干涉方法相比大大提高了测量范围。通过测量纳米台阶对该系统进行了精度标定,测量重复性在亚纳米量级。最后通过测量微谐振器和微压力传感器的几何尺寸说明了该方法的功能。